Search

Chia How Michael Liu

Examiner (ID: 7313, Phone: (571)272-9019 , Office: P/2882 )

Most Active Art Unit
2882
Art Unit(s)
2851, 2882
Total Applications
473
Issued Applications
284
Pending Applications
0
Abandoned Applications
189

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 8922158 [patent_doc_number] => 08488101 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2013-07-16 [patent_title] => 'Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position' [patent_app_type] => utility [patent_app_number] => 13/067867 [patent_app_country] => US [patent_app_date] => 2011-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 31372 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13067867 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/067867
Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position Jun 29, 2011 Issued
Array ( [id] => 9576747 [patent_doc_number] => 08767168 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-07-01 [patent_title] => 'Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table after exposure' [patent_app_type] => utility [patent_app_number] => 13/067842 [patent_app_country] => US [patent_app_date] => 2011-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 31392 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13067842 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/067842
Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table after exposure Jun 28, 2011 Issued
Array ( [id] => 11320487 [patent_doc_number] => 09519229 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-12-13 [patent_title] => 'Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate' [patent_app_type] => utility [patent_app_number] => 13/067569 [patent_app_country] => US [patent_app_date] => 2011-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 5998 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 302 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13067569 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/067569
Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate Jun 8, 2011 Issued
Array ( [id] => 9627815 [patent_doc_number] => 08797503 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-08-05 [patent_title] => 'Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure' [patent_app_type] => utility [patent_app_number] => 13/149404 [patent_app_country] => US [patent_app_date] => 2011-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 18 [patent_no_of_words] => 10457 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13149404 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/149404
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure May 30, 2011 Issued
Array ( [id] => 5957472 [patent_doc_number] => 20110181858 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-07-28 [patent_title] => 'VARIABLE SLIT DEVICE, ILLUMINATION DEVICE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 13/081718 [patent_app_country] => US [patent_app_date] => 2011-04-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 18111 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0181/20110181858.pdf [firstpage_image] =>[orig_patent_app_number] => 13081718 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/081718
VARIABLE SLIT DEVICE, ILLUMINATION DEVICE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD Apr 6, 2011 Abandoned
Array ( [id] => 7816238 [patent_doc_number] => 20120062858 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-03-15 [patent_title] => 'CLEANING METHOD, DEVICE MANUFACTURING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING SYSTEM' [patent_app_type] => utility [patent_app_number] => 13/078544 [patent_app_country] => US [patent_app_date] => 2011-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 33 [patent_figures_cnt] => 33 [patent_no_of_words] => 45985 [patent_no_of_claims] => 160 [patent_no_of_ind_claims] => 15 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0062/20120062858.pdf [firstpage_image] =>[orig_patent_app_number] => 13078544 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/078544
CLEANING METHOD, DEVICE MANUFACTURING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING SYSTEM Mar 31, 2011 Abandoned
Array ( [id] => 6163081 [patent_doc_number] => 20110194084 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-08-11 [patent_title] => 'FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 13/022319 [patent_app_country] => US [patent_app_date] => 2011-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 22906 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20110194084.pdf [firstpage_image] =>[orig_patent_app_number] => 13022319 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/022319
Fluid handling structure, lithographic apparatus and device manufacturing method Feb 6, 2011 Issued
Array ( [id] => 6086017 [patent_doc_number] => 20110216301 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-09-08 [patent_title] => 'LITHOGRAPHIC APPARATUS AND SCANNING METHOD' [patent_app_type] => utility [patent_app_number] => 13/022518 [patent_app_country] => US [patent_app_date] => 2011-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6409 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0216/20110216301.pdf [firstpage_image] =>[orig_patent_app_number] => 13022518 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/022518
LITHOGRAPHIC APPARATUS AND SCANNING METHOD Feb 6, 2011 Abandoned
Array ( [id] => 6163092 [patent_doc_number] => 20110194094 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-08-11 [patent_title] => 'LITHOGRAPHIC APPARATUS WITH SUPPORT FOR AN OBJECT AND METHOD FOR POSITIONING SAME' [patent_app_type] => utility [patent_app_number] => 13/022247 [patent_app_country] => US [patent_app_date] => 2011-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8394 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20110194094.pdf [firstpage_image] =>[orig_patent_app_number] => 13022247 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/022247
Lithographic apparatus with an object support having actuating structures to apply a force and method for operating the same Feb 6, 2011 Issued
Array ( [id] => 6086012 [patent_doc_number] => 20110216300 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-09-08 [patent_title] => 'LITHOGRAPHIC APPARATUS AND METHOD FOR MEASURING A POSITION' [patent_app_type] => utility [patent_app_number] => 13/022498 [patent_app_country] => US [patent_app_date] => 2011-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6089 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0216/20110216300.pdf [firstpage_image] =>[orig_patent_app_number] => 13022498 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/022498
