Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5804502 [patent_doc_number] => 20060090854 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-04 [patent_title] => 'RF supply system and plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/262747 [patent_app_country] => US [patent_app_date] => 2005-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 4530 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0090/20060090854.pdf [firstpage_image] =>[orig_patent_app_number] => 11262747 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/262747
RF supply system and plasma processing apparatus Oct 31, 2005 Issued
Array ( [id] => 5608175 [patent_doc_number] => 20060269691 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-30 [patent_title] => 'Plasma treatment apparatus and plasma treatment method' [patent_app_type] => utility [patent_app_number] => 11/259050 [patent_app_country] => US [patent_app_date] => 2005-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4386 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0269/20060269691.pdf [firstpage_image] =>[orig_patent_app_number] => 11259050 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/259050
Plasma treatment apparatus and plasma treatment method Oct 26, 2005 Abandoned
Array ( [id] => 5710605 [patent_doc_number] => 20060051950 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-09 [patent_title] => 'Apparatus and a method for forming an alloy layer over a substrate' [patent_app_type] => utility [patent_app_number] => 11/259961 [patent_app_country] => US [patent_app_date] => 2005-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3792 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20060051950.pdf [firstpage_image] =>[orig_patent_app_number] => 11259961 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/259961
Apparatus and a method for forming an alloy layer over a substrate Oct 25, 2005 Abandoned
Array ( [id] => 5712609 [patent_doc_number] => 20060075972 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-04-13 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => utility [patent_app_number] => 11/258670 [patent_app_country] => US [patent_app_date] => 2005-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 13777 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0075/20060075972.pdf [firstpage_image] =>[orig_patent_app_number] => 11258670 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/258670
Substrate processing apparatus and substrate processing method Oct 24, 2005 Abandoned
Array ( [id] => 5590963 [patent_doc_number] => 20060040415 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-23 [patent_title] => 'Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring' [patent_app_type] => utility [patent_app_number] => 11/258658 [patent_app_country] => US [patent_app_date] => 2005-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 8674 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20060040415.pdf [firstpage_image] =>[orig_patent_app_number] => 11258658 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/258658
Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring Oct 24, 2005 Abandoned
Array ( [id] => 5645033 [patent_doc_number] => 20060130765 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-22 [patent_title] => 'Arrangement for coating a substrate' [patent_app_type] => utility [patent_app_number] => 11/254425 [patent_app_country] => US [patent_app_date] => 2005-10-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1812 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20060130765.pdf [firstpage_image] =>[orig_patent_app_number] => 11254425 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/254425
Arrangement for coating a substrate Oct 19, 2005 Issued
Array ( [id] => 5796171 [patent_doc_number] => 20060032848 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-16 [patent_title] => 'Process and system for heating semiconductor substrates in a processing chamber containing a susceptor' [patent_app_type] => utility [patent_app_number] => 11/253271 [patent_app_country] => US [patent_app_date] => 2005-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4523 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20060032848.pdf [firstpage_image] =>[orig_patent_app_number] => 11253271 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/253271
Process and system for heating semiconductor substrates in a processing chamber containing a susceptor Oct 17, 2005 Abandoned
Array ( [id] => 4917056 [patent_doc_number] => 20080097657 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-04-24 [patent_title] => 'Method and System for Wafer Temperature Control' [patent_app_type] => utility [patent_app_number] => 11/664550 [patent_app_country] => US [patent_app_date] => 2005-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5156 [patent_no_of_claims] => 52 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0097/20080097657.pdf [firstpage_image] =>[orig_patent_app_number] => 11664550 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/664550
Method and System for Wafer Temperature Control Oct 12, 2005 Abandoned
Array ( [id] => 5877037 [patent_doc_number] => 20060027325 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-09 [patent_title] => 'Method and apparatus for photomask fabrication' [patent_app_type] => utility [patent_app_number] => 11/243548 [patent_app_country] => US [patent_app_date] => 2005-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5089 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0027/20060027325.pdf [firstpage_image] =>[orig_patent_app_number] => 11243548 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/243548
Method and apparatus for photomask fabrication Oct 3, 2005 Abandoned
Array ( [id] => 5210167 [patent_doc_number] => 20070248751 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-25 [patent_title] => 'Dynamic film thickness control system/method and its utilization' [patent_app_type] => utility [patent_app_number] => 11/240451 [patent_app_country] => US [patent_app_date] => 2005-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 5340 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0248/20070248751.pdf [firstpage_image] =>[orig_patent_app_number] => 11240451 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/240451
Dynamic film thickness control system/method and its utilization Oct 2, 2005 Abandoned
