
Deoram Persaud
Examiner (ID: 9737, Phone: (571)270-5476 , Office: P/2882 )
| Most Active Art Unit | 2882 |
| Art Unit(s) | 2882 |
| Total Applications | 875 |
| Issued Applications | 627 |
| Pending Applications | 84 |
| Abandoned Applications | 181 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 17316472
[patent_doc_number] => 20210405521
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-30
[patent_title] => PROXIMITY CORRECTION METHODS FOR SEMICONDUCTOR MANUFACTURING PROCESSES
[patent_app_type] => utility
[patent_app_number] => 17/180984
[patent_app_country] => US
[patent_app_date] => 2021-02-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 14396
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17180984
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/180984 | Proximity correction methods for semiconductor manufacturing processes | Feb 21, 2021 | Issued |
Array
(
[id] => 18741320
[patent_doc_number] => 20230350301
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-11-02
[patent_title] => METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
[patent_app_type] => utility
[patent_app_number] => 17/800649
[patent_app_country] => US
[patent_app_date] => 2021-02-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9372
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 60
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17800649
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/800649 | Method and apparatus for forming a patterned layer of material | Feb 16, 2021 | Issued |
Array
(
[id] => 19375200
[patent_doc_number] => 12066763
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-08-20
[patent_title] => Sensitivity improvement of optical and SEM defection inspection
[patent_app_type] => utility
[patent_app_number] => 17/168042
[patent_app_country] => US
[patent_app_date] => 2021-02-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 11
[patent_no_of_words] => 6117
[patent_no_of_claims] => 45
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 69
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17168042
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/168042 | Sensitivity improvement of optical and SEM defection inspection | Feb 3, 2021 | Issued |
Array
(
[id] => 18644376
[patent_doc_number] => 11768441
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-09-26
[patent_title] => Method for controlling a manufacturing process and associated apparatuses
[patent_app_type] => utility
[patent_app_number] => 17/801381
[patent_app_country] => US
[patent_app_date] => 2021-02-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 7
[patent_no_of_words] => 16581
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 161
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17801381
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/801381 | Method for controlling a manufacturing process and associated apparatuses | Feb 2, 2021 | Issued |
Array
(
[id] => 18933702
[patent_doc_number] => 11886125
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-01-30
[patent_title] => Method for inferring a local uniformity metric
[patent_app_type] => utility
[patent_app_number] => 17/800346
[patent_app_country] => US
[patent_app_date] => 2021-02-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 5
[patent_no_of_words] => 8318
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 115
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17800346
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/800346 | Method for inferring a local uniformity metric | Feb 1, 2021 | Issued |
Array
(
[id] => 18213207
[patent_doc_number] => 20230059471
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-02-23
[patent_title] => OPTICAL DESIGNS OF MINIATURIZED OVERLAY MEASUREMENT SYSTEM
[patent_app_type] => utility
[patent_app_number] => 17/796640
[patent_app_country] => US
[patent_app_date] => 2021-01-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8524
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 81
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17796640
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/796640 | Optical designs of miniaturized overlay measurement system | Jan 20, 2021 | Issued |
Array
(
[id] => 18195204
[patent_doc_number] => 20230048723
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-02-16
[patent_title] => SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/796545
[patent_app_country] => US
[patent_app_date] => 2021-01-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10347
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 40
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17796545
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/796545 | SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE | Jan 19, 2021 | Abandoned |
Array
(
[id] => 17743975
[patent_doc_number] => 11392038
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-07-19
[patent_title] => Maskless exposure apparatus and method, and manufacturing method of a semiconductor device including the maskless exposure method
[patent_app_type] => utility
[patent_app_number] => 17/149063
[patent_app_country] => US
[patent_app_date] => 2021-01-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 16
[patent_figures_cnt] => 17
[patent_no_of_words] => 11503
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 110
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17149063
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/149063 | Maskless exposure apparatus and method, and manufacturing method of a semiconductor device including the maskless exposure method | Jan 13, 2021 | Issued |
Array
(
[id] => 18255819
[patent_doc_number] => 20230082858
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-03-16
[patent_title] => METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES
[patent_app_type] => utility
[patent_app_number] => 17/797506
[patent_app_country] => US
[patent_app_date] => 2021-01-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11970
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 87
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17797506
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/797506 | Method for controlling a manufacturing process and associated apparatuses | Jan 13, 2021 | Issued |
Array
(
[id] => 18591672
[patent_doc_number] => 11740566
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-08-29
[patent_title] => Lithography apparatus
[patent_app_type] => utility
[patent_app_number] => 17/790986
[patent_app_country] => US
[patent_app_date] => 2020-12-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 15
[patent_no_of_words] => 7638
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 72
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17790986
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/790986 | Lithography apparatus | Dec 15, 2020 | Issued |
Array
(
[id] => 18203717
[patent_doc_number] => 11586107
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-02-21
[patent_title] => Phase shift mask and manufacturing method of semiconductor device
[patent_app_type] => utility
[patent_app_number] => 17/120278
[patent_app_country] => US
[patent_app_date] => 2020-12-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 5072
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 137
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17120278
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/120278 | Phase shift mask and manufacturing method of semiconductor device | Dec 13, 2020 | Issued |
Array
(
[id] => 16729329
[patent_doc_number] => 20210096476
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-04-01
[patent_title] => LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/119485
[patent_app_country] => US
[patent_app_date] => 2020-12-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11107
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 82
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17119485
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/119485 | Lithographic apparatus and device manufacturing method | Dec 10, 2020 | Issued |
Array
(
[id] => 18123943
[patent_doc_number] => 20230009554
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-01-12
[patent_title] => METROLOGY FOR IMPROVING DUV LASER ALIGNMENT
[patent_app_type] => utility
[patent_app_number] => 17/783351
[patent_app_country] => US
[patent_app_date] => 2020-12-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 13191
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17783351
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/783351 | Metrology for improving DUV laser alignment | Dec 8, 2020 | Issued |
Array
(
[id] => 19522453
[patent_doc_number] => 12124173
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-10-22
[patent_title] => Lithographic apparatus, metrology systems, illumination sources and methods thereof
[patent_app_type] => utility
[patent_app_number] => 17/790344
[patent_app_country] => US
[patent_app_date] => 2020-12-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 11
[patent_no_of_words] => 15362
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 100
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17790344
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/790344 | Lithographic apparatus, metrology systems, illumination sources and methods thereof | