Search

Chia How Michael Liu

Examiner (ID: 7313, Phone: (571)272-9019 , Office: P/2882 )

Most Active Art Unit
2882
Art Unit(s)
2851, 2882
Total Applications
473
Issued Applications
284
Pending Applications
0
Abandoned Applications
189

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 7796902 [patent_doc_number] => 08125610 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-02-28 [patent_title] => 'Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 11/292311 [patent_app_country] => US [patent_app_date] => 2005-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 8975 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 255 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/125/08125610.pdf [firstpage_image] =>[orig_patent_app_number] => 11292311 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/292311
Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus Dec 1, 2005 Issued
Array ( [id] => 5077866 [patent_doc_number] => 20070121090 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-31 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/289626 [patent_app_country] => US [patent_app_date] => 2005-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 10809 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0121/20070121090.pdf [firstpage_image] =>[orig_patent_app_number] => 11289626 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/289626
Lithographic apparatus and device manufacturing method Nov 29, 2005 Abandoned
Array ( [id] => 5660001 [patent_doc_number] => 20060250597 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-09 [patent_title] => 'Positional information measuring method and device, and exposure method and apparatus' [patent_app_type] => utility [patent_app_number] => 11/287319 [patent_app_country] => US [patent_app_date] => 2005-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11874 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0250/20060250597.pdf [firstpage_image] =>[orig_patent_app_number] => 11287319 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/287319
Positional information measuring method and device, and exposure method and apparatus Nov 27, 2005 Abandoned
Array ( [id] => 4822582 [patent_doc_number] => 20080123067 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-29 [patent_title] => 'Movable Body System, Exposure Apparatus, And Device Manufacturing Method' [patent_app_type] => utility [patent_app_number] => 11/791335 [patent_app_country] => US [patent_app_date] => 2005-11-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 14588 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0123/20080123067.pdf [firstpage_image] =>[orig_patent_app_number] => 11791335 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/791335
Movable Body System, Exposure Apparatus, And Device Manufacturing Method Nov 23, 2005 Abandoned
Array ( [id] => 5787795 [patent_doc_number] => 20060206279 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-14 [patent_title] => 'Wafer alignment method in photolithography process' [patent_app_type] => utility [patent_app_number] => 11/283967 [patent_app_country] => US [patent_app_date] => 2005-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2367 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0206/20060206279.pdf [firstpage_image] =>[orig_patent_app_number] => 11283967 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/283967
Method of aligning wafer using database constructed of alignment data in a photolithography process Nov 21, 2005 Issued
Array ( [id] => 5214709 [patent_doc_number] => 20070103789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-10 [patent_title] => 'Optical system, lithographic apparatus and method for projecting' [patent_app_type] => utility [patent_app_number] => 11/270825 [patent_app_country] => US [patent_app_date] => 2005-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7970 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20070103789.pdf [firstpage_image] =>[orig_patent_app_number] => 11270825 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/270825
Optical system, lithographic apparatus and method for projecting Nov 9, 2005 Abandoned
Array ( [id] => 8556462 [patent_doc_number] => 08330939 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-12-11 [patent_title] => 'Immersion exposure apparatus and device manufacturing method with a liquid recovery port provided on at least one of a first stage and second stage' [patent_app_type] => utility [patent_app_number] => 11/666420 [patent_app_country] => US [patent_app_date] => 2005-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 17 [patent_no_of_words] => 15537 [patent_no_of_claims] => 43 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 277 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11666420 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/666420
Immersion exposure apparatus and device manufacturing method with a liquid recovery port provided on at least one of a first stage and second stage Oct 30, 2005 Issued
Array ( [id] => 5746515 [patent_doc_number] => 20060109445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-25 [patent_title] => 'Maskless lithography system and method' [patent_app_type] => utility [patent_app_number] => 11/260165 [patent_app_country] => US [patent_app_date] => 2005-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6490 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20060109445.pdf [firstpage_image] =>[orig_patent_app_number] => 11260165 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/260165
Maskless lithography system and method using optical signals Oct 27, 2005 Issued
Array ( [id] => 4822590 [patent_doc_number] => 20080123074 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-29 [patent_title] => 'Projection Optical System, Exposure Equipment and Exposure Method' [patent_app_type] => utility [patent_app_number] => 11/666725 [patent_app_country] => US [patent_app_date] => 2005-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11229 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0123/20080123074.pdf [firstpage_image] =>[orig_patent_app_number] => 11666725 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/666725
Projection Optical System, Exposure Equipment and Exposure Method Oct 25, 2005 Abandoned
Array ( [id] => 4580706 [patent_doc_number] => 07830493 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-11-09 [patent_title] => 'System and method for compensating for radiation induced thermal distortions in a substrate or projection system' [patent_app_type] => utility [patent_app_number] => 11/257399 [patent_app_country] => US [patent_app_date] => 2005-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 12125 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 160 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/830/07830493.pdf [firstpage_image] =>[orig_patent_app_number] => 11257399 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/257399
System and method for compensating for radiation induced thermal distortions in a substrate or projection system Oct 24, 2005 Issued
