Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 5906982 [patent_doc_number] => 20020142611 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof' [patent_app_type] => new [patent_app_number] => 09/820693 [patent_app_country] => US [patent_app_date] => 2001-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5625 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0142/20020142611.pdf [firstpage_image] =>[orig_patent_app_number] => 09820693 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/820693
Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof Mar 29, 2001 Issued
Array ( [id] => 6027821 [patent_doc_number] => 20020017363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-14 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => new [patent_app_number] => 09/816643 [patent_app_country] => US [patent_app_date] => 2001-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 13965 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0017/20020017363.pdf [firstpage_image] =>[orig_patent_app_number] => 09816643 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/816643
Substrate processing apparatus and substrate processing method Mar 22, 2001 Abandoned
Array ( [id] => 1204356 [patent_doc_number] => 06716301 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-04-06 [patent_title] => 'Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe' [patent_app_type] => B2 [patent_app_number] => 09/799527 [patent_app_country] => US [patent_app_date] => 2001-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 12201 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/716/06716301.pdf [firstpage_image] =>[orig_patent_app_number] => 09799527 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/799527
Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe Mar 6, 2001 Issued
Array ( [id] => 1306719 [patent_doc_number] => 06613151 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-09-02 [patent_title] => 'Single disc vapor lubrication' [patent_app_type] => B1 [patent_app_number] => 09/798934 [patent_app_country] => US [patent_app_date] => 2001-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 5606 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/613/06613151.pdf [firstpage_image] =>[orig_patent_app_number] => 09798934 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/798934
Single disc vapor lubrication Mar 5, 2001 Issued
Array ( [id] => 1352511 [patent_doc_number] => 06572708 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-06-03 [patent_title] => 'Semiconductor wafer support lift-pin assembly' [patent_app_type] => B2 [patent_app_number] => 09/797214 [patent_app_country] => US [patent_app_date] => 2001-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 5144 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/572/06572708.pdf [firstpage_image] =>[orig_patent_app_number] => 09797214 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/797214
Semiconductor wafer support lift-pin assembly Feb 27, 2001 Issued
Array ( [id] => 6267742 [patent_doc_number] => 20020104619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-08-08 [patent_title] => 'Method and system for rotating a semiconductor wafer in processing chambers' [patent_app_type] => new [patent_app_number] => 09/776241 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6200 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0104/20020104619.pdf [firstpage_image] =>[orig_patent_app_number] => 09776241 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/776241
Method and system for rotating a semiconductor wafer in processing chambers Feb 1, 2001 Issued
Array ( [id] => 7039698 [patent_doc_number] => 20010004880 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-06-28 [patent_title] => 'Pedestal with a thermally controlled platen' [patent_app_type] => new-utility [patent_app_number] => 09/776002 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2922 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0004/20010004880.pdf [firstpage_image] =>[orig_patent_app_number] => 09776002 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/776002
Pedestal with a thermally controlled platen Feb 1, 2001 Issued
Array ( [id] => 7093201 [patent_doc_number] => 20010034111 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'METHOD AND APPARATUS DIFFFUSING ZINC INTO GROUPS III-V COMPOUND SEMICONDUCTOR CRYSTALS' [patent_app_type] => new [patent_app_number] => 09/773545 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12379 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0034/20010034111.pdf [firstpage_image] =>[orig_patent_app_number] => 09773545 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/773545
Method and apparatus diffusing zinc into groups III-V compound semiconductor crystals Feb 1, 2001 Issued
Array ( [id] => 1342767 [patent_doc_number] => 06579374 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-06-17 [patent_title] => 'Apparatus for fabrication of thin films' [patent_app_type] => B2 [patent_app_number] => 09/769562 [patent_app_country] => US [patent_app_date] => 2001-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7429 [patent_no_of_claims] => 75 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579374.pdf [firstpage_image] =>[orig_patent_app_number] => 09769562 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/769562
Apparatus for fabrication of thin films Jan 24, 2001 Issued
Array ( [id] => 5981412 [patent_doc_number] => 20020096495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-25 [patent_title] => 'Apparatus and method for monitoring backflow vapors' [patent_app_type] => new [patent_app_number] => 09/766137 [patent_app_country] => US [patent_app_date] => 2001-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6459 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20020096495.pdf [firstpage_image] =>[orig_patent_app_number] => 09766137 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/766137
Apparatus and method for monitoring backflow vapors Jan 18, 2001 Abandoned
