Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15386173 [patent_doc_number] => 10534270 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-01-14 [patent_title] => Lithography apparatus, a method of manufacturing a device and a control program [patent_app_type] => utility [patent_app_number] => 16/269745 [patent_app_country] => US [patent_app_date] => 2019-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 19 [patent_no_of_words] => 12323 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16269745 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/269745
Lithography apparatus, a method of manufacturing a device and a control program Feb 6, 2019 Issued
Array ( [id] => 15669639 [patent_doc_number] => 10599044 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-03-24 [patent_title] => Digital lithography with extended field size [patent_app_type] => utility [patent_app_number] => 16/267353 [patent_app_country] => US [patent_app_date] => 2019-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 10 [patent_no_of_words] => 5359 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16267353 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/267353
Digital lithography with extended field size Feb 3, 2019 Issued
Array ( [id] => 15185249 [patent_doc_number] => 20190363216 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => Optical Sensing Assembly and Method for Manufacturing the Same, and Optical Sensing System [patent_app_type] => utility [patent_app_number] => 16/265885 [patent_app_country] => US [patent_app_date] => 2019-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7089 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16265885 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/265885
Optical sensing assembly and method for manufacturing the same, and optical sensing system Jan 31, 2019 Issued
Array ( [id] => 17628879 [patent_doc_number] => 20220163894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-26 [patent_title] => SYSTEM AND METHOD FOR DOUBLE-SIDED DIGITAL LITHOGRAPHY OR EXPOSURE [patent_app_type] => utility [patent_app_number] => 17/425726 [patent_app_country] => US [patent_app_date] => 2019-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16103 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17425726 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/425726
SYSTEM AND METHOD FOR DOUBLE-SIDED DIGITAL LITHOGRAPHY OR EXPOSURE Jan 24, 2019 Abandoned
Array ( [id] => 14410529 [patent_doc_number] => 20190171108 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-06 [patent_title] => REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 16/257811 [patent_app_country] => US [patent_app_date] => 2019-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5842 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16257811 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/257811
Reflective optical element for EUV lithography Jan 24, 2019 Issued
Array ( [id] => 14688275 [patent_doc_number] => 20190243253 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-08 [patent_title] => METHOD OF OPTIMIZING A METROLOGY PROCESS [patent_app_type] => utility [patent_app_number] => 16/256359 [patent_app_country] => US [patent_app_date] => 2019-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 21379 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16256359 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/256359
Method of optimizing a metrology process Jan 23, 2019 Issued
Array ( [id] => 14346387 [patent_doc_number] => 20190155166 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-23 [patent_title] => METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/251149 [patent_app_country] => US [patent_app_date] => 2019-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10751 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16251149 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/251149
METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Jan 17, 2019 Abandoned
Array ( [id] => 14504009 [patent_doc_number] => 20190195659 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => SENSOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/247672 [patent_app_country] => US [patent_app_date] => 2019-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11042 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16247672 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/247672
Sensor device Jan 14, 2019 Issued
Array ( [id] => 15918583 [patent_doc_number] => 10656528 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-05-19 [patent_title] => Lithographic mask functions to model the incident angles of a partially coherent illumination [patent_app_type] => utility [patent_app_number] => 16/238444 [patent_app_country] => US [patent_app_date] => 2019-01-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 6270 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16238444 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/238444
Lithographic mask functions to model the incident angles of a partially coherent illumination Jan 1, 2019 Issued
Array ( [id] => 16093945 [patent_doc_number] => 20200200959 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => Light Source, a Shaping System Using the Light Source and an Article Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/227281 [patent_app_country] => US [patent_app_date] => 2018-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6727 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16227281 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/227281
Light source, a shaping system using the light source and an article manufacturing method Dec 19, 2018 Issued
Array ( [id] => 16584448 [patent_doc_number] => 20210018850 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-21 [patent_title] => PROCESS WINDOW BASED ON DEFECT PROBABILITY [patent_app_type] => utility [patent_app_number] => 16/955483 [patent_app_country] => US [patent_app_date] => 2018-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 40616 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16955483 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/955483
Process window based on defect probability Dec 16, 2018 Issued
Array ( [id] => 14217713 [patent_doc_number] => 20190121241 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-25 [patent_title] => EUV Lithography System and Method with Optimized Throughput and Stability [patent_app_type] => utility [patent_app_number] => 16/219561 [patent_app_country] => US [patent_app_date] => 2018-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8519 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16219561 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/219561
EUV lithography system and method with optimized throughput and stability Dec 12, 2018 Issued
Array ( [id] => 14217715 [patent_doc_number] => 20190121242 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-25 [patent_title] => LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD [patent_app_type] => utility [patent_app_number] => 16/216362 [patent_app_country] => US [patent_app_date] => 2018-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8510 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16216362 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/216362
Lithography system and lithography method Dec 10, 2018 Issued
Array ( [id] => 16721770 [patent_doc_number] => 20210088917 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-25 [patent_title] => VOLTAGE CONTRAST METROLOGY MARK [patent_app_type] => utility [patent_app_number] => 16/772022 [patent_app_country] => US [patent_app_date] => 2018-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18210 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16772022 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/772022
Voltage contrast metrology mark Dec 6, 2018 Issued
Array ( [id] => 16576988 [patent_doc_number] => 20210011389 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-14 [patent_title] => LITHOGRAPHIC METHOD AND APPARATUS [patent_app_type] => utility [patent_app_number] => 16/955324 [patent_app_country] => US [patent_app_date] => 2018-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13455 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16955324 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/955324
Lithographic method and apparatus Dec 2, 2018 Issued
Array ( [id] => 15577201 [patent_doc_number] => 10578976 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-03 [patent_title] => Catadioptric projection objective including a reflective optical component and a measuring device [patent_app_type] => utility [patent_app_number] => 16/207460 [patent_app_country] => US [patent_app_date] => 2018-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 7197 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 194 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16207460 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/207460
Catadioptric projection objective including a reflective optical component and a measuring device Dec 2, 2018 Issued
Array ( [id] => 14106065 [patent_doc_number] => 20190094708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-28 [patent_title] => EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/205763 [patent_app_country] => US [patent_app_date] => 2018-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 30656 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16205763 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/205763
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD Nov 29, 2018 Abandoned
Array ( [id] => 15230711 [patent_doc_number] => 10503075 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-10 [patent_title] => EUV Collector [patent_app_type] => utility [patent_app_number] => 16/199946 [patent_app_country] => US [patent_app_date] => 2018-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 6175 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16199946 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/199946
EUV Collector Nov 25, 2018 Issued
Array ( [id] => 16926702 [patent_doc_number] => 11048178 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-29 [patent_title] => Lithographic apparatus with improved patterning performance [patent_app_type] => utility [patent_app_number] => 16/772444 [patent_app_country] => US [patent_app_date] => 2018-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 21 [patent_no_of_words] => 12181 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16772444 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/772444
Lithographic apparatus with improved patterning performance Nov 21, 2018 Issued
Array ( [id] => 16713690 [patent_doc_number] => 20210080837 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-18 [patent_title] => COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL [patent_app_type] => utility [patent_app_number] => 16/954384 [patent_app_country] => US [patent_app_date] => 2018-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 38434 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16954384 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/954384
Computational metrology based correction and control Nov 19, 2018 Issued
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