Daniel D. Chang

Array ( [id] => 5732905 [patent_doc_number] => 20060258022 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-16 [patent_title] => 'Method for the calibration of radio frequency generator output power' [patent_app_type] => utility [patent_app_number] => 11/128239 [patent_app_country] => US [patent_app_date] => 2005-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 3838 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0258/20060258022.pdf [firstpage_image] =>[orig_patent_app_number] => 11128239 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7170320 [patent_doc_number] => 20050202575 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-15 [patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process' [patent_app_type] => utility [patent_app_number] => 11/126159 [patent_app_country] => US [patent_app_date] => 2005-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8611 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0202/20050202575.pdf [firstpage_image] =>[orig_patent_app_number] => 11126159 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7174424 [patent_doc_number] => 20050189074 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-01 [patent_title] => 'Gas processing apparatus and method and computer storage medium storing program for controlling same' [patent_app_type] => utility [patent_app_number] => 11/123174 [patent_app_country] => US [patent_app_date] => 2005-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9642 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0189/20050189074.pdf [firstpage_image] =>[orig_patent_app_number] => 11123174 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7015010 [patent_doc_number] => 20050217577 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Vertical type semiconductor device producing apparatus' [patent_app_type] => utility [patent_app_number] => 11/121919 [patent_app_country] => US [patent_app_date] => 2005-05-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6021 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0217/20050217577.pdf [firstpage_image] =>[orig_patent_app_number] => 11121919 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7136965 [patent_doc_number] => 20050181614 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-18 [patent_title] => 'Variable shape antenna etching system and antenna formed thereby' [patent_app_type] => utility [patent_app_number] => 11/103432 [patent_app_country] => US [patent_app_date] => 2005-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3183 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0181/20050181614.pdf [firstpage_image] =>[orig_patent_app_number] => 11103432 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7019600 [patent_doc_number] => 20050221619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'System and method for etching a mask' [patent_app_type] => utility [patent_app_number] => 11/103604 [patent_app_country] => US [patent_app_date] => 2005-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 5365 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20050221619.pdf [firstpage_image] =>[orig_patent_app_number] => 11103604 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7045279 [patent_doc_number] => 20050249874 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-10 [patent_title] => 'Deposition apparatus and deposition method, and process gas supply method' [patent_app_type] => utility [patent_app_number] => 11/103580 [patent_app_country] => US [patent_app_date] => 2005-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2802 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0249/20050249874.pdf [firstpage_image] =>[orig_patent_app_number] => 11103580 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6949250 [patent_doc_number] => 20050224344 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-13 [patent_title] => 'Plasma processing apparatus and method' [patent_app_type] => utility [patent_app_number] => 11/092910 [patent_app_country] => US [patent_app_date] => 2005-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7030 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0224/20050224344.pdf [firstpage_image] =>[orig_patent_app_number] => 11092910 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5853839 [patent_doc_number] => 20060225772 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-10-12 [patent_title] => 'Controlled pressure differential in a high-pressure processing chamber' [patent_app_type] => utility [patent_app_number] => 11/093944 [patent_app_country] => US [patent_app_date] => 2005-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 12377 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0225/20060225772.pdf [firstpage_image] =>[orig_patent_app_number] => 11093944 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7047942 [patent_doc_number] => 20050183829 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-25 [patent_title] => 'Low-mass susceptor improvements' [patent_app_type] => utility [patent_app_number] => 11/095335 [patent_app_country] => US [patent_app_date] => 2005-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 17188 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0183/20050183829.pdf [firstpage_image] =>[orig_patent_app_number] => 11095335 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5593072 [patent_doc_number] => 20060156988 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-20 [patent_title] => 'Pin set for a reactor' [patent_app_type] => utility [patent_app_number] => 11/085403 [patent_app_country] => US [patent_app_date] => 2005-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2235 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0156/20060156988.pdf [firstpage_image] =>[orig_patent_app_number] => 11085403 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5819082 [patent_doc_number] => 20060023395 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Systems and methods for temperature control of semiconductor wafers' [patent_app_type] => utility [patent_app_number] => 11/085354 [patent_app_country] => US [patent_app_date] => 2005-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 1423 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20060023395.pdf [firstpage_image] =>[orig_patent_app_number] => 11085354 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7174399 [patent_doc_number] => 20050189069 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-01 [patent_title] => 'Plasma processing system and method' [patent_app_type] => utility [patent_app_number] => 11/082246 [patent_app_country] => US [patent_app_date] => 2005-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 8403 [patent_no_of_claims] => 74 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0189/20050189069.pdf [firstpage_image] =>[orig_patent_app_number] => 11082246 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5760308 [patent_doc_number] => 20060211253 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-21 [patent_title] => 'Method and apparatus for monitoring plasma conditions in an etching plasma processing facility' [patent_app_type] => utility [patent_app_number] => 11/081439 [patent_app_country] => US [patent_app_date] => 2005-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3558 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0211/20060211253.pdf [firstpage_image] =>[orig_patent_app_number] => 11081439 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6930924 [patent_doc_number] => 20050281959 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Plasma generating apparatus and method of forming alignment film of liquid crystal display using the same' [patent_app_type] => utility [patent_app_number] => 11/080232 [patent_app_country] => US [patent_app_date] => 2005-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 10526 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0281/20050281959.pdf [firstpage_image] =>[orig_patent_app_number] => 11080232 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5680152 [patent_doc_number] => 20060196419 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-09-07 [patent_title] => 'Method and system for coating sections of internal surfaces' [patent_app_type] => utility [patent_app_number] => 11/074906 [patent_app_country] => US [patent_app_date] => 2005-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6486 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20060196419.pdf [firstpage_image] =>[orig_patent_app_number] => 11074906 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6966580 [patent_doc_number] => 20050233477 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-20 [patent_title] => 'Substrate processing apparatus, substrate processing method, and program for implementing the method' [patent_app_type] => utility [patent_app_number] => 11/072521 [patent_app_country] => US [patent_app_date] => 2005-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 9358 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0233/20050233477.pdf [firstpage_image] =>[orig_patent_app_number] => 11072521 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5877036 [patent_doc_number] => 20060027324 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-09 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/068805 [patent_app_country] => US [patent_app_date] => 2005-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 8194 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0027/20060027324.pdf [firstpage_image] =>[orig_patent_app_number] => 11068805 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 373030 [patent_doc_number] => 07473332 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-01-06 [patent_title] => 'Method for processing semiconductor' [patent_app_type] => utility [patent_app_number] => 11/066221 [patent_app_country] => US [patent_app_date] => 2005-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 4997 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 236 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/473/07473332.pdf [firstpage_image] =>[orig_patent_app_number] => 11066221 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7210040 [patent_doc_number] => 20050252454 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-17 [patent_title] => 'Contaminant reducing substrate transport and support system' [patent_app_type] => utility [patent_app_number] => 11/065702 [patent_app_country] => US [patent_app_date] => 2005-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 15065 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0252/20050252454.pdf [firstpage_image] =>[orig_patent_app_number] => 11065702 [rel_patent_id] =>[rel_patent_doc_number] =>)