Search

Daniel D. Chang

Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )

Most Active Art Unit
2844
Art Unit(s)
2844, 0, 2819
Total Applications
2537
Issued Applications
2319
Pending Applications
103
Abandoned Applications
143

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18371757 [patent_doc_number] => 11651938 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-16 [patent_title] => Impedance matching device provided in high-frequency power system [patent_app_type] => utility [patent_app_number] => 16/564234 [patent_app_country] => US [patent_app_date] => 2019-09-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 20 [patent_no_of_words] => 3374 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 226 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16564234 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/564234
Impedance matching device provided in high-frequency power system Sep 8, 2019 Issued
Array ( [id] => 16677257 [patent_doc_number] => 20210066023 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => Apparatus For Directional Processing [patent_app_type] => utility [patent_app_number] => 16/551972 [patent_app_country] => US [patent_app_date] => 2019-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7544 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16551972 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/551972
Apparatus for directional processing Aug 26, 2019 Issued
Array ( [id] => 15442545 [patent_doc_number] => 20200035456 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-30 [patent_title] => MAGNETICALLY ENHANCED AND SYMMETRICAL RADIO FREQUENCY DISCHARGE APPARATUS FOR MATERIAL PROCESSING [patent_app_type] => utility [patent_app_number] => 16/520464 [patent_app_country] => US [patent_app_date] => 2019-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3210 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16520464 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/520464
MAGNETICALLY ENHANCED AND SYMMETRICAL RADIO FREQUENCY DISCHARGE APPARATUS FOR MATERIAL PROCESSING Jul 23, 2019 Abandoned
Array ( [id] => 15123367 [patent_doc_number] => 20190348317 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-14 [patent_title] => EDGE RING OR PROCESS KIT FOR SEMICONDUCTOR PROCESS MODULE [patent_app_type] => utility [patent_app_number] => 16/518940 [patent_app_country] => US [patent_app_date] => 2019-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5399 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16518940 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/518940
EDGE RING OR PROCESS KIT FOR SEMICONDUCTOR PROCESS MODULE Jul 21, 2019 Abandoned
Array ( [id] => 18097277 [patent_doc_number] => 20220415618 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/958313 [patent_app_country] => US [patent_app_date] => 2019-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9662 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16958313 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/958313
Plasma processing apparatus Jul 17, 2019 Issued
Array ( [id] => 17070560 [patent_doc_number] => 20210272777 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-02 [patent_title] => PLASMA TREATMENT DEVICE [patent_app_type] => utility [patent_app_number] => 17/260233 [patent_app_country] => US [patent_app_date] => 2019-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8402 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17260233 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/260233
Plasma treatment device Jul 16, 2019 Issued
Array ( [id] => 19886794 [patent_doc_number] => 12272520 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-08 [patent_title] => Process control enabled VDC sensor for plasma process [patent_app_type] => utility [patent_app_number] => 16/506202 [patent_app_country] => US [patent_app_date] => 2019-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 14 [patent_no_of_words] => 6835 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16506202 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/506202
Process control enabled VDC sensor for plasma process Jul 8, 2019 Issued
Array ( [id] => 15351409 [patent_doc_number] => 20200013596 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-09 [patent_title] => PLASMA PROCESS MONITORING APPARATUS AND PLASMA PROCESSING APPARATUS COMPRISING THE SAME [patent_app_type] => utility [patent_app_number] => 16/459833 [patent_app_country] => US [patent_app_date] => 2019-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8952 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16459833 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/459833
PLASMA PROCESS MONITORING APPARATUS AND PLASMA PROCESSING APPARATUS COMPRISING THE SAME Jul 1, 2019 Pending
Array ( [id] => 16765422 [patent_doc_number] => 20210111004 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-15 [patent_title] => FLOW RATE CONTROLLER, GAS SUPPLY SYSTEM, AND FLOW RATE CONTROL METHOD [patent_app_type] => utility [patent_app_number] => 16/979812 [patent_app_country] => US [patent_app_date] => 2019-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6456 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16979812 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/979812
Flow rate controller, gas supply system, and flow rate control method Jun 25, 2019 Issued
Array ( [id] => 15299763 [patent_doc_number] => 20190393017 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-26 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SIGNAL SOURCE DEVICE, METHOD OF PROCESSING MATERIAL LAYER, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/448450 [patent_app_country] => US [patent_app_date] => 2019-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7416 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16448450 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/448450
Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device Jun 20, 2019 Issued
Array ( [id] => 15564163 [patent_doc_number] => 20200066493 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => METHODS AND APPARATUS FOR PLASMA LINERS WITH HIGH FLUID CONDUCTANCE [patent_app_type] => utility [patent_app_number] => 16/448536 [patent_app_country] => US [patent_app_date] => 2019-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5474 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16448536 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/448536
METHODS AND APPARATUS FOR PLASMA LINERS WITH HIGH FLUID CONDUCTANCE Jun 20, 2019 Abandoned
Array ( [id] => 15294423 [patent_doc_number] => 20190390347 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-26 [patent_title] => CONTROL DEVICE, FILM FORMING APPARATUS, CONTROL METHOD, FILM FORMING METHOD, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/446019 [patent_app_country] => US [patent_app_date] => 2019-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13263 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16446019 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/446019
CONTROL DEVICE, FILM FORMING APPARATUS, CONTROL METHOD, FILM FORMING METHOD, AND RECORDING MEDIUM Jun 18, 2019 Abandoned
Array ( [id] => 16966110 [patent_doc_number] => 20210217609 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-15 [patent_title] => METHOD OR APPARATUS FOR FORMING THIN FILM ON SUBSTRATE EMPLOYING ATOMIC LAYER EPITAXY METHOD [patent_app_type] => utility [patent_app_number] => 17/058975 [patent_app_country] => US [patent_app_date] => 2019-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10090 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17058975 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/058975
METHOD OR APPARATUS FOR FORMING THIN FILM ON SUBSTRATE EMPLOYING ATOMIC LAYER EPITAXY METHOD May 26, 2019 Abandoned
Array ( [id] => 15369573 [patent_doc_number] => 20200020551 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-16 [patent_title] => PLASMA GENERATOR, CLEANING LIQUID PROCESSING APPARATUS, SEMICONDUCTOR DEVICE CLEANING APPARATUS, CLEANING LIQUID PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/421473 [patent_app_country] => US [patent_app_date] => 2019-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9653 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16421473 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/421473
Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device May 23, 2019 Issued
Array ( [id] => 17716524 [patent_doc_number] => 11380522 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-05 [patent_title] => Radical deactivation component, plasma processing apparatus using the same and radical deactivation method [patent_app_type] => utility [patent_app_number] => 16/416681 [patent_app_country] => US [patent_app_date] => 2019-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 9886 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 24 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16416681 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/416681
Radical deactivation component, plasma processing apparatus using the same and radical deactivation method May 19, 2019 Issued
Array ( [id] => 15123257 [patent_doc_number] => 20190348262 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-14 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/409347 [patent_app_country] => US [patent_app_date] => 2019-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4416 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16409347 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/409347
Plasma processing apparatus May 9, 2019 Issued
Array ( [id] => 18047878 [patent_doc_number] => 11521836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-06 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/407508 [patent_app_country] => US [patent_app_date] => 2019-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 7473 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 242 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16407508 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/407508
Plasma processing apparatus May 8, 2019 Issued
Array ( [id] => 15092837 [patent_doc_number] => 20190341230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-07 [patent_title] => CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING [patent_app_type] => utility [patent_app_number] => 16/400332 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2890 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400332 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/400332
CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING Apr 30, 2019 Abandoned
Array ( [id] => 14752813 [patent_doc_number] => 20190259580 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-22 [patent_title] => OPTICAL EMISSION SPECTROSCOPY (OES) FOR REMOTE PLASMA MONITORING [patent_app_type] => utility [patent_app_number] => 16/400615 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7420 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400615 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/400615
OPTICAL EMISSION SPECTROSCOPY (OES) FOR REMOTE PLASMA MONITORING Apr 30, 2019 Pending
Array ( [id] => 15179017 [patent_doc_number] => 20190360100 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH [patent_app_type] => utility [patent_app_number] => 16/400054 [patent_app_country] => US [patent_app_date] => 2019-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4086 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16400054 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/400054
Ground path systems for providing a shorter and symmetrical ground path Apr 30, 2019 Issued
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