Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18780535 [patent_doc_number] => 11822255 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-21 [patent_title] => Process window based on defect probability [patent_app_type] => utility [patent_app_number] => 17/389842 [patent_app_country] => US [patent_app_date] => 2021-07-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 48 [patent_no_of_words] => 40870 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17389842 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/389842
Process window based on defect probability Jul 29, 2021 Issued
Array ( [id] => 19956257 [patent_doc_number] => 12326670 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-10 [patent_title] => Lithographic apparatus, metrology system, and intensity imbalance measurement for error correction [patent_app_type] => utility [patent_app_number] => 18/023162 [patent_app_country] => US [patent_app_date] => 2021-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 15 [patent_no_of_words] => 9892 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18023162 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/023162
Lithographic apparatus, metrology system, and intensity imbalance measurement for error correction Jul 23, 2021 Issued
Array ( [id] => 17401268 [patent_doc_number] => 20220043358 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-10 [patent_title] => METHOD FOR PRODUCING OR SETTING A PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 17/382577 [patent_app_country] => US [patent_app_date] => 2021-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2850 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17382577 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/382577
METHOD FOR PRODUCING OR SETTING A PROJECTION EXPOSURE APPARATUS Jul 21, 2021 Abandoned
Array ( [id] => 18126066 [patent_doc_number] => 20230011685 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => UV Lithography System [patent_app_type] => utility [patent_app_number] => 17/372446 [patent_app_country] => US [patent_app_date] => 2021-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5065 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17372446 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/372446
UV lithography system Jul 9, 2021 Issued
Array ( [id] => 20190041 [patent_doc_number] => 12401169 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-26 [patent_title] => Laser light energy and dose control using repetition rate based gain estimators [patent_app_type] => utility [patent_app_number] => 17/362053 [patent_app_country] => US [patent_app_date] => 2021-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17362053 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/362053
Laser light energy and dose control using repetition rate based gain estimators Jun 28, 2021 Issued
Array ( [id] => 18462725 [patent_doc_number] => 11687012 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-27 [patent_title] => Reduce mask defect impact by contamination decompose [patent_app_type] => utility [patent_app_number] => 17/358776 [patent_app_country] => US [patent_app_date] => 2021-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 17 [patent_no_of_words] => 7992 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17358776 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/358776
Reduce mask defect impact by contamination decompose Jun 24, 2021 Issued
Array ( [id] => 18924920 [patent_doc_number] => 20240027924 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-25 [patent_title] => VIBRATION ATTENUATION STRUCTURE AND EXPOSURE DEVICE [patent_app_type] => utility [patent_app_number] => 17/607877 [patent_app_country] => US [patent_app_date] => 2021-06-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3675 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17607877 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/607877
Vibration attenuation structure and exposure device Jun 23, 2021 Issued
Array ( [id] => 17316309 [patent_doc_number] => 20210405358 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-30 [patent_title] => COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE [patent_app_type] => utility [patent_app_number] => 17/354116 [patent_app_country] => US [patent_app_date] => 2021-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12770 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17354116 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/354116
COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE Jun 21, 2021 Abandoned
Array ( [id] => 18505959 [patent_doc_number] => 11703770 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Compensation of creep effects in an imaging device [patent_app_type] => utility [patent_app_number] => 17/354212 [patent_app_country] => US [patent_app_date] => 2021-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 10338 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 285 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17354212 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/354212
Compensation of creep effects in an imaging device Jun 21, 2021 Issued
Array ( [id] => 18832249 [patent_doc_number] => 20230400776 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => Multi Pattern Maskless Lithography Method and System [patent_app_type] => utility [patent_app_number] => 18/035283 [patent_app_country] => US [patent_app_date] => 2021-06-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9964 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18035283 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/035283
Multi Pattern Maskless Lithography Method and System Jun 19, 2021 Pending
Array ( [id] => 18037957 [patent_doc_number] => 20220382173 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => MASK FOR ATTRACTING CHARGED PARTICLES AND METHOD FOR USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/331985 [patent_app_country] => US [patent_app_date] => 2021-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8375 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17331985 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/331985
Mask for attracting charged particles and method for using the same May 26, 2021 Issued
Array ( [id] => 20214774 [patent_doc_number] => 12411425 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-09 [patent_title] => Fluid purging system [patent_app_type] => utility [patent_app_number] => 18/001256 [patent_app_country] => US [patent_app_date] => 2021-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 1245 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18001256 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/001256
Fluid purging system May 9, 2021 Issued
Array ( [id] => 17321212 [patent_doc_number] => 20210410262 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-30 [patent_title] => EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/314775 [patent_app_country] => US [patent_app_date] => 2021-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13556 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17314775 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/314775
Extreme ultraviolet light generation system and electronic device manufacturing method May 6, 2021 Issued
Array ( [id] => 17038595 [patent_doc_number] => 20210255554 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A SEMI-ACTIVE SPACER, AND METHOD FOR USING THE SEMI-ACTIVE SPACER [patent_app_type] => utility [patent_app_number] => 17/307363 [patent_app_country] => US [patent_app_date] => 2021-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4746 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17307363 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/307363
MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A SEMI-ACTIVE SPACER, AND METHOD FOR USING THE SEMI-ACTIVE SPACER May 3, 2021 Abandoned
Array ( [id] => 17445826 [patent_doc_number] => 20220066331 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => LITHOGRAPHY SYSTEM AND METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/306631 [patent_app_country] => US [patent_app_date] => 2021-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11117 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17306631 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/306631
Lithography system and method thereof May 2, 2021 Issued
Array ( [id] => 17743978 [patent_doc_number] => 11392041 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-19 [patent_title] => Particle removal device and method [patent_app_type] => utility [patent_app_number] => 17/239952 [patent_app_country] => US [patent_app_date] => 2021-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 6559 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17239952 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/239952
Particle removal device and method Apr 25, 2021 Issued
Array ( [id] => 17068959 [patent_doc_number] => 20210271175 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-02 [patent_title] => METHOD AND APPARATUS FOR DIFFRACTION-BASED OVERLAY MEASUREMENT [patent_app_type] => utility [patent_app_number] => 17/240805 [patent_app_country] => US [patent_app_date] => 2021-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12778 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17240805 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/240805
Method and apparatus for diffraction-based overlay measurement Apr 25, 2021 Issued
Array ( [id] => 17445823 [patent_doc_number] => 20220066328 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/234908 [patent_app_country] => US [patent_app_date] => 2021-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9364 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17234908 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/234908
Semiconductor device manufacturing system Apr 19, 2021 Issued
Array ( [id] => 17947485 [patent_doc_number] => 20220334504 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-20 [patent_title] => SYSTEM AND METHOD FOR OPTICAL-PATH COUPLING OF LIGHT FOR IN-SITU PHOTOCHEMICAL CLEANING IN PROJECTION IMAGING SYSTEMS [patent_app_type] => utility [patent_app_number] => 17/235573 [patent_app_country] => US [patent_app_date] => 2021-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7638 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -37 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17235573 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/235573
System and method for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systems Apr 19, 2021 Issued
Array ( [id] => 17354443 [patent_doc_number] => 11229112 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-18 [patent_title] => Extreme ultraviolet light generation apparatus, target control method, and electronic device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/227912 [patent_app_country] => US [patent_app_date] => 2021-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 40 [patent_no_of_words] => 13983 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17227912 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/227912
Extreme ultraviolet light generation apparatus, target control method, and electronic device manufacturing method Apr 11, 2021 Issued
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