
Daniel T. Pihulic
Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )
| Most Active Art Unit | 3645 |
| Art Unit(s) | 2899, 2735, 2201, 3642, 3662, 3645, 2202 |
| Total Applications | 3662 |
| Issued Applications | 3296 |
| Pending Applications | 170 |
| Abandoned Applications | 226 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 16520242
[patent_doc_number] => 10871456
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-12-22
[patent_title] => Semiconductor inspection system and semiconductor inspection apparatus
[patent_app_type] => utility
[patent_app_number] => 16/562502
[patent_app_country] => US
[patent_app_date] => 2019-09-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 13
[patent_no_of_words] => 5010
[patent_no_of_claims] => 7
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 244
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16562502
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/562502 | Semiconductor inspection system and semiconductor inspection apparatus | Sep 5, 2019 | Issued |
Array
(
[id] => 18370342
[patent_doc_number] => 11650513
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-05-16
[patent_title] => Apparatus and method for measuring a position of a mark
[patent_app_type] => utility
[patent_app_number] => 17/280711
[patent_app_country] => US
[patent_app_date] => 2019-09-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 12689
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 126
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17280711
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/280711 | Apparatus and method for measuring a position of a mark | Sep 4, 2019 | Issued |
Array
(
[id] => 16430631
[patent_doc_number] => 10830710
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-11-10
[patent_title] => Method and device for inspecting a semiconductor device
[patent_app_type] => utility
[patent_app_number] => 16/558803
[patent_app_country] => US
[patent_app_date] => 2019-09-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 16
[patent_no_of_words] => 3267
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 90
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16558803
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/558803 | Method and device for inspecting a semiconductor device | Sep 2, 2019 | Issued |
Array
(
[id] => 15327667
[patent_doc_number] => 20200004163
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-01-02
[patent_title] => LITHOGRAPHIC METHOD AND APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/558265
[patent_app_country] => US
[patent_app_date] => 2019-09-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 17884
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16558265
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/558265 | Lithographic method and apparatus | Sep 1, 2019 | Issued |
Array
(
[id] => 16431028
[patent_doc_number] => 10831107
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-11-10
[patent_title] => Method for of measuring a parameter relating to a structure formed using a lithographic process
[patent_app_type] => utility
[patent_app_number] => 16/556685
[patent_app_country] => US
[patent_app_date] => 2019-08-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 16
[patent_no_of_words] => 8813
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 88
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16556685
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/556685 | Method for of measuring a parameter relating to a structure formed using a lithographic process | Aug 29, 2019 | Issued |
Array
(
[id] => 16744717
[patent_doc_number] => 10969699
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-04-06
[patent_title] => Projection lighting system for semiconductor lithography with an improved heat transfer
[patent_app_type] => utility
[patent_app_number] => 16/541579
[patent_app_country] => US
[patent_app_date] => 2019-08-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 12
[patent_no_of_words] => 4514
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 184
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16541579
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/541579 | Projection lighting system for semiconductor lithography with an improved heat transfer | Aug 14, 2019 | Issued |
Array
(
[id] => 15530155
[patent_doc_number] => 20200057383
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-02-20
[patent_title] => METHOD FOR DETECTING EUV PELLICLE RUPTURE
[patent_app_type] => utility
[patent_app_number] => 16/540874
[patent_app_country] => US
[patent_app_date] => 2019-08-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8064
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 62
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16540874
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/540874 | Method for detecting EUV pellicle rupture | Aug 13, 2019 | Issued |
Array
(
[id] => 17053994
[patent_doc_number] => 20210263428
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-08-26
[patent_title] => MODEL CALIBRATION AND GUIDED METROLOGY BASED ON SMART SAMPLING
[patent_app_type] => utility
[patent_app_number] => 17/261293
[patent_app_country] => US
[patent_app_date] => 2019-07-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 24142
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 57
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17261293
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/261293 | Model calibration and guided metrology based on smart sampling | Jul 23, 2019 | Issued |
Array
(
[id] => 16446383
[patent_doc_number] => 10838307
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-11-17
[patent_title] => Apparatus and method for operating an apparatus
[patent_app_type] => utility
[patent_app_number] => 16/520047
[patent_app_country] => US
[patent_app_date] => 2019-07-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 6047
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 168
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16520047
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/520047 | Apparatus and method for operating an apparatus | Jul 22, 2019 | Issued |
Array
(
[id] => 17179685
[patent_doc_number] => 11156924
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-10-26
[patent_title] => Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method
[patent_app_type] => utility
[patent_app_number] => 17/269909
[patent_app_country] => US
