Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6963453 [patent_doc_number] => 20050230350 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-20 [patent_title] => 'In-situ dry clean chamber for front end of line fabrication' [patent_app_type] => utility [patent_app_number] => 11/063645 [patent_app_country] => US [patent_app_date] => 2005-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13057 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0230/20050230350.pdf [firstpage_image] =>[orig_patent_app_number] => 11063645 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/063645
In-situ dry clean chamber for front end of line fabrication Feb 21, 2005 Abandoned
Array ( [id] => 5764654 [patent_doc_number] => 20050263247 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-01 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/060598 [patent_app_country] => US [patent_app_date] => 2005-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3596 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0263/20050263247.pdf [firstpage_image] =>[orig_patent_app_number] => 11060598 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/060598
Plasma processing apparatus and plasma processing method Feb 17, 2005 Abandoned
Array ( [id] => 161429 [patent_doc_number] => 07670434 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-03-02 [patent_title] => 'Vapor phase growth apparatus' [patent_app_type] => utility [patent_app_number] => 10/589348 [patent_app_country] => US [patent_app_date] => 2005-02-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 3494 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/670/07670434.pdf [firstpage_image] =>[orig_patent_app_number] => 10589348 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/589348
Vapor phase growth apparatus Feb 14, 2005 Issued
Array ( [id] => 5669660 [patent_doc_number] => 20060175013 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-10 [patent_title] => 'Specimen surface treatment system' [patent_app_type] => utility [patent_app_number] => 11/055024 [patent_app_country] => US [patent_app_date] => 2005-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5330 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0175/20060175013.pdf [firstpage_image] =>[orig_patent_app_number] => 11055024 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/055024
Specimen surface treatment system Feb 9, 2005 Abandoned
Array ( [id] => 42448 [patent_doc_number] => 07776156 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-17 [patent_title] => 'Side RF coil and side heater for plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/055191 [patent_app_country] => US [patent_app_date] => 2005-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7318 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/776/07776156.pdf [firstpage_image] =>[orig_patent_app_number] => 11055191 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/055191
Side RF coil and side heater for plasma processing apparatus Feb 9, 2005 Issued
Array ( [id] => 7131511 [patent_doc_number] => 20050178326 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-18 [patent_title] => 'Sensor for monitoring material deposition' [patent_app_type] => utility [patent_app_number] => 11/047109 [patent_app_country] => US [patent_app_date] => 2005-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4932 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0178/20050178326.pdf [firstpage_image] =>[orig_patent_app_number] => 11047109 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/047109
Sensor for monitoring material deposition Jan 30, 2005 Issued
Array ( [id] => 7097875 [patent_doc_number] => 20050130334 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same' [patent_app_type] => utility [patent_app_number] => 11/046424 [patent_app_country] => US [patent_app_date] => 2005-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6206 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20050130334.pdf [firstpage_image] =>[orig_patent_app_number] => 11046424 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/046424
Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same Jan 26, 2005 Abandoned
Array ( [id] => 7097986 [patent_doc_number] => 20050130445 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Substrate processing method and substrate processing apparatus' [patent_app_type] => utility [patent_app_number] => 11/042199 [patent_app_country] => US [patent_app_date] => 2005-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6373 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20050130445.pdf [firstpage_image] =>[orig_patent_app_number] => 11042199 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/042199
Substrate processing method and substrate processing apparatus Jan 25, 2005 Abandoned
Array ( [id] => 5619209 [patent_doc_number] => 20060188742 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-24 [patent_title] => 'Chamber component having grooved surface' [patent_app_type] => utility [patent_app_number] => 11/037587 [patent_app_country] => US [patent_app_date] => 2005-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6993 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20060188742.pdf [firstpage_image] =>[orig_patent_app_number] => 11037587 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/037587
Chamber component having grooved surface Jan 17, 2005 Abandoned
Array ( [id] => 5691284 [patent_doc_number] => 20060151429 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-13 [patent_title] => 'Plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/032000 [patent_app_country] => US [patent_app_date] => 2005-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7461 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0151/20060151429.pdf [firstpage_image] =>[orig_patent_app_number] => 11032000 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/032000
Plasma processing method Jan 10, 2005 Abandoned
