Search

Daniel T. Pihulic

Examiner (ID: 407, Phone: (571)272-6977 , Office: P/3645 )

Most Active Art Unit
3645
Art Unit(s)
2899, 2735, 2201, 3642, 3662, 3645, 2202
Total Applications
3662
Issued Applications
3296
Pending Applications
170
Abandoned Applications
226

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18498920 [patent_doc_number] => 20230221650 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-13 [patent_title] => PROGRAMMABLE NANOLITHOGRAPHY MASK [patent_app_type] => utility [patent_app_number] => 17/995230 [patent_app_country] => US [patent_app_date] => 2021-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12352 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17995230 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/995230
Programmable nanolithography mask Apr 1, 2021 Issued
Array ( [id] => 19458819 [patent_doc_number] => 12099307 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-24 [patent_title] => Actuator unit for positioning an optical element [patent_app_type] => utility [patent_app_number] => 17/920763 [patent_app_country] => US [patent_app_date] => 2021-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 14934 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 215 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17920763 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/920763
Actuator unit for positioning an optical element Mar 18, 2021 Issued
Array ( [id] => 18103871 [patent_doc_number] => 11543755 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-03 [patent_title] => Method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 17/206563 [patent_app_country] => US [patent_app_date] => 2021-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 18 [patent_no_of_words] => 14352 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 206 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17206563 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/206563
Method of manufacturing semiconductor device Mar 18, 2021 Issued
Array ( [id] => 16918192 [patent_doc_number] => 20210191284 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-24 [patent_title] => LITHOGRAPHY SYSTEM AND CLEANING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/194327 [patent_app_country] => US [patent_app_date] => 2021-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7512 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17194327 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/194327
Lithography system and cleaning method thereof Mar 7, 2021 Issued
Array ( [id] => 16887119 [patent_doc_number] => 20210173316 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-10 [patent_title] => RADIATION SOURCE FOR LITHOGRAPHY PROCESS [patent_app_type] => utility [patent_app_number] => 17/180265 [patent_app_country] => US [patent_app_date] => 2021-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8168 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17180265 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/180265
Radiation source for lithography process Feb 18, 2021 Issued
Array ( [id] => 16848564 [patent_doc_number] => 20210149309 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-20 [patent_title] => POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 17/161211 [patent_app_country] => US [patent_app_date] => 2021-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17161211 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/161211
POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS Jan 27, 2021 Abandoned
Array ( [id] => 18242851 [patent_doc_number] => 20230075162 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => Reticle Gripper Damper and Isolation System for Lithographic Apparatuses [patent_app_type] => utility [patent_app_number] => 17/799652 [patent_app_country] => US [patent_app_date] => 2021-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7610 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17799652 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/799652
Reticle gripper damper and isolation system for lithographic apparatuses Jan 25, 2021 Issued
Array ( [id] => 16979270 [patent_doc_number] => 20210223507 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => LIGHT EMISSION APPARATUS FOR EXPOSURE MACHINE AND EXPOSURE EQUIPMENT INCLUDING SAME [patent_app_type] => utility [patent_app_number] => 17/153433 [patent_app_country] => US [patent_app_date] => 2021-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10645 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17153433 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/153433
LIGHT EMISSION APPARATUS FOR EXPOSURE MACHINE AND EXPOSURE EQUIPMENT INCLUDING SAME Jan 19, 2021 Abandoned
Array ( [id] => 17698621 [patent_doc_number] => 11372342 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-28 [patent_title] => Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/152362 [patent_app_country] => US [patent_app_date] => 2021-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 34 [patent_no_of_words] => 16647 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17152362 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/152362
Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method Jan 18, 2021 Issued
Array ( [id] => 18213171 [patent_doc_number] => 20230059435 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => APPARATUS AND METHOD FOR EXPOSURE OF RELIEF PRECURSORS [patent_app_type] => utility [patent_app_number] => 17/793870 [patent_app_country] => US [patent_app_date] => 2021-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6547 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793870 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793870
Apparatus and method for exposure of relief precursors Jan 17, 2021 Issued
