
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 6742402
[patent_doc_number] => 20030019585
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-01-30
[patent_title] => 'Substrate processing apparatus and method for fabricating semiconductor device'
[patent_app_type] => new
[patent_app_number] => 10/196958
[patent_app_country] => US
[patent_app_date] => 2002-07-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 6480
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 45
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0019/20030019585.pdf
[firstpage_image] =>[orig_patent_app_number] => 10196958
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/196958 | Substrate processing apparatus and method for fabricating semiconductor device | Jul 17, 2002 | Issued |
Array
(
[id] => 1014167
[patent_doc_number] => 06893507
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-05-17
[patent_title] => 'Self-centering wafer support system'
[patent_app_type] => utility
[patent_app_number] => 10/200465
[patent_app_country] => US
[patent_app_date] => 2002-07-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 22
[patent_figures_cnt] => 40
[patent_no_of_words] => 17154
[patent_no_of_claims] => 29
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 116
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/893/06893507.pdf
[firstpage_image] =>[orig_patent_app_number] => 10200465
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/200465 | Self-centering wafer support system | Jul 17, 2002 | Issued |
Array
(
[id] => 848761
[patent_doc_number] => 07381276
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2008-06-03
[patent_title] => 'Susceptor pocket with beveled projection sidewall'
[patent_app_type] => utility
[patent_app_number] => 10/064451
[patent_app_country] => US
[patent_app_date] => 2002-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 3
[patent_no_of_words] => 2108
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 69
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/381/07381276.pdf
[firstpage_image] =>[orig_patent_app_number] => 10064451
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/064451 | Susceptor pocket with beveled projection sidewall | Jul 15, 2002 | Issued |
Array
(
[id] => 6630474
[patent_doc_number] => 20030006010
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-01-09
[patent_title] => 'Support apparatus for a wafer'
[patent_app_type] => new
[patent_app_number] => 10/186969
[patent_app_country] => US
[patent_app_date] => 2002-07-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4395
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 70
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0006/20030006010.pdf
[firstpage_image] =>[orig_patent_app_number] => 10186969
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/186969 | Support apparatus for a wafer | Jun 30, 2002 | Abandoned |
Array
(
[id] => 7433734
[patent_doc_number] => 20040002221
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-01-01
[patent_title] => 'Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor'
[patent_app_type] => new
[patent_app_number] => 10/180504
[patent_app_country] => US
[patent_app_date] => 2002-06-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 7494
[patent_no_of_claims] => 34
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 36
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0002/20040002221.pdf
[firstpage_image] =>[orig_patent_app_number] => 10180504
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/180504 | Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor | Jun 26, 2002 | Issued |
Array
(
[id] => 6752696
[patent_doc_number] => 20030000472
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-01-02
[patent_title] => 'Vacuum plate having a symmetrical air-load block'
[patent_app_type] => new
[patent_app_number] => 10/180472
[patent_app_country] => US
[patent_app_date] => 2002-06-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4636
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 129
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0000/20030000472.pdf
[firstpage_image] =>[orig_patent_app_number] => 10180472
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/180472 | Vacuum plate having a symmetrical air-load block | Jun 25, 2002 | Issued |
Array
(
[id] => 833143
[patent_doc_number] => 07396432
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2008-07-08
[patent_title] => 'Composite shadow ring assembled with dowel pins and method of using'
[patent_app_type] => utility
[patent_app_number] => 10/164986
[patent_app_country] => US
[patent_app_date] => 2002-06-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 8
[patent_no_of_words] => 4389
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 149
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/396/07396432.pdf
[firstpage_image] =>[orig_patent_app_number] => 10164986
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/164986 | Composite shadow ring assembled with dowel pins and method of using | Jun 6, 2002 | Issued |
Array
(
[id] => 1046231
[patent_doc_number] => 06863736
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-03-08
[patent_title] => 'Shaft cooling mechanisms'
[patent_app_type] => utility
[patent_app_number] => 10/157687
[patent_app_country] => US
[patent_app_date] => 2002-05-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 3379
[patent_no_of_claims] => 25
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 124
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/863/06863736.pdf
[firstpage_image] =>[orig_patent_app_number] => 10157687
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/157687 | Shaft cooling mechanisms | May 28, 2002 | Issued |
| 10/031679 | Substrate and workpiece support for receiving a substrate | May 16, 2002 | Abandoned |
Array
(
[id] => 6603667
[patent_doc_number] => 20030209321
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-11-13
[patent_title] => 'Scanning type etcher design for precision process control'
[patent_app_type] => new
[patent_app_number] => 10/144015
[patent_app_country] => US
[patent_app_date] => 2002-05-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 3631
[patent_no_of_claims] => 28
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 65
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0209/20030209321.pdf
[firstpage_image] =>[orig_patent_app_number] => 10144015
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/144015 | Scanning type etcher design for precision process control | May 12, 2002 | Abandoned |
Array
(
[id] => 1533312
[patent_doc_number] => 06488776
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2002-12-03
[patent_title] => 'Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films'
[patent_app_type] => B2
[patent_app_number] => 10/145469
[patent_app_country] => US
