Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 491584 [patent_doc_number] => 07211153 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-01 [patent_title] => 'Ceramic joined body, substrate holding structure and substrate processing apparatus' [patent_app_type] => utility [patent_app_number] => 10/276394 [patent_app_country] => US [patent_app_date] => 2002-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 12951 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/211/07211153.pdf [firstpage_image] =>[orig_patent_app_number] => 10276394 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/276394
Ceramic joined body, substrate holding structure and substrate processing apparatus Apr 10, 2002 Issued
Array ( [id] => 6685847 [patent_doc_number] => 20030029569 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'Substrate processing apparatus' [patent_app_type] => new [patent_app_number] => 10/119955 [patent_app_country] => US [patent_app_date] => 2002-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8595 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029569.pdf [firstpage_image] =>[orig_patent_app_number] => 10119955 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/119955
Substrate processing apparatus Apr 8, 2002 Issued
Array ( [id] => 6863304 [patent_doc_number] => 20030188830 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Substrate support having barrier capable of detecting fluid leakage' [patent_app_type] => new [patent_app_number] => 10/118758 [patent_app_country] => US [patent_app_date] => 2002-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4547 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188830.pdf [firstpage_image] =>[orig_patent_app_number] => 10118758 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/118758
Substrate support having barrier capable of detecting fluid leakage Apr 7, 2002 Issued
Array ( [id] => 6863161 [patent_doc_number] => 20030188687 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Gas driven planetary rotation apparatus and methods for forming silicon carbide layers' [patent_app_type] => new [patent_app_number] => 10/117858 [patent_app_country] => US [patent_app_date] => 2002-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6088 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188687.pdf [firstpage_image] =>[orig_patent_app_number] => 10117858 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/117858
Gas driven planetary rotation apparatus and methods for forming silicon carbide layers Apr 7, 2002 Issued
Array ( [id] => 5899418 [patent_doc_number] => 20020139304 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Semiconductor manufacturing apparatus' [patent_app_type] => new [patent_app_number] => 10/105437 [patent_app_country] => US [patent_app_date] => 2002-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5953 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20020139304.pdf [firstpage_image] =>[orig_patent_app_number] => 10105437 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/105437
Semiconductor manufacturing apparatus Mar 25, 2002 Abandoned
Array ( [id] => 6152817 [patent_doc_number] => 20020144787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-10 [patent_title] => 'Supporting structure for a ceramic susceptor' [patent_app_type] => new [patent_app_number] => 10/105881 [patent_app_country] => US [patent_app_date] => 2002-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3537 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20020144787.pdf [firstpage_image] =>[orig_patent_app_number] => 10105881 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/105881
Supporting structure for a ceramic susceptor Mar 24, 2002 Issued
Array ( [id] => 6827087 [patent_doc_number] => 20030178145 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Closed hole edge lift pin and susceptor for wafer process chambers' [patent_app_type] => new [patent_app_number] => 10/106666 [patent_app_country] => US [patent_app_date] => 2002-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 5274 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0178/20030178145.pdf [firstpage_image] =>[orig_patent_app_number] => 10106666 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106666
Closed hole edge lift pin and susceptor for wafer process chambers Mar 24, 2002 Abandoned
Array ( [id] => 6694452 [patent_doc_number] => 20030106646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Plasma chamber insert ring' [patent_app_type] => new [patent_app_number] => 10/106008 [patent_app_country] => US [patent_app_date] => 2002-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5789 [patent_no_of_claims] => 76 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20030106646.pdf [firstpage_image] =>[orig_patent_app_number] => 10106008 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106008
Plasma chamber insert ring Mar 20, 2002 Abandoned
Array ( [id] => 6829404 [patent_doc_number] => 20030180462 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Planetary lift-off vapor deposition system' [patent_app_type] => new [patent_app_number] => 10/102351 [patent_app_country] => US [patent_app_date] => 2002-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3818 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0180/20030180462.pdf [firstpage_image] =>[orig_patent_app_number] => 10102351 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/102351
Planetary lift-off vapor deposition system Mar 18, 2002 Abandoned
Array ( [id] => 6826923 [patent_doc_number] => 20030177981 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Anti-binding deposition ring' [patent_app_type] => new [patent_app_number] => 10/106128 [patent_app_country] => US [patent_app_date] => 2002-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2291 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20030177981.pdf [firstpage_image] =>[orig_patent_app_number] => 10106128 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106128
Anti-binding deposition ring Mar 18, 2002 Issued
