Daniel D. Chang

Array ( [id] => 7035920 [patent_doc_number] => 20050155718 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-21 [patent_title] => 'Step edge insert ring for etch chamber' [patent_app_type] => utility [patent_app_number] => 10/761881 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3091 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0155/20050155718.pdf [firstpage_image] =>[orig_patent_app_number] => 10761881 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7283102 [patent_doc_number] => 20040144493 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-29 [patent_title] => 'Moveable barrier for multiple etch processes' [patent_app_type] => new [patent_app_number] => 10/758629 [patent_app_country] => US [patent_app_date] => 2004-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3893 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20040144493.pdf [firstpage_image] =>[orig_patent_app_number] => 10758629 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 90888 [patent_doc_number] => 07736462 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-06-15 [patent_title] => 'Installation for processing a substrate' [patent_app_type] => utility [patent_app_number] => 10/542075 [patent_app_country] => US [patent_app_date] => 2004-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 7360 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/736/07736462.pdf [firstpage_image] =>[orig_patent_app_number] => 10542075 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7282921 [patent_doc_number] => 20040144312 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-29 [patent_title] => 'Systems for producing semiconductors and members therefor' [patent_app_type] => new [patent_app_number] => 10/753625 [patent_app_country] => US [patent_app_date] => 2004-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4478 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20040144312.pdf [firstpage_image] =>[orig_patent_app_number] => 10753625 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7331627 [patent_doc_number] => 20040187790 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-30 [patent_title] => 'Substrate holder' [patent_app_type] => new [patent_app_number] => 10/748305 [patent_app_country] => US [patent_app_date] => 2003-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4473 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0187/20040187790.pdf [firstpage_image] =>[orig_patent_app_number] => 10748305 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 531006 [patent_doc_number] => 07172675 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-02-06 [patent_title] => 'Observation window of plasma processing apparatus and plasma processing apparatus using the same' [patent_app_type] => utility [patent_app_number] => 10/742779 [patent_app_country] => US [patent_app_date] => 2003-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 5327 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/172/07172675.pdf [firstpage_image] =>[orig_patent_app_number] => 10742779 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6993390 [patent_doc_number] => 20050133165 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-23 [patent_title] => 'Apparatus for the prevention of arcing in a CVD-TiN chamber' [patent_app_type] => utility [patent_app_number] => 10/744715 [patent_app_country] => US [patent_app_date] => 2003-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2149 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0133/20050133165.pdf [firstpage_image] =>[orig_patent_app_number] => 10744715 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7415661 [patent_doc_number] => 20040182316 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-23 [patent_title] => 'Processing equipment and processing method' [patent_app_type] => new [patent_app_number] => 10/743314 [patent_app_country] => US [patent_app_date] => 2003-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 12429 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20040182316.pdf [firstpage_image] =>[orig_patent_app_number] => 10743314 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 32225 [patent_doc_number] => 07785441 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-31 [patent_title] => 'Plasma generator, plasma control method, and method of producing substrate' [patent_app_type] => utility [patent_app_number] => 10/539254 [patent_app_country] => US [patent_app_date] => 2003-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 29 [patent_no_of_words] => 10182 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/785/07785441.pdf [firstpage_image] =>[orig_patent_app_number] => 10539254 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 536799 [patent_doc_number] => 07169254 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-01-30 [patent_title] => 'Plasma processing system and apparatus and a sample processing method' [patent_app_type] => utility [patent_app_number] => 10/732285 [patent_app_country] => US [patent_app_date] => 2003-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 9058 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/169/07169254.pdf [firstpage_image] =>[orig_patent_app_number] => 10732285 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7451432 [patent_doc_number] => 20040118518 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-24 [patent_title] => 'Plasma processing system and apparatus and a sample processing method' [patent_app_type] => new [patent_app_number] => 10/732286 [patent_app_country] => US [patent_app_date] => 2003-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9154 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0118/20040118518.pdf [firstpage_image] =>[orig_patent_app_number] => 10732286 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7172501 [patent_doc_number] => 20040200718 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-10-14 [patent_title] => 'Plasma processing method and apparatus' [patent_app_type] => new [patent_app_number] => 10/727604 [patent_app_country] => US [patent_app_date] => 2003-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 9249 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0200/20040200718.pdf [firstpage_image] =>[orig_patent_app_number] => 10727604 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7119607 [patent_doc_number] => 20050011436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-20 [patent_title] => 'Chemical vapor deposition reactor' [patent_app_type] => utility [patent_app_number] => 10/727746 [patent_app_country] => US [patent_app_date] => 2003-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7239 [patent_no_of_claims] => 72 [patent_no_of_ind_claims] => 21 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20050011436.pdf [firstpage_image] =>[orig_patent_app_number] => 10727746 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7285491 [patent_doc_number] => 20040108066 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-10 [patent_title] => 'Temperature measuring method and plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 10/724693 [patent_app_country] => US [patent_app_date] => 2003-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4131 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0108/20040108066.pdf [firstpage_image] =>[orig_patent_app_number] => 10724693 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7446057 [patent_doc_number] => 20040099282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-27 [patent_title] => 'System and a method for cleaning process chambers and vacuum lines' [patent_app_type] => new [patent_app_number] => 10/715450 [patent_app_country] => US [patent_app_date] => 2003-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4519 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20040099282.pdf [firstpage_image] =>[orig_patent_app_number] => 10715450 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6987638 [patent_doc_number] => 20050087132 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-04-28 [patent_title] => 'Methods and apparatus for the production of optical filters' [patent_app_type] => utility [patent_app_number] => 10/713362 [patent_app_country] => US [patent_app_date] => 2003-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5556 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 20 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0087/20050087132.pdf [firstpage_image] =>[orig_patent_app_number] => 10713362 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7294782 [patent_doc_number] => 20040123805 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-01 [patent_title] => 'Vacuum treatment method and vacuum treatment device' [patent_app_type] => new [patent_app_number] => 10/475857 [patent_app_country] => US [patent_app_date] => 2003-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 7533 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0123/20040123805.pdf [firstpage_image] =>[orig_patent_app_number] => 10475857 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6915034 [patent_doc_number] => 20050092595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-05 [patent_title] => 'Ion gauge condition detector and switching circuit' [patent_app_type] => utility [patent_app_number] => 10/697656 [patent_app_country] => US [patent_app_date] => 2003-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 6232 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20050092595.pdf [firstpage_image] =>[orig_patent_app_number] => 10697656 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7351602 [patent_doc_number] => 20040089420 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-13 [patent_title] => 'Bypass set up for integration of remote optical endpoint for CVD chamber' [patent_app_type] => new [patent_app_number] => 10/699137 [patent_app_country] => US [patent_app_date] => 2003-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 3932 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0089/20040089420.pdf [firstpage_image] =>[orig_patent_app_number] => 10699137 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5865674 [patent_doc_number] => 20060099805 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-11 [patent_title] => 'Heat treating system and heat treating method' [patent_app_type] => utility [patent_app_number] => 10/532878 [patent_app_country] => US [patent_app_date] => 2003-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6299 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0099/20060099805.pdf [firstpage_image] =>[orig_patent_app_number] => 10532878 [rel_patent_id] =>[rel_patent_doc_number] =>)