
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 978482
[patent_doc_number] => 06929712
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-08-16
[patent_title] => 'Plasma processing apparatus capable of evaluating process performance'
[patent_app_type] => utility
[patent_app_number] => 10/235783
[patent_app_country] => US
[patent_app_date] => 2002-09-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 27
[patent_figures_cnt] => 30
[patent_no_of_words] => 14219
[patent_no_of_claims] => 7
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 141
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/929/06929712.pdf
[firstpage_image] =>[orig_patent_app_number] => 10235783
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/235783 | Plasma processing apparatus capable of evaluating process performance | Sep 5, 2002 | Issued |
Array
(
[id] => 6671121
[patent_doc_number] => 20030056724
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-03-27
[patent_title] => 'Manufacturing device for substrate with transparent conductive film'
[patent_app_type] => new
[patent_app_number] => 10/149728
[patent_app_country] => US
[patent_app_date] => 2002-09-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 5696
[patent_no_of_claims] => 12
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[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0056/20030056724.pdf
[firstpage_image] =>[orig_patent_app_number] => 10149728
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/149728 | Manufacturing device for substrate with transparent conductive film | Sep 5, 2002 | Abandoned |
Array
(
[id] => 6752872
[patent_doc_number] => 20030000648
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-01-02
[patent_title] => ' Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates '
[patent_app_type] => new
[patent_app_number] => 10/234135
[patent_app_country] => US
[patent_app_date] => 2002-09-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 7051
[patent_no_of_claims] => 42
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[pdf_file] => publications/A1/0000/20030000648.pdf
[firstpage_image] =>[orig_patent_app_number] => 10234135
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/234135 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Sep 4, 2002 | Abandoned |
Array
(
[id] => 7129272
[patent_doc_number] => 20040040510
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-03-04
[patent_title] => 'Semiconductor wafer susceptor'
[patent_app_type] => new
[patent_app_number] => 10/233483
[patent_app_country] => US
[patent_app_date] => 2002-09-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 3082
[patent_no_of_claims] => 20
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[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0040/20040040510.pdf
[firstpage_image] =>[orig_patent_app_number] => 10233483
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/233483 | Semiconductor wafer susceptor | Sep 3, 2002 | Issued |
Array
(
[id] => 7129271
[patent_doc_number] => 20040040509
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-03-04
[patent_title] => 'Apparatus and method for preventing etchant condensation on wafer in a cooling chamber'
[patent_app_type] => new
[patent_app_number] => 10/235120
[patent_app_country] => US
[patent_app_date] => 2002-09-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 3062
[patent_no_of_claims] => 18
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[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0040/20040040509.pdf
[firstpage_image] =>[orig_patent_app_number] => 10235120
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/235120 | Apparatus and method for preventing etchant condensation on wafer in a cooling chamber | Sep 3, 2002 | Abandoned |
Array
(
[id] => 6778856
[patent_doc_number] => 20030049937
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-03-13
[patent_title] => 'Apparatus and method for surface treatment to substrate'
[patent_app_type] => new
[patent_app_number] => 10/233440
[patent_app_country] => US
[patent_app_date] => 2002-09-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
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[patent_no_of_words] => 6043
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[pdf_file] => publications/A1/0049/20030049937.pdf
[firstpage_image] =>[orig_patent_app_number] => 10233440
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/233440 | Apparatus and method for surface treatment to substrate | Sep 3, 2002 | Abandoned |
Array
(
[id] => 6686110
[patent_doc_number] => 20030029833
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-02-13
[patent_title] => 'High speed photoresist stripping chamber'
[patent_app_type] => new
[patent_app_number] => 10/204448
[patent_app_country] => US
[patent_app_date] => 2002-09-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 3178
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 3
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[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0029/20030029833.pdf
[firstpage_image] =>[orig_patent_app_number] => 10204448
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/204448 | High speed photoresist stripping chamber | Sep 2, 2002 | Abandoned |
Array
(
[id] => 7129538
[patent_doc_number] => 20040040658
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-03-04
[patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process'
[patent_app_type] => new
[patent_app_number] => 10/230309
[patent_app_country] => US
[patent_app_date] => 2002-08-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 8668
[patent_no_of_claims] => 5
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[patent_words_short_claim] => 90
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[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0040/20040040658.pdf
[firstpage_image] =>[orig_patent_app_number] => 10230309
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/230309 | Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process | Aug 28, 2002 | Abandoned |
Array
(
[id] => 7129546
[patent_doc_number] => 20040040663
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-03-04
[patent_title] => 'Plasma processing apparatus'
[patent_app_type] => new
[patent_app_number] => 10/230299
[patent_app_country] => US
[patent_app_date] => 2002-08-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
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[pdf_file] => publications/A1/0040/20040040663.pdf
[firstpage_image] =>[orig_patent_app_number] => 10230299
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/230299 | Plasma processing apparatus | Aug 28, 2002 | Abandoned |
Array
(
[id] => 7129537
[patent_doc_number] => 20040040657
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-03-04
[patent_title] => 'Sample processing apparatus and sample processing system'
[patent_app_type] => new
