Daniel T. Pihulic

Array ( [id] => 12148075 [patent_doc_number] => 09882340 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-01-30 [patent_title] => 'Laser device, and exposure device and inspection device provided with the laser device' [patent_app_type] => utility [patent_app_number] => 15/137630 [patent_app_country] => US [patent_app_date] => 2016-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 26133 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15137630 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12087962 [patent_doc_number] => 09841690 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-12-12 [patent_title] => 'Method and apparatus for exposure pattern correction and exposure system' [patent_app_type] => utility [patent_app_number] => 15/135373 [patent_app_country] => US [patent_app_date] => 2016-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 3470 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15135373 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12931813 [patent_doc_number] => 09829803 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-28 [patent_title] => Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder [patent_app_type] => utility [patent_app_number] => 15/131986 [patent_app_country] => US [patent_app_date] => 2016-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 31 [patent_no_of_words] => 15073 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15131986 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12113946 [patent_doc_number] => 09869936 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-01-16 [patent_title] => 'Detection apparatus, measurement apparatus, lithography apparatus, and method of manufacturing article' [patent_app_type] => utility [patent_app_number] => 15/099774 [patent_app_country] => US [patent_app_date] => 2016-04-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 13 [patent_no_of_words] => 6809 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15099774 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12201117 [patent_doc_number] => 09904178 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-02-27 [patent_title] => 'On-board supply system for a stage assembly' [patent_app_type] => utility [patent_app_number] => 15/094480 [patent_app_country] => US [patent_app_date] => 2016-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 20 [patent_no_of_words] => 11906 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15094480 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12213555 [patent_doc_number] => 09910359 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-03-06 [patent_title] => 'Illumination system of a microlithographic projection exposure apparatus' [patent_app_type] => utility [patent_app_number] => 15/086475 [patent_app_country] => US [patent_app_date] => 2016-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 32 [patent_no_of_words] => 13049 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15086475 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11012800 [patent_doc_number] => 20160209754 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-07-21 [patent_title] => 'PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY' [patent_app_type] => utility [patent_app_number] => 15/083622 [patent_app_country] => US [patent_app_date] => 2016-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 11549 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15083622 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11916871 [patent_doc_number] => 09785054 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-10-10 [patent_title] => 'Mirror, more particularly for a microlithographic projection exposure apparatus' [patent_app_type] => utility [patent_app_number] => 15/082555 [patent_app_country] => US [patent_app_date] => 2016-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3951 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15082555 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12045989 [patent_doc_number] => 09823589 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Lithographic apparatus and method' [patent_app_type] => utility [patent_app_number] => 15/078814 [patent_app_country] => US [patent_app_date] => 2016-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 23 [patent_no_of_words] => 16721 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15078814 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11816383 [patent_doc_number] => 09720329 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-08-01 [patent_title] => 'Projection objective of a microlithographic projection exposure apparatus' [patent_app_type] => utility [patent_app_number] => 15/070757 [patent_app_country] => US [patent_app_date] => 2016-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 7436 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15070757 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12248711 [patent_doc_number] => 09921484 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-03-20 [patent_title] => 'Illumination system and illumination optical unit for EUV projection lithography' [patent_app_type] => utility [patent_app_number] => 15/067436 [patent_app_country] => US [patent_app_date] => 2016-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 10668 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 239 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15067436 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10990840 [patent_doc_number] => 20160187786 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-30 [patent_title] => 'ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY' [patent_app_type] => utility [patent_app_number] => 15/066124 [patent_app_country] => US [patent_app_date] => 2016-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6148 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15066124 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10990841 [patent_doc_number] => 20160187785 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-30 [patent_title] => 'ILLUMINATION SYSTEM' [patent_app_type] => utility [patent_app_number] => 15/066039 [patent_app_country] => US [patent_app_date] => 2016-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7788 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15066039 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14008507 [patent_doc_number] => 10222707 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-03-05 [patent_title] => Lithographic apparatus and a device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/054010 [patent_app_country] => US [patent_app_date] => 2016-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 23 [patent_no_of_words] => 15949 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15054010 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10824143 [patent_doc_number] => 20160170309 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-16 [patent_title] => 'LIGHT EXPOSURE METHOD, AND LIGHT EXPOSURE APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/051093 [patent_app_country] => US [patent_app_date] => 2016-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 4699 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15051093 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11909769 [patent_doc_number] => 09778576 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-10-03 [patent_title] => 'Microlithography illumination system and microlithography illumination optical unit' [patent_app_type] => utility [patent_app_number] => 15/046743 [patent_app_country] => US [patent_app_date] => 2016-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 18 [patent_no_of_words] => 10932 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15046743 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12018304 [patent_doc_number] => 09811005 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-07 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 15/003768 [patent_app_country] => US [patent_app_date] => 2016-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 9856 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15003768 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10778160 [patent_doc_number] => 20160124316 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-05-05 [patent_title] => 'OPTICAL PROJECTION ARRAY EXPOSURE SYSTEM' [patent_app_type] => utility [patent_app_number] => 14/993071 [patent_app_country] => US [patent_app_date] => 2016-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8674 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14993071 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11931250 [patent_doc_number] => 09798243 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-10-24 [patent_title] => 'Optical device having a deformable optical element' [patent_app_type] => utility [patent_app_number] => 14/969703 [patent_app_country] => US [patent_app_date] => 2015-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 14140 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14969703 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10824146 [patent_doc_number] => 20160170313 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-16 [patent_title] => 'SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE PRODUCTION METHOD' [patent_app_type] => utility [patent_app_number] => 14/963656 [patent_app_country] => US [patent_app_date] => 2015-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5230 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14963656 [rel_patent_id] =>[rel_patent_doc_number] =>)