Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16520242 [patent_doc_number] => 10871456 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Semiconductor inspection system and semiconductor inspection apparatus [patent_app_type] => utility [patent_app_number] => 16/562502 [patent_app_country] => US [patent_app_date] => 2019-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 5010 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 244 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16562502 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/562502
Semiconductor inspection system and semiconductor inspection apparatus Sep 5, 2019 Issued
Array ( [id] => 18370342 [patent_doc_number] => 11650513 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-16 [patent_title] => Apparatus and method for measuring a position of a mark [patent_app_type] => utility [patent_app_number] => 17/280711 [patent_app_country] => US [patent_app_date] => 2019-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 12689 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17280711 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/280711
Apparatus and method for measuring a position of a mark Sep 4, 2019 Issued
Array ( [id] => 16430631 [patent_doc_number] => 10830710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-10 [patent_title] => Method and device for inspecting a semiconductor device [patent_app_type] => utility [patent_app_number] => 16/558803 [patent_app_country] => US [patent_app_date] => 2019-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 3267 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16558803 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/558803
Method and device for inspecting a semiconductor device Sep 2, 2019 Issued
Array ( [id] => 15327667 [patent_doc_number] => 20200004163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-02 [patent_title] => LITHOGRAPHIC METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 16/558265 [patent_app_country] => US [patent_app_date] => 2019-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17884 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16558265 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/558265
Lithographic method and apparatus Sep 1, 2019 Issued
Array ( [id] => 16431028 [patent_doc_number] => 10831107 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-10 [patent_title] => Method for of measuring a parameter relating to a structure formed using a lithographic process [patent_app_type] => utility [patent_app_number] => 16/556685 [patent_app_country] => US [patent_app_date] => 2019-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 16 [patent_no_of_words] => 8813 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16556685 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/556685
Method for of measuring a parameter relating to a structure formed using a lithographic process Aug 29, 2019 Issued
Array ( [id] => 16744717 [patent_doc_number] => 10969699 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-06 [patent_title] => Projection lighting system for semiconductor lithography with an improved heat transfer [patent_app_type] => utility [patent_app_number] => 16/541579 [patent_app_country] => US [patent_app_date] => 2019-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 4514 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16541579 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/541579
Projection lighting system for semiconductor lithography with an improved heat transfer Aug 14, 2019 Issued
Array ( [id] => 15530155 [patent_doc_number] => 20200057383 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-20 [patent_title] => METHOD FOR DETECTING EUV PELLICLE RUPTURE [patent_app_type] => utility [patent_app_number] => 16/540874 [patent_app_country] => US [patent_app_date] => 2019-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8064 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16540874 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/540874
Method for detecting EUV pellicle rupture Aug 13, 2019 Issued
Array ( [id] => 17053994 [patent_doc_number] => 20210263428 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => MODEL CALIBRATION AND GUIDED METROLOGY BASED ON SMART SAMPLING [patent_app_type] => utility [patent_app_number] => 17/261293 [patent_app_country] => US [patent_app_date] => 2019-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24142 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17261293 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/261293
Model calibration and guided metrology based on smart sampling Jul 23, 2019 Issued
Array ( [id] => 16446383 [patent_doc_number] => 10838307 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-11-17 [patent_title] => Apparatus and method for operating an apparatus [patent_app_type] => utility [patent_app_number] => 16/520047 [patent_app_country] => US [patent_app_date] => 2019-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6047 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16520047 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/520047
Apparatus and method for operating an apparatus Jul 22, 2019 Issued
Array ( [id] => 17179685 [patent_doc_number] => 11156924 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-26 [patent_title] => Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/269909 [patent_app_country] => US [patent_app_date] => 2019-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 11646 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17269909 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/269909
Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method Jul 15, 2019 Issued
Array ( [id] => 15437875 [patent_doc_number] => 20200033121 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-30 [patent_title] => CHROMATIC CONFOCAL AREA SENSOR [patent_app_type] => utility [patent_app_number] => 16/513091 [patent_app_country] => US [patent_app_date] => 2019-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4986 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16513091 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/513091
Chromatic confocal area sensor Jul 15, 2019 Issued
Array ( [id] => 15089623 [patent_doc_number] => 20190339622 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-07 [patent_title] => QUARTER WAVE LIGHT SPLITTING [patent_app_type] => utility [patent_app_number] => 16/509675 [patent_app_country] => US [patent_app_date] => 2019-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5772 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16509675 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/509675
Quarter wave light splitting Jul 11, 2019 Issued
Array ( [id] => 15151095 [patent_doc_number] => 20190354025 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-21 [patent_title] => OPTICAL SYSTEM [patent_app_type] => utility [patent_app_number] => 16/510055 [patent_app_country] => US [patent_app_date] => 2019-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9350 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16510055 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/510055
OPTICAL SYSTEM Jul 11, 2019 Abandoned
Array ( [id] => 17252510 [patent_doc_number] => 11187994 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-30 [patent_title] => Method for controlling a manufacturing process and associated apparatuses [patent_app_type] => utility [patent_app_number] => 17/264023 [patent_app_country] => US [patent_app_date] => 2019-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 7272 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17264023 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/264023
Method for controlling a manufacturing process and associated apparatuses Jul 2, 2019 Issued
Array ( [id] => 16856500 [patent_doc_number] => 20210157245 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => OPTICAL MASKLESS [patent_app_type] => utility [patent_app_number] => 17/258559 [patent_app_country] => US [patent_app_date] => 2019-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14972 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17258559 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/258559
Optical maskless Jul 2, 2019 Issued
Array ( [id] => 14996907 [patent_doc_number] => 20190317411 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-17 [patent_title] => LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/454126 [patent_app_country] => US [patent_app_date] => 2019-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6141 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16454126 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/454126
Lithographic apparatus and device manufacturing method Jun 26, 2019 Issued
Array ( [id] => 16247772 [patent_doc_number] => 10747124 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-18 [patent_title] => Method of measuring a target, metrology apparatus, polarizer assembly [patent_app_type] => utility [patent_app_number] => 16/441832 [patent_app_country] => US [patent_app_date] => 2019-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 10431 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16441832 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/441832
Method of measuring a target, metrology apparatus, polarizer assembly Jun 13, 2019 Issued
Array ( [id] => 14966159 [patent_doc_number] => 20190310558 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-10 [patent_title] => LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING [patent_app_type] => utility [patent_app_number] => 16/439893 [patent_app_country] => US [patent_app_date] => 2019-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18745 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16439893 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/439893
Lithography optics adjustment and monitoring Jun 12, 2019 Issued
Array ( [id] => 17939986 [patent_doc_number] => 11474436 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-10-18 [patent_title] => Tuning patterning apparatus based on optical characteristic [patent_app_type] => utility [patent_app_number] => 16/973732 [patent_app_country] => US [patent_app_date] => 2019-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 17020 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16973732 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/973732
Tuning patterning apparatus based on optical characteristic Jun 10, 2019 Issued
Array ( [id] => 14900487 [patent_doc_number] => 20190294009 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-09-26 [patent_title] => POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD [patent_app_type] => utility [patent_app_number] => 16/435443 [patent_app_country] => US [patent_app_date] => 2019-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6271 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -1 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16435443 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/435443
POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD Jun 6, 2019 Abandoned
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