Daniel D. Chang

Array ( [id] => 5839688 [patent_doc_number] => 20020130061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-19 [patent_title] => 'Apparatus and method of making a slip free wafer boat' [patent_app_type] => new [patent_app_number] => 09/884720 [patent_app_country] => US [patent_app_date] => 2001-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4068 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20020130061.pdf [firstpage_image] =>[orig_patent_app_number] => 09884720 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6933045 [patent_doc_number] => 20010054389 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-27 [patent_title] => 'Electro-static chucking mechanism and surface processing apparatus' [patent_app_type] => new [patent_app_number] => 09/879934 [patent_app_country] => US [patent_app_date] => 2001-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4826 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20010054389.pdf [firstpage_image] =>[orig_patent_app_number] => 09879934 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6252709 [patent_doc_number] => 20020185230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-12 [patent_title] => 'Article holders that use gas vortices to hold an article in a desired position' [patent_app_type] => new [patent_app_number] => 09/877366 [patent_app_country] => US [patent_app_date] => 2001-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2424 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20020185230.pdf [firstpage_image] =>[orig_patent_app_number] => 09877366 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7065007 [patent_doc_number] => 20010044217 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-22 [patent_title] => 'Plasma deposition of spin chucks to reduce contamination of silicon wafers' [patent_app_type] => new [patent_app_number] => 09/874073 [patent_app_country] => US [patent_app_date] => 2001-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3432 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0044/20010044217.pdf [firstpage_image] =>[orig_patent_app_number] => 09874073 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1274918 [patent_doc_number] => 06645344 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-11-11 [patent_title] => 'Universal backplane assembly and methods' [patent_app_type] => B2 [patent_app_number] => 09/861322 [patent_app_country] => US [patent_app_date] => 2001-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 7874 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 350 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/645/06645344.pdf [firstpage_image] =>[orig_patent_app_number] => 09861322 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1294181 [patent_doc_number] => 06626997 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-09-30 [patent_title] => 'Continuous processing chamber' [patent_app_type] => B2 [patent_app_number] => 09/861415 [patent_app_country] => US [patent_app_date] => 2001-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 15 [patent_no_of_words] => 4753 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/626/06626997.pdf [firstpage_image] =>[orig_patent_app_number] => 09861415 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1259653 [patent_doc_number] => 06663714 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-12-16 [patent_title] => 'CVD apparatus' [patent_app_type] => B2 [patent_app_number] => 09/858239 [patent_app_country] => US [patent_app_date] => 2001-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 8166 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/663/06663714.pdf [firstpage_image] =>[orig_patent_app_number] => 09858239 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6451620 [patent_doc_number] => 20020020189 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Temperature adjustment apparatus' [patent_app_type] => new [patent_app_number] => 09/858859 [patent_app_country] => US [patent_app_date] => 2001-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3791 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020189.pdf [firstpage_image] =>[orig_patent_app_number] => 09858859 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6997842 [patent_doc_number] => 20010052321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-20 [patent_title] => 'Single-substrate-processing apparatus for semiconductor' [patent_app_type] => new [patent_app_number] => 09/855493 [patent_app_country] => US [patent_app_date] => 2001-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 3940 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0052/20010052321.pdf [firstpage_image] =>[orig_patent_app_number] => 09855493 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6453592 [patent_doc_number] => 20020020355 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Processing apparatus' [patent_app_type] => new [patent_app_number] => 09/851330 [patent_app_country] => US [patent_app_date] => 2001-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 12189 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 343 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020355.pdf [firstpage_image] =>[orig_patent_app_number] => 09851330 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1244730 [patent_doc_number] => 06676759 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-01-13 [patent_title] => 'Wafer support device in semiconductor manufacturing device' [patent_app_type] => B1 [patent_app_number] => 09/830613 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 3192 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/676/06676759.pdf [firstpage_image] =>[orig_patent_app_number] => 09830613 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1198901 [patent_doc_number] => 06723202 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-04-20 [patent_title] => 'Worktable device and plasma processing apparatus for semiconductor process' [patent_app_type] => B2 [patent_app_number] => 09/840178 [patent_app_country] => US [patent_app_date] => 2001-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 11 [patent_no_of_words] => 5765 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/723/06723202.pdf [firstpage_image] =>[orig_patent_app_number] => 09840178 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6886625 [patent_doc_number] => 20010019894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-09-06 [patent_title] => 'Pre-heat step (or chamber) implemented in pr dry ash machines to effectively eliminate pr extrusion (bubble) after alloy' [patent_app_type] => new [patent_app_number] => 09/838748 [patent_app_country] => US [patent_app_date] => 2001-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4225 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0019/20010019894.pdf [firstpage_image] =>[orig_patent_app_number] => 09838748 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7090280 [patent_doc_number] => 20010032588 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'Semiconductor film deposition apparatus' [patent_app_type] => new [patent_app_number] => 09/838215 [patent_app_country] => US [patent_app_date] => 2001-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4813 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20010032588.pdf [firstpage_image] =>[orig_patent_app_number] => 09838215 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6168829 [patent_doc_number] => 20020153100 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Cooling system' [patent_app_type] => new [patent_app_number] => 09/837943 [patent_app_country] => US [patent_app_date] => 2001-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4379 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20020153100.pdf [firstpage_image] =>[orig_patent_app_number] => 09837943 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1020531 [patent_doc_number] => 06887316 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-03 [patent_title] => 'Ceramic heater' [patent_app_type] => utility [patent_app_number] => 09/926730 [patent_app_country] => US [patent_app_date] => 2001-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 8151 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/887/06887316.pdf [firstpage_image] =>[orig_patent_app_number] => 09926730 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6152811 [patent_doc_number] => 20020144783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-10 [patent_title] => 'Apparatus and method for accelerating process stability of high temperature vacuum processes after chamber cleaning' [patent_app_type] => new [patent_app_number] => 09/827877 [patent_app_country] => US [patent_app_date] => 2001-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4639 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20020144783.pdf [firstpage_image] =>[orig_patent_app_number] => 09827877 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6453645 [patent_doc_number] => 20020020360 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Silicon wafer supporting device for supporting a silicon wafer subjected to an evaporation process on its underside' [patent_app_type] => new [patent_app_number] => 09/826562 [patent_app_country] => US [patent_app_date] => 2001-04-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1681 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020360.pdf [firstpage_image] =>[orig_patent_app_number] => 09826562 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5906983 [patent_doc_number] => 20020142612 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Shielding plate in plasma for uniformity improvement' [patent_app_type] => new [patent_app_number] => 09/823528 [patent_app_country] => US [patent_app_date] => 2001-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3445 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0142/20020142612.pdf [firstpage_image] =>[orig_patent_app_number] => 09823528 [rel_patent_id] =>[rel_patent_doc_number] =>)