Christopher G. Young

Array ( [id] => 5834529 [patent_doc_number] => 20060246359 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-02 [patent_title] => 'Semiconductor device, fabricating method thereof, and photomask' [patent_app_type] => utility [patent_app_number] => 11/291318 [patent_app_country] => US [patent_app_date] => 2005-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 6679 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0246/20060246359.pdf [firstpage_image] =>[orig_patent_app_number] => 11291318 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5720641 [patent_doc_number] => 20060073416 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-06 [patent_title] => 'Mechanically robust interconnect for low-k dielectric material using post treatment' [patent_app_type] => utility [patent_app_number] => 11/286783 [patent_app_country] => US [patent_app_date] => 2005-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 4404 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0073/20060073416.pdf [firstpage_image] =>[orig_patent_app_number] => 11286783 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 292160 [patent_doc_number] => 07544449 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2009-06-09 [patent_title] => 'Method and apparatus for measurement of crossfield chromatic response of projection imaging systems' [patent_app_type] => utility [patent_app_number] => 11/280531 [patent_app_country] => US [patent_app_date] => 2005-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 23 [patent_no_of_words] => 9055 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/544/07544449.pdf [firstpage_image] =>[orig_patent_app_number] => 11280531 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 432136 [patent_doc_number] => 07264909 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-09-04 [patent_title] => 'Exposure parameter obtaining method, exposure parameter evaluating method, semiconductor device manufacturing method, charged beam exposure apparatus, and method of the same' [patent_app_type] => utility [patent_app_number] => 11/268526 [patent_app_country] => US [patent_app_date] => 2005-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 36 [patent_no_of_words] => 8910 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/264/07264909.pdf [firstpage_image] =>[orig_patent_app_number] => 11268526 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5707793 [patent_doc_number] => 20060049137 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'Multi-step process for etching photomasks' [patent_app_type] => utility [patent_app_number] => 11/264189 [patent_app_country] => US [patent_app_date] => 2005-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 7414 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20060049137.pdf [firstpage_image] =>[orig_patent_app_number] => 11264189 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 612580 [patent_doc_number] => 07147976 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-12-12 [patent_title] => 'Binary OPC for assist feature layout optimization' [patent_app_type] => utility [patent_app_number] => 11/251981 [patent_app_country] => US [patent_app_date] => 2005-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 17 [patent_no_of_words] => 11736 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/147/07147976.pdf [firstpage_image] =>[orig_patent_app_number] => 11251981 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5193796 [patent_doc_number] => 20070082280 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-12 [patent_title] => 'Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate' [patent_app_type] => utility [patent_app_number] => 11/247594 [patent_app_country] => US [patent_app_date] => 2005-10-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7573 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20070082280.pdf [firstpage_image] =>[orig_patent_app_number] => 11247594 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5193797 [patent_doc_number] => 20070082281 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-12 [patent_title] => 'Compensating for effects of topography variation by using a variable intensity-threshold' [patent_app_type] => utility [patent_app_number] => 11/254124 [patent_app_country] => US [patent_app_date] => 2005-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4206 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20070082281.pdf [firstpage_image] =>[orig_patent_app_number] => 11254124 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5637332 [patent_doc_number] => 20060068305 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-30 [patent_title] => 'Method for aligning exposure mask and method for manufacturing thin film device substrate' [patent_app_type] => utility [patent_app_number] => 11/235262 [patent_app_country] => US [patent_app_date] => 2005-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5853 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0068/20060068305.pdf [firstpage_image] =>[orig_patent_app_number] => 11235262 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 210170 [patent_doc_number] => 07625679 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-12-01 [patent_title] => 'Method of aligning a particle-beam-generated pattern to a pattern on a pre-patterned substrate' [patent_app_type] => utility [patent_app_number] => 11/233616 [patent_app_country] => US [patent_app_date] => 2005-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5329 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/625/07625679.pdf [firstpage_image] =>[orig_patent_app_number] => 11233616 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5106878 [patent_doc_number] => 20070065756 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-22 [patent_title] => 'HIGH SENSITIVITY ELECTRON BEAM RESIST PROCESSING' [patent_app_type] => utility [patent_app_number] => 11/229353 [patent_app_country] => US [patent_app_date] => 2005-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 4400 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0065/20070065756.pdf [firstpage_image] =>[orig_patent_app_number] => 11229353 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5637331 [patent_doc_number] => 20060068304 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-30 [patent_title] => 'Alignment method of exposure mask and manufacturing method of thin film element substrate' [patent_app_type] => utility [patent_app_number] => 11/223956 [patent_app_country] => US [patent_app_date] => 2005-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6239 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0068/20060068304.pdf [firstpage_image] =>[orig_patent_app_number] => 11223956 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 800255 [patent_doc_number] => 07425397 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-09-16 [patent_title] => 'Method of determining an illumination profile and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/223154 [patent_app_country] => US [patent_app_date] => 2005-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 4581 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/425/07425397.pdf [firstpage_image] =>[orig_patent_app_number] => 11223154 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5655661 [patent_doc_number] => 20060141396 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-29 [patent_title] => 'Electron beam lithography method using new material' [patent_app_type] => utility [patent_app_number] => 11/220697 [patent_app_country] => US [patent_app_date] => 2005-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2581 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0141/20060141396.pdf [firstpage_image] =>[orig_patent_app_number] => 11220697 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 314626 [patent_doc_number] => 07524595 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-04-28 [patent_title] => 'Process for forming anti-reflection coating and method for improving accuracy of overlay measurement and alignment' [patent_app_type] => utility [patent_app_number] => 11/223497 [patent_app_country] => US [patent_app_date] => 2005-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 4 [patent_no_of_words] => 1456 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/524/07524595.pdf [firstpage_image] =>[orig_patent_app_number] => 11223497 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5148570 [patent_doc_number] => 20070048629 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-01 [patent_title] => 'Overlay target for polarized light lithography' [patent_app_type] => utility [patent_app_number] => 11/218417 [patent_app_country] => US [patent_app_date] => 2005-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4752 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0048/20070048629.pdf [firstpage_image] =>[orig_patent_app_number] => 11218417 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 585620 [patent_doc_number] => 07439001 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-10-21 [patent_title] => 'Focus blur measurement and control method' [patent_app_type] => utility [patent_app_number] => 11/206326 [patent_app_country] => US [patent_app_date] => 2005-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 5506 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/439/07439001.pdf [firstpage_image] =>[orig_patent_app_number] => 11206326 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5710364 [patent_doc_number] => 20060051709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'Exposure system and pattern formation method' [patent_app_type] => utility [patent_app_number] => 11/203161 [patent_app_country] => US [patent_app_date] => 2005-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4829 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20060051709.pdf [firstpage_image] =>[orig_patent_app_number] => 11203161 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 369700 [patent_doc_number] => 07476473 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-01-13 [patent_title] => 'Process control method, a method for forming monitor marks, a mask for process control, and a semiconductor device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/198368 [patent_app_country] => US [patent_app_date] => 2005-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 21 [patent_no_of_words] => 6375 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/476/07476473.pdf [firstpage_image] =>[orig_patent_app_number] => 11198368 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 141431 [patent_doc_number] => 07687211 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-03-30 [patent_title] => 'System and method for photolithography in semiconductor manufacturing' [patent_app_type] => utility [patent_app_number] => 11/193126 [patent_app_country] => US [patent_app_date] => 2005-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 1597 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/687/07687211.pdf [firstpage_image] =>[orig_patent_app_number] => 11193126 [rel_patent_id] =>[rel_patent_doc_number] =>)