Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 4842395 [patent_doc_number] => 20080178803 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-31 [patent_title] => 'PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES' [patent_app_type] => utility [patent_app_number] => 11/733913 [patent_app_country] => US [patent_app_date] => 2007-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10949 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0178/20080178803.pdf [firstpage_image] =>[orig_patent_app_number] => 11733913 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/733913
PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES Apr 10, 2007 Abandoned
Array ( [id] => 5088028 [patent_doc_number] => 20070227667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-04 [patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD OF MEASURING AMOUNT OF RADIO-FREQUENCY CURRENT IN PLASMA' [patent_app_type] => utility [patent_app_number] => 11/692340 [patent_app_country] => US [patent_app_date] => 2007-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7083 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0227/20070227667.pdf [firstpage_image] =>[orig_patent_app_number] => 11692340 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/692340
Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma Mar 27, 2007 Issued
Array ( [id] => 5088019 [patent_doc_number] => 20070227658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-04 [patent_title] => 'CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR' [patent_app_type] => utility [patent_app_number] => 11/692426 [patent_app_country] => US [patent_app_date] => 2007-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 11261 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0227/20070227658.pdf [firstpage_image] =>[orig_patent_app_number] => 11692426 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/692426
CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR Mar 27, 2007 Abandoned
Array ( [id] => 5063069 [patent_doc_number] => 20070224709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-27 [patent_title] => 'PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 11/689840 [patent_app_country] => US [patent_app_date] => 2007-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7986 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0224/20070224709.pdf [firstpage_image] =>[orig_patent_app_number] => 11689840 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/689840
PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM Mar 21, 2007 Abandoned
Array ( [id] => 5002091 [patent_doc_number] => 20070199655 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-30 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 11/679363 [patent_app_country] => US [patent_app_date] => 2007-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 11396 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0199/20070199655.pdf [firstpage_image] =>[orig_patent_app_number] => 11679363 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/679363
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROCESSING CONDITIONS AND STORAGE MEDIUM Feb 26, 2007 Abandoned
Array ( [id] => 5061360 [patent_doc_number] => 20070222999 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-27 [patent_title] => 'Apparatus for monitoring a density profile of impurities' [patent_app_type] => utility [patent_app_number] => 11/710579 [patent_app_country] => US [patent_app_date] => 2007-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4553 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0222/20070222999.pdf [firstpage_image] =>[orig_patent_app_number] => 11710579 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/710579
Apparatus for monitoring a density profile of impurities Feb 25, 2007 Abandoned
Array ( [id] => 5259169 [patent_doc_number] => 20070212801 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-09-13 [patent_title] => 'System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/708344 [patent_app_country] => US [patent_app_date] => 2007-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9751 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0212/20070212801.pdf [firstpage_image] =>[orig_patent_app_number] => 11708344 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/708344
System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device Feb 20, 2007 Abandoned
Array ( [id] => 5357160 [patent_doc_number] => 20090031954 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-02-05 [patent_title] => 'SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER' [patent_app_type] => utility [patent_app_number] => 12/278650 [patent_app_country] => US [patent_app_date] => 2007-02-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 14094 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0031/20090031954.pdf [firstpage_image] =>[orig_patent_app_number] => 12278650 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/278650
SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER Feb 7, 2007 Abandoned
Array ( [id] => 150818 [patent_doc_number] => 07678226 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-03-16 [patent_title] => 'Method and apparatus for an improved bellows shield in a plasma processing system' [patent_app_type] => utility [patent_app_number] => 11/671282 [patent_app_country] => US [patent_app_date] => 2007-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4221 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 350 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/678/07678226.pdf [firstpage_image] =>[orig_patent_app_number] => 11671282 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/671282
Method and apparatus for an improved bellows shield in a plasma processing system Feb 4, 2007 Issued
Array ( [id] => 5097802 [patent_doc_number] => 20070181062 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-09 [patent_title] => 'SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT' [patent_app_type] => utility [patent_app_number] => 11/670596 [patent_app_country] => US [patent_app_date] => 2007-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6458 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0181/20070181062.pdf [firstpage_image] =>[orig_patent_app_number] => 11670596 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/670596
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT Feb 1, 2007 Abandoned
