Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 978482 [patent_doc_number] => 06929712 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-08-16 [patent_title] => 'Plasma processing apparatus capable of evaluating process performance' [patent_app_type] => utility [patent_app_number] => 10/235783 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 30 [patent_no_of_words] => 14219 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/929/06929712.pdf [firstpage_image] =>[orig_patent_app_number] => 10235783 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235783
Plasma processing apparatus capable of evaluating process performance Sep 5, 2002 Issued
Array ( [id] => 6671121 [patent_doc_number] => 20030056724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-27 [patent_title] => 'Manufacturing device for substrate with transparent conductive film' [patent_app_type] => new [patent_app_number] => 10/149728 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5696 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0056/20030056724.pdf [firstpage_image] =>[orig_patent_app_number] => 10149728 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/149728
Manufacturing device for substrate with transparent conductive film Sep 5, 2002 Abandoned
Array ( [id] => 6752872 [patent_doc_number] => 20030000648 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-02 [patent_title] => ' Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates ' [patent_app_type] => new [patent_app_number] => 10/234135 [patent_app_country] => US [patent_app_date] => 2002-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7051 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20030000648.pdf [firstpage_image] =>[orig_patent_app_number] => 10234135 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/234135
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates Sep 4, 2002 Abandoned
Array ( [id] => 7129272 [patent_doc_number] => 20040040510 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Semiconductor wafer susceptor' [patent_app_type] => new [patent_app_number] => 10/233483 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 3082 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040510.pdf [firstpage_image] =>[orig_patent_app_number] => 10233483 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/233483
Semiconductor wafer susceptor Sep 3, 2002 Issued
Array ( [id] => 7129271 [patent_doc_number] => 20040040509 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Apparatus and method for preventing etchant condensation on wafer in a cooling chamber' [patent_app_type] => new [patent_app_number] => 10/235120 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3062 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040509.pdf [firstpage_image] =>[orig_patent_app_number] => 10235120 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235120
Apparatus and method for preventing etchant condensation on wafer in a cooling chamber Sep 3, 2002 Abandoned
Array ( [id] => 6778856 [patent_doc_number] => 20030049937 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Apparatus and method for surface treatment to substrate' [patent_app_type] => new [patent_app_number] => 10/233440 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6043 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20030049937.pdf [firstpage_image] =>[orig_patent_app_number] => 10233440 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/233440
Apparatus and method for surface treatment to substrate Sep 3, 2002 Abandoned
Array ( [id] => 6686110 [patent_doc_number] => 20030029833 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'High speed photoresist stripping chamber' [patent_app_type] => new [patent_app_number] => 10/204448 [patent_app_country] => US [patent_app_date] => 2002-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3178 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029833.pdf [firstpage_image] =>[orig_patent_app_number] => 10204448 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/204448
High speed photoresist stripping chamber Sep 2, 2002 Abandoned
Array ( [id] => 7129538 [patent_doc_number] => 20040040658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process' [patent_app_type] => new [patent_app_number] => 10/230309 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040658.pdf [firstpage_image] =>[orig_patent_app_number] => 10230309 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/230309
Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process Aug 28, 2002 Abandoned
Array ( [id] => 7129546 [patent_doc_number] => 20040040663 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 10/230299 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4220 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040663.pdf [firstpage_image] =>[orig_patent_app_number] => 10230299 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/230299
Plasma processing apparatus Aug 28, 2002 Abandoned
Array ( [id] => 7129537 [patent_doc_number] => 20040040657 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Sample processing apparatus and sample processing system' [patent_app_type] => new [patent_app_number] => 10/228039 [patent_app_country] => US [patent_app_date] => 2002-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4629 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040657.pdf [firstpage_image] =>[orig_patent_app_number] => 10228039 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/228039
Sample processing apparatus and sample processing system Aug 26, 2002 Issued
Array ( [id] => 7129270 [patent_doc_number] => 20040040508 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling' [patent_app_type] => new [patent_app_number] => 10/228788 [patent_app_country] => US [patent_app_date] => 2002-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7155 [patent_no_of_claims] => 69 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040508.pdf [firstpage_image] =>[orig_patent_app_number] => 10228788 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/228788
