Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6928421 [patent_doc_number] => 20050279453 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'System and methods for surface cleaning' [patent_app_type] => utility [patent_app_number] => 10/870646 [patent_app_country] => US [patent_app_date] => 2004-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 10591 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279453.pdf [firstpage_image] =>[orig_patent_app_number] => 10870646 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/870646
System and methods for surface cleaning Jun 16, 2004 Abandoned
Array ( [id] => 7022129 [patent_doc_number] => 20050016568 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-27 [patent_title] => 'Apparatus and method for cleaning of semiconductor device manufacturing equipment' [patent_app_type] => utility [patent_app_number] => 10/870309 [patent_app_country] => US [patent_app_date] => 2004-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2377 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20050016568.pdf [firstpage_image] =>[orig_patent_app_number] => 10870309 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/870309
Apparatus and method for cleaning of semiconductor device manufacturing equipment Jun 15, 2004 Abandoned
Array ( [id] => 8444537 [patent_doc_number] => 08286581 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-10-16 [patent_title] => 'High frequency power source and its control method, and plasma processing apparatus' [patent_app_type] => utility [patent_app_number] => 10/864538 [patent_app_country] => US [patent_app_date] => 2004-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 6987 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 229 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 10864538 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/864538
High frequency power source and its control method, and plasma processing apparatus Jun 9, 2004 Issued
Array ( [id] => 7359824 [patent_doc_number] => 20040216678 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-11-04 [patent_title] => 'Wafer Holder for Semiconductor Manufacturing Equipment and Semiconductor Manufacturing Equipment in Which It Is Installed' [patent_app_type] => new [patent_app_number] => 10/709957 [patent_app_country] => US [patent_app_date] => 2004-06-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7368 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0216/20040216678.pdf [firstpage_image] =>[orig_patent_app_number] => 10709957 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/709957
Wafer Holder for Semiconductor Manufacturing Equipment and Semiconductor Manufacturing Equipment in Which It Is Installed Jun 8, 2004 Abandoned
Array ( [id] => 6925540 [patent_doc_number] => 20050238795 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-27 [patent_title] => 'Method and arrangement for the regulation of the layer thickness of a coating material on a web moved in its longitudinal direction' [patent_app_type] => utility [patent_app_number] => 10/855984 [patent_app_country] => US [patent_app_date] => 2004-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2527 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0238/20050238795.pdf [firstpage_image] =>[orig_patent_app_number] => 10855984 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/855984
Method and arrangement for the regulation of the layer thickness of a coating material on a web moved in its longitudinal direction May 25, 2004 Abandoned
Array ( [id] => 386280 [patent_doc_number] => 07303648 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-12-04 [patent_title] => 'Via etch process' [patent_app_type] => utility [patent_app_number] => 10/854541 [patent_app_country] => US [patent_app_date] => 2004-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 8 [patent_no_of_words] => 1160 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/303/07303648.pdf [firstpage_image] =>[orig_patent_app_number] => 10854541 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/854541
Via etch process May 24, 2004 Issued
Array ( [id] => 7058069 [patent_doc_number] => 20050000428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => 'Method and apparatus for vaporizing and delivering reactant' [patent_app_type] => utility [patent_app_number] => 10/846206 [patent_app_country] => US [patent_app_date] => 2004-05-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8165 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20050000428.pdf [firstpage_image] =>[orig_patent_app_number] => 10846206 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/846206
Method and apparatus for vaporizing and delivering reactant May 13, 2004 Abandoned
Array ( [id] => 5222186 [patent_doc_number] => 20070251452 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-11-01 [patent_title] => 'Processing Apparatus Using Source Gas and Reactive Gas' [patent_app_type] => utility [patent_app_number] => 10/555813 [patent_app_country] => US [patent_app_date] => 2004-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11381 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0251/20070251452.pdf [firstpage_image] =>[orig_patent_app_number] => 10555813 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/555813
Processing Apparatus Using Source Gas and Reactive Gas May 12, 2004 Abandoned
Array ( [id] => 7058181 [patent_doc_number] => 20050000540 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => ' In Situ module for particle removal from solid-state surfaces' [patent_app_type] => utility [patent_app_number] => 10/845377 [patent_app_country] => US [patent_app_date] => 2004-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4291 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20050000540.pdf [firstpage_image] =>[orig_patent_app_number] => 10845377 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/845377
In situ module for particle removal from solid-state surfaces May 12, 2004 Issued
Array ( [id] => 7093315 [patent_doc_number] => 20050126482 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Forming thin film on semiconductor wafer' [patent_app_type] => utility [patent_app_number] => 10/839710 [patent_app_country] => US [patent_app_date] => 2004-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5807 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0126/20050126482.pdf [firstpage_image] =>[orig_patent_app_number] => 10839710 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/839710
Forming thin film on semiconductor wafer May 5, 2004 Abandoned
