Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 4701512 [patent_doc_number] => 20080061034 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-03-13 [patent_title] => 'ETCHING APPARATUS AND ETCHING METHOD USING THE SAME' [patent_app_type] => utility [patent_app_number] => 11/852012 [patent_app_country] => US [patent_app_date] => 2007-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4906 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0061/20080061034.pdf [firstpage_image] =>[orig_patent_app_number] => 11852012 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/852012
ETCHING APPARATUS AND ETCHING METHOD USING THE SAME Sep 6, 2007 Abandoned
Array ( [id] => 4694772 [patent_doc_number] => 20080216956 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-11 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/850722 [patent_app_country] => US [patent_app_date] => 2007-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 15113 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0216/20080216956.pdf [firstpage_image] =>[orig_patent_app_number] => 11850722 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/850722
PLASMA PROCESSING APPARATUS Sep 5, 2007 Abandoned
Array ( [id] => 4788792 [patent_doc_number] => 20080289765 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-11-27 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/848262 [patent_app_country] => US [patent_app_date] => 2007-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4739 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0289/20080289765.pdf [firstpage_image] =>[orig_patent_app_number] => 11848262 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/848262
Plasma processing apparatus Aug 30, 2007 Issued
Array ( [id] => 4890340 [patent_doc_number] => 20080099436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'ENDPOINT DETECTION FOR PHOTOMASK ETCHING' [patent_app_type] => utility [patent_app_number] => 11/844868 [patent_app_country] => US [patent_app_date] => 2007-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9823 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20080099436.pdf [firstpage_image] =>[orig_patent_app_number] => 11844868 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/844868
ENDPOINT DETECTION FOR PHOTOMASK ETCHING Aug 23, 2007 Abandoned
Array ( [id] => 4768164 [patent_doc_number] => 20080053818 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-03-06 [patent_title] => 'Plasma processing apparatus of substrate and plasma processing method thereof' [patent_app_type] => utility [patent_app_number] => 11/889518 [patent_app_country] => US [patent_app_date] => 2007-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6282 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0053/20080053818.pdf [firstpage_image] =>[orig_patent_app_number] => 11889518 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/889518
Plasma processing apparatus of substrate and plasma processing method thereof Aug 13, 2007 Abandoned
Array ( [id] => 4714226 [patent_doc_number] => 20080236748 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-10-02 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/835449 [patent_app_country] => US [patent_app_date] => 2007-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7844 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0236/20080236748.pdf [firstpage_image] =>[orig_patent_app_number] => 11835449 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/835449
PLASMA PROCESSING APPARATUS Aug 7, 2007 Abandoned
Array ( [id] => 4816263 [patent_doc_number] => 20080223522 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-18 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/835455 [patent_app_country] => US [patent_app_date] => 2007-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6711 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0223/20080223522.pdf [firstpage_image] =>[orig_patent_app_number] => 11835455 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/835455
PLASMA PROCESSING APPARATUS Aug 7, 2007 Abandoned
Array ( [id] => 4929648 [patent_doc_number] => 20080000423 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-03 [patent_title] => 'SYSTEM FOR IMPROVING THE WAFER TO WAFER UNIFORMITY AND DEFECTIVITY OF A DEPOSITED DIELECTRIC FILM' [patent_app_type] => utility [patent_app_number] => 11/835576 [patent_app_country] => US [patent_app_date] => 2007-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 11472 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20080000423.pdf [firstpage_image] =>[orig_patent_app_number] => 11835576 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/835576
SYSTEM FOR IMPROVING THE WAFER TO WAFER UNIFORMITY AND DEFECTIVITY OF A DEPOSITED DIELECTRIC FILM Aug 7, 2007 Abandoned
Array ( [id] => 5029548 [patent_doc_number] => 20070270995 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-11-22 [patent_title] => 'RECESSING TRENCH TO TARGET DEPTH USING FEED FORWARD DATA' [patent_app_type] => utility [patent_app_number] => 11/832718 [patent_app_country] => US [patent_app_date] => 2007-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4276 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0270/20070270995.pdf [firstpage_image] =>[orig_patent_app_number] => 11832718 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/832718
RECESSING TRENCH TO TARGET DEPTH USING FEED FORWARD DATA Aug 1, 2007 Abandoned
Array ( [id] => 4799835 [patent_doc_number] => 20080011422 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-17 [patent_title] => 'Plasma Processing System And Apparatus And A Sample Processing Method' [patent_app_type] => utility [patent_app_number] => 11/780014 [patent_app_country] => US [patent_app_date] => 2007-07-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9096 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20080011422.pdf [firstpage_image] =>[orig_patent_app_number] => 11780014 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/780014
Plasma processing system and apparatus and a sample processing method Jul 18, 2007 Issued