Array ( [id] => 5178598 [patent_doc_number] => 20070179658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-02 [patent_title] => 'SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/670018 [patent_app_country] => US [patent_app_date] => 2007-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 13106 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20070179658.pdf [firstpage_image] =>[orig_patent_app_number] => 11670018 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/670018
SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBSTRATE PROCESSING APPARATUS Jan 31, 2007 Abandoned
Array ( [id] => 177387 [patent_doc_number] => 07655093 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-02-02 [patent_title] => 'Wafer support system' [patent_app_type] => utility [patent_app_number] => 11/668409 [patent_app_country] => US [patent_app_date] => 2007-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 19 [patent_no_of_words] => 8606 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/655/07655093.pdf [firstpage_image] =>[orig_patent_app_number] => 11668409 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/668409
Wafer support system Jan 28, 2007 Issued
Array ( [id] => 5076321 [patent_doc_number] => 20070119545 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-31 [patent_title] => 'METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GATE APPLICATIONS' [patent_app_type] => utility [patent_app_number] => 11/627025 [patent_app_country] => US [patent_app_date] => 2007-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6059 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0119/20070119545.pdf [firstpage_image] =>[orig_patent_app_number] => 11627025 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/627025
METHOD TO IMPROVE PROFILE CONTROL AND N/P LOADING IN DUAL DOPED GATE APPLICATIONS Jan 24, 2007 Abandoned
Array ( [id] => 4971336 [patent_doc_number] => 20070111338 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-17 [patent_title] => 'Method of controlling trimming of a gate electrode structure' [patent_app_type] => utility [patent_app_number] => 11/652074 [patent_app_country] => US [patent_app_date] => 2007-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6462 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0111/20070111338.pdf [firstpage_image] =>[orig_patent_app_number] => 11652074 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/652074
Method of controlling trimming of a gate electrode structure Jan 10, 2007 Abandoned
Array ( [id] => 4967844 [patent_doc_number] => 20070107846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-17 [patent_title] => 'METHOD AND APPARATUS FOR AN IMPROVED BAFFLE PLATE IN A PLASMA PROCESSING SYSTEM' [patent_app_type] => utility [patent_app_number] => 11/620334 [patent_app_country] => US [patent_app_date] => 2007-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4799 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0107/20070107846.pdf [firstpage_image] =>[orig_patent_app_number] => 11620334 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/620334
Method and apparatus for an improved baffle plate in a plasma processing system Jan 4, 2007 Issued
Array ( [id] => 4752097 [patent_doc_number] => 20080160170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-07-03 [patent_title] => 'TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION' [patent_app_type] => utility [patent_app_number] => 11/617348 [patent_app_country] => US [patent_app_date] => 2006-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4802 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20080160170.pdf [firstpage_image] =>[orig_patent_app_number] => 11617348 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/617348
TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION Dec 27, 2006 Abandoned
Array ( [id] => 5022938 [patent_doc_number] => 20070148904 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-28 [patent_title] => 'DEVICE AND METHOD FOR CONTROLLING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 11/616711 [patent_app_country] => US [patent_app_date] => 2006-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 1478 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0148/20070148904.pdf [firstpage_image] =>[orig_patent_app_number] => 11616711 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/616711
DEVICE AND METHOD FOR CONTROLLING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION APPARATUS Dec 26, 2006 Abandoned
Array ( [id] => 5040364 [patent_doc_number] => 20070092646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-26 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 11/614310 [patent_app_country] => US [patent_app_date] => 2006-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 58 [patent_figures_cnt] => 58 [patent_no_of_words] => 29373 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20070092646.pdf [firstpage_image] =>[orig_patent_app_number] => 11614310 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/614310
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Dec 20, 2006 Abandoned
Array ( [id] => 337640 [patent_doc_number] => 07503980 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-03-17 [patent_title] => 'Substrate supporting apparatus' [patent_app_type] => utility [patent_app_number] => 11/642155 [patent_app_country] => US [patent_app_date] => 2006-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 3559 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 330 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/503/07503980.pdf [firstpage_image] =>[orig_patent_app_number] => 11642155 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/642155
Substrate supporting apparatus Dec 19, 2006 Issued
Array ( [id] => 4443572 [patent_doc_number] => 07862736 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-01-04 [patent_title] => 'Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus' [patent_app_type] => utility [patent_app_number] => 11/633530 [patent_app_country] => US [patent_app_date] => 2006-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7543 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/862/07862736.pdf [firstpage_image] =>[orig_patent_app_number] => 11633530 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/633530
Method of cleaning plasma etching apparatus, and thus-cleanable plasma etching apparatus Dec 4, 2006 Issued
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