Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15042025 [patent_doc_number] => 20190332017 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-31 [patent_title] => SYSTEMS AND METHODS OF USING SOLID STATE EMITTER ARRAYS [patent_app_type] => utility [patent_app_number] => 15/964018 [patent_app_country] => US [patent_app_date] => 2018-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8412 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15964018 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/964018
Systems and methods of using solid state emitter arrays Apr 25, 2018 Issued
Array ( [id] => 16278407 [patent_doc_number] => 10761432 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-09-01 [patent_title] => Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/961377 [patent_app_country] => US [patent_app_date] => 2018-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 22 [patent_no_of_words] => 12369 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15961377 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/961377
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method Apr 23, 2018 Issued
Array ( [id] => 15652241 [patent_doc_number] => 20200088650 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-19 [patent_title] => Surface Defect Inspection Device and Method [patent_app_type] => utility [patent_app_number] => 16/616011 [patent_app_country] => US [patent_app_date] => 2018-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9206 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16616011 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/616011
Surface defect inspection device and method Apr 5, 2018 Issued
Array ( [id] => 13346421 [patent_doc_number] => 20180224750 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-09 [patent_title] => ILLUMINATION SYSTEM FOR EUV PROJECTION LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 15/945879 [patent_app_country] => US [patent_app_date] => 2018-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14587 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15945879 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/945879
Illumination system for EUV projection lithography Apr 4, 2018 Issued
Array ( [id] => 18462721 [patent_doc_number] => 11687008 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-27 [patent_title] => Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof [patent_app_type] => utility [patent_app_number] => 16/319163 [patent_app_country] => US [patent_app_date] => 2018-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 11366 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 301 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16319163 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/319163
Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof Feb 21, 2018 Issued
Array ( [id] => 12867499 [patent_doc_number] => 20180181008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-28 [patent_title] => ON-BOARD SUPPLY SYSTEM FOR A STAGE ASSEMBLY [patent_app_type] => utility [patent_app_number] => 15/901045 [patent_app_country] => US [patent_app_date] => 2018-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11489 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -32 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15901045 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/901045
On-board supply system for a stage assembly Feb 20, 2018 Issued
Array ( [id] => 15088795 [patent_doc_number] => 20190339208 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-07 [patent_title] => INSPECTION OF COMPONENTS FOR IMPERFECTIONS [patent_app_type] => utility [patent_app_number] => 16/473792 [patent_app_country] => US [patent_app_date] => 2018-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8032 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16473792 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/473792
Inspection of components for imperfections Feb 19, 2018 Issued
Array ( [id] => 12817906 [patent_doc_number] => 20180164474 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-14 [patent_title] => PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 15/894293 [patent_app_country] => US [patent_app_date] => 2018-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3293 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15894293 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/894293
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY Feb 11, 2018 Abandoned
Array ( [id] => 13360713 [patent_doc_number] => 20180231896 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-16 [patent_title] => METHOD OF PERFORMING MODEL-BASED SCANNER TUNING [patent_app_type] => utility [patent_app_number] => 15/893305 [patent_app_country] => US [patent_app_date] => 2018-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8561 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15893305 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/893305
Method of performing model-based scanner tuning Feb 8, 2018 Issued
Array ( [id] => 16550663 [patent_doc_number] => 10883816 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-01-05 [patent_title] => Position measurement system, zeroing method, lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 16/489439 [patent_app_country] => US [patent_app_date] => 2018-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 9476 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16489439 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/489439
Position measurement system, zeroing method, lithographic apparatus and device manufacturing method Feb 5, 2018 Issued
Array ( [id] => 12806050 [patent_doc_number] => 20180160520 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => Radiation Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 15/888362 [patent_app_country] => US [patent_app_date] => 2018-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8884 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15888362 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/888362
Radiation source, metrology apparatus, lithographic system and device manufacturing method Feb 4, 2018 Issued
Array ( [id] => 16809959 [patent_doc_number] => 20210132514 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => LITHOGRAPHIC APPARATUS AND COOLING METHOD [patent_app_type] => utility [patent_app_number] => 16/604976 [patent_app_country] => US [patent_app_date] => 2018-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9750 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -43 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16604976 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/604976
Lithographic apparatus and cooling method Jan 30, 2018 Issued
Array ( [id] => 12818593 [patent_doc_number] => 20180164703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-14 [patent_title] => ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION LITHOGRAPHY APPARATUS [patent_app_type] => utility [patent_app_number] => 15/879755 [patent_app_country] => US [patent_app_date] => 2018-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8043 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15879755 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/879755
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION LITHOGRAPHY APPARATUS Jan 24, 2018 Abandoned
Array ( [id] => 16354181 [patent_doc_number] => 10794686 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-10-06 [patent_title] => Apparatus and methods for measuring belts [patent_app_type] => utility [patent_app_number] => 16/480052 [patent_app_country] => US [patent_app_date] => 2018-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 2733 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16480052 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/480052
Apparatus and methods for measuring belts Jan 23, 2018 Issued
Array ( [id] => 12645873 [patent_doc_number] => 20180107122 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-04-19 [patent_title] => LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS [patent_app_type] => utility [patent_app_number] => 15/845590 [patent_app_country] => US [patent_app_date] => 2017-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9877 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -27 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15845590 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/845590
Lithography apparatus and method for operating a lithography apparatus Dec 17, 2017 Issued
Array ( [id] => 12645870 [patent_doc_number] => 20180107121 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-04-19 [patent_title] => MICROELECTROMECHANICAL MIRROR ASSEMBLY [patent_app_type] => utility [patent_app_number] => 15/844086 [patent_app_country] => US [patent_app_date] => 2017-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9422 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15844086 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/844086
Microelectromechanical mirror assembly Dec 14, 2017 Issued
Array ( [id] => 14734673 [patent_doc_number] => 10386733 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-20 [patent_title] => Optical system [patent_app_type] => utility [patent_app_number] => 15/835922 [patent_app_country] => US [patent_app_date] => 2017-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 9351 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15835922 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/835922
Optical system Dec 7, 2017 Issued
Array ( [id] => 12796033 [patent_doc_number] => 20180157180 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly [patent_app_type] => utility [patent_app_number] => 15/830775 [patent_app_country] => US [patent_app_date] => 2017-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10387 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15830775 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/830775
Method of measuring a target, metrology apparatus, polarizer assembly Dec 3, 2017 Issued
Array ( [id] => 12818572 [patent_doc_number] => 20180164696 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-14 [patent_title] => OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 15/828906 [patent_app_country] => US [patent_app_date] => 2017-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8335 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 187 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15828906 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/828906
Optical processing apparatus and substrate processing apparatus Nov 30, 2017 Issued
Array ( [id] => 14886085 [patent_doc_number] => 10423079 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-09-24 [patent_title] => Bearing device and exposure apparatus [patent_app_type] => utility [patent_app_number] => 15/829375 [patent_app_country] => US [patent_app_date] => 2017-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 4732 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 227 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15829375 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/829375
Bearing device and exposure apparatus Nov 30, 2017 Issued
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