Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 9899905 [patent_doc_number] => 20150055105 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-02-26 [patent_title] => 'EXPOSURE APPARATUS, EXPOSURE METHOD, AND EXPOSURE PROGRAM' [patent_app_type] => utility [patent_app_number] => 14/197726 [patent_app_country] => US [patent_app_date] => 2014-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2451 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14197726 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/197726
EXPOSURE APPARATUS, EXPOSURE METHOD, AND EXPOSURE PROGRAM Mar 4, 2014 Abandoned
Array ( [id] => 11774740 [patent_doc_number] => 09383657 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-07-05 [patent_title] => 'Method and structure for lithography processes with focus monitoring and control' [patent_app_type] => utility [patent_app_number] => 14/194960 [patent_app_country] => US [patent_app_date] => 2014-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 15 [patent_no_of_words] => 6337 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 28 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14194960 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/194960
Method and structure for lithography processes with focus monitoring and control Mar 2, 2014 Issued
Array ( [id] => 9559217 [patent_doc_number] => 20140176929 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-06-26 [patent_title] => 'Lithographic Apparatus and Device Manufacturing Method Using Dose Control' [patent_app_type] => utility [patent_app_number] => 14/190147 [patent_app_country] => US [patent_app_date] => 2014-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 10669 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14190147 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/190147
Lithographic apparatus and device manufacturing method using dose control Feb 25, 2014 Issued
Array ( [id] => 10356784 [patent_doc_number] => 20150241789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-08-27 [patent_title] => 'IN-LINE INSPECTION AND CLEAN FOR IMMERSION LITHOGRAPHY' [patent_app_type] => utility [patent_app_number] => 14/189975 [patent_app_country] => US [patent_app_date] => 2014-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3928 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14189975 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/189975
In-line inspection and clean for immersion lithography Feb 24, 2014 Issued
Array ( [id] => 10937641 [patent_doc_number] => 20140340662 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-11-20 [patent_title] => 'MASKLESS EXPOSURE DEVICE' [patent_app_type] => utility [patent_app_number] => 14/189663 [patent_app_country] => US [patent_app_date] => 2014-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 4754 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14189663 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/189663
Maskless exposure device Feb 24, 2014 Issued
Array ( [id] => 11258061 [patent_doc_number] => 09482960 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-11-01 [patent_title] => 'Pellicle for reticle and multilayer mirror' [patent_app_type] => utility [patent_app_number] => 14/181076 [patent_app_country] => US [patent_app_date] => 2014-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 15 [patent_no_of_words] => 13688 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14181076 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/181076
Pellicle for reticle and multilayer mirror Feb 13, 2014 Issued
Array ( [id] => 9784060 [patent_doc_number] => 20140300879 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-10-09 [patent_title] => 'FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 14/179276 [patent_app_country] => US [patent_app_date] => 2014-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 12462 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14179276 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/179276
Fluid extraction system, lithographic apparatus and device manufacturing method Feb 11, 2014 Issued
Array ( [id] => 11889462 [patent_doc_number] => 09760020 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-09-12 [patent_title] => 'In-situ metrology' [patent_app_type] => utility [patent_app_number] => 14/162110 [patent_app_country] => US [patent_app_date] => 2014-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 5484 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14162110 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/162110
In-situ metrology Jan 22, 2014 Issued
Array ( [id] => 11285105 [patent_doc_number] => 09500956 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-11-22 [patent_title] => 'Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure' [patent_app_type] => utility [patent_app_number] => 14/143878 [patent_app_country] => US [patent_app_date] => 2013-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 10235 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 222 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14143878 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/143878
Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure Dec 29, 2013 Issued
Array ( [id] => 11810614 [patent_doc_number] => 09715182 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-07-25 [patent_title] => 'Lithographic apparatus, substrate support system, device manufacturing method and control program' [patent_app_type] => utility [patent_app_number] => 14/647778 [patent_app_country] => US [patent_app_date] => 2013-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 22 [patent_no_of_words] => 12126 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14647778 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/647778
Lithographic apparatus, substrate support system, device manufacturing method and control program Nov 24, 2013 Issued
Array ( [id] => 9361541 [patent_doc_number] => 20140071414 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-03-13 [patent_title] => 'MICROLITHOGRAPHY PROJECTION SYSTEM WITH AN ACCESSIBLE DIAPHRAGM OR APERTURE STOP' [patent_app_type] => utility [patent_app_number] => 14/080224 [patent_app_country] => US [patent_app_date] => 2013-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11250 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14080224 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/080224
Microlithography projection system with an accessible diaphragm or aperture stop Nov 13, 2013 Issued
Array ( [id] => 10408445 [patent_doc_number] => 20150293455 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-15 [patent_title] => 'EXPOSURE APPARATUS AND EXPOSURE METHOD' [patent_app_type] => utility [patent_app_number] => 14/351083 [patent_app_country] => US [patent_app_date] => 2013-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2533 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14351083 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/351083
Exposure apparatus and exposure method Nov 11, 2013 Issued
Array ( [id] => 10392232 [patent_doc_number] => 20150277239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-01 [patent_title] => 'Multiple-Blade Device for Substrate Edge Protection during Photolithography' [patent_app_type] => utility [patent_app_number] => 14/433233 [patent_app_country] => US [patent_app_date] => 2013-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 34 [patent_figures_cnt] => 34 [patent_no_of_words] => 9209 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14433233 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/433233
Multiple-Blade Device for Substrate Edge Protection during Photolithography Oct 1, 2013 Abandoned
Array ( [id] => 10349276 [patent_doc_number] => 20150234281 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-08-20 [patent_title] => 'Blade for Substrate Edge Protection During Photolithography' [patent_app_type] => utility [patent_app_number] => 14/433194 [patent_app_country] => US [patent_app_date] => 2013-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 34 [patent_figures_cnt] => 34 [patent_no_of_words] => 9301 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14433194 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/433194
Blade for Substrate Edge Protection During Photolithography Oct 1, 2013 Abandoned
Array ( [id] => 10416448 [patent_doc_number] => 20150301458 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-22 [patent_title] => 'MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 14/432513 [patent_app_country] => US [patent_app_date] => 2013-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 10857 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14432513 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/432513
Movable body apparatus, exposure apparatus, and device manufacturing method Oct 1, 2013 Issued
Array ( [id] => 9650071 [patent_doc_number] => 08804095 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-08-12 [patent_title] => 'Exposure apparatus and device fabrication method' [patent_app_type] => utility [patent_app_number] => 14/041174 [patent_app_country] => US [patent_app_date] => 2013-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 8383 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14041174 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/041174
Exposure apparatus and device fabrication method Sep 29, 2013 Issued
Array ( [id] => 9328985 [patent_doc_number] => 20140055767 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-02-27 [patent_title] => 'MIRROR ARRAY' [patent_app_type] => utility [patent_app_number] => 14/031464 [patent_app_country] => US [patent_app_date] => 2013-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 19670 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14031464 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/031464
Mirror array Sep 18, 2013 Issued
Array ( [id] => 9196408 [patent_doc_number] => 20130335723 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-12-19 [patent_title] => 'MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 13/973260 [patent_app_country] => US [patent_app_date] => 2013-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 18565 [patent_no_of_claims] => 86 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13973260 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/973260
Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method Aug 21, 2013 Issued
Array ( [id] => 11916877 [patent_doc_number] => 09785060 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-10-10 [patent_title] => 'Stage system and lithographic apparatus comprising such stage system' [patent_app_type] => utility [patent_app_number] => 14/423405 [patent_app_country] => US [patent_app_date] => 2013-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 5517 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14423405 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/423405
Stage system and lithographic apparatus comprising such stage system Aug 18, 2013 Issued
Array ( [id] => 10376091 [patent_doc_number] => 20150261098 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-09-17 [patent_title] => 'Off-Axis Alignment System and Alignment Method' [patent_app_type] => utility [patent_app_number] => 14/434079 [patent_app_country] => US [patent_app_date] => 2013-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 6689 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14434079 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/434079
Off-axis alignment system and alignment method Aug 4, 2013 Issued
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