[patent_app_date] => 2002-05-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 5248
[patent_no_of_claims] => 3
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 188
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/488/06488776.pdf
[firstpage_image] =>[orig_patent_app_number] => 10145469
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/145469 | Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films | May 12, 2002 | Issued |
Array
(
[id] => 6423928
[patent_doc_number] => 20020174953
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-11-28
[patent_title] => 'Wafer chuck having refrigerating plate serving as chucking plate'
[patent_app_type] => new
[patent_app_number] => 10/141824
[patent_app_country] => US
[patent_app_date] => 2002-05-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4111
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0174/20020174953.pdf
[firstpage_image] =>[orig_patent_app_number] => 10141824
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/141824 | Wafer chuck having refrigerating plate serving as chucking plate | May 9, 2002 | Abandoned |
Array
(
[id] => 1153234
[patent_doc_number] => 06761772
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2004-07-13
[patent_title] => 'Workpiece support'
[patent_app_type] => B2
[patent_app_number] => 10/141432
[patent_app_country] => US
[patent_app_date] => 2002-05-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 1
[patent_figures_cnt] => 0
[patent_no_of_words] => 2484
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 204
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/761/06761772.pdf
[firstpage_image] =>[orig_patent_app_number] => 10141432
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/141432 | Workpiece support | May 7, 2002 | Issued |
Array
(
[id] => 1148743
[patent_doc_number] => 06767407
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2004-07-27
[patent_title] => 'Auto-centering device for mechanical clamp'
[patent_app_type] => B2
[patent_app_number] => 10/140733
[patent_app_country] => US
[patent_app_date] => 2002-05-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 11
[patent_no_of_words] => 3053
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 200
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/767/06767407.pdf
[firstpage_image] =>[orig_patent_app_number] => 10140733
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/140733 | Auto-centering device for mechanical clamp | May 6, 2002 | Issued |
Array
(
[id] => 6603731
[patent_doc_number] => 20030209326
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-11-13
[patent_title] => 'Process and system for heating semiconductor substrates in a processing chamber containing a susceptor'
[patent_app_type] => new
[patent_app_number] => 10/141515
[patent_app_country] => US
[patent_app_date] => 2002-05-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 4600
[patent_no_of_claims] => 41
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 105
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0209/20030209326.pdf
[firstpage_image] =>[orig_patent_app_number] => 10141515
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/141515 | Process and system for heating semiconductor substrates in a processing chamber containing a susceptor | May 6, 2002 | Abandoned |
Array
(
[id] => 6723012
[patent_doc_number] => 20030205324
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-11-06
[patent_title] => 'Wafer holder with stiffening rib'
[patent_app_type] => new
[patent_app_number] => 10/139098
[patent_app_country] => US
[patent_app_date] => 2002-05-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 6134
[patent_no_of_claims] => 34
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 41
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0205/20030205324.pdf
[firstpage_image] =>[orig_patent_app_number] => 10139098
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/139098 | Wafer holder with stiffening rib | May 2, 2002 | Issued |
Array
(
[id] => 989833
[patent_doc_number] => 06918351
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2005-07-19
[patent_title] => 'Apparatus for ion beam implantation'
[patent_app_type] => utility
[patent_app_number] => 10/133140
[patent_app_country] => US
[patent_app_date] => 2002-04-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 4
[patent_no_of_words] => 4840
[patent_no_of_claims] => 32
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 92
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/918/06918351.pdf
[firstpage_image] =>[orig_patent_app_number] => 10133140
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/133140 | Apparatus for ion beam implantation | Apr 25, 2002 | Issued |
Array
(
[id] => 1343114
[patent_doc_number] => 06579408
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2003-06-17
[patent_title] => 'Apparatus and method for etching wafer backside'
[patent_app_type] => B1
[patent_app_number] => 10/127389
[patent_app_country] => US
[patent_app_date] => 2002-04-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 4
[patent_no_of_words] => 3553
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 304
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/579/06579408.pdf
[firstpage_image] =>[orig_patent_app_number] => 10127389
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/127389 | Apparatus and method for etching wafer backside | Apr 21, 2002 | Issued |
Array
(
[id] => 6806665
[patent_doc_number] => 20030196604
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-10-23
[patent_title] => 'Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers'
[patent_app_type] => new
[patent_app_number] => 10/131455
[patent_app_country] => US
[patent_app_date] => 2002-04-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 3159
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 66
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0196/20030196604.pdf
[firstpage_image] =>[orig_patent_app_number] => 10131455
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/131455 | Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers | Apr 21, 2002 | Issued |
Array
(
[id] => 6168848
[patent_doc_number] => 20020153104
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-10-24
[patent_title] => 'Plasma etching chamber and method for manufacturing photomask using the same'
[patent_app_type] => new
[patent_app_number] => 10/124578
[patent_app_country] => US
[patent_app_date] => 2002-04-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 3939
[patent_no_of_claims] => 23
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 49
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0153/20020153104.pdf
[firstpage_image] =>[orig_patent_app_number] => 10124578
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/124578 | Plasma etching chamber and method for manufacturing photomask using the same | Apr 17, 2002 | Abandoned |