Daniel D. Chang

Array ( [id] => 7019494 [patent_doc_number] => 20050221513 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Method of controlling trimming of a gate electrode structure' [patent_app_type] => utility [patent_app_number] => 10/812952 [patent_app_country] => US [patent_app_date] => 2004-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6432 [patent_no_of_claims] => 65 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20050221513.pdf [firstpage_image] =>[orig_patent_app_number] => 10812952 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7015354 [patent_doc_number] => 20050217796 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Techniques for packaging and encapsulating components of diagnostic plasma measurement devices' [patent_app_type] => utility [patent_app_number] => 10/815124 [patent_app_country] => US [patent_app_date] => 2004-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3096 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0217/20050217796.pdf [firstpage_image] =>[orig_patent_app_number] => 10815124 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5690972 [patent_doc_number] => 20060151117 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-13 [patent_title] => 'Semiconductor producing device and semiconductor producing method' [patent_app_type] => utility [patent_app_number] => 10/544937 [patent_app_country] => US [patent_app_date] => 2004-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5897 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0151/20060151117.pdf [firstpage_image] =>[orig_patent_app_number] => 10544937 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7015353 [patent_doc_number] => 20050217795 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-06 [patent_title] => 'Method of plasma etch endpoint detection using a V-I probe diagnostics' [patent_app_type] => utility [patent_app_number] => 10/813829 [patent_app_country] => US [patent_app_date] => 2004-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3680 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0217/20050217795.pdf [firstpage_image] =>[orig_patent_app_number] => 10813829 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7372714 [patent_doc_number] => 20040177925 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-16 [patent_title] => 'Plasma processing system and apparatus and a sample processing method' [patent_app_type] => new [patent_app_number] => 10/810598 [patent_app_country] => US [patent_app_date] => 2004-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9182 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20040177925.pdf [firstpage_image] =>[orig_patent_app_number] => 10810598 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7372704 [patent_doc_number] => 20040177924 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-16 [patent_title] => 'Data processing apparatus for semiconductor processing apparatus' [patent_app_type] => new [patent_app_number] => 10/807181 [patent_app_country] => US [patent_app_date] => 2004-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 4032 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20040177924.pdf [firstpage_image] =>[orig_patent_app_number] => 10807181 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7264156 [patent_doc_number] => 20040241995 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-12-02 [patent_title] => 'Etching apparatus and etching method' [patent_app_type] => new [patent_app_number] => 10/807191 [patent_app_country] => US [patent_app_date] => 2004-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 10877 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20040241995.pdf [firstpage_image] =>[orig_patent_app_number] => 10807191 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7332276 [patent_doc_number] => 20040188021 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-30 [patent_title] => 'Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck' [patent_app_type] => new [patent_app_number] => 10/807439 [patent_app_country] => US [patent_app_date] => 2004-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4631 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20040188021.pdf [firstpage_image] =>[orig_patent_app_number] => 10807439 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6980395 [patent_doc_number] => 20050150463 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-14 [patent_title] => 'Holder for sample materials used in high throughput physical vapor deposition material studies' [patent_app_type] => utility [patent_app_number] => 10/800553 [patent_app_country] => US [patent_app_date] => 2004-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 2682 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0150/20050150463.pdf [firstpage_image] =>[orig_patent_app_number] => 10800553 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7143681 [patent_doc_number] => 20040169012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-02 [patent_title] => 'Cleaning of semiconductor wafers by contaminate encapsulation' [patent_app_type] => new [patent_app_number] => 10/798816 [patent_app_country] => US [patent_app_date] => 2004-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3580 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0169/20040169012.pdf [firstpage_image] =>[orig_patent_app_number] => 10798816 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7142979 [patent_doc_number] => 20040168632 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-02 [patent_title] => 'Manufacturing system in electronic devices' [patent_app_type] => new [patent_app_number] => 10/794057 [patent_app_country] => US [patent_app_date] => 2004-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 13143 [patent_no_of_claims] => 60 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0168/20040168632.pdf [firstpage_image] =>[orig_patent_app_number] => 10794057 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7029760 [patent_doc_number] => 20050028934 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-10 [patent_title] => 'Apparatus and method for plasma etching' [patent_app_type] => utility [patent_app_number] => 10/793886 [patent_app_country] => US [patent_app_date] => 2004-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10244 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0028/20050028934.pdf [firstpage_image] =>[orig_patent_app_number] => 10793886 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7212945 [patent_doc_number] => 20050054205 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-10 [patent_title] => 'Mask trimming apparatus and mask trimming method' [patent_app_type] => utility [patent_app_number] => 10/790212 [patent_app_country] => US [patent_app_date] => 2004-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 3925 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20050054205.pdf [firstpage_image] =>[orig_patent_app_number] => 10790212 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6942047 [patent_doc_number] => 20050194095 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-08 [patent_title] => 'Semiconductor production apparatus' [patent_app_type] => utility [patent_app_number] => 10/790185 [patent_app_country] => US [patent_app_date] => 2004-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10386 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20050194095.pdf [firstpage_image] =>[orig_patent_app_number] => 10790185 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7372696 [patent_doc_number] => 20040177922 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-16 [patent_title] => 'Method and apparatus for monitoring plasma conditions using a monitoring ring' [patent_app_type] => new [patent_app_number] => 10/788328 [patent_app_country] => US [patent_app_date] => 2004-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 1953 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20040177922.pdf [firstpage_image] =>[orig_patent_app_number] => 10788328 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7429515 [patent_doc_number] => 20040161941 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-19 [patent_title] => 'Aspect ratio controlled etch selectivity using time modulated DC bias voltage' [patent_app_type] => new [patent_app_number] => 10/779843 [patent_app_country] => US [patent_app_date] => 2004-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4622 [patent_no_of_claims] => 63 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0161/20040161941.pdf [firstpage_image] =>[orig_patent_app_number] => 10779843 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7465173 [patent_doc_number] => 20040166598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-26 [patent_title] => 'processing method' [patent_app_type] => new [patent_app_number] => 10/779742 [patent_app_country] => US [patent_app_date] => 2004-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10849 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0166/20040166598.pdf [firstpage_image] =>[orig_patent_app_number] => 10779742 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7426173 [patent_doc_number] => 20040161533 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-19 [patent_title] => 'Processing apparatus, exhaust processing process and plasma processing process' [patent_app_type] => new [patent_app_number] => 10/776173 [patent_app_country] => US [patent_app_date] => 2004-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 30 [patent_no_of_words] => 32073 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0161/20040161533.pdf [firstpage_image] =>[orig_patent_app_number] => 10776173 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7443106 [patent_doc_number] => 20040185664 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-23 [patent_title] => 'Method of and apparatus for manufacturing a semiconductor device using a polysilicon hard mask' [patent_app_type] => new [patent_app_number] => 10/766932 [patent_app_country] => US [patent_app_date] => 2004-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4654 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20040185664.pdf [firstpage_image] =>[orig_patent_app_number] => 10766932 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5831555 [patent_doc_number] => 20060243385 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-02 [patent_title] => 'Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration' [patent_app_type] => utility [patent_app_number] => 10/542662 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 8166 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0243/20060243385.pdf [firstpage_image] =>[orig_patent_app_number] => 10542662 [rel_patent_id] =>[rel_patent_doc_number] =>)