Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5891350 [patent_doc_number] => 20060000414 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Semiconductor processing equipment for forming films of uniform properties on semiconductor substrates' [patent_app_type] => utility [patent_app_number] => 11/214608 [patent_app_country] => US [patent_app_date] => 2005-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7690 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000414.pdf [firstpage_image] =>[orig_patent_app_number] => 11214608 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/214608
Semiconductor processing equipment for forming films of uniform properties on semiconductor substrates Aug 28, 2005 Abandoned
Array ( [id] => 5182699 [patent_doc_number] => 20070054045 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-03-08 [patent_title] => 'METHOD FOR CONDITIONING CHEMICAL VAPOR DEPOSITION CHAMBER' [patent_app_type] => utility [patent_app_number] => 11/161998 [patent_app_country] => US [patent_app_date] => 2005-08-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1833 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20070054045.pdf [firstpage_image] =>[orig_patent_app_number] => 11161998 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/161998
METHOD FOR CONDITIONING CHEMICAL VAPOR DEPOSITION CHAMBER Aug 24, 2005 Abandoned
Array ( [id] => 6928252 [patent_doc_number] => 20050279284 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Temperature control system' [patent_app_type] => utility [patent_app_number] => 11/210986 [patent_app_country] => US [patent_app_date] => 2005-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5069 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279284.pdf [firstpage_image] =>[orig_patent_app_number] => 11210986 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/210986
Temperature control system Aug 23, 2005 Abandoned
Array ( [id] => 223809 [patent_doc_number] => 07604010 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-10-20 [patent_title] => 'Film formation apparatus and method of using the same' [patent_app_type] => utility [patent_app_number] => 11/209741 [patent_app_country] => US [patent_app_date] => 2005-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 8244 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/604/07604010.pdf [firstpage_image] =>[orig_patent_app_number] => 11209741 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/209741
Film formation apparatus and method of using the same Aug 23, 2005 Issued
Array ( [id] => 5685234 [patent_doc_number] => 20060283549 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-21 [patent_title] => 'Plasma processing apparatus and method capable of adjusting temperature within sample table' [patent_app_type] => utility [patent_app_number] => 11/209743 [patent_app_country] => US [patent_app_date] => 2005-08-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 9722 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0283/20060283549.pdf [firstpage_image] =>[orig_patent_app_number] => 11209743 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/209743
Plasma processing apparatus and method capable of adjusting temperature within sample table Aug 23, 2005 Abandoned
Array ( [id] => 5735749 [patent_doc_number] => 20060006139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-12 [patent_title] => 'Selection of wavelengths for end point in a time division multiplexed process' [patent_app_type] => utility [patent_app_number] => 11/210248 [patent_app_country] => US [patent_app_date] => 2005-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 6421 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0006/20060006139.pdf [firstpage_image] =>[orig_patent_app_number] => 11210248 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/210248
Selection of wavelengths for end point in a time division multiplexed process Aug 22, 2005 Abandoned
Array ( [id] => 4999497 [patent_doc_number] => 20070042131 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-02-22 [patent_title] => 'Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films' [patent_app_type] => utility [patent_app_number] => 11/208835 [patent_app_country] => US [patent_app_date] => 2005-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6632 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20070042131.pdf [firstpage_image] =>[orig_patent_app_number] => 11208835 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/208835
Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films Aug 21, 2005 Abandoned
Array ( [id] => 7056114 [patent_doc_number] => 20050277289 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-15 [patent_title] => 'Line edge roughness reduction for trench etch' [patent_app_type] => utility [patent_app_number] => 11/205372 [patent_app_country] => US [patent_app_date] => 2005-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5548 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0277/20050277289.pdf [firstpage_image] =>[orig_patent_app_number] => 11205372 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/205372
Line edge roughness reduction for trench etch Aug 15, 2005 Abandoned
Array ( [id] => 5723330 [patent_doc_number] => 20060054090 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-16 [patent_title] => 'PECVD susceptor support construction' [patent_app_type] => utility [patent_app_number] => 11/202654 [patent_app_country] => US [patent_app_date] => 2005-08-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6101 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20060054090.pdf [firstpage_image] =>[orig_patent_app_number] => 11202654 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/202654
PECVD susceptor support construction Aug 11, 2005 Abandoned
Array ( [id] => 5622241 [patent_doc_number] => 20060260746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-23 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/199234 [patent_app_country] => US [patent_app_date] => 2005-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 10345 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0260/20060260746.pdf [firstpage_image] =>[orig_patent_app_number] => 11199234 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/199234
Plasma processing apparatus Aug 8, 2005 Abandoned
