Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 13303641 [patent_doc_number] => 20180203357 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-19 [patent_title] => METHOD FOR CONTROLLING RADIATION EMITTING FROM ONE OR MORE TUBULAR LAMPS IN AN EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 15/742738 [patent_app_country] => US [patent_app_date] => 2016-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1602 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15742738 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/742738
METHOD FOR CONTROLLING RADIATION EMITTING FROM ONE OR MORE TUBULAR LAMPS IN AN EXPOSURE APPARATUS Jul 6, 2016 Abandoned
Array ( [id] => 11853350 [patent_doc_number] => 20170227842 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-10 [patent_title] => 'MASK PLATE' [patent_app_type] => utility [patent_app_number] => 15/193992 [patent_app_country] => US [patent_app_date] => 2016-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2725 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15193992 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/193992
Mask plate Jun 26, 2016 Issued
Array ( [id] => 13859345 [patent_doc_number] => 10191390 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-01-29 [patent_title] => Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 15/578312 [patent_app_country] => US [patent_app_date] => 2016-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 11503 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15578312 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/578312
Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus Jun 26, 2016 Issued
Array ( [id] => 11367036 [patent_doc_number] => 20170005017 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-01-05 [patent_title] => 'DETECTION APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND DETECTION METHOD' [patent_app_type] => utility [patent_app_number] => 15/189043 [patent_app_country] => US [patent_app_date] => 2016-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5843 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15189043 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/189043
Detection apparatus, lithography apparatus, method of manufacturing article, and detection method Jun 21, 2016 Issued
Array ( [id] => 12045975 [patent_doc_number] => 09823573 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Correction of non-uniform patterns using time-shifted exposures' [patent_app_type] => utility [patent_app_number] => 15/188667 [patent_app_country] => US [patent_app_date] => 2016-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 8099 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15188667 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/188667
Correction of non-uniform patterns using time-shifted exposures Jun 20, 2016 Issued
Array ( [id] => 12371718 [patent_doc_number] => 09958789 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-01 [patent_title] => Method of metrology, inspection apparatus, lithographic system and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/186031 [patent_app_country] => US [patent_app_date] => 2016-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 22 [patent_no_of_words] => 16889 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15186031 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/186031
Method of metrology, inspection apparatus, lithographic system and device manufacturing method Jun 16, 2016 Issued
Array ( [id] => 11422997 [patent_doc_number] => 20170031142 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-02-02 [patent_title] => 'APPARATUS GENERATING EXTREME ULTRAVIOLET LIGHT AND EXPOSURE SYSTEM INCLUDING THE SAME' [patent_app_type] => utility [patent_app_number] => 15/183015 [patent_app_country] => US [patent_app_date] => 2016-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6321 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15183015 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/183015
APPARATUS GENERATING EXTREME ULTRAVIOLET LIGHT AND EXPOSURE SYSTEM INCLUDING THE SAME Jun 14, 2016 Abandoned
Array ( [id] => 11338116 [patent_doc_number] => 20160363871 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-15 [patent_title] => 'Inspection Apparatus, Inspection Method, Lithographic Apparatus, Patterning Device and Manufacturing Method' [patent_app_type] => utility [patent_app_number] => 15/179509 [patent_app_country] => US [patent_app_date] => 2016-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 13968 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 15 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15179509 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/179509
Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method Jun 9, 2016 Issued
Array ( [id] => 11867946 [patent_doc_number] => 20170235232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-17 [patent_title] => 'SUBSTRATE MEASUREMENT SYSTEM, METHOD OF MEASURING SUBSTRATE, AND COMPUTER PROGRAM PRODUCT' [patent_app_type] => utility [patent_app_number] => 15/169902 [patent_app_country] => US [patent_app_date] => 2016-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7046 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15169902 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/169902
Substrate measurement system, method of measuring substrate, and computer program product May 31, 2016 Issued
Array ( [id] => 11351974 [patent_doc_number] => 20160370715 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-22 [patent_title] => 'Device for Treating a Disc-Shaped Substrate and Support Adapter' [patent_app_type] => utility [patent_app_number] => 15/166431 [patent_app_country] => US [patent_app_date] => 2016-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4308 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15166431 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/166431
Device for treating a disc-shaped substrate and support adapter May 26, 2016 Issued