Array ( [id] => 7166997 [patent_doc_number] => 20050120962 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-09 [patent_title] => 'Substrate supporting table, method for producing same, and processing system' [patent_app_type] => utility [patent_app_number] => 11/032138 [patent_app_country] => US [patent_app_date] => 2005-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5501 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0120/20050120962.pdf [firstpage_image] =>[orig_patent_app_number] => 11032138 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/032138
Substrate supporting table, method for producing same, and processing system Jan 10, 2005 Abandoned
Array ( [id] => 6980689 [patent_doc_number] => 20050150757 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-14 [patent_title] => 'Heated and cooled vacuum chamber shield' [patent_app_type] => utility [patent_app_number] => 11/028889 [patent_app_country] => US [patent_app_date] => 2005-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5017 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0150/20050150757.pdf [firstpage_image] =>[orig_patent_app_number] => 11028889 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/028889
Heated and cooled vacuum chamber shield Jan 3, 2005 Abandoned
Array ( [id] => 5817657 [patent_doc_number] => 20060021970 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters' [patent_app_type] => utility [patent_app_number] => 11/023548 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3230 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20060021970.pdf [firstpage_image] =>[orig_patent_app_number] => 11023548 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/023548
Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters Dec 28, 2004 Abandoned
Array ( [id] => 7047934 [patent_doc_number] => 20050183821 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-25 [patent_title] => 'Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters' [patent_app_type] => utility [patent_app_number] => 11/023383 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3244 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0183/20050183821.pdf [firstpage_image] =>[orig_patent_app_number] => 11023383 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/023383
Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters Dec 28, 2004 Abandoned
Array ( [id] => 363033 [patent_doc_number] => 07481887 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-01-27 [patent_title] => 'Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces' [patent_app_type] => utility [patent_app_number] => 11/027809 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 5638 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 393 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/481/07481887.pdf [firstpage_image] =>[orig_patent_app_number] => 11027809 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/027809
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces Dec 28, 2004 Issued
Array ( [id] => 7100126 [patent_doc_number] => 20050103261 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-19 [patent_title] => 'Epitaxially coated semiconductor wafer' [patent_app_type] => utility [patent_app_number] => 11/020947 [patent_app_country] => US [patent_app_date] => 2004-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4927 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20050103261.pdf [firstpage_image] =>[orig_patent_app_number] => 11020947 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/020947
Epitaxially coated semiconductor wafer Dec 22, 2004 Abandoned
Array ( [id] => 7100476 [patent_doc_number] => 20050103439 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-19 [patent_title] => 'Stabilization of electronegative plasmas with feedback control of RF generator systems' [patent_app_type] => utility [patent_app_number] => 11/020376 [patent_app_country] => US [patent_app_date] => 2004-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4204 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20050103439.pdf [firstpage_image] =>[orig_patent_app_number] => 11020376 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/020376
Stabilization of electronegative plasmas with feedback control of RF generator systems Dec 21, 2004 Abandoned
Array ( [id] => 6993182 [patent_doc_number] => 20050132957 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-23 [patent_title] => 'CARRIER BODY AND METHOD' [patent_app_type] => utility [patent_app_number] => 10/905226 [patent_app_country] => US [patent_app_date] => 2004-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3214 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20050132957.pdf [firstpage_image] =>[orig_patent_app_number] => 10905226 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/905226
CARRIER BODY AND METHOD Dec 21, 2004 Abandoned
Array ( [id] => 6905754 [patent_doc_number] => 20050101149 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-12 [patent_title] => 'Dry etching method and apparatus for use in the LCD device' [patent_app_type] => utility [patent_app_number] => 11/014801 [patent_app_country] => US [patent_app_date] => 2004-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2583 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0101/20050101149.pdf [firstpage_image] =>[orig_patent_app_number] => 11014801 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/014801
Dry etching method and apparatus for use in the LCD device Dec 19, 2004 Issued
Array ( [id] => 7097871 [patent_doc_number] => 20050130330 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Method for etch processing with end point detection thereof' [patent_app_type] => utility [patent_app_number] => 11/008868 [patent_app_country] => US [patent_app_date] => 2004-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3460 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20050130330.pdf [firstpage_image] =>[orig_patent_app_number] => 11008868 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/008868
Method for etch processing with end point detection thereof Dec 9, 2004 Issued
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