Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16879469 [patent_doc_number] => 11029610 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-08 [patent_title] => Lithographic method [patent_app_type] => utility [patent_app_number] => 16/650520 [patent_app_country] => US [patent_app_date] => 2018-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 16 [patent_no_of_words] => 17957 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16650520 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/650520
Lithographic method Sep 3, 2018 Issued
Array ( [id] => 15918605 [patent_doc_number] => 10656539 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-19 [patent_title] => Radiation source for lithography process [patent_app_type] => utility [patent_app_number] => 16/117545 [patent_app_country] => US [patent_app_date] => 2018-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 8054 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16117545 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/117545
Radiation source for lithography process Aug 29, 2018 Issued
Array ( [id] => 15230713 [patent_doc_number] => 10503076 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2019-12-10 [patent_title] => Reserving spatial light modulator sections to address field non-uniformities [patent_app_type] => utility [patent_app_number] => 16/116126 [patent_app_country] => US [patent_app_date] => 2018-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4073 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16116126 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/116126
Reserving spatial light modulator sections to address field non-uniformities Aug 28, 2018 Issued
Array ( [id] => 16064179 [patent_doc_number] => 10691031 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-06-23 [patent_title] => Method and apparatus to determine a patterning process parameter [patent_app_type] => utility [patent_app_number] => 16/116437 [patent_app_country] => US [patent_app_date] => 2018-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 32 [patent_no_of_words] => 42322 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 197 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16116437 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/116437
Method and apparatus to determine a patterning process parameter Aug 28, 2018 Issued
Array ( [id] => 15166559 [patent_doc_number] => 10488768 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-26 [patent_title] => Beat patterns for alignment on small metrology targets [patent_app_type] => utility [patent_app_number] => 16/115047 [patent_app_country] => US [patent_app_date] => 2018-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 13 [patent_no_of_words] => 12819 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16115047 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/115047
Beat patterns for alignment on small metrology targets Aug 27, 2018 Issued
Array ( [id] => 15074229 [patent_doc_number] => 10466602 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-05 [patent_title] => Patterning method, lithography apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 16/110417 [patent_app_country] => US [patent_app_date] => 2018-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 5984 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16110417 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/110417
Patterning method, lithography apparatus, and article manufacturing method Aug 22, 2018 Issued
Array ( [id] => 17016597 [patent_doc_number] => 11086232 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-10 [patent_title] => Mark, overlay target, and methods of alignment and overlay [patent_app_type] => utility [patent_app_number] => 16/753441 [patent_app_country] => US [patent_app_date] => 2018-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 23 [patent_no_of_words] => 10915 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16753441 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/753441
Mark, overlay target, and methods of alignment and overlay Aug 22, 2018 Issued
Array ( [id] => 14981473 [patent_doc_number] => 10444646 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-10-15 [patent_title] => Lithography apparatus and method of manufacturing article [patent_app_type] => utility [patent_app_number] => 16/107864 [patent_app_country] => US [patent_app_date] => 2018-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 21 [patent_no_of_words] => 8306 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16107864 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/107864
Lithography apparatus and method of manufacturing article Aug 20, 2018 Issued
Array ( [id] => 14614017 [patent_doc_number] => 10359706 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2019-07-23 [patent_title] => Integrated scanning electron microscopy and optical analysis techniques for advanced process control [patent_app_type] => utility [patent_app_number] => 16/103386 [patent_app_country] => US [patent_app_date] => 2018-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5847 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16103386 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/103386
Integrated scanning electron microscopy and optical analysis techniques for advanced process control Aug 13, 2018 Issued
Array ( [id] => 16576987 [patent_doc_number] => 20210011388 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-14 [patent_title] => EXPOSURE EQUIPMENT AND EXPOSURE METHOD [patent_app_type] => utility [patent_app_number] => 16/637658 [patent_app_country] => US [patent_app_date] => 2018-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5296 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16637658 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/637658
