Chia How Michael Liu

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11563240 [patent_doc_number] => 09625825 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-04-18 [patent_title] => 'Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction' [patent_app_type] => utility [patent_app_number] => 13/890142 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 39 [patent_no_of_words] => 29584 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13890142 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045882 [patent_doc_number] => 09823478 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light' [patent_app_type] => utility [patent_app_number] => 13/889965 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 14300 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13889965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11563240 [patent_doc_number] => 09625825 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-04-18 [patent_title] => 'Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction' [patent_app_type] => utility [patent_app_number] => 13/890142 [patent_app_country] => US [patent_app_date] => 2013-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 39 [patent_no_of_words] => 29584 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13890142 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10555841 [patent_doc_number] => 09280041 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-03-08 [patent_title] => 'Cross quadrupole double lithography method using two complementary apertures' [patent_app_type] => utility [patent_app_number] => 13/791542 [patent_app_country] => US [patent_app_date] => 2013-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 5406 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 377 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13791542 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8914922 [patent_doc_number] => 20130176547 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-07-11 [patent_title] => 'Lithographic Apparatus and a Method for Determining a Polarization Property' [patent_app_type] => utility [patent_app_number] => 13/786400 [patent_app_country] => US [patent_app_date] => 2013-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 10858 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13786400 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8914923 [patent_doc_number] => 20130176548 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-07-11 [patent_title] => 'Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY' [patent_app_type] => utility [patent_app_number] => 13/784402 [patent_app_country] => US [patent_app_date] => 2013-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5577 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13784402 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9003514 [patent_doc_number] => 20130224639 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-08-29 [patent_title] => 'PERIPHERAL EXPOSURE METHOD AND APPARATUS THEREFOR' [patent_app_type] => utility [patent_app_number] => 13/773741 [patent_app_country] => US [patent_app_date] => 2013-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 11176 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13773741 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10524027 [patent_doc_number] => 09250537 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-02-02 [patent_title] => 'Immersion exposure apparatus and method with detection of liquid on members of the apparatus' [patent_app_type] => utility [patent_app_number] => 13/742743 [patent_app_country] => US [patent_app_date] => 2013-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 24 [patent_no_of_words] => 18130 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13742743 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10177346 [patent_doc_number] => 09207549 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-12-08 [patent_title] => 'Exposure apparatus and exposure method, and device manufacturing method with encoder of higher reliability for position measurement' [patent_app_type] => utility [patent_app_number] => 13/727286 [patent_app_country] => US [patent_app_date] => 2012-12-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 56 [patent_figures_cnt] => 84 [patent_no_of_words] => 65848 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13727286 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9146494 [patent_doc_number] => 20130301017 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-11-14 [patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 13/722830 [patent_app_country] => US [patent_app_date] => 2012-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 15135 [patent_no_of_claims] => 72 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13722830 [rel_patent_id] =>[rel_patent_doc_number] =>)