Array ( [id] => 7398948 [patent_doc_number] => 20040261713 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-12-30 [patent_title] => 'Monitoring system for plasma deposition facility' [patent_app_type] => new [patent_app_number] => 10/836345 [patent_app_country] => US [patent_app_date] => 2004-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2613 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0261/20040261713.pdf [firstpage_image] =>[orig_patent_app_number] => 10836345 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/836345
Monitoring system for plasma deposition facility May 2, 2004 Abandoned
Array ( [id] => 7066083 [patent_doc_number] => 20050241766 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-03 [patent_title] => 'Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing' [patent_app_type] => utility [patent_app_number] => 10/835456 [patent_app_country] => US [patent_app_date] => 2004-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8326 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20050241766.pdf [firstpage_image] =>[orig_patent_app_number] => 10835456 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/835456
Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing Apr 29, 2004 Issued
Array ( [id] => 7058082 [patent_doc_number] => 20050000441 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => 'Process and device for depositing in particular crystalline layers on in particular crystalline substrates' [patent_app_type] => utility [patent_app_number] => 10/836699 [patent_app_country] => US [patent_app_date] => 2004-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2378 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20050000441.pdf [firstpage_image] =>[orig_patent_app_number] => 10836699 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/836699
Process and device for depositing in particular crystalline layers on in particular crystalline substrates Apr 29, 2004 Abandoned
Array ( [id] => 7390429 [patent_doc_number] => 20040173310 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-09 [patent_title] => 'Arrangement and method for detecting sidewall flaking in a plasma chamber' [patent_app_type] => new [patent_app_number] => 10/481420 [patent_app_country] => US [patent_app_date] => 2004-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2820 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0173/20040173310.pdf [firstpage_image] =>[orig_patent_app_number] => 10481420 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/481420
Arrangement and method for detecting sidewall flaking in a plasma chamber Apr 29, 2004 Abandoned
Array ( [id] => 7434852 [patent_doc_number] => 20040194884 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-10-07 [patent_title] => 'High-pressure process' [patent_app_type] => new [patent_app_number] => 10/832329 [patent_app_country] => US [patent_app_date] => 2004-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 10065 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 3 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20040194884.pdf [firstpage_image] =>[orig_patent_app_number] => 10832329 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/832329
High-pressure process Apr 26, 2004 Abandoned
Array ( [id] => 5750029 [patent_doc_number] => 20060219178 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-10-05 [patent_title] => 'Device for applying semiconductor treatment to treatment subject substrate' [patent_app_type] => utility [patent_app_number] => 10/553843 [patent_app_country] => US [patent_app_date] => 2004-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 11846 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0219/20060219178.pdf [firstpage_image] =>[orig_patent_app_number] => 10553843 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/553843
Apparatus for performing semiconductor processing on target substrate Apr 19, 2004 Issued
Array ( [id] => 7434878 [patent_doc_number] => 20040194887 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-10-07 [patent_title] => 'Process for producing semiconductor device' [patent_app_type] => new [patent_app_number] => 10/825114 [patent_app_country] => US [patent_app_date] => 2004-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5739 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20040194887.pdf [firstpage_image] =>[orig_patent_app_number] => 10825114 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/825114
Process for producing semiconductor device Apr 15, 2004 Abandoned
Array ( [id] => 6962741 [patent_doc_number] => 20050229854 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-20 [patent_title] => 'Method and apparatus for temperature change and control' [patent_app_type] => utility [patent_app_number] => 10/824643 [patent_app_country] => US [patent_app_date] => 2004-04-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5807 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0229/20050229854.pdf [firstpage_image] =>[orig_patent_app_number] => 10824643 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/824643
Method and apparatus for temperature change and control Apr 14, 2004 Abandoned
Array ( [id] => 7343936 [patent_doc_number] => 20040191933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-30 [patent_title] => 'Silicon-on-insulator devices and methods for fabricating the same' [patent_app_type] => new [patent_app_number] => 10/824458 [patent_app_country] => US [patent_app_date] => 2004-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 1455 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0191/20040191933.pdf [firstpage_image] =>[orig_patent_app_number] => 10824458 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/824458
Silicon-on-insulator devices and methods for fabricating the same Apr 12, 2004 Abandoned
Array ( [id] => 7019598 [patent_doc_number] => 20050221617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Inductively coupled plasma chamber attachable to a processing chamber for analysis of process gases' [patent_app_type] => utility [patent_app_number] => 10/814985 [patent_app_country] => US [patent_app_date] => 2004-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4141 [patent_no_of_claims] => 97 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20050221617.pdf [firstpage_image] =>[orig_patent_app_number] => 10814985 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/814985
Inductively coupled plasma chamber attachable to a processing chamber for analysis of process gases Mar 30, 2004 Abandoned
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