Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 51908 [patent_doc_number] => 07771561 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-10 [patent_title] => 'Apparatus and method for surface treatment to substrate' [patent_app_type] => utility [patent_app_number] => 11/598067 [patent_app_country] => US [patent_app_date] => 2006-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 6005 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/771/07771561.pdf [firstpage_image] =>[orig_patent_app_number] => 11598067 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/598067
Apparatus and method for surface treatment to substrate Nov 12, 2006 Issued
Array ( [id] => 5092180 [patent_doc_number] => 20070113789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-24 [patent_title] => 'METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR' [patent_app_type] => utility [patent_app_number] => 11/557462 [patent_app_country] => US [patent_app_date] => 2006-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6484 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0113/20070113789.pdf [firstpage_image] =>[orig_patent_app_number] => 11557462 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/557462
METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR Nov 6, 2006 Abandoned
Array ( [id] => 4890341 [patent_doc_number] => 20080099437 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Plasma reactor for processing a transparent workpiece with backside process endpoint detection' [patent_app_type] => utility [patent_app_number] => 11/589476 [patent_app_country] => US [patent_app_date] => 2006-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 7660 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20080099437.pdf [firstpage_image] =>[orig_patent_app_number] => 11589476 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/589476
Plasma reactor for processing a transparent workpiece with backside process endpoint detection Oct 29, 2006 Abandoned
Array ( [id] => 4890354 [patent_doc_number] => 20080099450 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution' [patent_app_type] => utility [patent_app_number] => 11/589343 [patent_app_country] => US [patent_app_date] => 2006-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 50 [patent_figures_cnt] => 50 [patent_no_of_words] => 20623 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20080099450.pdf [firstpage_image] =>[orig_patent_app_number] => 11589343 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/589343
Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution Oct 29, 2006 Abandoned
Array ( [id] => 4893101 [patent_doc_number] => 20080102199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-01 [patent_title] => 'Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration' [patent_app_type] => utility [patent_app_number] => 11/588440 [patent_app_country] => US [patent_app_date] => 2006-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2122 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0102/20080102199.pdf [firstpage_image] =>[orig_patent_app_number] => 11588440 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/588440
Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration Oct 25, 2006 Abandoned
Array ( [id] => 4660197 [patent_doc_number] => 20080251104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-10-16 [patent_title] => 'Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes' [patent_app_type] => utility [patent_app_number] => 12/088825 [patent_app_country] => US [patent_app_date] => 2006-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 16011 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0251/20080251104.pdf [firstpage_image] =>[orig_patent_app_number] => 12088825 [rel_patent_id] =>[rel_patent_doc_number] =>)
12/088825
Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes Oct 2, 2006 Abandoned
Array ( [id] => 72835 [patent_doc_number] => 07749353 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-07-06 [patent_title] => 'High aspect ratio etch using modulation of RF powers of various frequencies' [patent_app_type] => utility [patent_app_number] => 11/525602 [patent_app_country] => US [patent_app_date] => 2006-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 19 [patent_no_of_words] => 11657 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 354 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/749/07749353.pdf [firstpage_image] =>[orig_patent_app_number] => 11525602 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/525602
High aspect ratio etch using modulation of RF powers of various frequencies Sep 20, 2006 Issued
Array ( [id] => 4980008 [patent_doc_number] => 20070084562 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-19 [patent_title] => 'Plasma processing chamber' [patent_app_type] => utility [patent_app_number] => 11/518228 [patent_app_country] => US [patent_app_date] => 2006-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8361 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0084/20070084562.pdf [firstpage_image] =>[orig_patent_app_number] => 11518228 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/518228
Plasma processing chamber Sep 10, 2006 Abandoned
Array ( [id] => 5103927 [patent_doc_number] => 20070062802 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-22 [patent_title] => 'System and method for managing a plasma process and method for manufacturing an electronic device' [patent_app_type] => utility [patent_app_number] => 11/516773 [patent_app_country] => US [patent_app_date] => 2006-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5786 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0062/20070062802.pdf [firstpage_image] =>[orig_patent_app_number] => 11516773 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/516773
System and method for managing a plasma process and method for manufacturing an electronic device Sep 6, 2006 Abandoned
Array ( [id] => 190427 [patent_doc_number] => 07641737 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-01-05 [patent_title] => 'Evaporation source for evaporating an organic' [patent_app_type] => utility [patent_app_number] => 11/514266 [patent_app_country] => US [patent_app_date] => 2006-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 5000 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/641/07641737.pdf [firstpage_image] =>[orig_patent_app_number] => 11514266 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/514266