Array ( [id] => 17714897 [patent_doc_number] => 11378888 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2022-07-05 [patent_title] => Lens adjustment for an edge exposure tool [patent_app_type] => utility [patent_app_number] => 17/248074 [patent_app_country] => US [patent_app_date] => 2021-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 13158 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17248074 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/248074
Lens adjustment for an edge exposure tool Jan 6, 2021 Issued
Array ( [id] => 18168900 [patent_doc_number] => 20230035511 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION [patent_app_type] => utility [patent_app_number] => 17/791641 [patent_app_country] => US [patent_app_date] => 2021-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15228 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17791641 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/791641
LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION Jan 3, 2021 Pending
Array ( [id] => 18222973 [patent_doc_number] => 20230061967 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => METHODS AND SYSTEMS FOR MASKLESS LITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 17/793726 [patent_app_country] => US [patent_app_date] => 2020-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17950 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793726 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793726
Methods and systems for maskless lithography Dec 27, 2020 Issued
Array ( [id] => 16993635 [patent_doc_number] => 20210232055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-29 [patent_title] => MASK BLANK FOR LITHOGRAPHY AND METHOD OF MANUFACTURING THE SAME [patent_app_type] => utility [patent_app_number] => 17/129841 [patent_app_country] => US [patent_app_date] => 2020-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5984 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17129841 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/129841
Mask blank for lithography and method of manufacturing the same Dec 20, 2020 Issued
Array ( [id] => 16765473 [patent_doc_number] => 20210111055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-15 [patent_title] => ALIGNER AND CORRECTION VALUE CALCULATION METHOD FOR ALIGNER [patent_app_type] => utility [patent_app_number] => 17/128199 [patent_app_country] => US [patent_app_date] => 2020-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14584 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 256 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17128199 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/128199
Aligner and correction value calculation method for aligner Dec 20, 2020 Issued
Array ( [id] => 19703117 [patent_doc_number] => 12197141 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Suction clamp, object handler, stage apparatus and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 17/792335 [patent_app_country] => US [patent_app_date] => 2020-12-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 17 [patent_no_of_words] => 10988 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17792335 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/792335
Suction clamp, object handler, stage apparatus and lithographic apparatus Dec 17, 2020 Issued
Array ( [id] => 16729322 [patent_doc_number] => 20210096469 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-01 [patent_title] => RETICLE-MASKING STRUCTURE, EXTREME ULTRAVIOLET APPARATUS, AND METHOD OF FORMING THE SAME [patent_app_type] => utility [patent_app_number] => 17/121588 [patent_app_country] => US [patent_app_date] => 2020-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7638 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17121588 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/121588
Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same Dec 13, 2020 Issued
Array ( [id] => 17157569 [patent_doc_number] => 20210318620 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-14 [patent_title] => SYSTEMS AND METHODS FOR OPTIMIZATION OF PARAMETERS FOR EXPOSING FLEXOGRAPHIC PHOTOPOLYMER PLATES [patent_app_type] => utility [patent_app_number] => 17/114642 [patent_app_country] => US [patent_app_date] => 2020-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7172 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -30 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17114642 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/114642
SYSTEMS AND METHODS FOR OPTIMIZATION OF PARAMETERS FOR EXPOSING FLEXOGRAPHIC PHOTOPOLYMER PLATES Dec 7, 2020 Pending
Array ( [id] => 18164846 [patent_doc_number] => 20230031443 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-02 [patent_title] => WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT [patent_app_type] => utility [patent_app_number] => 17/788806 [patent_app_country] => US [patent_app_date] => 2020-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10927 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17788806 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/788806
WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT Dec 7, 2020 Abandoned
Array ( [id] => 19292947 [patent_doc_number] => 12032299 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-09 [patent_title] => Metrology method and associated metrology and lithographic apparatuses [patent_app_type] => utility [patent_app_number] => 17/784566 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 11113 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17784566 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/784566
Metrology method and associated metrology and lithographic apparatuses Dec 2, 2020 Issued
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