Daniel D. Chang

Array ( [id] => 4781428 [patent_doc_number] => 20080134757 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-12 [patent_title] => 'Method And Apparatus For Monitoring Plasma Conditions In An Etching Plasma Processing Facility' [patent_app_type] => utility [patent_app_number] => 11/908668 [patent_app_country] => US [patent_app_date] => 2006-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 16015 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0134/20080134757.pdf [firstpage_image] =>[orig_patent_app_number] => 11908668 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5005043 [patent_doc_number] => 20070202613 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-30 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/371921 [patent_app_country] => US [patent_app_date] => 2006-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 11433 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0202/20070202613.pdf [firstpage_image] =>[orig_patent_app_number] => 11371921 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5680579 [patent_doc_number] => 20060196846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-07 [patent_title] => 'Plasma processing method and apparatus, and method for measuring a density of fluorine in plasma' [patent_app_type] => utility [patent_app_number] => 11/363935 [patent_app_country] => US [patent_app_date] => 2006-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6284 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20060196846.pdf [firstpage_image] =>[orig_patent_app_number] => 11363935 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5004674 [patent_doc_number] => 20070202242 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-30 [patent_title] => 'SYSTEM FOR MANUFACTURING EDIBLE GREETING CARDS' [patent_app_type] => utility [patent_app_number] => 11/276388 [patent_app_country] => US [patent_app_date] => 2006-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6068 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0202/20070202242.pdf [firstpage_image] =>[orig_patent_app_number] => 11276388 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5680386 [patent_doc_number] => 20060196653 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-07 [patent_title] => 'Apparatus and method for controlling temperature in a chuck system' [patent_app_type] => utility [patent_app_number] => 11/363358 [patent_app_country] => US [patent_app_date] => 2006-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 14011 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20060196653.pdf [firstpage_image] =>[orig_patent_app_number] => 11363358 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5533595 [patent_doc_number] => 20090233383 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-09-17 [patent_title] => 'Plasma Doping Method and Apparatus' [patent_app_type] => utility [patent_app_number] => 11/884924 [patent_app_country] => US [patent_app_date] => 2006-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 9341 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0233/20090233383.pdf [firstpage_image] =>[orig_patent_app_number] => 11884924 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5249898 [patent_doc_number] => 20070131354 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-06-14 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/353165 [patent_app_country] => US [patent_app_date] => 2006-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4883 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0131/20070131354.pdf [firstpage_image] =>[orig_patent_app_number] => 11353165 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5907522 [patent_doc_number] => 20060124243 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-15 [patent_title] => 'Disturbance-free, recipe-controlled plasma processing system and method' [patent_app_type] => utility [patent_app_number] => 11/346298 [patent_app_country] => US [patent_app_date] => 2006-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 5110 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0124/20060124243.pdf [firstpage_image] =>[orig_patent_app_number] => 11346298 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5156762 [patent_doc_number] => 20070169806 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-07-26 [patent_title] => 'Solar cell production using non-contact patterning and direct-write metallization' [patent_app_type] => utility [patent_app_number] => 11/336714 [patent_app_country] => US [patent_app_date] => 2006-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 10732 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0169/20070169806.pdf [firstpage_image] =>[orig_patent_app_number] => 11336714 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5868045 [patent_doc_number] => 20060162662 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-27 [patent_title] => 'Vacuum vapor deposition apparatus' [patent_app_type] => utility [patent_app_number] => 11/334409 [patent_app_country] => US [patent_app_date] => 2006-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 13067 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0162/20060162662.pdf [firstpage_image] =>[orig_patent_app_number] => 11334409 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5776937 [patent_doc_number] => 20060105577 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-18 [patent_title] => 'Aspect ratio controlled etch selectivity using time modulated DC bias voltage' [patent_app_type] => utility [patent_app_number] => 11/319402 [patent_app_country] => US [patent_app_date] => 2005-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4581 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0105/20060105577.pdf [firstpage_image] =>[orig_patent_app_number] => 11319402 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5645141 [patent_doc_number] => 20060130873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-22 [patent_title] => 'Plasma cleaning of deposition chamber residues using duo-step wafer-less auto clean method' [patent_app_type] => utility [patent_app_number] => 11/318122 [patent_app_country] => US [patent_app_date] => 2005-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7261 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20060130873.pdf [firstpage_image] =>[orig_patent_app_number] => 11318122 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4965006 [patent_doc_number] => 20080107826 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-05-08 [patent_title] => 'Method and apparatus for fabricating nanostructure multi-element compound' [patent_app_type] => utility [patent_app_number] => 11/299930 [patent_app_country] => US [patent_app_date] => 2005-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2898 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0107/20080107826.pdf [firstpage_image] =>[orig_patent_app_number] => 11299930 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4785664 [patent_doc_number] => 20080138993 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-06-12 [patent_title] => 'Plasma Processing Apparatus' [patent_app_type] => utility [patent_app_number] => 11/794306 [patent_app_country] => US [patent_app_date] => 2005-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7252 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0138/20080138993.pdf [firstpage_image] =>[orig_patent_app_number] => 11794306 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5720844 [patent_doc_number] => 20060073619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-06 [patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process' [patent_app_type] => utility [patent_app_number] => 11/293213 [patent_app_country] => US [patent_app_date] => 2005-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8625 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0073/20060073619.pdf [firstpage_image] =>[orig_patent_app_number] => 11293213 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5907002 [patent_doc_number] => 20060124055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-15 [patent_title] => 'Mask-retaining device' [patent_app_type] => utility [patent_app_number] => 11/286170 [patent_app_country] => US [patent_app_date] => 2005-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2165 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0124/20060124055.pdf [firstpage_image] =>[orig_patent_app_number] => 11286170 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5669483 [patent_doc_number] => 20060174836 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-10 [patent_title] => 'Apparatus for heating wafer' [patent_app_type] => utility [patent_app_number] => 11/267406 [patent_app_country] => US [patent_app_date] => 2005-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3700 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0174/20060174836.pdf [firstpage_image] =>[orig_patent_app_number] => 11267406 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5862412 [patent_doc_number] => 20060096542 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-11 [patent_title] => 'Heating crucible and deposition apparatus including the same' [patent_app_type] => utility [patent_app_number] => 11/266397 [patent_app_country] => US [patent_app_date] => 2005-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 2944 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20060096542.pdf [firstpage_image] =>[orig_patent_app_number] => 11266397 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5710621 [patent_doc_number] => 20060051966 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber' [patent_app_type] => utility [patent_app_number] => 11/266167 [patent_app_country] => US [patent_app_date] => 2005-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13165 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20060051966.pdf [firstpage_image] =>[orig_patent_app_number] => 11266167 [rel_patent_id] =>[rel_patent_doc_number] =>)