Array ( [id] => 6887231 [patent_doc_number] => 20010008225 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-07-19 [patent_title] => 'Method of wiring formation and method for manufacturing electronic components' [patent_app_type] => new-utility [patent_app_number] => 09/761317 [patent_app_country] => US [patent_app_date] => 2001-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4204 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0008/20010008225.pdf [firstpage_image] =>[orig_patent_app_number] => 09761317 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/761317
Method of wiring formation and method for manufacturing electronic components Jan 16, 2001 Issued
Array ( [id] => 816785 [patent_doc_number] => 07410592 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-08-12 [patent_title] => 'Stamp for use in a lithographic process, method of manufacturing a stamp, and method of manufacturing a patterned layer on a substrate' [patent_app_type] => utility [patent_app_number] => 09/759179 [patent_app_country] => US [patent_app_date] => 2001-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 14 [patent_no_of_words] => 5974 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/410/07410592.pdf [firstpage_image] =>[orig_patent_app_number] => 09759179 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/759179
Stamp for use in a lithographic process, method of manufacturing a stamp, and method of manufacturing a patterned layer on a substrate Jan 11, 2001 Issued
Array ( [id] => 6893936 [patent_doc_number] => 20010016302 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-08-23 [patent_title] => 'Wafer chucks allowing controlled reduction of substrate heating and rapid substrate exchange' [patent_app_type] => new [patent_app_number] => 09/749865 [patent_app_country] => US [patent_app_date] => 2000-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9989 [patent_no_of_claims] => 46 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20010016302.pdf [firstpage_image] =>[orig_patent_app_number] => 09749865 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/749865
Wafer chucks allowing controlled reduction of substrate heating and rapid substrate exchange Dec 26, 2000 Abandoned
Array ( [id] => 1373865 [patent_doc_number] => 06551404 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-22 [patent_title] => 'Apparatus for treating a wafer' [patent_app_type] => B2 [patent_app_number] => 09/747275 [patent_app_country] => US [patent_app_date] => 2000-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 5466 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/551/06551404.pdf [firstpage_image] =>[orig_patent_app_number] => 09747275 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/747275
Apparatus for treating a wafer Dec 21, 2000 Issued
Array ( [id] => 1359380 [patent_doc_number] => 06565662 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-05-20 [patent_title] => 'Vacuum processing apparatus for semiconductor process' [patent_app_type] => B2 [patent_app_number] => 09/739701 [patent_app_country] => US [patent_app_date] => 2000-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 5250 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 277 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/565/06565662.pdf [firstpage_image] =>[orig_patent_app_number] => 09739701 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/739701
Vacuum processing apparatus for semiconductor process Dec 19, 2000 Issued
Array ( [id] => 1380972 [patent_doc_number] => 06544340 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-08 [patent_title] => 'Heater with detachable ceramic top plate' [patent_app_type] => B2 [patent_app_number] => 09/733374 [patent_app_country] => US [patent_app_date] => 2000-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 4601 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/544/06544340.pdf [firstpage_image] =>[orig_patent_app_number] => 09733374 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/733374
Heater with detachable ceramic top plate Dec 7, 2000 Issued
Array ( [id] => 1288716 [patent_doc_number] => 06630029 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-10-07 [patent_title] => 'Fiber coating method and reactor' [patent_app_type] => B2 [patent_app_number] => 09/728904 [patent_app_country] => US [patent_app_date] => 2000-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 9 [patent_no_of_words] => 3637 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/630/06630029.pdf [firstpage_image] =>[orig_patent_app_number] => 09728904 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/728904
Fiber coating method and reactor Dec 3, 2000 Issued
Array ( [id] => 1177140 [patent_doc_number] => 06740166 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-05-25 [patent_title] => 'Thin film deposition apparatus for semiconductor' [patent_app_type] => B2 [patent_app_number] => 09/726977 [patent_app_country] => US [patent_app_date] => 2000-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 3268 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 368 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/740/06740166.pdf [firstpage_image] =>[orig_patent_app_number] => 09726977 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/726977
Thin film deposition apparatus for semiconductor Nov 29, 2000 Issued
Array ( [id] => 6885625 [patent_doc_number] => 20010018894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-09-06 [patent_title] => 'Vertical low-pressure chemical vapor deposition furnace' [patent_app_type] => new [patent_app_number] => 09/727125 [patent_app_country] => US [patent_app_date] => 2000-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2377 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0018/20010018894.pdf [firstpage_image] =>[orig_patent_app_number] => 09727125 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/727125
Vertical low-pressure chemical vapor deposition furnace Nov 29, 2000 Abandoned
09/715576 Susceptor designs for silicon carbide thin films Nov 16, 2000 Abandoned
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