
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 51908
[patent_doc_number] => 07771561
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-08-10
[patent_title] => 'Apparatus and method for surface treatment to substrate'
[patent_app_type] => utility
[patent_app_number] => 11/598067
[patent_app_country] => US
[patent_app_date] => 2006-11-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
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[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/771/07771561.pdf
[firstpage_image] =>[orig_patent_app_number] => 11598067
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/598067 | Apparatus and method for surface treatment to substrate | Nov 12, 2006 | Issued |
Array
(
[id] => 5092180
[patent_doc_number] => 20070113789
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-05-24
[patent_title] => 'METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR'
[patent_app_type] => utility
[patent_app_number] => 11/557462
[patent_app_country] => US
[patent_app_date] => 2006-11-07
[patent_effective_date] => 0000-00-00
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[pdf_file] => publications/A1/0113/20070113789.pdf
[firstpage_image] =>[orig_patent_app_number] => 11557462
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/557462 | METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR | Nov 6, 2006 | Abandoned |
Array
(
[id] => 4890341
[patent_doc_number] => 20080099437
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-05-01
[patent_title] => 'Plasma reactor for processing a transparent workpiece with backside process endpoint detection'
[patent_app_type] => utility
[patent_app_number] => 11/589476
[patent_app_country] => US
[patent_app_date] => 2006-10-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 20
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[firstpage_image] =>[orig_patent_app_number] => 11589476
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/589476 | Plasma reactor for processing a transparent workpiece with backside process endpoint detection | Oct 29, 2006 | Abandoned |
Array
(
[id] => 4890354
[patent_doc_number] => 20080099450
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-05-01
[patent_title] => 'Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution'
[patent_app_type] => utility
[patent_app_number] => 11/589343
[patent_app_country] => US
[patent_app_date] => 2006-10-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 50
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/589343 | Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution | Oct 29, 2006 | Abandoned |
Array
(
[id] => 4893101
[patent_doc_number] => 20080102199
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[patent_kind] => A1
[patent_issue_date] => 2008-05-01
[patent_title] => 'Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration'
[patent_app_type] => utility
[patent_app_number] => 11/588440
[patent_app_country] => US
[patent_app_date] => 2006-10-26
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[patent_drawing_sheets_cnt] => 6
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[firstpage_image] =>[orig_patent_app_number] => 11588440
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/588440 | Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration | Oct 25, 2006 | Abandoned |
Array
(
[id] => 4660197
[patent_doc_number] => 20080251104
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-10-16
[patent_title] => 'Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes'
[patent_app_type] => utility
[patent_app_number] => 12/088825
[patent_app_country] => US
[patent_app_date] => 2006-10-03
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[patent_drawing_sheets_cnt] => 16
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[pdf_file] => publications/A1/0251/20080251104.pdf
[firstpage_image] =>[orig_patent_app_number] => 12088825
[rel_patent_id] =>[rel_patent_doc_number] =>) 12/088825 | Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes | Oct 2, 2006 | Abandoned |
Array
(
[id] => 72835
[patent_doc_number] => 07749353
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-07-06
[patent_title] => 'High aspect ratio etch using modulation of RF powers of various frequencies'
[patent_app_type] => utility
[patent_app_number] => 11/525602
[patent_app_country] => US
[patent_app_date] => 2006-09-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
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[patent_no_of_words] => 11657
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[pdf_file] => patents/07/749/07749353.pdf
[firstpage_image] =>[orig_patent_app_number] => 11525602
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/525602 | High aspect ratio etch using modulation of RF powers of various frequencies | Sep 20, 2006 | Issued |
Array
(
[id] => 4980008
[patent_doc_number] => 20070084562
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-04-19
[patent_title] => 'Plasma processing chamber'
[patent_app_type] => utility
[patent_app_number] => 11/518228
[patent_app_country] => US
[patent_app_date] => 2006-09-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
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[firstpage_image] =>[orig_patent_app_number] => 11518228
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/518228 | Plasma processing chamber | Sep 10, 2006 | Abandoned |
Array
(
[id] => 5103927
[patent_doc_number] => 20070062802
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-03-22
[patent_title] => 'System and method for managing a plasma process and method for manufacturing an electronic device'
[patent_app_type] => utility
[patent_app_number] => 11/516773
[patent_app_country] => US
[patent_app_date] => 2006-09-07
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[patent_drawing_sheets_cnt] => 9
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[pdf_file] => publications/A1/0062/20070062802.pdf
[firstpage_image] =>[orig_patent_app_number] => 11516773
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/516773 | System and method for managing a plasma process and method for manufacturing an electronic device | Sep 6, 2006 | Abandoned |
Array
(
[id] => 190427
[patent_doc_number] => 07641737
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-01-05
[patent_title] => 'Evaporation source for evaporating an organic'
[patent_app_type] => utility
[patent_app_number] => 11/514266
[patent_app_country] => US
[patent_app_date] => 2006-09-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
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[patent_no_of_words] => 5000
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[pdf_file] => patents/07/641/07641737.pdf
[firstpage_image] =>[orig_patent_app_number] => 11514266
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/514266 | Evaporation source for evaporating an organic | Aug 31, 2006 | Issued |
Array
(
[id] => 4654279
[patent_doc_number] => 20080023139
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2008-01-31
[patent_title] => 'Plasma processing apparatus and plasma processing method'
[patent_app_type] => utility
[patent_app_number] => 11/512116
[patent_app_country] => US
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[pdf_file] => publications/A1/0023/20080023139.pdf
[firstpage_image] =>[orig_patent_app_number] => 11512116
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/512116 | Plasma processing apparatus and plasma processing method | Aug 29, 2006 | Abandoned |
Array
(
[id] => 5685238
[patent_doc_number] => 20060283553
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[patent_kind] => A1
[patent_issue_date] => 2006-12-21
[patent_title] => 'PLASMA CHAMBER INSERT RING'
[patent_app_type] => utility
[patent_app_number] => 11/468270
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[firstpage_image] =>[orig_patent_app_number] => 11468270
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/468270 | PLASMA CHAMBER INSERT RING | Aug 28, 2006 | Abandoned |
Array
(
[id] => 5156659
[patent_doc_number] => 20070169703
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-07-26
[patent_title] => 'Advanced ceramic heater for substrate processing'
[patent_app_type] => utility
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[patent_app_country] => US
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[firstpage_image] =>[orig_patent_app_number] => 11509899
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/509899 | Advanced ceramic heater for substrate processing | Aug 23, 2006 | Abandoned |
Array
(
[id] => 4704286
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[patent_title] => 'In-situ process state monitoring of chamber'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/508524 | In-situ process state monitoring of chamber | Aug 22, 2006 | Abandoned |
Array
(
[id] => 5639886
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[patent_title] => 'Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/506833 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Aug 20, 2006 | Abandoned |
Array
(
[id] => 5183138
[patent_doc_number] => 20070054492
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[patent_issue_date] => 2007-03-08
[patent_title] => 'Photoreactive removal of ion implanted resist'
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[patent_app_number] => 11/498992
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/498992 | Photoreactive removal of ion implanted resist | Aug 3, 2006 | Abandoned |
Array
(
[id] => 5622242
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[patent_title] => 'Gas introduction system for temperature adjustment of object to be processed'
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Array
(
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Array
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Array
(
[id] => 5409043
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[patent_title] => 'Device for Producing an Atmospheric Pressure Plasma'
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[firstpage_image] =>[orig_patent_app_number] => 11988810
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/988810 | Device for Producing an Atmospheric Pressure Plasma | Jul 13, 2006 | Abandoned |