David E Harvey
Examiner (ID: 1742)
Most Active Art Unit | 2602 |
Art Unit(s) | 3992, 2621, 2481, 2714, 2602, 2614 |
Total Applications | 1668 |
Issued Applications | 1258 |
Pending Applications | 60 |
Abandoned Applications | 342 |
Applications
Application number | Title of the application | Filing Date | Status |
---|---|---|---|
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[patent_title] => ENHANCED HIGH ASPECT RATIO ETCH PERFORMANCE USING ACCELERATED NEUTRAL BEAMS DERIVED FROM GAS-CLUSTER ION BEAMS
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