Array ( [id] => 4802775 [patent_doc_number] => 20080014363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-17 [patent_title] => 'Electro-Static Chucking Mechanism and Surface Processing Apparatus' [patent_app_type] => utility [patent_app_number] => 11/779169 [patent_app_country] => US [patent_app_date] => 2007-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4775 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0014/20080014363.pdf [firstpage_image] =>[orig_patent_app_number] => 11779169 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/779169
Electro-Static Chucking Mechanism and Surface Processing Apparatus Jul 16, 2007 Abandoned
Array ( [id] => 4654284 [patent_doc_number] => 20080023144 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-31 [patent_title] => 'DIELECTRIC ETCH TOOL CONFIGURED FOR HIGH DENSITY AND LOW BOMBARDMENT ENERGY PLASMA PROVIDING HIGH ETCH RATES' [patent_app_type] => utility [patent_app_number] => 11/778058 [patent_app_country] => US [patent_app_date] => 2007-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 17550 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20080023144.pdf [firstpage_image] =>[orig_patent_app_number] => 11778058 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/778058
DIELECTRIC ETCH TOOL CONFIGURED FOR HIGH DENSITY AND LOW BOMBARDMENT ENERGY PLASMA PROVIDING HIGH ETCH RATES Jul 14, 2007 Abandoned
Array ( [id] => 5349512 [patent_doc_number] => 20090004873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-01-01 [patent_title] => 'HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS' [patent_app_type] => utility [patent_app_number] => 11/749069 [patent_app_country] => US [patent_app_date] => 2007-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4340 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0004/20090004873.pdf [firstpage_image] =>[orig_patent_app_number] => 11749069 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/749069
HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS Jun 25, 2007 Abandoned
Array ( [id] => 5244591 [patent_doc_number] => 20070240825 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Wafer processing apparatus capable of controlling wafer temperature' [patent_app_type] => utility [patent_app_number] => 11/812289 [patent_app_country] => US [patent_app_date] => 2007-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7905 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0240/20070240825.pdf [firstpage_image] =>[orig_patent_app_number] => 11812289 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/812289
Wafer processing apparatus capable of controlling wafer temperature Jun 17, 2007 Abandoned
Array ( [id] => 5059622 [patent_doc_number] => 20070221258 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-27 [patent_title] => 'ETCHING METHOD AND APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/755385 [patent_app_country] => US [patent_app_date] => 2007-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5491 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20070221258.pdf [firstpage_image] =>[orig_patent_app_number] => 11755385 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/755385
ETCHING METHOD AND APPARATUS May 29, 2007 Abandoned
Array ( [id] => 8212924 [patent_doc_number] => 08192576 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-06-05 [patent_title] => 'Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing' [patent_app_type] => utility [patent_app_number] => 11/805607 [patent_app_country] => US [patent_app_date] => 2007-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 19 [patent_no_of_words] => 14262 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/192/08192576.pdf [firstpage_image] =>[orig_patent_app_number] => 11805607 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/805607
Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing May 22, 2007 Issued
Array ( [id] => 4472720 [patent_doc_number] => 07867356 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-01-11 [patent_title] => 'Apparatus for reducing polymer deposition on a substrate and substrate support' [patent_app_type] => utility [patent_app_number] => 11/802212 [patent_app_country] => US [patent_app_date] => 2007-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3211 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/867/07867356.pdf [firstpage_image] =>[orig_patent_app_number] => 11802212 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/802212
Apparatus for reducing polymer deposition on a substrate and substrate support May 20, 2007 Issued
Array ( [id] => 5043285 [patent_doc_number] => 20070261956 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-11-15 [patent_title] => 'COATING INSTALLATION WITH CARRIER FOR SUBSTRATE COATING' [patent_app_type] => utility [patent_app_number] => 11/746749 [patent_app_country] => US [patent_app_date] => 2007-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2228 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0261/20070261956.pdf [firstpage_image] =>[orig_patent_app_number] => 11746749 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/746749
COATING INSTALLATION WITH CARRIER FOR SUBSTRATE COATING May 9, 2007 Abandoned
Array ( [id] => 5109604 [patent_doc_number] => 20070193519 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-23 [patent_title] => 'Large area deposition in high vacuum with high thickness uniformity' [patent_app_type] => utility [patent_app_number] => 11/785141 [patent_app_country] => US [patent_app_date] => 2007-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5111 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0193/20070193519.pdf [firstpage_image] =>[orig_patent_app_number] => 11785141 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/785141
Large area deposition in high vacuum with high thickness uniformity Apr 15, 2007 Abandoned
Array ( [id] => 4842603 [patent_doc_number] => 20080179011 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-31 [patent_title] => 'PLASMA REACTOR WITH WIDE PROCESS WINDOW EMPLOYING PLURAL VHF SOURCES' [patent_app_type] => utility [patent_app_number] => 11/734040 [patent_app_country] => US [patent_app_date] => 2007-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10855 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20080179011.pdf [firstpage_image] =>[orig_patent_app_number] => 11734040 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/734040
PLASMA REACTOR WITH WIDE PROCESS WINDOW EMPLOYING PLURAL VHF SOURCES Apr 10, 2007 Abandoned
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