Array ( [id] => 6928699 [patent_doc_number] => 20050279731 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Processing method for conservation of processing gases' [patent_app_type] => utility [patent_app_number] => 11/197434 [patent_app_country] => US [patent_app_date] => 2005-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 10016 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279731.pdf [firstpage_image] =>[orig_patent_app_number] => 11197434 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/197434
Processing method for conservation of processing gases Aug 4, 2005 Issued
Array ( [id] => 5048502 [patent_doc_number] => 20070029046 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-02-08 [patent_title] => 'Methods and systems for increasing substrate temperature in plasma reactors' [patent_app_type] => utility [patent_app_number] => 11/196850 [patent_app_country] => US [patent_app_date] => 2005-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7317 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20070029046.pdf [firstpage_image] =>[orig_patent_app_number] => 11196850 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/196850
Methods and systems for increasing substrate temperature in plasma reactors Aug 3, 2005 Abandoned
Array ( [id] => 246636 [patent_doc_number] => 07585386 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-09-08 [patent_title] => 'Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/195803 [patent_app_country] => US [patent_app_date] => 2005-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 82 [patent_no_of_words] => 15273 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/585/07585386.pdf [firstpage_image] =>[orig_patent_app_number] => 11195803 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/195803
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method Aug 2, 2005 Issued
Array ( [id] => 5588253 [patent_doc_number] => 20060037704 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-23 [patent_title] => 'Plasma Processing apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/192041 [patent_app_country] => US [patent_app_date] => 2005-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 8251 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0037/20060037704.pdf [firstpage_image] =>[orig_patent_app_number] => 11192041 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/192041
Plasma Processing apparatus and method Jul 28, 2005 Abandoned
Array ( [id] => 7202302 [patent_doc_number] => 20050257747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-24 [patent_title] => 'Worktable device, film formation apparatus, and film formation method for semiconductor process' [patent_app_type] => utility [patent_app_number] => 11/192047 [patent_app_country] => US [patent_app_date] => 2005-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 11500 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0257/20050257747.pdf [firstpage_image] =>[orig_patent_app_number] => 11192047 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/192047
Worktable device, film formation apparatus, and film formation method for semiconductor process Jul 28, 2005 Abandoned
Array ( [id] => 5669938 [patent_doc_number] => 20060175291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-10 [patent_title] => 'Control of process gases in specimen surface treatment system' [patent_app_type] => utility [patent_app_number] => 11/192304 [patent_app_country] => US [patent_app_date] => 2005-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5504 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0175/20060175291.pdf [firstpage_image] =>[orig_patent_app_number] => 11192304 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/192304
Control of process gases in specimen surface treatment system Jul 27, 2005 Abandoned
Array ( [id] => 5680338 [patent_doc_number] => 20060196605 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-07 [patent_title] => 'Method and apparatus for plasma processing' [patent_app_type] => utility [patent_app_number] => 11/190839 [patent_app_country] => US [patent_app_date] => 2005-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2774 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20060196605.pdf [firstpage_image] =>[orig_patent_app_number] => 11190839 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/190839
Method and apparatus for plasma processing Jul 27, 2005 Abandoned
Array ( [id] => 7210038 [patent_doc_number] => 20050252453 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-17 [patent_title] => 'Apparatus and a method for forming an alloy layer over a substrate' [patent_app_type] => utility [patent_app_number] => 11/188068 [patent_app_country] => US [patent_app_date] => 2005-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3782 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0252/20050252453.pdf [firstpage_image] =>[orig_patent_app_number] => 11188068 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/188068
Apparatus and a method for forming an alloy layer over a substrate Jul 21, 2005 Abandoned
Array ( [id] => 4672541 [patent_doc_number] => 20080210169 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-04 [patent_title] => 'System for Supporting and Rotating a Susceptor Inside a Treatment Chamber of a Wafer Treating Apparatus' [patent_app_type] => utility [patent_app_number] => 11/995891 [patent_app_country] => US [patent_app_date] => 2005-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4843 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0210/20080210169.pdf [firstpage_image] =>[orig_patent_app_number] => 11995891 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/995891
System for Supporting and Rotating a Susceptor Inside a Treatment Chamber of a Wafer Treating Apparatus Jul 20, 2005 Abandoned
Array ( [id] => 4935888 [patent_doc_number] => 20080073202 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-03-27 [patent_title] => 'Plasma Nozzle Array for Providing Uniform Scalable Microwave Plasma Generation' [patent_app_type] => utility [patent_app_number] => 11/658356 [patent_app_country] => US [patent_app_date] => 2005-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 8558 [patent_no_of_claims] => 82 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0073/20080073202.pdf [firstpage_image] =>[orig_patent_app_number] => 11658356 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/658356
Plasma Nozzle Array for Providing Uniform Scalable Microwave Plasma Generation Jul 20, 2005 Abandoned
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