
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 4842395
[patent_doc_number] => 20080178803
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-07-31
[patent_title] => 'PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES'
[patent_app_type] => utility
[patent_app_number] => 11/733913
[patent_app_country] => US
[patent_app_date] => 2007-04-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 15
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[pdf_file] => publications/A1/0178/20080178803.pdf
[firstpage_image] =>[orig_patent_app_number] => 11733913
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/733913 | PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES | Apr 10, 2007 | Abandoned |
Array
(
[id] => 5088028
[patent_doc_number] => 20070227667
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-10-04
[patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD OF MEASURING AMOUNT OF RADIO-FREQUENCY CURRENT IN PLASMA'
[patent_app_type] => utility
[patent_app_number] => 11/692340
[patent_app_country] => US
[patent_app_date] => 2007-03-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
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[pdf_file] => publications/A1/0227/20070227667.pdf
[firstpage_image] =>[orig_patent_app_number] => 11692340
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/692340 | Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma | Mar 27, 2007 | Issued |
Array
(
[id] => 5088019
[patent_doc_number] => 20070227658
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-10-04
[patent_title] => 'CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR'
[patent_app_type] => utility
[patent_app_number] => 11/692426
[patent_app_country] => US
[patent_app_date] => 2007-03-28
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[pdf_file] => publications/A1/0227/20070227658.pdf
[firstpage_image] =>[orig_patent_app_number] => 11692426
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/692426 | CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR | Mar 27, 2007 | Abandoned |
Array
(
[id] => 5063069
[patent_doc_number] => 20070224709
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-09-27
[patent_title] => 'PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 11/689840
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/689840 | PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM | Mar 21, 2007 | Abandoned |
Array
(
[id] => 5002091
[patent_doc_number] => 20070199655
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-08-30
[patent_title] => 'SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM'
[patent_app_type] => utility
[patent_app_number] => 11/679363
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[pdf_file] => publications/A1/0199/20070199655.pdf
[firstpage_image] =>[orig_patent_app_number] => 11679363
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/679363 | SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM | Feb 26, 2007 | Abandoned |
Array
(
[id] => 5061360
[patent_doc_number] => 20070222999
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-09-27
[patent_title] => 'Apparatus for monitoring a density profile of impurities'
[patent_app_type] => utility
[patent_app_number] => 11/710579
[patent_app_country] => US
[patent_app_date] => 2007-02-26
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[pdf_file] => publications/A1/0222/20070222999.pdf
[firstpage_image] =>[orig_patent_app_number] => 11710579
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/710579 | Apparatus for monitoring a density profile of impurities | Feb 25, 2007 | Abandoned |
Array
(
[id] => 5259169
[patent_doc_number] => 20070212801
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-09-13
[patent_title] => 'System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device'
[patent_app_type] => utility
[patent_app_number] => 11/708344
[patent_app_country] => US
[patent_app_date] => 2007-02-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
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[patent_no_of_words] => 9751
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[pdf_file] => publications/A1/0212/20070212801.pdf
[firstpage_image] =>[orig_patent_app_number] => 11708344
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/708344 | System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device | Feb 20, 2007 | Abandoned |
Array
(
[id] => 5357160
[patent_doc_number] => 20090031954
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2009-02-05
[patent_title] => 'SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER'
[patent_app_type] => utility
[patent_app_number] => 12/278650
[patent_app_country] => US
[patent_app_date] => 2007-02-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 18
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[patent_no_of_words] => 14094
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[pdf_file] => publications/A1/0031/20090031954.pdf
[firstpage_image] =>[orig_patent_app_number] => 12278650
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/278650 | SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER | Feb 7, 2007 | Abandoned |
Array
(
[id] => 150818
[patent_doc_number] => 07678226
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-03-16
[patent_title] => 'Method and apparatus for an improved bellows shield in a plasma processing system'
[patent_app_type] => utility
[patent_app_number] => 11/671282
[patent_app_country] => US
[patent_app_date] => 2007-02-05
[patent_effective_date] => 0000-00-00
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[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/678/07678226.pdf
[firstpage_image] =>[orig_patent_app_number] => 11671282
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/671282 | Method and apparatus for an improved bellows shield in a plasma processing system | Feb 4, 2007 | Issued |
Array
(
[id] => 5097802
[patent_doc_number] => 20070181062
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-08-09
[patent_title] => 'SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT'
[patent_app_type] => utility
[patent_app_number] => 11/670596
[patent_app_country] => US
[patent_app_date] => 2007-02-02
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[pdf_file] => publications/A1/0181/20070181062.pdf
[firstpage_image] =>[orig_patent_app_number] => 11670596
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/670596 | SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT | Feb 1, 2007 | Abandoned |
Array
(
[id] => 5178598
[patent_doc_number] => 20070179658
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[patent_kind] => A1
[patent_issue_date] => 2007-08-02
[patent_title] => 'SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 11/670018
[patent_app_country] => US
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Array
(
[id] => 177387
[patent_doc_number] => 07655093
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-02-02
[patent_title] => 'Wafer support system'
[patent_app_type] => utility
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Array
(
[id] => 5076321
[patent_doc_number] => 20070119545
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[patent_kind] => A1
[patent_issue_date] => 2007-05-31
[patent_title] => 'METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GATE APPLICATIONS'
[patent_app_type] => utility
[patent_app_number] => 11/627025
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Array
(
[id] => 4971336
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[patent_issue_date] => 2007-05-17
[patent_title] => 'Method of controlling trimming of a gate electrode structure'
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Array
(
[id] => 4967844
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[patent_issue_date] => 2007-05-17
[patent_title] => 'METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCESSING SYSTEM'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/620334 | Method and apparatus for an improved baffle plate in a plasma processing system | Jan 4, 2007 | Issued |
Array
(
[id] => 4752097
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[patent_kind] => A1
[patent_issue_date] => 2008-07-03
[patent_title] => 'TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION'
[patent_app_type] => utility
[patent_app_number] => 11/617348
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Array
(
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Array
(
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Array
(
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/642155 | Substrate supporting apparatus | Dec 19, 2006 | Issued |
Array
(
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[patent_issue_date] => 2011-01-04
[patent_title] => 'Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus'
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[pdf_file] => patents/07/862/07862736.pdf
[firstpage_image] =>[orig_patent_app_number] => 11633530
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/633530 | Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus | Dec 4, 2006 | Issued |