[patent_app_date] => 2019-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 12
[patent_no_of_words] => 11646
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 7
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17269909
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/269909 | Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method | Jul 15, 2019 | Issued |
Array
(
[id] => 15437875
[patent_doc_number] => 20200033121
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-01-30
[patent_title] => CHROMATIC CONFOCAL AREA SENSOR
[patent_app_type] => utility
[patent_app_number] => 16/513091
[patent_app_country] => US
[patent_app_date] => 2019-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4986
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 126
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16513091
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/513091 | Chromatic confocal area sensor | Jul 15, 2019 | Issued |
Array
(
[id] => 15089623
[patent_doc_number] => 20190339622
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-11-07
[patent_title] => QUARTER WAVE LIGHT SPLITTING
[patent_app_type] => utility
[patent_app_number] => 16/509675
[patent_app_country] => US
[patent_app_date] => 2019-07-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5772
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 95
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16509675
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/509675 | Quarter wave light splitting | Jul 11, 2019 | Issued |
Array
(
[id] => 15151095
[patent_doc_number] => 20190354025
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-11-21
[patent_title] => OPTICAL SYSTEM
[patent_app_type] => utility
[patent_app_number] => 16/510055
[patent_app_country] => US
[patent_app_date] => 2019-07-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9350
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16510055
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/510055 | OPTICAL SYSTEM | Jul 11, 2019 | Abandoned |
Array
(
[id] => 17252510
[patent_doc_number] => 11187994
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-11-30
[patent_title] => Method for controlling a manufacturing process and associated apparatuses
[patent_app_type] => utility
[patent_app_number] => 17/264023
[patent_app_country] => US
[patent_app_date] => 2019-07-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 4
[patent_no_of_words] => 7272
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 95
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17264023
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/264023 | Method for controlling a manufacturing process and associated apparatuses | Jul 2, 2019 | Issued |
Array
(
[id] => 16856500
[patent_doc_number] => 20210157245
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-27
[patent_title] => OPTICAL MASKLESS
[patent_app_type] => utility
[patent_app_number] => 17/258559
[patent_app_country] => US
[patent_app_date] => 2019-07-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 14972
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 63
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17258559
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/258559 | Optical maskless | Jul 2, 2019 | Issued |
Array
(
[id] => 14996907
[patent_doc_number] => 20190317411
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-10-17
[patent_title] => LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/454126
[patent_app_country] => US
[patent_app_date] => 2019-06-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6141
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 46
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16454126
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/454126 | Lithographic apparatus and device manufacturing method | Jun 26, 2019 | Issued |
Array
(
[id] => 16247772
[patent_doc_number] => 10747124
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-08-18
[patent_title] => Method of measuring a target, metrology apparatus, polarizer assembly
[patent_app_type] => utility
[patent_app_number] => 16/441832
[patent_app_country] => US
[patent_app_date] => 2019-06-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 7
[patent_no_of_words] => 10431
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 126
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16441832
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/441832 | Method of measuring a target, metrology apparatus, polarizer assembly | Jun 13, 2019 | Issued |
Array
(
[id] => 14966159
[patent_doc_number] => 20190310558
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-10-10
[patent_title] => LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING
[patent_app_type] => utility
[patent_app_number] => 16/439893
[patent_app_country] => US
[patent_app_date] => 2019-06-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 18745
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 135
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16439893
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/439893 | Lithography optics adjustment and monitoring | Jun 12, 2019 | Issued |
Array
(
[id] => 17939986
[patent_doc_number] => 11474436
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-10-18
[patent_title] => Tuning patterning apparatus based on optical characteristic
[patent_app_type] => utility
[patent_app_number] => 16/973732
[patent_app_country] => US
[patent_app_date] => 2019-06-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 14
[patent_no_of_words] => 17020
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 116
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16973732
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/973732 | Tuning patterning apparatus based on optical characteristic | Jun 10, 2019 | Issued |
Array
(
[id] => 14900487
[patent_doc_number] => 20190294009
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-09-26
[patent_title] => POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD
[patent_app_type] => utility
[patent_app_number] => 16/435443
[patent_app_country] => US
[patent_app_date] => 2019-06-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6271
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -1
[patent_words_short_claim] => 59
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16435443
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/435443 | POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD | Jun 6, 2019 | Abandoned |