Daniel T. Pihulic

Array ( [id] => 17499048 [patent_doc_number] => 11287751 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-29 [patent_title] => System and method for lens heating control [patent_app_type] => utility [patent_app_number] => 16/942575 [patent_app_country] => US [patent_app_date] => 2020-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6177 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16942575 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16709360 [patent_doc_number] => 10959317 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-03-23 [patent_title] => Extreme ultraviolet light generating apparatus and method of manufacturing electronic device [patent_app_type] => utility [patent_app_number] => 16/938895 [patent_app_country] => US [patent_app_date] => 2020-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 14037 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 257 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16938895 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16423407 [patent_doc_number] => 20200348605 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/931002 [patent_app_country] => US [patent_app_date] => 2020-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12405 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16931002 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17331100 [patent_doc_number] => 11221559 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-11 [patent_title] => Photomask [patent_app_type] => utility [patent_app_number] => 16/924569 [patent_app_country] => US [patent_app_date] => 2020-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 47 [patent_no_of_words] => 7879 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16924569 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19917315 [patent_doc_number] => 12292682 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-06 [patent_title] => Method and device for producing micro- and/or nanostructures [patent_app_type] => utility [patent_app_number] => 18/011276 [patent_app_country] => US [patent_app_date] => 2020-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 9109 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 292 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18011276 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17808921 [patent_doc_number] => 20220260756 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => OXYGEN-LOSS RESISTANT TOP COATING FOR OPTICAL ELEMENTS [patent_app_type] => utility [patent_app_number] => 17/625426 [patent_app_country] => US [patent_app_date] => 2020-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6197 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 21 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17625426 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17379471 [patent_doc_number] => 11237483 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-01 [patent_title] => Method and apparatus for controlling droplet in extreme ultraviolet light source [patent_app_type] => utility [patent_app_number] => 16/901552 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 20 [patent_no_of_words] => 10453 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16901552 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20273339 [patent_doc_number] => 12443116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-14 [patent_title] => Machine measurement metrology frame for a lithography system [patent_app_type] => utility [patent_app_number] => 18/000035 [patent_app_country] => US [patent_app_date] => 2020-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 0 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18000035 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16330322 [patent_doc_number] => 20200301288 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-24 [patent_title] => RESERVING SPATIAL LIGHT MODULATOR SECTIONS TO ADDRESS FIELD NON-UNIFORMITIES [patent_app_type] => utility [patent_app_number] => 16/895971 [patent_app_country] => US [patent_app_date] => 2020-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4115 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16895971 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16918191 [patent_doc_number] => 20210191283 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-24 [patent_title] => PARTICLE PREVENTION METHOD IN LITHOGRAPHY EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/885149 [patent_app_country] => US [patent_app_date] => 2020-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9945 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16885149 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17364639 [patent_doc_number] => 11231658 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-25 [patent_title] => Arrangement for an EUV lithography apparatus [patent_app_type] => utility [patent_app_number] => 16/882511 [patent_app_country] => US [patent_app_date] => 2020-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 21 [patent_no_of_words] => 6757 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16882511 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16299434 [patent_doc_number] => 20200285157 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-10 [patent_title] => METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER [patent_app_type] => utility [patent_app_number] => 16/881991 [patent_app_country] => US [patent_app_date] => 2020-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 42284 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16881991 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18342639 [patent_doc_number] => 11640117 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-02 [patent_title] => Selection of regions of interest for measurement of misregistration and amelioration thereof [patent_app_type] => utility [patent_app_number] => 16/956209 [patent_app_country] => US [patent_app_date] => 2020-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5049 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16956209 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17136145 [patent_doc_number] => 11137696 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Lithography apparatus and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 16/877872 [patent_app_country] => US [patent_app_date] => 2020-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 43 [patent_no_of_words] => 11143 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16877872 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17422730 [patent_doc_number] => 11256183 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-22 [patent_title] => Detection method and system for pellicle membrane of photomask [patent_app_type] => utility [patent_app_number] => 16/876148 [patent_app_country] => US [patent_app_date] => 2020-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 3812 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16876148 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16469906 [patent_doc_number] => 20200371443 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-26 [patent_title] => EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE [patent_app_type] => utility [patent_app_number] => 16/876453 [patent_app_country] => US [patent_app_date] => 2020-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9000 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16876453 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16285015 [patent_doc_number] => 20200278617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-03 [patent_title] => RADIATION SOURCE FOR LITHOGRAPHY PROCESS [patent_app_type] => utility [patent_app_number] => 16/876442 [patent_app_country] => US [patent_app_date] => 2020-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8080 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16876442 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17736322 [patent_doc_number] => 20220221781 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => PRINTING SYSTEM USING A PROJECTION DEVICE [patent_app_type] => utility [patent_app_number] => 17/611271 [patent_app_country] => US [patent_app_date] => 2020-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6985 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17611271 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16469909 [patent_doc_number] => 20200371446 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-26 [patent_title] => EXPOSURE APPARATUS AND EXPOSURE METHOD [patent_app_type] => utility [patent_app_number] => 15/930443 [patent_app_country] => US [patent_app_date] => 2020-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8452 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15930443 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17931502 [patent_doc_number] => 20220326627 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE ACTUATORS [patent_app_type] => utility [patent_app_number] => 17/608760 [patent_app_country] => US [patent_app_date] => 2020-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14422 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17608760 [rel_patent_id] =>[rel_patent_doc_number] =>)