Array ( [id] => 12213465 [patent_doc_number] => 09910268 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-03-06 [patent_title] => 'Spatial light modulator, photolithographing apparatus, exposure apparatus, and method of manufacturing device' [patent_app_type] => utility [patent_app_number] => 15/164225 [patent_app_country] => US [patent_app_date] => 2016-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 31 [patent_no_of_words] => 8958 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15164225 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/164225
Spatial light modulator, photolithographing apparatus, exposure apparatus, and method of manufacturing device May 24, 2016 Issued
Array ( [id] => 11069535 [patent_doc_number] => 20160266499 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-15 [patent_title] => 'REFLECTIVE OPTICAL ELEMENT, AND OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/160616 [patent_app_country] => US [patent_app_date] => 2016-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 5839 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15160616 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/160616
Reflective optical element, and optical system of a microlithographic projection exposure apparatus May 19, 2016 Issued
Array ( [id] => 13638825 [patent_doc_number] => 09846370 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-12-19 [patent_title] => Support apparatus for an optical device, optical device and lithography system [patent_app_type] => utility [patent_app_number] => 15/156602 [patent_app_country] => US [patent_app_date] => 2016-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 5035 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 163 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15156602 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/156602
Support apparatus for an optical device, optical device and lithography system May 16, 2016 Issued
Array ( [id] => 12255571 [patent_doc_number] => 09927712 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-03-27 [patent_title] => 'Spatial light modulation element module, photolithographing apparatus, exposure apparatus, method of manufacturing spatial light modulation element module and method of manufacturing device' [patent_app_type] => utility [patent_app_number] => 15/155453 [patent_app_country] => US [patent_app_date] => 2016-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 9486 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15155453 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/155453
Spatial light modulation element module, photolithographing apparatus, exposure apparatus, method of manufacturing spatial light modulation element module and method of manufacturing device May 15, 2016 Issued
Array ( [id] => 14797447 [patent_doc_number] => 10401725 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-09-03 [patent_title] => Mask cover and mask [patent_app_type] => utility [patent_app_number] => 15/324381 [patent_app_country] => US [patent_app_date] => 2016-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 3270 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 311 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15324381 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/324381
Mask cover and mask May 15, 2016 Issued
Array ( [id] => 12371700 [patent_doc_number] => 09958783 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-05-01 [patent_title] => Illumination system for EUV projection lithography [patent_app_type] => utility [patent_app_number] => 15/152670 [patent_app_country] => US [patent_app_date] => 2016-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 29 [patent_no_of_words] => 14563 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15152670 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/152670
Illumination system for EUV projection lithography May 11, 2016 Issued
Array ( [id] => 11049221 [patent_doc_number] => 20160246180 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-08-25 [patent_title] => 'METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/146350 [patent_app_country] => US [patent_app_date] => 2016-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 10805 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15146350 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/146350
Method for operating an illumination system of a microlithographic projection exposure apparatus May 3, 2016 Issued
Array ( [id] => 12949519 [patent_doc_number] => 09835958 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-12-05 [patent_title] => Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/146105 [patent_app_country] => US [patent_app_date] => 2016-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 67 [patent_no_of_words] => 52522 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15146105 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/146105
Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method May 3, 2016 Issued
Array ( [id] => 11049220 [patent_doc_number] => 20160246179 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-08-25 [patent_title] => 'MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/144982 [patent_app_country] => US [patent_app_date] => 2016-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3387 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15144982 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/144982
Mirror, in particular for a microlithographic projection exposure apparatus May 2, 2016 Issued
Array ( [id] => 11049227 [patent_doc_number] => 20160246186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-08-25 [patent_title] => 'DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LITHOGRAPHY SYSTEM, AND METHOD' [patent_app_type] => utility [patent_app_number] => 15/145114 [patent_app_country] => US [patent_app_date] => 2016-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5432 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15145114 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/145114
Device for determining a tilt angle of at least one mirror of a lithography system, and method May 2, 2016 Issued
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