Exposure equipment and exposure method Aug 8, 2018 Issued
Array ( [id] => 14886069 [patent_doc_number] => 10423071 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-09-24 [patent_title] => Methods for patterning hydrogels into multi-well plates [patent_app_type] => utility [patent_app_number] => 16/057241 [patent_app_country] => US [patent_app_date] => 2018-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 15 [patent_no_of_words] => 6708 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16057241 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/057241
Methods for patterning hydrogels into multi-well plates Aug 6, 2018 Issued
Array ( [id] => 15835693 [patent_doc_number] => 20200133129 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-30 [patent_title] => SYSTEM AND PROCESS FOR DIRECT CURING OF PHOTOPOLYMER PRINTING PLATES [patent_app_type] => utility [patent_app_number] => 16/629061 [patent_app_country] => US [patent_app_date] => 2018-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5618 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16629061 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/629061
System and process for direct curing of photopolymer printing plates Jul 19, 2018 Issued
Array ( [id] => 18445663 [patent_doc_number] => 11681228 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-20 [patent_title] => Method and apparatus for illuminating image points [patent_app_type] => utility [patent_app_number] => 16/973578 [patent_app_country] => US [patent_app_date] => 2018-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 9478 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16973578 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/973578
Method and apparatus for illuminating image points Jun 18, 2018 Issued
Array ( [id] => 14281195 [patent_doc_number] => 20190137882 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-05-09 [patent_title] => LIGHT SOURCE FOR LITHOGRAPHY EXPOSURE PROCESS [patent_app_type] => utility [patent_app_number] => 16/002180 [patent_app_country] => US [patent_app_date] => 2018-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8403 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16002180 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/002180
Light source for lithography exposure process Jun 6, 2018 Issued
Array ( [id] => 13626061 [patent_doc_number] => 20180364582 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-20 [patent_title] => APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRATE, LITHOGRAPHIC APPARATUS, AND METHOD OF PERFORMING A MEASUREMENT OPERATION ON A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 15/994400 [patent_app_country] => US [patent_app_date] => 2018-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9127 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15994400 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/994400
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate May 30, 2018 Issued
Array ( [id] => 17237959 [patent_doc_number] => 11181836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-23 [patent_title] => Method for determining deformation [patent_app_type] => utility [patent_app_number] => 16/623912 [patent_app_country] => US [patent_app_date] => 2018-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 7964 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16623912 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/623912
Method for determining deformation May 27, 2018 Issued
Array ( [id] => 17666708 [patent_doc_number] => 11360400 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-14 [patent_title] => Transport system having a magnetically levitated transportation stage [patent_app_type] => utility [patent_app_number] => 16/490206 [patent_app_country] => US [patent_app_date] => 2018-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 19 [patent_no_of_words] => 8065 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16490206 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/490206
Transport system having a magnetically levitated transportation stage May 20, 2018 Issued
Array ( [id] => 13416607 [patent_doc_number] => 20180259846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-13 [patent_title] => PELLICLE FOR RETICLE AND MULTILAYER MIRROR [patent_app_type] => utility [patent_app_number] => 15/974661 [patent_app_country] => US [patent_app_date] => 2018-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13428 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 7 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15974661 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/974661
Graphene spectral purity filter May 7, 2018 Issued
Array ( [id] => 14765487 [patent_doc_number] => 10394137 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-27 [patent_title] => Inspection method, lithographic apparatus, mask and substrate [patent_app_type] => utility [patent_app_number] => 15/968743 [patent_app_country] => US [patent_app_date] => 2018-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 25 [patent_no_of_words] => 14663 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15968743 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/968743
Inspection method, lithographic apparatus, mask and substrate Apr 30, 2018 Issued
Array ( [id] => 16076483 [patent_doc_number] => 20200192228 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-18 [patent_title] => SILICON WAFER PROCESSING DEVICE AND METHOD [patent_app_type] => utility [patent_app_number] => 16/608968 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5719 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16608968 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/608968
Silicon wafer processing device and method Apr 26, 2018 Issued
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