| Application number | Title of the application | Filing Date | Status |
|---|
| 09/689861 | X-ray mask and device manufacturing method using the same | Oct 12, 2000 | Abandoned |
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| 09/676809 | PROCESS FOR FORMING LATENT IMAGE, PROCESS FOR DETECTING LATENT IMAGE, PROCESS AND DEVICE FOR EXPOSURE, EXPOSURE APPARATUS, RESIST AND SUBSTRATE | Oct 1, 2000 | Abandoned |
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