
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 491584
[patent_doc_number] => 07211153
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2007-05-01
[patent_title] => 'Ceramic joined body, substrate holding structure and substrate processing apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/276394
[patent_app_country] => US
[patent_app_date] => 2002-04-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 4
[patent_no_of_words] => 12951
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 179
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/211/07211153.pdf
[firstpage_image] =>[orig_patent_app_number] => 10276394
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/276394 | Ceramic joined body, substrate holding structure and substrate processing apparatus | Apr 10, 2002 | Issued |
Array
(
[id] => 6685847
[patent_doc_number] => 20030029569
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-02-13
[patent_title] => 'Substrate processing apparatus'
[patent_app_type] => new
[patent_app_number] => 10/119955
[patent_app_country] => US
[patent_app_date] => 2002-04-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 8595
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 70
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0029/20030029569.pdf
[firstpage_image] =>[orig_patent_app_number] => 10119955
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/119955 | Substrate processing apparatus | Apr 8, 2002 | Issued |
Array
(
[id] => 6863304
[patent_doc_number] => 20030188830
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-10-09
[patent_title] => 'Substrate support having barrier capable of detecting fluid leakage'
[patent_app_type] => new
[patent_app_number] => 10/118758
[patent_app_country] => US
[patent_app_date] => 2002-04-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 7
[patent_no_of_words] => 4547
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 52
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0188/20030188830.pdf
[firstpage_image] =>[orig_patent_app_number] => 10118758
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/118758 | Substrate support having barrier capable of detecting fluid leakage | Apr 7, 2002 | Issued |
Array
(
[id] => 6863161
[patent_doc_number] => 20030188687
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-10-09
[patent_title] => 'Gas driven planetary rotation apparatus and methods for forming silicon carbide layers'
[patent_app_type] => new
[patent_app_number] => 10/117858
[patent_app_country] => US
[patent_app_date] => 2002-04-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 6088
[patent_no_of_claims] => 39
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 114
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0188/20030188687.pdf
[firstpage_image] =>[orig_patent_app_number] => 10117858
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/117858 | Gas driven planetary rotation apparatus and methods for forming silicon carbide layers | Apr 7, 2002 | Issued |
Array
(
[id] => 5899418
[patent_doc_number] => 20020139304
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-10-03
[patent_title] => 'Semiconductor manufacturing apparatus'
[patent_app_type] => new
[patent_app_number] => 10/105437
[patent_app_country] => US
[patent_app_date] => 2002-03-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 5953
[patent_no_of_claims] => 2
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 200
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0139/20020139304.pdf
[firstpage_image] =>[orig_patent_app_number] => 10105437
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/105437 | Semiconductor manufacturing apparatus | Mar 25, 2002 | Abandoned |
Array
(
[id] => 6152817
[patent_doc_number] => 20020144787
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-10-10
[patent_title] => 'Supporting structure for a ceramic susceptor'
[patent_app_type] => new
[patent_app_number] => 10/105881
[patent_app_country] => US
[patent_app_date] => 2002-03-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 3537
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 102
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0144/20020144787.pdf
[firstpage_image] =>[orig_patent_app_number] => 10105881
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/105881 | Supporting structure for a ceramic susceptor | Mar 24, 2002 | Issued |
Array
(
[id] => 6827087
[patent_doc_number] => 20030178145
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-09-25
[patent_title] => 'Closed hole edge lift pin and susceptor for wafer process chambers'
[patent_app_type] => new
[patent_app_number] => 10/106666
[patent_app_country] => US
[patent_app_date] => 2002-03-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 19
[patent_figures_cnt] => 19
[patent_no_of_words] => 5274
[patent_no_of_claims] => 33
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 56
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0178/20030178145.pdf
[firstpage_image] =>[orig_patent_app_number] => 10106666
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/106666 | Closed hole edge lift pin and susceptor for wafer process chambers | Mar 24, 2002 | Abandoned |
Array
(
[id] => 6694452
[patent_doc_number] => 20030106646
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-06-12
[patent_title] => 'Plasma chamber insert ring'
[patent_app_type] => new
[patent_app_number] => 10/106008
[patent_app_country] => US
[patent_app_date] => 2002-03-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 5789
[patent_no_of_claims] => 76
[patent_no_of_ind_claims] => 12
[patent_words_short_claim] => 73
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0106/20030106646.pdf
[firstpage_image] =>[orig_patent_app_number] => 10106008
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/106008 | Plasma chamber insert ring | Mar 20, 2002 | Abandoned |
Array
(
[id] => 6829404
[patent_doc_number] => 20030180462
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-09-25
[patent_title] => 'Planetary lift-off vapor deposition system'
[patent_app_type] => new
[patent_app_number] => 10/102351
[patent_app_country] => US
[patent_app_date] => 2002-03-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 3818
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 66
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0180/20030180462.pdf
[firstpage_image] =>[orig_patent_app_number] => 10102351
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/102351 | Planetary lift-off vapor deposition system | Mar 18, 2002 | Abandoned |
Array
(
[id] => 6826923
[patent_doc_number] => 20030177981
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-09-25
[patent_title] => 'Anti-binding deposition ring'
[patent_app_type] => new
[patent_app_number] => 10/106128
[patent_app_country] => US
[patent_app_date] => 2002-03-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 2291
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 103
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0177/20030177981.pdf
[firstpage_image] =>[orig_patent_app_number] => 10106128
