Christopher G. Young

Array ( [id] => 13156763 [patent_doc_number] => 10095101 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-10-09 [patent_title] => Critical dimension variation correction in extreme ultraviolet lithography [patent_app_type] => utility [patent_app_number] => 15/189058 [patent_app_country] => US [patent_app_date] => 2016-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 7878 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15189058 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11989077 [patent_doc_number] => 20170293232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-12 [patent_title] => 'METHOD TO REDUCE LINE WAVINESS' [patent_app_type] => utility [patent_app_number] => 15/188193 [patent_app_country] => US [patent_app_date] => 2016-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7500 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15188193 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13709033 [patent_doc_number] => 20170365471 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-12-21 [patent_title] => MASK SUBSTRATE STRUCTURE [patent_app_type] => utility [patent_app_number] => 15/187126 [patent_app_country] => US [patent_app_date] => 2016-06-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1921 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 24 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15187126 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11102452 [patent_doc_number] => 20160299422 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-10-13 [patent_title] => 'Method and System for Forming Patterns Using Charged Particle Beam Lithography with Variable Pattern Dosage' [patent_app_type] => utility [patent_app_number] => 15/184099 [patent_app_country] => US [patent_app_date] => 2016-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 11534 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15184099 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12173388 [patent_doc_number] => 09891528 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-02-13 [patent_title] => 'Extreme ultraviolet lithography with reduced exposure dose and negative tone development' [patent_app_type] => utility [patent_app_number] => 15/182160 [patent_app_country] => US [patent_app_date] => 2016-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 17 [patent_no_of_words] => 6963 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15182160 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12931765 [patent_doc_number] => 09829787 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-28 [patent_title] => Defect inspecting method, sorting method, and producing method for photomask blank [patent_app_type] => utility [patent_app_number] => 15/181691 [patent_app_country] => US [patent_app_date] => 2016-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 50 [patent_no_of_words] => 11664 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 293 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15181691 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13082301 [patent_doc_number] => 10061215 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-08-28 [patent_title] => Patterning method and patterning apparatus for fabricating a resist pattern [patent_app_type] => utility [patent_app_number] => 15/182348 [patent_app_country] => US [patent_app_date] => 2016-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 3205 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15182348 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11358671 [patent_doc_number] => 09535318 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-01-03 [patent_title] => 'Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device' [patent_app_type] => utility [patent_app_number] => 15/179030 [patent_app_country] => US [patent_app_date] => 2016-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 15788 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15179030 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12774382 [patent_doc_number] => 20180149962 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-05-31 [patent_title] => SUBSTRATE WITH ELECTRICALLY CONDUCTIVE FILM, SUBSTRATE WITH MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 15/580331 [patent_app_country] => US [patent_app_date] => 2016-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18368 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15580331 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15788015 [patent_doc_number] => 10627729 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-04-21 [patent_title] => Calibration method for a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 15/736451 [patent_app_country] => US [patent_app_date] => 2016-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 12102 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15736451 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12843763 [patent_doc_number] => 20180173094 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-21 [patent_title] => PROCESS FOR CONTROLLING THE SURFACE ENERGY AT THE INTERFACE BETWEEN A BLOCK COPOLYMER AND ANOTHER COMPOUND [patent_app_type] => utility [patent_app_number] => 15/579063 [patent_app_country] => US [patent_app_date] => 2016-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9689 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15579063 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11062276 [patent_doc_number] => 20160259238 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-08 [patent_title] => 'Method and System for Forming a Pattern on a Reticle Using Charged Particle Beam Lithography' [patent_app_type] => utility [patent_app_number] => 15/157190 [patent_app_country] => US [patent_app_date] => 2016-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 12790 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15157190 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11437656 [patent_doc_number] => 20170038676 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-02-09 [patent_title] => 'PELLICLE AND PHOTOMASK ASSEMBLY INCLUDING THE SAME' [patent_app_type] => utility [patent_app_number] => 15/155444 [patent_app_country] => US [patent_app_date] => 2016-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 46 [patent_figures_cnt] => 46 [patent_no_of_words] => 15246 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15155444 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15136039 [patent_doc_number] => 10481485 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-19 [patent_title] => Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 15/571131 [patent_app_country] => US [patent_app_date] => 2016-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 14 [patent_no_of_words] => 22426 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15571131 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11049954 [patent_doc_number] => 20160246912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-08-25 [patent_title] => 'Grid Refinement Method' [patent_app_type] => utility [patent_app_number] => 15/144571 [patent_app_country] => US [patent_app_date] => 2016-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 11175 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15144571 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11049223 [patent_doc_number] => 20160246183 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-08-25 [patent_title] => 'TRANSMISSION BALANCING FOR PHASE SHIFT MASK WITH A TRIM MASK' [patent_app_type] => utility [patent_app_number] => 15/144368 [patent_app_country] => US [patent_app_date] => 2016-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3579 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15144368 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14668263 [patent_doc_number] => 10372029 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-06 [patent_title] => Reflective mask, reflective mask blank, and manufacturing method therefor [patent_app_type] => utility [patent_app_number] => 15/138960 [patent_app_country] => US [patent_app_date] => 2016-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 39 [patent_no_of_words] => 6110 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15138960 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13239961 [patent_doc_number] => 10133177 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-11-20 [patent_title] => Exposure apparatus, exposure method, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 15/097585 [patent_app_country] => US [patent_app_date] => 2016-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 6108 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15097585 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15312259 [patent_doc_number] => 10520831 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-31 [patent_title] => Substrate processing method, substrate processing system and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 15/565714 [patent_app_country] => US [patent_app_date] => 2016-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7191 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15565714 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14641627 [patent_doc_number] => 10365556 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-07-30 [patent_title] => Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 15/561124 [patent_app_country] => US [patent_app_date] => 2016-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 12 [patent_no_of_words] => 14158 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15561124 [rel_patent_id] =>[rel_patent_doc_number] =>)