Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16520498 [patent_doc_number] => 10871713 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning [patent_app_type] => utility [patent_app_number] => 16/866188 [patent_app_country] => US [patent_app_date] => 2020-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 7369 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16866188 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/866188
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning May 3, 2020 Issued
Array ( [id] => 16454300 [patent_doc_number] => 20200363726 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-19 [patent_title] => EXPOSURE APPARATUS, EXPOSURE METHOD, DECISION METHOD, AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/864221 [patent_app_country] => US [patent_app_date] => 2020-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9729 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16864221 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/864221
Exposure apparatus, exposure method, decision method, and article manufacturing method Apr 30, 2020 Issued
Array ( [id] => 16224466 [patent_doc_number] => 20200249583 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/854152 [patent_app_country] => US [patent_app_date] => 2020-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5094 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16854152 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/854152
Exposure apparatus and article manufacturing method Apr 20, 2020 Issued
Array ( [id] => 17723370 [patent_doc_number] => 20220216092 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-07 [patent_title] => LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING METHOD [patent_app_type] => utility [patent_app_number] => 17/608238 [patent_app_country] => US [patent_app_date] => 2020-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9114 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17608238 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/608238
Lithographic apparatus, substrate table, and non-uniform coating method Apr 20, 2020 Issued
Array ( [id] => 17706391 [patent_doc_number] => 20220206397 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => LASER FOCUSSING MODULE [patent_app_type] => utility [patent_app_number] => 17/600763 [patent_app_country] => US [patent_app_date] => 2020-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12725 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17600763 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/600763
Laser focussing module Apr 2, 2020 Issued
Array ( [id] => 16801637 [patent_doc_number] => 10996574 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-04 [patent_title] => Substrate processing apparatus, article manufacturing method, substrate processing method, substrate processing system, management apparatus, and storage medium [patent_app_type] => utility [patent_app_number] => 16/830753 [patent_app_country] => US [patent_app_date] => 2020-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5929 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16830753 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/830753
Substrate processing apparatus, article manufacturing method, substrate processing method, substrate processing system, management apparatus, and storage medium Mar 25, 2020 Issued
Array ( [id] => 18917866 [patent_doc_number] => 11880144 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-23 [patent_title] => Object table, a stage apparatus and a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 17/603812 [patent_app_country] => US [patent_app_date] => 2020-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 20 [patent_no_of_words] => 14292 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17603812 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/603812
Object table, a stage apparatus and a lithographic apparatus Mar 24, 2020 Issued
Array ( [id] => 16740254 [patent_doc_number] => 10965935 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-30 [patent_title] => Calibration systems usable for distortion characterization in cameras [patent_app_type] => utility [patent_app_number] => 16/809869 [patent_app_country] => US [patent_app_date] => 2020-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 34 [patent_no_of_words] => 16184 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16809869 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/809869
Calibration systems usable for distortion characterization in cameras Mar 4, 2020 Issued
Array ( [id] => 16949824 [patent_doc_number] => 20210208515 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/808392 [patent_app_country] => US [patent_app_date] => 2020-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6130 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16808392 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/808392
Apparatus and method for processing a substrate using the same Mar 3, 2020 Issued
Array ( [id] => 16469911 [patent_doc_number] => 20200371448 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-26 [patent_title] => METHOD FOR MASK AND SUBSTRATE ALIGNMENT [patent_app_type] => utility [patent_app_number] => 16/807860 [patent_app_country] => US [patent_app_date] => 2020-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12180 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16807860 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/807860
Method for mask and substrate alignment Mar 2, 2020 Issued
Array ( [id] => 16094403 [patent_doc_number] => 20200201188 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => IMAGE EXPOSURE DEVICE [patent_app_type] => utility [patent_app_number] => 16/807364 [patent_app_country] => US [patent_app_date] => 2020-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9092 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16807364 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/807364
Image exposure device Mar 2, 2020 Issued
Array ( [id] => 16682985 [patent_doc_number] => 10942459 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-09 [patent_title] => Lithography system and cleaning method thereof [patent_app_type] => utility [patent_app_number] => 16/805857 [patent_app_country] => US [patent_app_date] => 2020-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 7482 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16805857 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/805857
Lithography system and cleaning method thereof Mar 1, 2020 Issued
Array ( [id] => 16787597 [patent_doc_number] => 10990023 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-04-27 [patent_title] => Method and apparatus for diffraction-based overlay measurement [patent_app_type] => utility [patent_app_number] => 16/803981 [patent_app_country] => US [patent_app_date] => 2020-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 12744 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16803981 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/803981
Method and apparatus for diffraction-based overlay measurement Feb 26, 2020 Issued
Array ( [id] => 16926695 [patent_doc_number] => 11048171 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-29 [patent_title] => Conveying type washing device [patent_app_type] => utility [patent_app_number] => 16/801120 [patent_app_country] => US [patent_app_date] => 2020-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 9305 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16801120 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/801120
Conveying type washing device Feb 24, 2020 Issued
Array ( [id] => 20303740 [patent_doc_number] => 12449726 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-21 [patent_title] => Apparatus for assembly of a reticle assembly [patent_app_type] => utility [patent_app_number] => 17/433038 [patent_app_country] => US [patent_app_date] => 2020-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 37 [patent_no_of_words] => 27640 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17433038 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/433038
Apparatus for assembly of a reticle assembly Feb 24, 2020 Issued
Array ( [id] => 16666266 [patent_doc_number] => 10935504 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-03-02 [patent_title] => Equipment inspection apparatus [patent_app_type] => utility [patent_app_number] => 16/798564 [patent_app_country] => US [patent_app_date] => 2020-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 2809 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 211 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16798564 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/798564
Equipment inspection apparatus Feb 23, 2020 Issued
Array ( [id] => 16565174 [patent_doc_number] => 10890539 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-01-12 [patent_title] => Semiconductor defect inspection apparatus [patent_app_type] => utility [patent_app_number] => 16/798990 [patent_app_country] => US [patent_app_date] => 2020-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 5326 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16798990 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/798990
Semiconductor defect inspection apparatus Feb 23, 2020 Issued
Array ( [id] => 16054675 [patent_doc_number] => 20200189192 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-18 [patent_title] => MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS [patent_app_type] => utility [patent_app_number] => 16/797012 [patent_app_country] => US [patent_app_date] => 2020-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12108 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16797012 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/797012
MODEL-BASED SCANNER TUNING SYSTEMS AND METHODS Feb 20, 2020 Abandoned
Array ( [id] => 17491813 [patent_doc_number] => 11281112 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-22 [patent_title] => Method of measuring misregistration in the manufacture of topographic semiconductor device wafers [patent_app_type] => utility [patent_app_number] => 16/647092 [patent_app_country] => US [patent_app_date] => 2020-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 8878 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16647092 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/647092
Method of measuring misregistration in the manufacture of topographic semiconductor device wafers Feb 13, 2020 Issued
Array ( [id] => 16666643 [patent_doc_number] => 10935885 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-03-02 [patent_title] => System and method for cleaning mesa sidewalls [patent_app_type] => utility [patent_app_number] => 16/787626 [patent_app_country] => US [patent_app_date] => 2020-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 35 [patent_no_of_words] => 9503 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16787626 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/787626
System and method for cleaning mesa sidewalls Feb 10, 2020 Issued
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