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/106128 | Anti-binding deposition ring | Mar 18, 2002 | Issued |
Array
(
[id] => 768047
[patent_doc_number] => 07005032
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-02-28
[patent_title] => 'Wafer table for local dry etching apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/098588
[patent_app_country] => US
[patent_app_date] => 2002-03-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 14
[patent_no_of_words] => 4282
[patent_no_of_claims] => 4
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 104
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/005/07005032.pdf
[firstpage_image] =>[orig_patent_app_number] => 10098588
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/098588 | Wafer table for local dry etching apparatus | Mar 17, 2002 | Issued |
Array
(
[id] => 6794473
[patent_doc_number] => 20030173346
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-09-18
[patent_title] => 'System and method for heating and cooling wafer at accelerated rates'
[patent_app_type] => new
[patent_app_number] => 10/100934
[patent_app_country] => US
[patent_app_date] => 2002-03-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 4064
[patent_no_of_claims] => 25
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 43
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0173/20030173346.pdf
[firstpage_image] =>[orig_patent_app_number] => 10100934
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/100934 | System and method for heating and cooling wafer at accelerated rates | Mar 17, 2002 | Abandoned |
Array
(
[id] => 1138766
[patent_doc_number] => 06776849
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2004-08-17
[patent_title] => 'Wafer holder with peripheral lift ring'
[patent_app_type] => B2
[patent_app_number] => 10/100308
[patent_app_country] => US
[patent_app_date] => 2002-03-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 19
[patent_figures_cnt] => 21
[patent_no_of_words] => 9249
[patent_no_of_claims] => 36
[patent_no_of_ind_claims] => 7
[patent_words_short_claim] => 187
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/776/06776849.pdf
[firstpage_image] =>[orig_patent_app_number] => 10100308
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/100308 | Wafer holder with peripheral lift ring | Mar 14, 2002 | Issued |
Array
(
[id] => 5844653
[patent_doc_number] => 20020132497
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-09-19
[patent_title] => 'Substrate processing apparatus and method for manufacturing semiconductor device'
[patent_app_type] => new
[patent_app_number] => 10/097624
[patent_app_country] => US
[patent_app_date] => 2002-03-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 6736
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 126
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0132/20020132497.pdf
[firstpage_image] =>[orig_patent_app_number] => 10097624
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/097624 | Substrate processing apparatus and method for manufacturing semiconductor device | Mar 14, 2002 | Abandoned |
Array
(
[id] => 5839258
[patent_doc_number] => 20020129770
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-09-19
[patent_title] => 'Vacuum deposition system'
[patent_app_type] => new
[patent_app_number] => 10/099502
[patent_app_country] => US
[patent_app_date] => 2002-03-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 5735
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 108
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0129/20020129770.pdf
[firstpage_image] =>[orig_patent_app_number] => 10099502
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/099502 | Vacuum deposition system | Mar 14, 2002 | Abandoned |
Array
(
[id] => 6708426
[patent_doc_number] => 20030168175
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-09-11
[patent_title] => 'Substrate alignment apparatus'
[patent_app_type] => new
[patent_app_number] => 10/094156
[patent_app_country] => US
[patent_app_date] => 2002-03-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4941
[patent_no_of_claims] => 41
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 138
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0168/20030168175.pdf
[firstpage_image] =>[orig_patent_app_number] => 10094156
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/094156 | Substrate alignment apparatus | Mar 7, 2002 | Abandoned |
Array
(
[id] => 6708425
[patent_doc_number] => 20030168174
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-09-11
[patent_title] => 'Gas cushion susceptor system'
[patent_app_type] => new
[patent_app_number] => 10/093882
[patent_app_country] => US
[patent_app_date] => 2002-03-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 9985
[patent_no_of_claims] => 36
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 59
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0168/20030168174.pdf
[firstpage_image] =>[orig_patent_app_number] => 10093882
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/093882 | Gas cushion susceptor system | Mar 7, 2002 | Abandoned |
Array
(
[id] => 6410646
[patent_doc_number] => 20020124964
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2002-09-12
[patent_title] => 'Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same'
[patent_app_type] => new
[patent_app_number] => 10/087833
[patent_app_country] => US
[patent_app_date] => 2002-03-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 3813
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 98
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0124/20020124964.pdf
[firstpage_image] =>[orig_patent_app_number] => 10087833
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/087833 | Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same | Mar 4, 2002 | Issued |
Array
(
[id] => 6832479
[patent_doc_number] => 20030160024
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-08-28
[patent_title] => 'Plasma processing method and apparatus'
[patent_app_type] => new
[patent_app_number] => 10/083252
[patent_app_country] => US
[patent_app_date] => 2002-02-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 4228
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0160/20030160024.pdf
[firstpage_image] =>[orig_patent_app_number] => 10083252
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/083252 | Plasma processing method and apparatus | Feb 26, 2002 | Abandoned |
Array
(
[id] => 6737712
[patent_doc_number] => 20030155080
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2003-08-21
[patent_title] => 'Microchip fabrication chamber wafer detection'
[patent_app_type] => new
[patent_app_number] => 10/081665
[patent_app_country] => US
[patent_app_date] => 2002-02-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 3353
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 44
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0155/20030155080.pdf
[firstpage_image] =>[orig_patent_app_number] => 10081665
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/081665 | Microchip fabrication chamber wafer detection | Feb 20, 2002 | Issued |