Daniel D. Chang

Array ( [id] => 7368021 [patent_doc_number] => 20040079289 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-29 [patent_title] => 'Electrostatic chuck wafer port and top plate with edge shielding and gas scavenging' [patent_app_type] => new [patent_app_number] => 10/278640 [patent_app_country] => US [patent_app_date] => 2002-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3189 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0079/20040079289.pdf [firstpage_image] =>[orig_patent_app_number] => 10278640 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4694557 [patent_doc_number] => 20080216741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-09-11 [patent_title] => 'DYNAMIC FILM THICKNESS CONTROL SYSTEM/METHOD AND ITS UTILIZATION' [patent_app_type] => utility [patent_app_number] => 10/277677 [patent_app_country] => US [patent_app_date] => 2002-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 5340 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0216/20080216741.pdf [firstpage_image] =>[orig_patent_app_number] => 10277677 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 783543 [patent_doc_number] => 06988463 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-01-24 [patent_title] => 'Ion beam source with gas introduced directly into deposition/vacuum chamber' [patent_app_type] => utility [patent_app_number] => 10/289244 [patent_app_country] => US [patent_app_date] => 2002-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 4887 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/988/06988463.pdf [firstpage_image] =>[orig_patent_app_number] => 10289244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6821825 [patent_doc_number] => 20030219986 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-27 [patent_title] => 'Substrate carrier for processing substrates' [patent_app_type] => new [patent_app_number] => 10/267824 [patent_app_country] => US [patent_app_date] => 2002-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5428 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0219/20030219986.pdf [firstpage_image] =>[orig_patent_app_number] => 10267824 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6819533 [patent_doc_number] => 20030217693 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-27 [patent_title] => 'Substrate support assembly having an edge protector' [patent_app_type] => new [patent_app_number] => 10/267987 [patent_app_country] => US [patent_app_date] => 2002-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5295 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0217/20030217693.pdf [firstpage_image] =>[orig_patent_app_number] => 10267987 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 70498 [patent_doc_number] => 07754016 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-07-13 [patent_title] => 'Multiple axis tumbler coating apparatus' [patent_app_type] => utility [patent_app_number] => 10/266052 [patent_app_country] => US [patent_app_date] => 2002-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1993 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/754/07754016.pdf [firstpage_image] =>[orig_patent_app_number] => 10266052 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6867415 [patent_doc_number] => 20030080104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-01 [patent_title] => 'Heat treating apparatus and method' [patent_app_type] => new [patent_app_number] => 10/267128 [patent_app_country] => US [patent_app_date] => 2002-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3610 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0080/20030080104.pdf [firstpage_image] =>[orig_patent_app_number] => 10267128 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7428301 [patent_doc_number] => 20040065257 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-08 [patent_title] => 'Self-aligning PVD mark shield' [patent_app_type] => new [patent_app_number] => 10/266044 [patent_app_country] => US [patent_app_date] => 2002-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2761 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0065/20040065257.pdf [firstpage_image] =>[orig_patent_app_number] => 10266044 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7278279 [patent_doc_number] => 20040060656 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-01 [patent_title] => 'Method and apparatus for an improved bellows shield in a plasma processing system' [patent_app_type] => new [patent_app_number] => 10/259306 [patent_app_country] => US [patent_app_date] => 2002-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3943 [patent_no_of_claims] => 61 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0060/20040060656.pdf [firstpage_image] =>[orig_patent_app_number] => 10259306 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7280956 [patent_doc_number] => 20040063333 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-01 [patent_title] => 'Method and apparatus for an improved baffle plate in a plasma processing system' [patent_app_type] => new [patent_app_number] => 10/259380 [patent_app_country] => US [patent_app_date] => 2002-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4853 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0063/20040063333.pdf [firstpage_image] =>[orig_patent_app_number] => 10259380 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1315549 [patent_doc_number] => 06605177 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-08-12 [patent_title] => 'Substrate support with gas feed-through and method' [patent_app_type] => B2 [patent_app_number] => 10/256441 [patent_app_country] => US [patent_app_date] => 2002-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 5974 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/605/06605177.pdf [firstpage_image] =>[orig_patent_app_number] => 10256441 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7185697 [patent_doc_number] => 20040083976 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Modified deposition ring to eliminate backside and wafer edge coating' [patent_app_type] => new [patent_app_number] => 10/255545 [patent_app_country] => US [patent_app_date] => 2002-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2462 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0083/20040083976.pdf [firstpage_image] =>[orig_patent_app_number] => 10255545 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7267123 [patent_doc_number] => 20040055708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Apparatus and method for in-situ cleaning of borosilicate (BSG) and borophosphosilicate (BPSG) films from CVD chambers' [patent_app_type] => new [patent_app_number] => 10/253206 [patent_app_country] => US [patent_app_date] => 2002-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4019 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0055/20040055708.pdf [firstpage_image] =>[orig_patent_app_number] => 10253206 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 435543 [patent_doc_number] => 07261796 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-28 [patent_title] => 'Method and apparatus for aligning a machine tool' [patent_app_type] => utility [patent_app_number] => 10/252910 [patent_app_country] => US [patent_app_date] => 2002-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 2953 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/261/07261796.pdf [firstpage_image] =>[orig_patent_app_number] => 10252910 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 445001 [patent_doc_number] => 07252738 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-07 [patent_title] => 'Apparatus for reducing polymer deposition on a substrate and substrate support' [patent_app_type] => utility [patent_app_number] => 10/251179 [patent_app_country] => US [patent_app_date] => 2002-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3163 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/252/07252738.pdf [firstpage_image] =>[orig_patent_app_number] => 10251179 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7267124 [patent_doc_number] => 20040055709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Electrostatic chuck having a low level of particle generation and method of fabricating same' [patent_app_type] => new [patent_app_number] => 10/247499 [patent_app_country] => US [patent_app_date] => 2002-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3879 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0055/20040055709.pdf [firstpage_image] =>[orig_patent_app_number] => 10247499 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6718127 [patent_doc_number] => 20030051814 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-20 [patent_title] => 'Manufacturing apparatus of a semiconductor device having a sensing system' [patent_app_type] => new [patent_app_number] => 10/246254 [patent_app_country] => US [patent_app_date] => 2002-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3274 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20030051814.pdf [firstpage_image] =>[orig_patent_app_number] => 10246254 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6771956 [patent_doc_number] => 20030015294 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-23 [patent_title] => 'Rapid heating and cooling of workpiece chucks' [patent_app_type] => new [patent_app_number] => 10/244713 [patent_app_country] => US [patent_app_date] => 2002-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 6280 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0015/20030015294.pdf [firstpage_image] =>[orig_patent_app_number] => 10244713 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6838942 [patent_doc_number] => 20030036282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'Etching end point judging device' [patent_app_type] => new [patent_app_number] => 10/242425 [patent_app_country] => US [patent_app_date] => 2002-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 11836 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20030036282.pdf [firstpage_image] =>[orig_patent_app_number] => 10242425 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1020533 [patent_doc_number] => 06887317 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-03 [patent_title] => 'Reduced friction lift pin' [patent_app_type] => utility [patent_app_number] => 10/241005 [patent_app_country] => US [patent_app_date] => 2002-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 2279 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/887/06887317.pdf [firstpage_image] =>[orig_patent_app_number] => 10241005 [rel_patent_id] =>[rel_patent_doc_number] =>)