| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 1570263
[patent_doc_number] => 06467427
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2002-10-22
[patent_title] => 'Evaporation source material supplier'
[patent_app_type] => B1
[patent_app_number] => 09/710713
[patent_app_country] => US
[patent_app_date] => 2000-11-10
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[firstpage_image] =>[orig_patent_app_number] => 09710713
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/710713 | Evaporation source material supplier | Nov 9, 2000 | Issued |
Array
(
[id] => 1370678
[patent_doc_number] => 06554906
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2003-04-29
[patent_title] => 'Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same'
[patent_app_type] => B1
[patent_app_number] => 09/707813
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[pdf_file] => patents/06/554/06554906.pdf
[firstpage_image] =>[orig_patent_app_number] => 09707813
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/707813 | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same | Nov 6, 2000 | Issued |
| 09/704641 | Method and apparatus for supercritical processing of a workpiece | Oct 31, 2000 | Abandoned |
Array
(
[id] => 836588
[patent_doc_number] => 07393417
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2008-07-01
[patent_title] => 'Semiconductor-manufacturing apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/111555
[patent_app_country] => US
[patent_app_date] => 2000-10-20
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[pdf_file] => patents/07/393/07393417.pdf
[firstpage_image] =>[orig_patent_app_number] => 10111555
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/111555 | Semiconductor-manufacturing apparatus | Oct 19, 2000 | Issued |
| 09/686370 | Processing Appartatus for Conservation of Processing Gases | Oct 11, 2000 | Abandoned |
| 09/554629 | Device for holding semiconductor wafer | Oct 10, 2000 | Abandoned |
Array
(
[id] => 1297173
[patent_doc_number] => 06623597
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2003-09-23
[patent_title] => 'Focus ring and apparatus for processing a semiconductor wafer comprising the same'
[patent_app_type] => B1
[patent_app_number] => 09/671212
[patent_app_country] => US
[patent_app_date] => 2000-09-28
[patent_effective_date] => 0000-00-00
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[firstpage_image] =>[orig_patent_app_number] => 09671212
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/671212 | Focus ring and apparatus for processing a semiconductor wafer comprising the same | Sep 27, 2000 | Issued |
| 09/651498 | TEMPERATURE CONTROL ELEMENTS, SPINDLE ASSEMBLY, AND WAFER PROCESSING ASSEMBLY INCORPORATING SAME | Aug 29, 2000 | Abandoned |
Array
(
[id] => 1174392
[patent_doc_number] => 06743329
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2004-06-01
[patent_title] => 'Sealing mechanism of multi-chamber load-locking device'
[patent_app_type] => B1
[patent_app_number] => 09/650122
[patent_app_country] => US
[patent_app_date] => 2000-08-29
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[rel_patent_id] =>[rel_patent_doc_number] =>) 09/650122 | Sealing mechanism of multi-chamber load-locking device | Aug 28, 2000 | Issued |
Array
(
[id] => 1320539
[patent_doc_number] => 06602346
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2003-08-05
[patent_title] => 'Gas-purged vacuum valve'
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[firstpage_image] =>[orig_patent_app_number] => 09643523
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/643523 | Gas-purged vacuum valve | Aug 21, 2000 | Issued |
Array
(
[id] => 1177148
[patent_doc_number] => 06740167
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2004-05-25
[patent_title] => 'Device for mounting a substrate and method for producing an insert for a susceptor'
[patent_app_type] => B1
[patent_app_number] => 09/630154
[patent_app_country] => US
[patent_app_date] => 2000-07-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
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[pdf_file] => patents/06/740/06740167.pdf
[firstpage_image] =>[orig_patent_app_number] => 09630154
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/630154 | Device for mounting a substrate and method for producing an insert for a susceptor | Jul 30, 2000 | Issued |
| 09/619870 | Method and apparatus for dechucking a substrate | Jul 19, 2000 | Abandoned |
Array
(
[id] => 938243
[patent_doc_number] => 06972071
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2005-12-06
[patent_title] => 'High-speed symmetrical plasma treatment system'
[patent_app_type] => utility
[patent_app_number] => 10/030723
[patent_app_country] => US
[patent_app_date] => 2000-07-10
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[pdf_file] => patents/06/972/06972071.pdf
[firstpage_image] =>[orig_patent_app_number] => 10030723
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/030723 | High-speed symmetrical plasma treatment system | Jul 9, 2000 | Issued |
Array
(
[id] => 1413438
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[patent_issue_date] => 2003-01-14
[patent_title] => 'Semiconductor processing equipment having improved particle performance'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 09/607923 | Semiconductor processing equipment having improved particle performance | Jun 29, 2000 | Issued |
Array
(
[id] => 1438946
[patent_doc_number] => 06494955
[patent_country] => US
[patent_kind] => B1
[patent_issue_date] => 2002-12-17
[patent_title] => 'Ceramic substrate support'
[patent_app_type] => B1
[patent_app_number] => 09/596854
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[rel_patent_id] =>[rel_patent_doc_number] =>) 09/596854 | Ceramic substrate support | Jun 18, 2000 | Issued |
Array
(
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[patent_title] => 'Apparatus for fabrication of thin films'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 09/568077 | Apparatus for fabrication of thin films | May 9, 2000 | Issued |
Array
(
[id] => 718390
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[patent_kind] => B1
[patent_issue_date] => 2006-05-23
[patent_title] => 'Device for treating silicon wafers'
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[firstpage_image] =>[orig_patent_app_number] => 09959495
[rel_patent_id] =>[rel_patent_doc_number] =>) 09/959495 | Device for treating silicon wafers | Apr 12, 2000 | Issued |
| 09/511934 | Thin-Film forming apparatus having an automatic cleaning function for cleaning the inside | Feb 23, 2000 | Abandoned |
Array
(
[id] => 6845058
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[patent_app_type] => new
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[rel_patent_id] =>[rel_patent_doc_number] =>) 09/294367 | PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING | Apr 19, 1999 | Abandoned |