| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 10300617
[patent_doc_number] => 20150185617
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-07-02
[patent_title] => 'Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist'
[patent_app_type] => utility
[patent_app_number] => 14/244942
[patent_app_country] => US
[patent_app_date] => 2014-04-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 39
[patent_figures_cnt] => 39
[patent_no_of_words] => 25739
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14244942
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/244942 | Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist | Apr 3, 2014 | Issued |
Array
(
[id] => 10953770
[patent_doc_number] => 20140356791
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-12-04
[patent_title] => 'METHOD OF MAKING NANOSTRUCTURE'
[patent_app_type] => utility
[patent_app_number] => 14/242876
[patent_app_country] => US
[patent_app_date] => 2014-04-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 3863
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14242876
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/242876 | Method of making nanostructure | Apr 1, 2014 | Issued |
Array
(
[id] => 10233609
[patent_doc_number] => 20150118603
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-04-30
[patent_title] => 'PHOTO MASK AND METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING TRENCHES BY USING PHOTO MASK'
[patent_app_type] => utility
[patent_app_number] => 14/224112
[patent_app_country] => US
[patent_app_date] => 2014-03-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 4509
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14224112
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/224112 | PHOTO MASK AND METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING TRENCHES BY USING PHOTO MASK | Mar 24, 2014 | Abandoned |
Array
(
[id] => 10536147
[patent_doc_number] => 09261774
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-02-16
[patent_title] => 'Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity'
[patent_app_type] => utility
[patent_app_number] => 14/221555
[patent_app_country] => US
[patent_app_date] => 2014-03-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 9
[patent_no_of_words] => 7954
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 107
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14221555
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/221555 | Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity | Mar 20, 2014 | Issued |
Array
(
[id] => 9597070
[patent_doc_number] => 20140193749
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-07-10
[patent_title] => 'PATTERN-FORMING METHOD, ELECTRON BEAM-SENSITIVE OR EXTREME ULTRAVIOLET RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, MANUFACTURING METHOD OF ELECTRONIC DEVICE USING THEM AND ELECTRONIC DEVICE'
[patent_app_type] => utility
[patent_app_number] => 14/207867
[patent_app_country] => US
[patent_app_date] => 2014-03-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 36402
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14207867
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/207867 | Pattern-forming method, electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition, resist film, manufacturing method of electronic device using them and electronic device | Mar 12, 2014 | Issued |
Array
(
[id] => 11192881
[patent_doc_number] => 09423693
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2016-08-23
[patent_title] => 'In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate'
[patent_app_type] => utility
[patent_app_number] => 14/207088
[patent_app_country] => US
[patent_app_date] => 2014-03-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 2091
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 66
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14207088
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/207088 | In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate | Mar 11, 2014 | Issued |
Array
(
[id] => 10130541
[patent_doc_number] => 09164373
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-10-20
[patent_title] => 'Method and device for writing photomasks with reduced mura errors'
[patent_app_type] => utility
[patent_app_number] => 14/207428
[patent_app_country] => US
[patent_app_date] => 2014-03-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 13
[patent_no_of_words] => 3544
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 129
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14207428
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/207428 | Method and device for writing photomasks with reduced mura errors | Mar 11, 2014 | Issued |
Array
(
[id] => 9909426
[patent_doc_number] => 20150064627
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-03-05
[patent_title] => 'PATTERNING METHOD USING ELECTRON BEAM AND EXPOSURE SYSTEM CONFIGURED TO PERFORM THE SAME'
[patent_app_type] => utility
[patent_app_number] => 14/197824
[patent_app_country] => US
[patent_app_date] => 2014-03-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 8569
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14197824
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/197824 | Patterning method using electron beam and exposure system configured to perform the same | Mar 4, 2014 | Issued |
Array
(
[id] => 9950843
[patent_doc_number] => 08999627
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2015-04-07
[patent_title] => 'Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp'
[patent_app_type] => utility
[patent_app_number] => 14/198145
[patent_app_country] => US
[patent_app_date] => 2014-03-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 18
[patent_figures_cnt] => 18
[patent_no_of_words] => 7464
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 148
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14198145
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/198145 | Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp | Mar 4, 2014 | Issued |
Array
(
[id] => 10892704
[patent_doc_number] => 08916316
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2014-12-23
[patent_title] => 'Reflecting mask blank, method for manufacturing reflective mask blank and method for quality control for reflective mask blank'
[patent_app_type] => utility
[patent_app_number] => 14/196572
[patent_app_country] => US
[patent_app_date] => 2014-03-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 13
[patent_no_of_words] => 16237
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14196572