[patent_app_number] => 10/228039
[patent_app_country] => US
[patent_app_date] => 2002-08-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
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[patent_no_of_words] => 4629
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[pdf_file] => publications/A1/0040/20040040657.pdf
[firstpage_image] =>[orig_patent_app_number] => 10228039
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/228039 | Sample processing apparatus and sample processing system | Aug 26, 2002 | Issued |
Array
(
[id] => 7129270
[patent_doc_number] => 20040040508
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-03-04
[patent_title] => 'Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling'
[patent_app_type] => new
[patent_app_number] => 10/228788
[patent_app_country] => US
[patent_app_date] => 2002-08-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
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[patent_no_of_words] => 7155
[patent_no_of_claims] => 69
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[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0040/20040040508.pdf
[firstpage_image] =>[orig_patent_app_number] => 10228788
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/228788 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Aug 26, 2002 | Issued |
Array
(
[id] => 6671296
[patent_doc_number] => 20030056899
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-03-27
[patent_title] => 'Semiconductor processing apparatus and manufacturing method of semiconductor device'
[patent_app_type] => new
[patent_app_number] => 10/225152
[patent_app_country] => US
[patent_app_date] => 2002-08-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 19
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[pdf_file] => publications/A1/0056/20030056899.pdf
[firstpage_image] =>[orig_patent_app_number] => 10225152
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/225152 | Semiconductor processing apparatus and manufacturing method of semiconductor device | Aug 21, 2002 | Abandoned |
Array
(
[id] => 6837277
[patent_doc_number] => 20030034617
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-02-20
[patent_title] => 'Wafer chuck with plunger'
[patent_app_type] => new
[patent_app_number] => 10/218170
[patent_app_country] => US
[patent_app_date] => 2002-08-13
[patent_effective_date] => 0000-00-00
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[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0034/20030034617.pdf
[firstpage_image] =>[orig_patent_app_number] => 10218170
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/218170 | Wafer chuck with plunger | Aug 12, 2002 | Abandoned |
Array
(
[id] => 955991
[patent_doc_number] => 06955741
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-10-18
[patent_title] => 'Semiconductor-processing reaction chamber'
[patent_app_type] => utility
[patent_app_number] => 10/214890
[patent_app_country] => US
[patent_app_date] => 2002-08-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
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[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/955/06955741.pdf
[firstpage_image] =>[orig_patent_app_number] => 10214890
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/214890 | Semiconductor-processing reaction chamber | Aug 6, 2002 | Issued |
Array
(
[id] => 6713132
[patent_doc_number] => 20030024479
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-02-06
[patent_title] => 'Vacuum deposition apparatus'
[patent_app_type] => new
[patent_app_number] => 10/208035
[patent_app_country] => US
[patent_app_date] => 2002-07-31
[patent_effective_date] => 0000-00-00
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[pdf_file] => publications/A1/0024/20030024479.pdf
[firstpage_image] =>[orig_patent_app_number] => 10208035
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/208035 | Vacuum deposition apparatus | Jul 30, 2002 | Abandoned |
Array
(
[id] => 7381897
[patent_doc_number] => 20040020438
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-02-05
[patent_title] => 'Managing work-piece deflection'
[patent_app_type] => new
[patent_app_number] => 10/209284
[patent_app_country] => US
[patent_app_date] => 2002-07-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
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[pdf_file] => publications/A1/0020/20040020438.pdf
[firstpage_image] =>[orig_patent_app_number] => 10209284
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/209284 | Managing work-piece deflection | Jul 29, 2002 | Issued |
Array
(
[id] => 6742654
[patent_doc_number] => 20030019837
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-01-30
[patent_title] => 'Method and apparatus for producing at least one depression in a semiconductor material'
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[patent_app_date] => 2002-07-30
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[pdf_file] => publications/A1/0019/20030019837.pdf
[firstpage_image] =>[orig_patent_app_number] => 10208498
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/208498 | Method and apparatus for producing at least one depression in a semiconductor material | Jul 29, 2002 | Abandoned |
Array
(
[id] => 7385606
[patent_doc_number] => 20040016402
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-01-29
[patent_title] => 'Methods and apparatus for monitoring plasma parameters in plasma doping systems'
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[firstpage_image] =>[orig_patent_app_number] => 10205961
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/205961 | Methods and apparatus for monitoring plasma parameters in plasma doping systems | Jul 25, 2002 | Abandoned |
Array
(
[id] => 6695671
[patent_doc_number] => 20030107865
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-06-12
[patent_title] => 'Wafer handling apparatus and method of manufacturing the same'
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[patent_app_country] => US
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[firstpage_image] =>[orig_patent_app_number] => 10198052
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/198052 | Wafer handling apparatus and method of manufacturing the same | Jul 18, 2002 | Abandoned |
Array
(
[id] => 1046228
[patent_doc_number] => 06863734
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[patent_kind] => B2
[patent_issue_date] => 2005-03-08
[patent_title] => 'Substrate processing apparatus and method for manufacturing semiconductor device'
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[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/863/06863734.pdf
[firstpage_image] =>[orig_patent_app_number] => 10197398
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/197398 | Substrate processing apparatus and method for manufacturing semiconductor device | Jul 17, 2002 | Issued |