
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 6963453
[patent_doc_number] => 20050230350
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-10-20
[patent_title] => 'In-situ dry clean chamber for front end of line fabrication'
[patent_app_type] => utility
[patent_app_number] => 11/063645
[patent_app_country] => US
[patent_app_date] => 2005-02-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
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[pdf_file] => publications/A1/0230/20050230350.pdf
[firstpage_image] =>[orig_patent_app_number] => 11063645
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/063645 | In-situ dry clean chamber for front end of line fabrication | Feb 21, 2005 | Abandoned |
Array
(
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[patent_doc_number] => 20050263247
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-12-01
[patent_title] => 'Plasma processing apparatus and plasma processing method'
[patent_app_type] => utility
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[patent_app_date] => 2005-02-18
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[firstpage_image] =>[orig_patent_app_number] => 11060598
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/060598 | Plasma processing apparatus and plasma processing method | Feb 17, 2005 | Abandoned |
Array
(
[id] => 161429
[patent_doc_number] => 07670434
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-03-02
[patent_title] => 'Vapor phase growth apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/589348
[patent_app_country] => US
[patent_app_date] => 2005-02-15
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[rel_patent_id] =>[rel_patent_doc_number] =>) 10/589348 | Vapor phase growth apparatus | Feb 14, 2005 | Issued |
Array
(
[id] => 5669660
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[patent_kind] => A1
[patent_issue_date] => 2006-08-10
[patent_title] => 'Specimen surface treatment system'
[patent_app_type] => utility
[patent_app_number] => 11/055024
[patent_app_country] => US
[patent_app_date] => 2005-02-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
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[patent_no_of_words] => 5330
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/055024 | Specimen surface treatment system | Feb 9, 2005 | Abandoned |
Array
(
[id] => 42448
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[patent_kind] => B2
[patent_issue_date] => 2010-08-17
[patent_title] => 'Side RF coil and side heater for plasma processing apparatus'
[patent_app_type] => utility
[patent_app_number] => 11/055191
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[patent_app_date] => 2005-02-10
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/055191 | Side RF coil and side heater for plasma processing apparatus | Feb 9, 2005 | Issued |
Array
(
[id] => 7131511
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[patent_issue_date] => 2005-08-18
[patent_title] => 'Sensor for monitoring material deposition'
[patent_app_type] => utility
[patent_app_number] => 11/047109
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/047109 | Sensor for monitoring material deposition | Jan 30, 2005 | Issued |
Array
(
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[patent_title] => 'Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same'
[patent_app_type] => utility
[patent_app_number] => 11/046424
[patent_app_country] => US
[patent_app_date] => 2005-01-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
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[firstpage_image] =>[orig_patent_app_number] => 11046424
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/046424 | Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same | Jan 26, 2005 | Abandoned |
Array
(
[id] => 7097986
[patent_doc_number] => 20050130445
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-06-16
[patent_title] => 'Substrate processing method and substrate processing apparatus'
[patent_app_type] => utility
[patent_app_number] => 11/042199
[patent_app_country] => US
[patent_app_date] => 2005-01-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
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[firstpage_image] =>[orig_patent_app_number] => 11042199
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/042199 | Substrate processing method and substrate processing apparatus | Jan 25, 2005 | Abandoned |
Array
(
[id] => 5619209
[patent_doc_number] => 20060188742
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2006-08-24
[patent_title] => 'Chamber component having grooved surface'
[patent_app_type] => utility
[patent_app_number] => 11/037587
[patent_app_country] => US
[patent_app_date] => 2005-01-18
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[firstpage_image] =>[orig_patent_app_number] => 11037587
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/037587 | Chamber component having grooved surface | Jan 17, 2005 | Abandoned |
Array
(
[id] => 5691284
[patent_doc_number] => 20060151429
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2006-07-13
[patent_title] => 'Plasma processing method'
[patent_app_type] => utility
[patent_app_number] => 11/032000
[patent_app_country] => US
[patent_app_date] => 2005-01-11
[patent_effective_date] => 0000-00-00
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[pdf_file] => publications/A1/0151/20060151429.pdf
[firstpage_image] =>[orig_patent_app_number] => 11032000
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/032000 | Plasma processing method | Jan 10, 2005 | Abandoned |
Array
(
[id] => 7166997
[patent_doc_number] => 20050120962
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[patent_kind] => A1
[patent_issue_date] => 2005-06-09
[patent_title] => 'Substrate supporting table, method for producing same, and processing system'
[patent_app_type] => utility
[patent_app_number] => 11/032138
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[pdf_file] => publications/A1/0120/20050120962.pdf
[firstpage_image] =>[orig_patent_app_number] => 11032138
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/032138 | Substrate supporting table, method for producing same, and processing system | Jan 10, 2005 | Abandoned |
Array
(
[id] => 6980689
[patent_doc_number] => 20050150757
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[patent_issue_date] => 2005-07-14
[patent_title] => 'Heated and cooled vacuum chamber shield'
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Array
(
[id] => 5817657
[patent_doc_number] => 20060021970
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Array
(
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Array
(
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[patent_issue_date] => 2009-01-27
[patent_title] => 'Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/027809 | Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces | Dec 28, 2004 | Issued |
Array
(
[id] => 7100126
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[patent_issue_date] => 2005-05-19
[patent_title] => 'Epitaxially coated semiconductor wafer'
[patent_app_type] => utility
[patent_app_number] => 11/020947
[patent_app_country] => US
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[rel_patent_id] =>[rel_patent_doc_number] =>) 11/020947 | Epitaxially coated semiconductor wafer | Dec 22, 2004 | Abandoned |
Array
(
[id] => 7100476
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[patent_kind] => A1
[patent_issue_date] => 2005-05-19
[patent_title] => 'Stabilization of electronegative plasmas with feedback control of RF generator systems'
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Array
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Array
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Array
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