Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6742402 [patent_doc_number] => 20030019585 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-30 [patent_title] => 'Substrate processing apparatus and method for fabricating semiconductor device' [patent_app_type] => new [patent_app_number] => 10/196958 [patent_app_country] => US [patent_app_date] => 2002-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6480 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0019/20030019585.pdf [firstpage_image] =>[orig_patent_app_number] => 10196958 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/196958
Substrate processing apparatus and method for fabricating semiconductor device Jul 17, 2002 Issued
Array ( [id] => 1014167 [patent_doc_number] => 06893507 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-17 [patent_title] => 'Self-centering wafer support system' [patent_app_type] => utility [patent_app_number] => 10/200465 [patent_app_country] => US [patent_app_date] => 2002-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 40 [patent_no_of_words] => 17154 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/893/06893507.pdf [firstpage_image] =>[orig_patent_app_number] => 10200465 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/200465
Self-centering wafer support system Jul 17, 2002 Issued
Array ( [id] => 848761 [patent_doc_number] => 07381276 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-06-03 [patent_title] => 'Susceptor pocket with beveled projection sidewall' [patent_app_type] => utility [patent_app_number] => 10/064451 [patent_app_country] => US [patent_app_date] => 2002-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2108 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/381/07381276.pdf [firstpage_image] =>[orig_patent_app_number] => 10064451 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/064451
Susceptor pocket with beveled projection sidewall Jul 15, 2002 Issued
Array ( [id] => 6630474 [patent_doc_number] => 20030006010 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-09 [patent_title] => 'Support apparatus for a wafer' [patent_app_type] => new [patent_app_number] => 10/186969 [patent_app_country] => US [patent_app_date] => 2002-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4395 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0006/20030006010.pdf [firstpage_image] =>[orig_patent_app_number] => 10186969 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/186969
Support apparatus for a wafer Jun 30, 2002 Abandoned
Array ( [id] => 7433734 [patent_doc_number] => 20040002221 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-01 [patent_title] => 'Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor' [patent_app_type] => new [patent_app_number] => 10/180504 [patent_app_country] => US [patent_app_date] => 2002-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7494 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0002/20040002221.pdf [firstpage_image] =>[orig_patent_app_number] => 10180504 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/180504
Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor Jun 26, 2002 Issued
Array ( [id] => 6752696 [patent_doc_number] => 20030000472 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-02 [patent_title] => 'Vacuum plate having a symmetrical air-load block' [patent_app_type] => new [patent_app_number] => 10/180472 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4636 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20030000472.pdf [firstpage_image] =>[orig_patent_app_number] => 10180472 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/180472
Vacuum plate having a symmetrical air-load block Jun 25, 2002 Issued
Array ( [id] => 833143 [patent_doc_number] => 07396432 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-08 [patent_title] => 'Composite shadow ring assembled with dowel pins and method of using' [patent_app_type] => utility [patent_app_number] => 10/164986 [patent_app_country] => US [patent_app_date] => 2002-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 8 [patent_no_of_words] => 4389 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/396/07396432.pdf [firstpage_image] =>[orig_patent_app_number] => 10164986 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/164986
Composite shadow ring assembled with dowel pins and method of using Jun 6, 2002 Issued
Array ( [id] => 1046231 [patent_doc_number] => 06863736 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-03-08 [patent_title] => 'Shaft cooling mechanisms' [patent_app_type] => utility [patent_app_number] => 10/157687 [patent_app_country] => US [patent_app_date] => 2002-05-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3379 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/863/06863736.pdf [firstpage_image] =>[orig_patent_app_number] => 10157687 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/157687
Shaft cooling mechanisms May 28, 2002 Issued
10/031679 Substrate and workpiece support for receiving a substrate May 16, 2002 Abandoned
Array ( [id] => 6603667 [patent_doc_number] => 20030209321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-13 [patent_title] => 'Scanning type etcher design for precision process control' [patent_app_type] => new [patent_app_number] => 10/144015 [patent_app_country] => US [patent_app_date] => 2002-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3631 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20030209321.pdf [firstpage_image] =>[orig_patent_app_number] => 10144015 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/144015
Scanning type etcher design for precision process control May 12, 2002 Abandoned
Array ( [id] => 1533312 [patent_doc_number] => 06488776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-12-03 [patent_title] => 'Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films' [patent_app_type] => B2 [patent_app_number] => 10/145469 [patent_app_country] => US [patent_app_date] => 2002-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5248 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/488/06488776.pdf [firstpage_image] =>[orig_patent_app_number] => 10145469 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/145469
Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films May 12, 2002 Issued
Array ( [id] => 6423928 [patent_doc_number] => 20020174953 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-28 [patent_title] => 'Wafer chuck having refrigerating plate serving as chucking plate' [patent_app_type] => new [patent_app_number] => 10/141824 [patent_app_country] => US [patent_app_date] => 2002-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4111 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0174/20020174953.pdf [firstpage_image] =>[orig_patent_app_number] => 10141824 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141824
Wafer chuck having refrigerating plate serving as chucking plate May 9, 2002 Abandoned
Array ( [id] => 1153234 [patent_doc_number] => 06761772 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-13 [patent_title] => 'Workpiece support' [patent_app_type] => B2 [patent_app_number] => 10/141432 [patent_app_country] => US [patent_app_date] => 2002-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 0 [patent_no_of_words] => 2484 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/761/06761772.pdf [firstpage_image] =>[orig_patent_app_number] => 10141432 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141432
Workpiece support May 7, 2002 Issued
Array ( [id] => 1148743 [patent_doc_number] => 06767407 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-27 [patent_title] => 'Auto-centering device for mechanical clamp' [patent_app_type] => B2 [patent_app_number] => 10/140733 [patent_app_country] => US [patent_app_date] => 2002-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 11 [patent_no_of_words] => 3053 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/767/06767407.pdf [firstpage_image] =>[orig_patent_app_number] => 10140733 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/140733
Auto-centering device for mechanical clamp May 6, 2002 Issued
Array ( [id] => 6603731 [patent_doc_number] => 20030209326 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-13 [patent_title] => 'Process and system for heating semiconductor substrates in a processing chamber containing a susceptor' [patent_app_type] => new [patent_app_number] => 10/141515 [patent_app_country] => US [patent_app_date] => 2002-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4600 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20030209326.pdf [firstpage_image] =>[orig_patent_app_number] => 10141515 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141515
Process and system for heating semiconductor substrates in a processing chamber containing a susceptor May 6, 2002 Abandoned
Array ( [id] => 6723012 [patent_doc_number] => 20030205324 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-06 [patent_title] => 'Wafer holder with stiffening rib' [patent_app_type] => new [patent_app_number] => 10/139098 [patent_app_country] => US [patent_app_date] => 2002-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6134 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0205/20030205324.pdf [firstpage_image] =>[orig_patent_app_number] => 10139098 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/139098
Wafer holder with stiffening rib May 2, 2002 Issued
Array ( [id] => 989833 [patent_doc_number] => 06918351 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-07-19 [patent_title] => 'Apparatus for ion beam implantation' [patent_app_type] => utility [patent_app_number] => 10/133140 [patent_app_country] => US [patent_app_date] => 2002-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 4840 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/918/06918351.pdf [firstpage_image] =>[orig_patent_app_number] => 10133140 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/133140
Apparatus for ion beam implantation Apr 25, 2002 Issued
Array ( [id] => 1343114 [patent_doc_number] => 06579408 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-17 [patent_title] => 'Apparatus and method for etching wafer backside' [patent_app_type] => B1 [patent_app_number] => 10/127389 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 3553 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 304 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579408.pdf [firstpage_image] =>[orig_patent_app_number] => 10127389 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/127389
Apparatus and method for etching wafer backside Apr 21, 2002 Issued
Array ( [id] => 6806665 [patent_doc_number] => 20030196604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-23 [patent_title] => 'Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers' [patent_app_type] => new [patent_app_number] => 10/131455 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3159 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20030196604.pdf [firstpage_image] =>[orig_patent_app_number] => 10131455 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/131455
Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers Apr 21, 2002 Issued
Array ( [id] => 6168848 [patent_doc_number] => 20020153104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Plasma etching chamber and method for manufacturing photomask using the same' [patent_app_type] => new [patent_app_number] => 10/124578 [patent_app_country] => US [patent_app_date] => 2002-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3939 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20020153104.pdf [firstpage_image] =>[orig_patent_app_number] => 10124578 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/124578
Plasma etching chamber and method for manufacturing photomask using the same Apr 17, 2002 Abandoned
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