Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5616057 [patent_doc_number] => 20060185589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-24 [patent_title] => 'Silicon gas injector and method of making' [patent_app_type] => utility [patent_app_number] => 11/177808 [patent_app_country] => US [patent_app_date] => 2005-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3007 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20060185589.pdf [firstpage_image] =>[orig_patent_app_number] => 11177808 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/177808
Silicon gas injector and method of making Jul 7, 2005 Abandoned
Array ( [id] => 7066093 [patent_doc_number] => 20050241771 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-03 [patent_title] => 'Substrate carrier for processing substrates' [patent_app_type] => utility [patent_app_number] => 11/175750 [patent_app_country] => US [patent_app_date] => 2005-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5358 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20050241771.pdf [firstpage_image] =>[orig_patent_app_number] => 11175750 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/175750
Substrate carrier for processing substrates Jul 5, 2005 Abandoned
Array ( [id] => 4991900 [patent_doc_number] => 20070007244 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-01-11 [patent_title] => 'DETECTION OF LOSS OF PLASMA CONFINEMENT' [patent_app_type] => utility [patent_app_number] => 11/160671 [patent_app_country] => US [patent_app_date] => 2005-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 4572 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0007/20070007244.pdf [firstpage_image] =>[orig_patent_app_number] => 11160671 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/160671
DETECTION OF LOSS OF PLASMA CONFINEMENT Jul 4, 2005 Abandoned
Array ( [id] => 5817392 [patent_doc_number] => 20060021705 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Substrate mounting apparatus and control method of substrate temperature' [patent_app_type] => utility [patent_app_number] => 11/165573 [patent_app_country] => US [patent_app_date] => 2005-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7075 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20060021705.pdf [firstpage_image] =>[orig_patent_app_number] => 11165573 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/165573
Substrate mounting apparatus and control method of substrate temperature Jun 22, 2005 Abandoned
Array ( [id] => 6923109 [patent_doc_number] => 20050236364 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-27 [patent_title] => 'Etching system and etching method' [patent_app_type] => utility [patent_app_number] => 11/154698 [patent_app_country] => US [patent_app_date] => 2005-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6429 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0236/20050236364.pdf [firstpage_image] =>[orig_patent_app_number] => 11154698 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/154698
Etching system and etching method Jun 16, 2005 Abandoned
Array ( [id] => 5762619 [patent_doc_number] => 20060016558 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-26 [patent_title] => 'Endpoint detecting device in semiconductor manufacturing system' [patent_app_type] => utility [patent_app_number] => 11/151236 [patent_app_country] => US [patent_app_date] => 2005-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 2428 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20060016558.pdf [firstpage_image] =>[orig_patent_app_number] => 11151236 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/151236
Endpoint detecting device in semiconductor manufacturing system Jun 13, 2005 Abandoned
Array ( [id] => 4849385 [patent_doc_number] => 20080315127 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-12-25 [patent_title] => 'Ion Implanter Operating in Pulsed Plasma Mode' [patent_app_type] => utility [patent_app_number] => 11/629690 [patent_app_country] => US [patent_app_date] => 2005-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3606 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0315/20080315127.pdf [firstpage_image] =>[orig_patent_app_number] => 11629690 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/629690
Ion Implanter Operating in Pulsed Plasma Mode Jun 13, 2005 Abandoned
Array ( [id] => 7042643 [patent_doc_number] => 20050247404 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-10 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/147925 [patent_app_country] => US [patent_app_date] => 2005-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6704 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0247/20050247404.pdf [firstpage_image] =>[orig_patent_app_number] => 11147925 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/147925
Plasma processing apparatus and plasma processing method Jun 7, 2005 Abandoned
Array ( [id] => 6928427 [patent_doc_number] => 20050279459 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Plasma treating apparatus and plasma treating method' [patent_app_type] => utility [patent_app_number] => 11/147882 [patent_app_country] => US [patent_app_date] => 2005-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4290 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279459.pdf [firstpage_image] =>[orig_patent_app_number] => 11147882 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/147882
Plasma treating apparatus and plasma treating method Jun 7, 2005 Abandoned
Array ( [id] => 5610956 [patent_doc_number] => 20060112879 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-01 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/144735 [patent_app_country] => US [patent_app_date] => 2005-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2749 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0112/20060112879.pdf [firstpage_image] =>[orig_patent_app_number] => 11144735 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/144735
Plasma processing apparatus Jun 5, 2005 Abandoned
Array ( [id] => 7015026 [patent_doc_number] => 20050217586 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Lift pin alignment and operation methods and apparatus' [patent_app_type] => utility [patent_app_number] => 11/146687 [patent_app_country] => US [patent_app_date] => 2005-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5364 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0217/20050217586.pdf [firstpage_image] =>[orig_patent_app_number] => 11146687 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/146687