Array ( [id] => 5133183 [patent_doc_number] => 20070074811 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-05 [patent_title] => 'Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube' [patent_app_type] => utility [patent_app_number] => 11/239471 [patent_app_country] => US [patent_app_date] => 2005-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3571 [patent_no_of_claims] => 69 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0074/20070074811.pdf [firstpage_image] =>[orig_patent_app_number] => 11239471 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/239471
Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube Sep 29, 2005 Abandoned
Array ( [id] => 5133184 [patent_doc_number] => 20070074812 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-04-05 [patent_title] => 'Temperature control of plasma density probe' [patent_app_type] => utility [patent_app_number] => 11/239478 [patent_app_country] => US [patent_app_date] => 2005-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4270 [patent_no_of_claims] => 48 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0074/20070074812.pdf [firstpage_image] =>[orig_patent_app_number] => 11239478 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/239478
Temperature control of plasma density probe Sep 29, 2005 Abandoned
Array ( [id] => 563572 [patent_doc_number] => 07462243 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-12-09 [patent_title] => 'Chemical processing system and method' [patent_app_type] => utility [patent_app_number] => 11/233077 [patent_app_country] => US [patent_app_date] => 2005-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 7308 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/462/07462243.pdf [firstpage_image] =>[orig_patent_app_number] => 11233077 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/233077
Chemical processing system and method Sep 22, 2005 Issued
Array ( [id] => 5828245 [patent_doc_number] => 20060063280 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-23 [patent_title] => 'Lamp heating apparatus and method for producing semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/228459 [patent_app_country] => US [patent_app_date] => 2005-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5420 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0063/20060063280.pdf [firstpage_image] =>[orig_patent_app_number] => 11228459 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/228459
Lamp heating apparatus and method for producing semiconductor device Sep 18, 2005 Abandoned
Array ( [id] => 5723328 [patent_doc_number] => 20060054088 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-16 [patent_title] => 'Vapor phase epitaxial growth apparatus and semiconductor wafer production method' [patent_app_type] => utility [patent_app_number] => 11/224054 [patent_app_country] => US [patent_app_date] => 2005-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5838 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20060054088.pdf [firstpage_image] =>[orig_patent_app_number] => 11224054 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/224054
Vapor phase epitaxial growth apparatus and semiconductor wafer production method Sep 12, 2005 Abandoned
Array ( [id] => 5735540 [patent_doc_number] => 20060005930 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-12 [patent_title] => 'Substrate supporting structure for semiconductor processing, and plasma processing device' [patent_app_type] => utility [patent_app_number] => 11/221704 [patent_app_country] => US [patent_app_date] => 2005-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11471 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0005/20060005930.pdf [firstpage_image] =>[orig_patent_app_number] => 11221704 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/221704
Substrate supporting structure for semiconductor processing, and plasma processing device Sep 8, 2005 Issued
Array ( [id] => 6974859 [patent_doc_number] => 20050284574 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-29 [patent_title] => 'Plasma processing apparatus and processing method' [patent_app_type] => utility [patent_app_number] => 11/217287 [patent_app_country] => US [patent_app_date] => 2005-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 6343 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0284/20050284574.pdf [firstpage_image] =>[orig_patent_app_number] => 11217287 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/217287
Plasma processing apparatus and processing method Sep 1, 2005 Abandoned
Array ( [id] => 5144860 [patent_doc_number] => 20070044914 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-01 [patent_title] => 'Vacuum processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/213735 [patent_app_country] => US [patent_app_date] => 2005-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5740 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0044/20070044914.pdf [firstpage_image] =>[orig_patent_app_number] => 11213735 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/213735
Vacuum processing apparatus Aug 29, 2005 Abandoned
Array ( [id] => 5892094 [patent_doc_number] => 20060000800 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units' [patent_app_type] => utility [patent_app_number] => 11/213770 [patent_app_country] => US [patent_app_date] => 2005-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 11382 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000800.pdf [firstpage_image] =>[orig_patent_app_number] => 11213770 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/213770
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units Aug 29, 2005 Abandoned
Array ( [id] => 5915471 [patent_doc_number] => 20060237391 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-10-26 [patent_title] => 'Vacuum processing apparatus and vacuum processing method of sample' [patent_app_type] => utility [patent_app_number] => 11/213736 [patent_app_country] => US [patent_app_date] => 2005-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8146 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0237/20060237391.pdf [firstpage_image] =>[orig_patent_app_number] => 11213736 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/213736
Vacuum processing apparatus and vacuum processing method of sample Aug 29, 2005 Abandoned
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