| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 4320143
[patent_doc_number] => 06331369
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-12-18
[patent_title] => 'Exposure methods for overlaying one mask pattern on another'
[patent_app_type] => 1
[patent_app_number] => 9/415500
[patent_app_country] => US
[patent_app_date] => 1999-10-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 28
[patent_figures_cnt] => 79
[patent_no_of_words] => 38484
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 9
[patent_words_short_claim] => 112
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/331/06331369.pdf
[firstpage_image] =>[orig_patent_app_number] => 415500
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/415500 | Exposure methods for overlaying one mask pattern on another | Oct 11, 1999 | Issued |
Array
(
[id] => 4406724
[patent_doc_number] => 06228554
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-05-08
[patent_title] => 'Radiation-sensitive resin composition'
[patent_app_type] => 1
[patent_app_number] => 9/414724
[patent_app_country] => US
[patent_app_date] => 1999-10-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6427
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 83
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/228/06228554.pdf
[firstpage_image] =>[orig_patent_app_number] => 414724
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/414724 | Radiation-sensitive resin composition | Oct 7, 1999 | Issued |
Array
(
[id] => 1435745
[patent_doc_number] => 06355388
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2002-03-12
[patent_title] => 'Method for controlling photoresist strip processes'
[patent_app_type] => B1
[patent_app_number] => 09/414274
[patent_app_country] => US
[patent_app_date] => 1999-10-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 2334
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 67
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/355/06355388.pdf
[firstpage_image] =>[orig_patent_app_number] => 09414274
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/414274 | Method for controlling photoresist strip processes | Oct 6, 1999 | Issued |
| 09/411028 | PHOTOMASK INCLUDING HARDENED PHOTORESIST | Oct 3, 1999 | Abandoned |
| 09/411027 | PHOTOMASK INCLUDING HARDENED PHOTORESIST AND A CONDUCTIVE LAYER | Oct 3, 1999 | Abandoned |
Array
(
[id] => 4316400
[patent_doc_number] => 06248486
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-06-19
[patent_title] => 'Method of detecting aberrations of an optical imaging system'
[patent_app_type] => 1
[patent_app_number] => 9/407532
[patent_app_country] => US
[patent_app_date] => 1999-09-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 28
[patent_no_of_words] => 11062
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 160
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/248/06248486.pdf
[firstpage_image] =>[orig_patent_app_number] => 407532
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/407532 | Method of detecting aberrations of an optical imaging system | Sep 28, 1999 | Issued |
Array
(
[id] => 1458507
[patent_doc_number] => 06391502
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2002-05-21
[patent_title] => 'Photolithographic process for producing etched patterns on the surface of fine tubes, wires or other three dimensional structures'
[patent_app_type] => B1
[patent_app_number] => 09/401634
[patent_app_country] => US
[patent_app_date] => 1999-09-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 29
[patent_no_of_words] => 4894
[patent_no_of_claims] => 35
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 55
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/391/06391502.pdf
[firstpage_image] =>[orig_patent_app_number] => 09401634
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/401634 | Photolithographic process for producing etched patterns on the surface of fine tubes, wires or other three dimensional structures | Sep 21, 1999 | Issued |
Array
(
[id] => 1535684
[patent_doc_number] => 06337163
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2002-01-08
[patent_title] => 'Method of forming a pattern by making use of hybrid exposure'
[patent_app_type] => B1
[patent_app_number] => 09/400280
[patent_app_country] => US
[patent_app_date] => 1999-09-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 27
[patent_no_of_words] => 12679
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 112
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/337/06337163.pdf
[firstpage_image] =>[orig_patent_app_number] => 09400280
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/400280 | Method of forming a pattern by making use of hybrid exposure | Sep 20, 1999 | Issued |
Array
(
[id] => 4406033
[patent_doc_number] => 06300018
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-10-09
[patent_title] => 'Photolithography mask having a subresolution alignment mark window'
[patent_app_type] => 1
[patent_app_number] => 9/399884
[patent_app_country] => US
[patent_app_date] => 1999-09-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 7
[patent_no_of_words] => 1888
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 82
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/300/06300018.pdf
[firstpage_image] =>[orig_patent_app_number] => 399884
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/399884 | Photolithography mask having a subresolution alignment mark window | Sep 20, 1999 | Issued |
Array
(
[id] => 4092200
[patent_doc_number] => 06096462
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-08-01
[patent_title] => 'Charged-particle-beam-projection-microlithography transfer methods with coulomb effect correction'
[patent_app_type] => 1
[patent_app_number] => 9/394854
[patent_app_country] => US
[patent_app_date] => 1999-09-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 5
[patent_no_of_words] => 4674
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 283
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/096/06096462.pdf
[firstpage_image] =>[orig_patent_app_number] => 394854
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/394854 | Charged-particle-beam-projection-microlithography transfer methods with coulomb effect correction | Sep 12, 1999 | Issued |
Array
(
[id] => 4256229
[patent_doc_number] => 06258495
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-07-10
[patent_title] => 'Process for aligning work and mask'
[patent_app_type] => 1
[patent_app_number] => 9/394041
[patent_app_country] => US