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/196572 | Reflecting mask blank, method for manufacturing reflective mask blank and method for quality control for reflective mask blank | Mar 3, 2014 | Issued |
Array
(
[id] => 10130561
[patent_doc_number] => 09164392
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-10-20
[patent_title] => 'Developer and patterning process'
[patent_app_type] => utility
[patent_app_number] => 14/193193
[patent_app_country] => US
[patent_app_date] => 2014-02-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9195
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 42
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14193193
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/193193 | Developer and patterning process | Feb 27, 2014 | Issued |
Array
(
[id] => 10870022
[patent_doc_number] => 08895214
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2014-11-25
[patent_title] => 'Optical mask for forming pattern'
[patent_app_type] => utility
[patent_app_number] => 14/180234
[patent_app_country] => US
[patent_app_date] => 2014-02-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 24
[patent_figures_cnt] => 25
[patent_no_of_words] => 11928
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 81
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14180234
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/180234 | Optical mask for forming pattern | Feb 12, 2014 | Issued |
Array
(
[id] => 10622996
[patent_doc_number] => 09341936
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-05-17
[patent_title] => 'Method and system for forming a pattern on a reticle using charged particle beam lithography'
[patent_app_type] => utility
[patent_app_number] => 14/177688
[patent_app_country] => US
[patent_app_date] => 2014-02-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 27
[patent_no_of_words] => 12739
[patent_no_of_claims] => 25
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14177688
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/177688 | Method and system for forming a pattern on a reticle using charged particle beam lithography | Feb 10, 2014 | Issued |
Array
(
[id] => 10602579
[patent_doc_number] => 09323140
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-04-26
[patent_title] => 'Method and system for forming a pattern on a reticle using charged particle beam lithography'
[patent_app_type] => utility
[patent_app_number] => 14/177679
[patent_app_country] => US
[patent_app_date] => 2014-02-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 27
[patent_no_of_words] => 12769
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 127
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14177679
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/177679 | Method and system for forming a pattern on a reticle using charged particle beam lithography | Feb 10, 2014 | Issued |
Array
(
[id] => 10960604
[patent_doc_number] => 20140363633
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-12-11
[patent_title] => 'METHODS OF REDUCING A REGISTRATION ERROR OF A PHOTOMASK, AND RELATED PHOTOMASKS AND METHODS OF MANUFACTURING AN INTEGRATED CIRCUIT'
[patent_app_type] => utility
[patent_app_number] => 14/176565
[patent_app_country] => US
[patent_app_date] => 2014-02-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
[patent_figures_cnt] => 15
[patent_no_of_words] => 13696
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14176565
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/176565 | Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit | Feb 9, 2014 | Issued |
Array
(
[id] => 9511281
[patent_doc_number] => 20140147773
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-05-29
[patent_title] => 'PELLICLE FOR LITHOGRAPHY, PELLICLE-MOUNTED PHOTOMASK, AND EXPOSURE TREATMENT METHOD'
[patent_app_type] => utility
[patent_app_number] => 14/167210
[patent_app_country] => US
[patent_app_date] => 2014-01-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 11624
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14167210
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/167210 | Pellicle for lithography, pellicle-mounted photomask, and exposure treatment method | Jan 28, 2014 | Issued |
Array
(
[id] => 10334982
[patent_doc_number] => 20150219987
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-08-06
[patent_title] => 'Photomask, Method of Manufacturing Photomask and Exposure Apparatus'
[patent_app_type] => utility
[patent_app_number] => 14/420584
[patent_app_country] => US
[patent_app_date] => 2014-01-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 9147
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14420584
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/420584 | Photomask, method of manufacturing photomask and exposure apparatus | Jan 27, 2014 | Issued |
Array
(
[id] => 10098306
[patent_doc_number] => 09134615
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2015-09-15
[patent_title] => 'Exposure method for glass substrate of liquid crystal display'
[patent_app_type] => utility
[patent_app_number] => 14/346423
[patent_app_country] => US
[patent_app_date] => 2014-01-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 9
[patent_no_of_words] => 2959
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 206
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14346423
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/346423 | Exposure method for glass substrate of liquid crystal display | Jan 8, 2014 | Issued |
Array
(
[id] => 10824151
[patent_doc_number] => 20160170317
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-06-16
[patent_title] => 'METHOD OF ALIGNING QUADRATE WAFER IN FIRST PHOTOLITHOGRAPHY PROCESS'
[patent_app_type] => utility
[patent_app_number] => 14/901541
[patent_app_country] => US
[patent_app_date] => 2014-01-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 2904
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14901541
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/901541 | Method of aligning quadrate wafer in first photolithography process | Jan 2, 2014 | Issued |
Array
(
[id] => 10294533
[patent_doc_number] => 20150179532
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-06-25
[patent_title] => 'SYSTEM AND METHOD FOR DARK FIELD INSPECTION'
[patent_app_type] => utility
[patent_app_number] => 14/138743
[patent_app_country] => US
[patent_app_date] => 2013-12-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 8302
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14138743
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/138743 | System and method for dark field inspection | Dec 22, 2013 | Issued |