Daniel T. Pihulic

Array ( [id] => 11430521 [patent_doc_number] => 09568836 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-02-14 [patent_title] => 'Exposure apparatus and device manufacturing method using same' [patent_app_type] => utility [patent_app_number] => 14/820931 [patent_app_country] => US [patent_app_date] => 2015-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 7365 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 233 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14820931 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10431846 [patent_doc_number] => 20150316858 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-11-05 [patent_title] => 'LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 14/800493 [patent_app_country] => US [patent_app_date] => 2015-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6255 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14800493 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11838214 [patent_doc_number] => 20170219933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-03 [patent_title] => 'LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING A DEVICE' [patent_app_type] => utility [patent_app_number] => 15/500866 [patent_app_country] => US [patent_app_date] => 2015-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 11619 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15500866 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12890461 [patent_doc_number] => 20180188662 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-05 [patent_title] => METHOD AND APPARATUS FOR MAINTAINING THE SURFACE OF A RETICLE FREE OF PARTICLES [patent_app_type] => utility [patent_app_number] => 15/739726 [patent_app_country] => US [patent_app_date] => 2015-06-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3564 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15739726 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11326495 [patent_doc_number] => 20160357107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-08 [patent_title] => 'IMMERSION FIELD GUIDED EXPOSURE AND POST-EXPOSURE BAKE PROCESS' [patent_app_type] => utility [patent_app_number] => 14/733923 [patent_app_country] => US [patent_app_date] => 2015-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 10075 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14733923 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14456851 [patent_doc_number] => 10324384 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-06-18 [patent_title] => Lithographic apparatus and a method of manufacturing a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 15/320300 [patent_app_country] => US [patent_app_date] => 2015-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11201 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15320300 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12774454 [patent_doc_number] => 20180149986 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-05-31 [patent_title] => LITHOGRAPHIC APPARATUS, OBJECT POSITIONING SYSTEM AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 15/316526 [patent_app_country] => US [patent_app_date] => 2015-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10279 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15316526 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11077500 [patent_doc_number] => 20160274465 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-22 [patent_title] => 'EUV Lithography System and Method with Optimized Throughput and Stability' [patent_app_type] => utility [patent_app_number] => 14/717890 [patent_app_country] => US [patent_app_date] => 2015-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 8628 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14717890 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10815701 [patent_doc_number] => 20160161862 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-09 [patent_title] => 'MQW DEVICES & METHODS FOR SEMICONDUCTOR PATTERNING SYSTEMS' [patent_app_type] => utility [patent_app_number] => 14/714245 [patent_app_country] => US [patent_app_date] => 2015-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 4617 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14714245 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10446314 [patent_doc_number] => 20150331329 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-11-19 [patent_title] => 'EXPOSURE APPARATUS, ALIGNMENT METHOD, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 14/713060 [patent_app_country] => US [patent_app_date] => 2015-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6748 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14713060 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13280809 [patent_doc_number] => 10151983 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-12-11 [patent_title] => Exposure apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 14/703138 [patent_app_country] => US [patent_app_date] => 2015-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 30647 [patent_no_of_claims] => 43 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 264 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14703138 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13128999 [patent_doc_number] => 10082424 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-09-25 [patent_title] => Diamond-based monitoring apparatus for lithographic apparatus, and a lithographic apparatus comprising diamond-based monitoring apparatus [patent_app_type] => utility [patent_app_number] => 15/308670 [patent_app_country] => US [patent_app_date] => 2015-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 9263 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15308670 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10424400 [patent_doc_number] => 20150309411 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-29 [patent_title] => 'Methods of Forming Pattern by Using Dual Tone Development Processes' [patent_app_type] => utility [patent_app_number] => 14/679054 [patent_app_country] => US [patent_app_date] => 2015-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 10390 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14679054 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12351018 [patent_doc_number] => 09952513 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-04-24 [patent_title] => Undulator [patent_app_type] => utility [patent_app_number] => 15/129360 [patent_app_country] => US [patent_app_date] => 2015-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 18 [patent_no_of_words] => 18962 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15129360 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11320480 [patent_doc_number] => 09519222 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-12-13 [patent_title] => 'Dynamic optical head layer and lithography method using the same' [patent_app_type] => utility [patent_app_number] => 14/635336 [patent_app_country] => US [patent_app_date] => 2015-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 22 [patent_no_of_words] => 4836 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14635336 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11758848 [patent_doc_number] => 20170205717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-20 [patent_title] => 'APPARATUS FOR CLEANING AN OBJECT' [patent_app_type] => utility [patent_app_number] => 15/302146 [patent_app_country] => US [patent_app_date] => 2015-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7520 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15302146 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11351976 [patent_doc_number] => 20160370716 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-22 [patent_title] => 'SENSOR SYSTEM, SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/121719 [patent_app_country] => US [patent_app_date] => 2015-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 9656 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15121719 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10363062 [patent_doc_number] => 20150248067 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-09-03 [patent_title] => 'DETERMINATION METHOD, EXPOSURE APPARATUS, EXPOSURE SYSTEM, METHOD OF MANUFACTURING ARTICLE, AND STORAGE MEDIUM' [patent_app_type] => utility [patent_app_number] => 14/630858 [patent_app_country] => US [patent_app_date] => 2015-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5782 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14630858 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10342050 [patent_doc_number] => 20150227055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-08-13 [patent_title] => 'OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE' [patent_app_type] => utility [patent_app_number] => 14/620589 [patent_app_country] => US [patent_app_date] => 2015-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13686 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14620589 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15485567 [patent_doc_number] => 10558126 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-11 [patent_title] => Lithographic apparatus and method [patent_app_type] => utility [patent_app_number] => 15/120093 [patent_app_country] => US [patent_app_date] => 2015-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 11 [patent_no_of_words] => 13189 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15120093 [rel_patent_id] =>[rel_patent_doc_number] =>)