Array ( [id] => 768047 [patent_doc_number] => 07005032 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-02-28 [patent_title] => 'Wafer table for local dry etching apparatus' [patent_app_type] => utility [patent_app_number] => 10/098588 [patent_app_country] => US [patent_app_date] => 2002-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 4282 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/005/07005032.pdf [firstpage_image] =>[orig_patent_app_number] => 10098588 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/098588
Wafer table for local dry etching apparatus Mar 17, 2002 Issued
Array ( [id] => 6794473 [patent_doc_number] => 20030173346 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-18 [patent_title] => 'System and method for heating and cooling wafer at accelerated rates' [patent_app_type] => new [patent_app_number] => 10/100934 [patent_app_country] => US [patent_app_date] => 2002-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4064 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0173/20030173346.pdf [firstpage_image] =>[orig_patent_app_number] => 10100934 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/100934
System and method for heating and cooling wafer at accelerated rates Mar 17, 2002 Abandoned
Array ( [id] => 1138766 [patent_doc_number] => 06776849 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-08-17 [patent_title] => 'Wafer holder with peripheral lift ring' [patent_app_type] => B2 [patent_app_number] => 10/100308 [patent_app_country] => US [patent_app_date] => 2002-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 21 [patent_no_of_words] => 9249 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 187 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/776/06776849.pdf [firstpage_image] =>[orig_patent_app_number] => 10100308 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/100308
Wafer holder with peripheral lift ring Mar 14, 2002 Issued
Array ( [id] => 5844653 [patent_doc_number] => 20020132497 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-19 [patent_title] => 'Substrate processing apparatus and method for manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 10/097624 [patent_app_country] => US [patent_app_date] => 2002-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6736 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20020132497.pdf [firstpage_image] =>[orig_patent_app_number] => 10097624 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/097624
Substrate processing apparatus and method for manufacturing semiconductor device Mar 14, 2002 Abandoned
Array ( [id] => 5839258 [patent_doc_number] => 20020129770 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-19 [patent_title] => 'Vacuum deposition system' [patent_app_type] => new [patent_app_number] => 10/099502 [patent_app_country] => US [patent_app_date] => 2002-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5735 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0129/20020129770.pdf [firstpage_image] =>[orig_patent_app_number] => 10099502 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/099502
Vacuum deposition system Mar 14, 2002 Abandoned
Array ( [id] => 6708426 [patent_doc_number] => 20030168175 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-11 [patent_title] => 'Substrate alignment apparatus' [patent_app_type] => new [patent_app_number] => 10/094156 [patent_app_country] => US [patent_app_date] => 2002-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4941 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0168/20030168175.pdf [firstpage_image] =>[orig_patent_app_number] => 10094156 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/094156
Substrate alignment apparatus Mar 7, 2002 Abandoned
Array ( [id] => 6708425 [patent_doc_number] => 20030168174 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-11 [patent_title] => 'Gas cushion susceptor system' [patent_app_type] => new [patent_app_number] => 10/093882 [patent_app_country] => US [patent_app_date] => 2002-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9985 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0168/20030168174.pdf [firstpage_image] =>[orig_patent_app_number] => 10093882 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/093882
Gas cushion susceptor system Mar 7, 2002 Abandoned
Array ( [id] => 6410646 [patent_doc_number] => 20020124964 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-12 [patent_title] => 'Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same' [patent_app_type] => new [patent_app_number] => 10/087833 [patent_app_country] => US [patent_app_date] => 2002-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3813 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0124/20020124964.pdf [firstpage_image] =>[orig_patent_app_number] => 10087833 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/087833
Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same Mar 4, 2002 Issued
Array ( [id] => 6832479 [patent_doc_number] => 20030160024 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-28 [patent_title] => 'Plasma processing method and apparatus' [patent_app_type] => new [patent_app_number] => 10/083252 [patent_app_country] => US [patent_app_date] => 2002-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4228 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20030160024.pdf [firstpage_image] =>[orig_patent_app_number] => 10083252 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/083252
Plasma processing method and apparatus Feb 26, 2002 Abandoned
Array ( [id] => 6737712 [patent_doc_number] => 20030155080 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-21 [patent_title] => 'Microchip fabrication chamber wafer detection' [patent_app_type] => new [patent_app_number] => 10/081665 [patent_app_country] => US [patent_app_date] => 2002-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3353 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0155/20030155080.pdf [firstpage_image] =>[orig_patent_app_number] => 10081665 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/081665
Microchip fabrication chamber wafer detection Feb 20, 2002 Issued
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