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Aug 26, 2002 Issued
Array ( [id] => 6671296 [patent_doc_number] => 20030056899 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-27 [patent_title] => 'Semiconductor processing apparatus and manufacturing method of semiconductor device' [patent_app_type] => new [patent_app_number] => 10/225152 [patent_app_country] => US [patent_app_date] => 2002-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 15125 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0056/20030056899.pdf [firstpage_image] =>[orig_patent_app_number] => 10225152 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/225152
Semiconductor processing apparatus and manufacturing method of semiconductor device Aug 21, 2002 Abandoned
Array ( [id] => 6837277 [patent_doc_number] => 20030034617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'Wafer chuck with plunger' [patent_app_type] => new [patent_app_number] => 10/218170 [patent_app_country] => US [patent_app_date] => 2002-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 1651 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0034/20030034617.pdf [firstpage_image] =>[orig_patent_app_number] => 10218170 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/218170
Wafer chuck with plunger Aug 12, 2002 Abandoned
Array ( [id] => 955991 [patent_doc_number] => 06955741 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-10-18 [patent_title] => 'Semiconductor-processing reaction chamber' [patent_app_type] => utility [patent_app_number] => 10/214890 [patent_app_country] => US [patent_app_date] => 2002-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 1966 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/955/06955741.pdf [firstpage_image] =>[orig_patent_app_number] => 10214890 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/214890
Semiconductor-processing reaction chamber Aug 6, 2002 Issued
Array ( [id] => 6713132 [patent_doc_number] => 20030024479 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-06 [patent_title] => 'Vacuum deposition apparatus' [patent_app_type] => new [patent_app_number] => 10/208035 [patent_app_country] => US [patent_app_date] => 2002-07-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9443 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0024/20030024479.pdf [firstpage_image] =>[orig_patent_app_number] => 10208035 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/208035
Vacuum deposition apparatus Jul 30, 2002 Abandoned
Array ( [id] => 7381897 [patent_doc_number] => 20040020438 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-05 [patent_title] => 'Managing work-piece deflection' [patent_app_type] => new [patent_app_number] => 10/209284 [patent_app_country] => US [patent_app_date] => 2002-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9327 [patent_no_of_claims] => 58 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20040020438.pdf [firstpage_image] =>[orig_patent_app_number] => 10209284 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/209284
Managing work-piece deflection Jul 29, 2002 Issued
Array ( [id] => 6742654 [patent_doc_number] => 20030019837 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-30 [patent_title] => 'Method and apparatus for producing at least one depression in a semiconductor material' [patent_app_type] => new [patent_app_number] => 10/208498 [patent_app_country] => US [patent_app_date] => 2002-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2798 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0019/20030019837.pdf [firstpage_image] =>[orig_patent_app_number] => 10208498 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/208498
Method and apparatus for producing at least one depression in a semiconductor material Jul 29, 2002 Abandoned
Array ( [id] => 7385606 [patent_doc_number] => 20040016402 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-29 [patent_title] => 'Methods and apparatus for monitoring plasma parameters in plasma doping systems' [patent_app_type] => new [patent_app_number] => 10/205961 [patent_app_country] => US [patent_app_date] => 2002-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 7173 [patent_no_of_claims] => 74 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20040016402.pdf [firstpage_image] =>[orig_patent_app_number] => 10205961 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/205961
Methods and apparatus for monitoring plasma parameters in plasma doping systems Jul 25, 2002 Abandoned
Array ( [id] => 6695671 [patent_doc_number] => 20030107865 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Wafer handling apparatus and method of manufacturing the same' [patent_app_type] => new [patent_app_number] => 10/198052 [patent_app_country] => US [patent_app_date] => 2002-07-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7144 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0107/20030107865.pdf [firstpage_image] =>[orig_patent_app_number] => 10198052 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/198052
Wafer handling apparatus and method of manufacturing the same Jul 18, 2002 Abandoned
Array ( [id] => 1046228 [patent_doc_number] => 06863734 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-03-08 [patent_title] => 'Substrate processing apparatus and method for manufacturing semiconductor device' [patent_app_type] => utility [patent_app_number] => 10/197398 [patent_app_country] => US [patent_app_date] => 2002-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 18 [patent_no_of_words] => 8718 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/863/06863734.pdf [firstpage_image] =>[orig_patent_app_number] => 10197398 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/197398
Substrate processing apparatus and method for manufacturing semiconductor device Jul 17, 2002 Issued
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