Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15653191 [patent_doc_number] => 20200089126 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-19 [patent_title] => POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 16/688598 [patent_app_country] => US [patent_app_date] => 2019-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16688598 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/688598
Position measurement of optical elements in a lithographic apparatus Nov 18, 2019 Issued
Array ( [id] => 16493478 [patent_doc_number] => 10859510 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-08 [patent_title] => Robotic sensor system for measuring parameters of a structure [patent_app_type] => utility [patent_app_number] => 16/684866 [patent_app_country] => US [patent_app_date] => 2019-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 2451 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16684866 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/684866
Robotic sensor system for measuring parameters of a structure Nov 14, 2019 Issued
Array ( [id] => 17135720 [patent_doc_number] => 11137270 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Spatial modulation device [patent_app_type] => utility [patent_app_number] => 16/683376 [patent_app_country] => US [patent_app_date] => 2019-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5428 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16683376 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/683376
Spatial modulation device Nov 13, 2019 Issued
Array ( [id] => 16114283 [patent_doc_number] => 20200209164 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-02 [patent_title] => WAFER BONDING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND APPARATUS THEREFOR [patent_app_type] => utility [patent_app_number] => 16/678226 [patent_app_country] => US [patent_app_date] => 2019-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6822 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16678226 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/678226
Wafer bonding method, method for manufacturing semiconductor device, and apparatus therefor Nov 7, 2019 Issued
Array ( [id] => 15560667 [patent_doc_number] => 20200064745 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-27 [patent_title] => METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 16/672787 [patent_app_country] => US [patent_app_date] => 2019-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6042 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16672787 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/672787
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY Nov 3, 2019 Abandoned
Array ( [id] => 17371767 [patent_doc_number] => 20220026819 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-27 [patent_title] => LITHOGRAPHY SUPPORT CLEANING WITH CLEANING SUBSTRATE HAVING CONTROLLED GEOMETRY AND COMPOSITION [patent_app_type] => utility [patent_app_number] => 17/291322 [patent_app_country] => US [patent_app_date] => 2019-10-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8426 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -23 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17291322 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/291322
Lithography support cleaning with cleaning substrate having controlled geometry and composition Oct 30, 2019 Issued
Array ( [id] => 16643269 [patent_doc_number] => 10921113 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-02-16 [patent_title] => System and method for optical measurements in a rotary machine [patent_app_type] => utility [patent_app_number] => 16/669466 [patent_app_country] => US [patent_app_date] => 2019-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 18644 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16669466 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/669466
System and method for optical measurements in a rotary machine Oct 29, 2019 Issued
Array ( [id] => 16416192 [patent_doc_number] => 10824080 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-03 [patent_title] => Method to reduce native defect printability [patent_app_type] => utility [patent_app_number] => 16/663214 [patent_app_country] => US [patent_app_date] => 2019-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7467 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16663214 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/663214
Method to reduce native defect printability Oct 23, 2019 Issued
Array ( [id] => 16159865 [patent_doc_number] => 20200218165 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => EXPOSURE APPARATUS AND METHOD OF DETECTING ALIGNMENT ERROR OF RETICLE [patent_app_type] => utility [patent_app_number] => 16/660733 [patent_app_country] => US [patent_app_date] => 2019-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6133 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16660733 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/660733
EXPOSURE APPARATUS AND METHOD OF DETECTING ALIGNMENT ERROR OF RETICLE Oct 21, 2019 Abandoned
Array ( [id] => 16744715 [patent_doc_number] => 10969697 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2021-04-06 [patent_title] => Overlay metrology tool and methods of performing overlay measurements [patent_app_type] => utility [patent_app_number] => 16/657172 [patent_app_country] => US [patent_app_date] => 2019-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 13376 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16657172 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/657172
Overlay metrology tool and methods of performing overlay measurements Oct 17, 2019 Issued
Array ( [id] => 15772167 [patent_doc_number] => 20200117101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-16 [patent_title] => Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/599215 [patent_app_country] => US [patent_app_date] => 2019-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16812 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16599215 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/599215
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Oct 10, 2019 Issued
Array ( [id] => 17216066 [patent_doc_number] => 20210349404 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-11 [patent_title] => METHOD TO CREATE THE IDEAL SOURCE SPECTRA WITH SOURCE AND MASK OPTIMIZATION [patent_app_type] => utility [patent_app_number] => 17/283056 [patent_app_country] => US [patent_app_date] => 2019-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16487 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17283056 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/283056
METHOD TO CREATE THE IDEAL SOURCE SPECTRA WITH SOURCE AND MASK OPTIMIZATION Oct 10, 2019 Pending
Array ( [id] => 15593437 [patent_doc_number] => 20200073253 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-05 [patent_title] => RESERVING SPATIAL LIGHT MODULATOR SECTIONS TO ADDRESS FIELD NON-UNIFORMITIES [patent_app_type] => utility [patent_app_number] => 16/597718 [patent_app_country] => US [patent_app_date] => 2019-10-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4099 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16597718 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/597718
Reserving spatial light modulator sections to address field non-uniformities Oct 8, 2019 Issued
Array ( [id] => 19167075 [patent_doc_number] => 11982976 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-14 [patent_title] => Hologram transcription apparatus [patent_app_type] => utility [patent_app_number] => 17/283654 [patent_app_country] => US [patent_app_date] => 2019-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6709 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17283654 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/283654
Hologram transcription apparatus Oct 7, 2019 Issued
Array ( [id] => 16501138 [patent_doc_number] => 10866519 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-12-15 [patent_title] => Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same [patent_app_type] => utility [patent_app_number] => 16/589616 [patent_app_country] => US [patent_app_date] => 2019-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 7653 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16589616 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/589616
Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same Sep 30, 2019 Issued
Array ( [id] => 15834653 [patent_doc_number] => 20200132608 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-30 [patent_title] => SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN [patent_app_type] => utility [patent_app_number] => 16/584370 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6363 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584370 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/584370
Scanning differential interference contrast in an imaging system design Sep 25, 2019 Issued
Array ( [id] => 17230316 [patent_doc_number] => 20210356873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => METROLOGY METHOD AND APPARATUS THEREFOR [patent_app_type] => utility [patent_app_number] => 17/277583 [patent_app_country] => US [patent_app_date] => 2019-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1771 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 11 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17277583 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/277583
METROLOGY METHOD AND APPARATUS THEREFOR Sep 18, 2019 Pending
Array ( [id] => 16520506 [patent_doc_number] => 10871721 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Mask blank for lithography and method of manufacturing the same [patent_app_type] => utility [patent_app_number] => 16/573861 [patent_app_country] => US [patent_app_date] => 2019-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 5963 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16573861 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/573861
Mask blank for lithography and method of manufacturing the same Sep 16, 2019 Issued
Array ( [id] => 16477306 [patent_doc_number] => 10852245 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-01 [patent_title] => Information processing apparatus, information processing method, and storage medium [patent_app_type] => utility [patent_app_number] => 16/572175 [patent_app_country] => US [patent_app_date] => 2019-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 27 [patent_no_of_words] => 12697 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16572175 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/572175
Information processing apparatus, information processing method, and storage medium Sep 15, 2019 Issued
Array ( [id] => 15348533 [patent_doc_number] => 20200012158 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-09 [patent_title] => LIGHT IRRADIATION DEVICE [patent_app_type] => utility [patent_app_number] => 16/572213 [patent_app_country] => US [patent_app_date] => 2019-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8300 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16572213 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/572213
LIGHT IRRADIATION DEVICE Sep 15, 2019 Abandoned
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