Lift pin alignment and operation methods and apparatus Jun 5, 2005 Abandoned
Array ( [id] => 5889093 [patent_doc_number] => 20060275933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-07 [patent_title] => 'Thermally conductive ceramic tipped contact thermocouple' [patent_app_type] => utility [patent_app_number] => 11/143270 [patent_app_country] => US [patent_app_date] => 2005-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2698 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0275/20060275933.pdf [firstpage_image] =>[orig_patent_app_number] => 11143270 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/143270
Thermally conductive ceramic tipped contact thermocouple Jun 1, 2005 Abandoned
Array ( [id] => 833127 [patent_doc_number] => 07396415 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-08 [patent_title] => 'Apparatus and methods for isolating chemical vapor reactions at a substrate surface' [patent_app_type] => utility [patent_app_number] => 11/144510 [patent_app_country] => US [patent_app_date] => 2005-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6450 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 19 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/396/07396415.pdf [firstpage_image] =>[orig_patent_app_number] => 11144510 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/144510
Apparatus and methods for isolating chemical vapor reactions at a substrate surface Jun 1, 2005 Issued
Array ( [id] => 5817267 [patent_doc_number] => 20060021580 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Plasma processing apparatus and impedance adjustment method' [patent_app_type] => utility [patent_app_number] => 11/142391 [patent_app_country] => US [patent_app_date] => 2005-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9238 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20060021580.pdf [firstpage_image] =>[orig_patent_app_number] => 11142391 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/142391
Plasma processing apparatus and impedance adjustment method Jun 1, 2005 Abandoned
Array ( [id] => 5892097 [patent_doc_number] => 20060000803 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Plasma processing method and apparatus' [patent_app_type] => utility [patent_app_number] => 11/137673 [patent_app_country] => US [patent_app_date] => 2005-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 27 [patent_no_of_words] => 15350 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000803.pdf [firstpage_image] =>[orig_patent_app_number] => 11137673 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/137673
Plasma processing method and apparatus May 25, 2005 Abandoned
Array ( [id] => 5762459 [patent_doc_number] => 20060016398 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-26 [patent_title] => 'Supporting and lifting device for substrates in vacuum' [patent_app_type] => utility [patent_app_number] => 11/137230 [patent_app_country] => US [patent_app_date] => 2005-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 1815 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20060016398.pdf [firstpage_image] =>[orig_patent_app_number] => 11137230 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/137230
Supporting and lifting device for substrates in vacuum May 24, 2005 Abandoned
Array ( [id] => 7019533 [patent_doc_number] => 20050221552 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Substrate support for in-situ dry clean chamber for front end of line fabrication' [patent_app_type] => utility [patent_app_number] => 11/137090 [patent_app_country] => US [patent_app_date] => 2005-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13123 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20050221552.pdf [firstpage_image] =>[orig_patent_app_number] => 11137090 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/137090
Substrate support for in-situ dry clean chamber for front end of line fabrication May 23, 2005 Abandoned
Array ( [id] => 318252 [patent_doc_number] => 07520957 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-04-21 [patent_title] => 'Lid assembly for front end of line fabrication' [patent_app_type] => utility [patent_app_number] => 11/137199 [patent_app_country] => US [patent_app_date] => 2005-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 19 [patent_no_of_words] => 13210 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/520/07520957.pdf [firstpage_image] =>[orig_patent_app_number] => 11137199 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/137199
Lid assembly for front end of line fabrication May 23, 2005 Issued
Array ( [id] => 7248313 [patent_doc_number] => 20050272273 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-08 [patent_title] => 'Method and apparatus for electrostatically maintaining substrate flatness' [patent_app_type] => utility [patent_app_number] => 11/136662 [patent_app_country] => US [patent_app_date] => 2005-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4582 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0272/20050272273.pdf [firstpage_image] =>[orig_patent_app_number] => 11136662 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/136662
Method and apparatus for electrostatically maintaining substrate flatness May 23, 2005 Abandoned
Array ( [id] => 7202299 [patent_doc_number] => 20050257746 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-24 [patent_title] => 'Clamp member, film deposition apparatus, film deposition method, and semiconductor device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/133452 [patent_app_country] => US [patent_app_date] => 2005-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5588 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0257/20050257746.pdf [firstpage_image] =>[orig_patent_app_number] => 11133452 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/133452
Clamp member, film deposition apparatus, film deposition method, and semiconductor device manufacturing method May 19, 2005 Abandoned
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