Array ( [id] => 7516409 [patent_doc_number] => 08040489 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-10-18 [patent_title] => 'Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid' [patent_app_type] => utility [patent_app_number] => 11/666165 [patent_app_country] => US [patent_app_date] => 2005-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 19 [patent_no_of_words] => 21661 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/040/08040489.pdf [firstpage_image] =>[orig_patent_app_number] => 11666165 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/666165
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid Oct 24, 2005 Issued
Array ( [id] => 5741905 [patent_doc_number] => 20060087629 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-27 [patent_title] => 'Optical lens elements, semiconductor lithographic patterning apparatus, and methods for processing semiconductor devices' [patent_app_type] => utility [patent_app_number] => 11/255594 [patent_app_country] => US [patent_app_date] => 2005-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3711 [patent_no_of_claims] => 45 [patent_no_of_ind_claims] => 28 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20060087629.pdf [firstpage_image] =>[orig_patent_app_number] => 11255594 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/255594
Optical lens elements, semiconductor lithographic patterning apparatus, and methods for processing semiconductor devices Oct 20, 2005 Abandoned
Array ( [id] => 4981431 [patent_doc_number] => 20070085988 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-19 [patent_title] => 'Wafer edge exposure method in semiconductor photolithographic processes, and orientation flatness detecting system provided with a WEE apparatus' [patent_app_type] => utility [patent_app_number] => 11/254296 [patent_app_country] => US [patent_app_date] => 2005-10-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1749 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0085/20070085988.pdf [firstpage_image] =>[orig_patent_app_number] => 11254296 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/254296
Wafer edge exposure method in semiconductor photolithographic processes, and orientation flatness detecting system provided with a WEE apparatus Oct 18, 2005 Abandoned
Array ( [id] => 5647015 [patent_doc_number] => 20060132747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-22 [patent_title] => 'Optical element for an illumination system' [patent_app_type] => utility [patent_app_number] => 11/251136 [patent_app_country] => US [patent_app_date] => 2005-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6701 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 13 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20060132747.pdf [firstpage_image] =>[orig_patent_app_number] => 11251136 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/251136
Optical element for an illumination system Oct 13, 2005 Abandoned
Array ( [id] => 5192656 [patent_doc_number] => 20070081138 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-12 [patent_title] => 'Lithographic projection apparatus, device manufacturing methods and mask for use in a device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/246551 [patent_app_country] => US [patent_app_date] => 2005-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5153 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0081/20070081138.pdf [firstpage_image] =>[orig_patent_app_number] => 11246551 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/246551
Lithographic projection apparatus, device manufacturing methods and mask for use in a device manufacturing method Oct 10, 2005 Abandoned
Array ( [id] => 591518 [patent_doc_number] => 07446858 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-11-04 [patent_title] => 'Exposure method and apparatus, and method for fabricating device' [patent_app_type] => utility [patent_app_number] => 11/246642 [patent_app_country] => US [patent_app_date] => 2005-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 34 [patent_no_of_words] => 29457 [patent_no_of_claims] => 43 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/446/07446858.pdf [firstpage_image] =>[orig_patent_app_number] => 11246642 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/246642
Exposure method and apparatus, and method for fabricating device Oct 10, 2005 Issued
Array ( [id] => 5825136 [patent_doc_number] => 20060061886 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-23 [patent_title] => 'System for setting and maintaining a gas atmosphere in an optical system' [patent_app_type] => utility [patent_app_number] => 11/247925 [patent_app_country] => US [patent_app_date] => 2005-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3758 [patent_no_of_claims] => 52 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0061/20060061886.pdf [firstpage_image] =>[orig_patent_app_number] => 11247925 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/247925
System for setting and maintaining a gas atmosphere in an optical system Oct 10, 2005 Abandoned
Array ( [id] => 5192659 [patent_doc_number] => 20070081141 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-12 [patent_title] => 'Lithographic apparatus' [patent_app_type] => utility [patent_app_number] => 11/246554 [patent_app_country] => US [patent_app_date] => 2005-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5677 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0081/20070081141.pdf [firstpage_image] =>[orig_patent_app_number] => 11246554 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/246554
Lithographic apparatus with mounted sensor Oct 10, 2005 Issued
Array ( [id] => 5818874 [patent_doc_number] => 20060023187 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Environmental system including an electro-osmotic element for an immersion lithography apparatus' [patent_app_type] => utility [patent_app_number] => 11/239075 [patent_app_country] => US [patent_app_date] => 2005-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6934 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20060023187.pdf [firstpage_image] =>[orig_patent_app_number] => 11239075 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/239075
Environmental system including an electro-osmotic element for an immersion lithography apparatus Sep 29, 2005 Abandoned
Array ( [id] => 844568 [patent_doc_number] => 07388648 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-06-17 [patent_title] => 'Lithographic projection apparatus' [patent_app_type] => utility [patent_app_number] => 11/239493 [patent_app_country] => US [patent_app_date] => 2005-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 17 [patent_no_of_words] => 10400 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/388/07388648.pdf [firstpage_image] =>[orig_patent_app_number] => 11239493 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/239493
Lithographic projection apparatus Sep 29, 2005 Issued
Menu