[patent_app_date] => 1999-09-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 36
[patent_no_of_words] => 12023
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 199
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/258/06258495.pdf
[firstpage_image] =>[orig_patent_app_number] => 394041
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/394041 | Process for aligning work and mask | Sep 12, 1999 | Issued |
Array
(
[id] => 4212812
[patent_doc_number] => 06087071
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-07-11
[patent_title] => 'Process for increasing thermostability of a resist through electron beam exposure'
[patent_app_type] => 1
[patent_app_number] => 9/394346
[patent_app_country] => US
[patent_app_date] => 1999-09-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 5
[patent_no_of_words] => 4703
[patent_no_of_claims] => 7
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 106
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/087/06087071.pdf
[firstpage_image] =>[orig_patent_app_number] => 394346
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/394346 | Process for increasing thermostability of a resist through electron beam exposure | Sep 12, 1999 | Issued |
Array
(
[id] => 4406602
[patent_doc_number] => 06228544
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-05-08
[patent_title] => 'Exposure method utilizing pre-exposure reduction of substrate temperature'
[patent_app_type] => 1
[patent_app_number] => 9/388607
[patent_app_country] => US
[patent_app_date] => 1999-09-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 9
[patent_no_of_words] => 5381
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 85
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/228/06228544.pdf
[firstpage_image] =>[orig_patent_app_number] => 388607
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/388607 | Exposure method utilizing pre-exposure reduction of substrate temperature | Sep 1, 1999 | Issued |
Array
(
[id] => 4151090
[patent_doc_number] => 06107011
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-08-22
[patent_title] => 'Method of high resolution optical scanning utilizing primary and secondary masks'
[patent_app_type] => 1
[patent_app_number] => 9/390582
[patent_app_country] => US
[patent_app_date] => 1999-08-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 9
[patent_no_of_words] => 7797
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 166
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/107/06107011.pdf
[firstpage_image] =>[orig_patent_app_number] => 390582
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/390582 | Method of high resolution optical scanning utilizing primary and secondary masks | Aug 30, 1999 | Issued |
Array
(
[id] => 4100456
[patent_doc_number] => 06051349
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-04-18
[patent_title] => 'Apparatus for coating resist and developing the coated resist'
[patent_app_type] => 1
[patent_app_number] => 9/386459
[patent_app_country] => US
[patent_app_date] => 1999-08-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 18
[patent_figures_cnt] => 21
[patent_no_of_words] => 9632
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 251
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/051/06051349.pdf
[firstpage_image] =>[orig_patent_app_number] => 386459
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/386459 | Apparatus for coating resist and developing the coated resist | Aug 30, 1999 | Issued |
Array
(
[id] => 4100442
[patent_doc_number] => 06051348
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-04-18
[patent_title] => 'Method for detecting malfunction in photolithographic fabrication track'
[patent_app_type] => 1
[patent_app_number] => 9/375793
[patent_app_country] => US
[patent_app_date] => 1999-08-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 8
[patent_no_of_words] => 2781
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 127
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/051/06051348.pdf
[firstpage_image] =>[orig_patent_app_number] => 375793
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/375793 | Method for detecting malfunction in photolithographic fabrication track | Aug 16, 1999 | Issued |
Array
(
[id] => 4283301
[patent_doc_number] => 06210846
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-04-03
[patent_title] => 'Exposure during rework for enhanced resist removal'
[patent_app_type] => 1
[patent_app_number] => 9/373571
[patent_app_country] => US
[patent_app_date] => 1999-08-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 1
[patent_figures_cnt] => 3
[patent_no_of_words] => 2867
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 75
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/210/06210846.pdf
[firstpage_image] =>[orig_patent_app_number] => 373571
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/373571 | Exposure during rework for enhanced resist removal | Aug 12, 1999 | Issued |
Array
(
[id] => 4082029
[patent_doc_number] => 06162567
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-12-19
[patent_title] => 'Process for producing halftone mask'
[patent_app_type] => 1
[patent_app_number] => 9/372089
[patent_app_country] => US
[patent_app_date] => 1999-08-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 14
[patent_no_of_words] => 3648
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 188
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/162/06162567.pdf
[firstpage_image] =>[orig_patent_app_number] => 372089
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/372089 | Process for producing halftone mask | Aug 10, 1999 | Issued |
| 09/361247 | SCANNING EXPOSURE METHOD AND CIRCUIT ELEMENT PRODUCING METHOD EMPLOYING THE SAME | Jul 26, 1999 | Abandoned |
Array
(
[id] => 4374441
[patent_doc_number] => 06303251
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2001-10-16
[patent_title] => 'Mask pattern correction process, photomask and semiconductor integrated circuit device'
[patent_app_type] => 1
[patent_app_number] => 9/360989
[patent_app_country] => US
[patent_app_date] => 1999-07-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 30
[patent_no_of_words] => 8777
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 192
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/303/06303251.pdf
[firstpage_image] =>[orig_patent_app_number] => 360989
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/360989 | Mask pattern correction process, photomask and semiconductor integrated circuit device | Jul 26, 1999 | Issued |