Lithographic apparatus and method for measuring a position Feb 6, 2011 Issued
Array ( [id] => 11264624 [patent_doc_number] => 09488919 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-11-08 [patent_title] => 'Substrate table, a lithographic apparatus and a method involving an encoder plate' [patent_app_type] => utility [patent_app_number] => 13/022397 [patent_app_country] => US [patent_app_date] => 2011-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 23 [patent_no_of_words] => 11657 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13022397 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/022397
Substrate table, a lithographic apparatus and a method involving an encoder plate Feb 6, 2011 Issued
Array ( [id] => 6163087 [patent_doc_number] => 20110194089 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-08-11 [patent_title] => 'OPTICAL SYSTEM WITH APERTURE DEVICE' [patent_app_type] => utility [patent_app_number] => 13/021583 [patent_app_country] => US [patent_app_date] => 2011-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8506 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20110194089.pdf [firstpage_image] =>[orig_patent_app_number] => 13021583 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/021583
Optical system with aperture device having plurality of aperture elements Feb 3, 2011 Issued
Array ( [id] => 6108026 [patent_doc_number] => 20110188012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-08-04 [patent_title] => 'LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 13/017700 [patent_app_country] => US [patent_app_date] => 2011-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 16649 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20110188012.pdf [firstpage_image] =>[orig_patent_app_number] => 13017700 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/017700
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure Jan 30, 2011 Issued
Array ( [id] => 6044321 [patent_doc_number] => 20110205515 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-08-25 [patent_title] => 'Calibration of Lithographic Apparatus' [patent_app_type] => utility [patent_app_number] => 13/017640 [patent_app_country] => US [patent_app_date] => 2011-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 10103 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0205/20110205515.pdf [firstpage_image] =>[orig_patent_app_number] => 13017640 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/017640
Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientations Jan 30, 2011 Issued
Array ( [id] => 9627814 [patent_doc_number] => 08797502 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-08-05 [patent_title] => 'Exposure apparatus, exposure method, and method for producing device with electricity removal device by adding additive to liquid' [patent_app_type] => utility [patent_app_number] => 12/929503 [patent_app_country] => US [patent_app_date] => 2011-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 12765 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 12929503 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/929503
Exposure apparatus, exposure method, and method for producing device with electricity removal device by adding additive to liquid Jan 27, 2011 Issued
Array ( [id] => 8322380 [patent_doc_number] => 20120194792 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2012-08-02 [patent_title] => 'METHOD AND SYSTEM TO PREDICT LITHOGRAPHY FOCUS ERROR USING SIMULATED OR MEASURED TOPOGRAPHY' [patent_app_type] => utility [patent_app_number] => 13/014803 [patent_app_country] => US [patent_app_date] => 2011-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3817 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13014803 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/014803
Method and system to predict lithography focus error using simulated or measured topography Jan 26, 2011 Issued
Array ( [id] => 6044317 [patent_doc_number] => 20110205513 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2011-08-25 [patent_title] => 'Lithographic Apparatus and Device Manufacturing Method' [patent_app_type] => utility [patent_app_number] => 13/010388 [patent_app_country] => US [patent_app_date] => 2011-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 7396 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0205/20110205513.pdf [firstpage_image] =>[orig_patent_app_number] => 13010388 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/010388
Lithographic apparatus and device manufacturing method for measuring wafer parameters using non-standard alignment settings Jan 19, 2011 Issued
Array ( [id] => 9845718 [patent_doc_number] => 08947643 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-02-03 [patent_title] => 'Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substrate' [patent_app_type] => utility [patent_app_number] => 13/010409 [patent_app_country] => US [patent_app_date] => 2011-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 7626 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13010409 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/010409
Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substrate Jan 19, 2011 Issued
Array ( [id] => 9845717 [patent_doc_number] => 08947642 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-02-03 [patent_title] => 'Method and apparatus for estimating model parameters of and controlling a lithographic apparatus by measuring a substrate property and using a polynomial model' [patent_app_type] => utility [patent_app_number] => 13/010402 [patent_app_country] => US [patent_app_date] => 2011-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 7132 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13010402 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/010402
Method and apparatus for estimating model parameters of and controlling a lithographic apparatus by measuring a substrate property and using a polynomial model Jan 19, 2011 Issued
Array ( [id] => 11550014 [patent_doc_number] => 09618858 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-04-11 [patent_title] => 'Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table' [patent_app_type] => utility [patent_app_number] => 13/010002 [patent_app_country] => US [patent_app_date] => 2011-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 19 [patent_no_of_words] => 13856 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 239 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13010002 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/010002
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table Jan 19, 2011 Issued
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