Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15312247 [patent_doc_number] => 10520825 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-31 [patent_title] => Illumination optical system, exposure apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/196530 [patent_app_country] => US [patent_app_date] => 2018-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 12545 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16196530 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/196530
Illumination optical system, exposure apparatus and device manufacturing method Nov 19, 2018 Issued
Array ( [id] => 14075851 [patent_doc_number] => 20190086813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-21 [patent_title] => POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 16/194795 [patent_app_country] => US [patent_app_date] => 2018-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24010 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16194795 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/194795
Position measurement of optical elements in a lithographic apparatus Nov 18, 2018 Issued
Array ( [id] => 14046625 [patent_doc_number] => 20190079419 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-14 [patent_title] => LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/188216 [patent_app_country] => US [patent_app_date] => 2018-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11183 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16188216 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/188216
Lithographic apparatus and device manufacturing method Nov 11, 2018 Issued
Array ( [id] => 17861213 [patent_doc_number] => 11442369 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-13 [patent_title] => Object stage bearing for lithographic apparatus [patent_app_type] => utility [patent_app_number] => 16/763487 [patent_app_country] => US [patent_app_date] => 2018-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 20 [patent_no_of_words] => 10461 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 240 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16763487 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/763487
Object stage bearing for lithographic apparatus Nov 6, 2018 Issued
Array ( [id] => 15105443 [patent_doc_number] => 10474044 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-12 [patent_title] => Movable body apparatus, exposure apparatus, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/181689 [patent_app_country] => US [patent_app_date] => 2018-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 10654 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16181689 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/181689
Movable body apparatus, exposure apparatus, and device manufacturing method Nov 5, 2018 Issued
Array ( [id] => 16377798 [patent_doc_number] => 20200326640 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-15 [patent_title] => Lithographic Cluster, Lithographic Apparatus, and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 16/760137 [patent_app_country] => US [patent_app_date] => 2018-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10739 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16760137 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/760137
Lithographic cluster, lithographic apparatus, and device manufacturing method Oct 25, 2018 Issued
Array ( [id] => 16377793 [patent_doc_number] => 20200326635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-15 [patent_title] => SUBSTRATE HOLDER, SUBSTRATE SUPPORT AND METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM [patent_app_type] => utility [patent_app_number] => 16/761608 [patent_app_country] => US [patent_app_date] => 2018-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10625 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16761608 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/761608
Substrate holder, substrate support and method of clamping a substrate to a clamping system Oct 23, 2018 Issued
Array ( [id] => 17394462 [patent_doc_number] => 11243474 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-08 [patent_title] => Method for generating exposure compensation table, method for photoresist exposure compensation, and exposure machine [patent_app_type] => utility [patent_app_number] => 16/313140 [patent_app_country] => US [patent_app_date] => 2018-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 13 [patent_no_of_words] => 4363 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16313140 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/313140
Method for generating exposure compensation table, method for photoresist exposure compensation, and exposure machine Oct 21, 2018 Issued
Array ( [id] => 16993633 [patent_doc_number] => 20210232053 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-29 [patent_title] => EXPOSURE METHOD AND EXPOSURE DEVICE THEREOF [patent_app_type] => utility [patent_app_number] => 16/311666 [patent_app_country] => US [patent_app_date] => 2018-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7930 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16311666 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/311666
Exposure method and exposure device thereof Oct 21, 2018 Issued
Array ( [id] => 14234281 [patent_doc_number] => 20190129313 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-02 [patent_title] => ESTIMATION OF DATA IN METROLOGY [patent_app_type] => utility [patent_app_number] => 16/163751 [patent_app_country] => US [patent_app_date] => 2018-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12928 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16163751 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/163751
Estimation of data in metrology Oct 17, 2018 Issued
Array ( [id] => 16224462 [patent_doc_number] => 20200249579 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => METHOD AND EXPOSURE DEVICE FOR EXPOSING AT LEAST ONE STORED REPRESENTATION ON A LIGHT-SENSITIVE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/652057 [patent_app_country] => US [patent_app_date] => 2018-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3336 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16652057 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/652057
Method and exposure device for exposing at least one stored representation on a light-sensitive recording medium Oct 7, 2018 Issued
Array ( [id] => 16902724 [patent_doc_number] => 20210181640 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => Assembly for Use in Semiconductor Photolithography and Method of Manufacturing Same [patent_app_type] => utility [patent_app_number] => 16/760357 [patent_app_country] => US [patent_app_date] => 2018-10-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8611 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16760357 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/760357
Assembly for use in semiconductor photolithography and method of manufacturing same Oct 4, 2018 Issued
Array ( [id] => 15853759 [patent_doc_number] => 10642158 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-05 [patent_title] => Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning [patent_app_type] => utility [patent_app_number] => 16/151300 [patent_app_country] => US [patent_app_date] => 2018-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 7349 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16151300 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/151300
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning Oct 2, 2018 Issued
Array ( [id] => 16345605 [patent_doc_number] => 20200310256 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => PROJECTION OBJECTIVE [patent_app_type] => utility [patent_app_number] => 16/651663 [patent_app_country] => US [patent_app_date] => 2018-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6591 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16651663 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/651663
Projection objective Sep 28, 2018 Issued
Array ( [id] => 16330320 [patent_doc_number] => 20200301286 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-24 [patent_title] => FORMING MULTIPLE AERIAL IMAGES IN A SINGLE LITHOGRAPHY EXPOSURE PASS [patent_app_type] => utility [patent_app_number] => 16/755993 [patent_app_country] => US [patent_app_date] => 2018-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12270 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16755993 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/755993
Forming multiple aerial images in a single lithography exposure pass Sep 25, 2018 Issued
Array ( [id] => 13839019 [patent_doc_number] => 20190022994 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-24 [patent_title] => METHOD FOR PRODUCING FLEXOGRAPHIC PRINTING PLATES USING UV-LED IRRADIATION [patent_app_type] => utility [patent_app_number] => 16/142225 [patent_app_country] => US [patent_app_date] => 2018-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12832 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16142225 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/142225
Method for producing flexographic printing plates using UV-LED irradiation Sep 25, 2018 Issued
Array ( [id] => 16285014 [patent_doc_number] => 20200278616 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-03 [patent_title] => POSITIONING DEVICE, MAGNETIC SUPPORT SYSTEM AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 16/647080 [patent_app_country] => US [patent_app_date] => 2018-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8043 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16647080 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/647080
Positioning device, magnetic support system and lithographic apparatus Sep 23, 2018 Issued
Array ( [id] => 16316103 [patent_doc_number] => 20200294841 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-17 [patent_title] => SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 16/650939 [patent_app_country] => US [patent_app_date] => 2018-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12235 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16650939 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/650939
Substrate holder for use in a lithographic apparatus Sep 18, 2018 Issued
Array ( [id] => 18965463 [patent_doc_number] => 11899221 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-13 [patent_title] => Apparatus and method for assembling optical module [patent_app_type] => utility [patent_app_number] => 16/753308 [patent_app_country] => US [patent_app_date] => 2018-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6078 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16753308 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/753308
Apparatus and method for assembling optical module Sep 5, 2018 Issued
Array ( [id] => 17000418 [patent_doc_number] => 11079221 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-03 [patent_title] => Method and apparatus of optical module assembly [patent_app_type] => utility [patent_app_number] => 16/652359 [patent_app_country] => US [patent_app_date] => 2018-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 6688 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 223 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16652359 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/652359
Method and apparatus of optical module assembly Sep 5, 2018 Issued
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