Evaporation source for evaporating an organic Aug 31, 2006 Issued
Array ( [id] => 4654279 [patent_doc_number] => 20080023139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-31 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/512116 [patent_app_country] => US [patent_app_date] => 2006-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7821 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20080023139.pdf [firstpage_image] =>[orig_patent_app_number] => 11512116 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/512116
Plasma processing apparatus and plasma processing method Aug 29, 2006 Abandoned
Array ( [id] => 5685238 [patent_doc_number] => 20060283553 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-21 [patent_title] => 'PLASMA CHAMBER INSERT RING' [patent_app_type] => utility [patent_app_number] => 11/468270 [patent_app_country] => US [patent_app_date] => 2006-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5737 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0283/20060283553.pdf [firstpage_image] =>[orig_patent_app_number] => 11468270 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/468270
PLASMA CHAMBER INSERT RING Aug 28, 2006 Abandoned
Array ( [id] => 5156659 [patent_doc_number] => 20070169703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-07-26 [patent_title] => 'Advanced ceramic heater for substrate processing' [patent_app_type] => utility [patent_app_number] => 11/509899 [patent_app_country] => US [patent_app_date] => 2006-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4430 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0169/20070169703.pdf [firstpage_image] =>[orig_patent_app_number] => 11509899 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/509899
Advanced ceramic heater for substrate processing Aug 23, 2006 Abandoned
Array ( [id] => 4704286 [patent_doc_number] => 20080063810 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-03-13 [patent_title] => 'In-situ process state monitoring of chamber' [patent_app_type] => utility [patent_app_number] => 11/508524 [patent_app_country] => US [patent_app_date] => 2006-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8286 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0063/20080063810.pdf [firstpage_image] =>[orig_patent_app_number] => 11508524 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/508524
In-situ process state monitoring of chamber Aug 22, 2006 Abandoned
Array ( [id] => 5639886 [patent_doc_number] => 20060278341 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-14 [patent_title] => 'Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates' [patent_app_type] => utility [patent_app_number] => 11/506833 [patent_app_country] => US [patent_app_date] => 2006-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7054 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0278/20060278341.pdf [firstpage_image] =>[orig_patent_app_number] => 11506833 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/506833
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates Aug 20, 2006 Abandoned
Array ( [id] => 5183138 [patent_doc_number] => 20070054492 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-08 [patent_title] => 'Photoreactive removal of ion implanted resist' [patent_app_type] => utility [patent_app_number] => 11/498992 [patent_app_country] => US [patent_app_date] => 2006-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10247 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20070054492.pdf [firstpage_image] =>[orig_patent_app_number] => 11498992 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/498992
Photoreactive removal of ion implanted resist Aug 3, 2006 Abandoned
Array ( [id] => 5622242 [patent_doc_number] => 20060260747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-23 [patent_title] => 'Gas introduction system for temperature adjustment of object to be processed' [patent_app_type] => utility [patent_app_number] => 11/496585 [patent_app_country] => US [patent_app_date] => 2006-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7377 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0260/20060260747.pdf [firstpage_image] =>[orig_patent_app_number] => 11496585 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/496585
Gas introduction system for temperature adjustment of object to be processed Jul 31, 2006 Abandoned
Array ( [id] => 4685303 [patent_doc_number] => 20080029484 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-02-07 [patent_title] => 'In-situ process diagnostics of in-film aluminum during plasma deposition' [patent_app_type] => utility [patent_app_number] => 11/492639 [patent_app_country] => US [patent_app_date] => 2006-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6943 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20080029484.pdf [firstpage_image] =>[orig_patent_app_number] => 11492639 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/492639
In-situ process diagnostics of in-film aluminum during plasma deposition Jul 24, 2006 Abandoned
Array ( [id] => 5622245 [patent_doc_number] => 20060260750 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-23 [patent_title] => 'Plasma processing apparatuses and methods' [patent_app_type] => utility [patent_app_number] => 11/492500 [patent_app_country] => US [patent_app_date] => 2006-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6851 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0260/20060260750.pdf [firstpage_image] =>[orig_patent_app_number] => 11492500 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/492500
Plasma processing apparatuses and methods Jul 23, 2006 Abandoned
Array ( [id] => 5409043 [patent_doc_number] => 20090122941 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-05-14 [patent_title] => 'Device for Producing an Atmospheric Pressure Plasma' [patent_app_type] => utility [patent_app_number] => 11/988810 [patent_app_country] => US [patent_app_date] => 2006-07-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 35 [patent_figures_cnt] => 35 [patent_no_of_words] => 16090 [patent_no_of_claims] => 51 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0122/20090122941.pdf [firstpage_image] =>[orig_patent_app_number] => 11988810 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/988810
Device for Producing an Atmospheric Pressure Plasma Jul 13, 2006 Abandoned
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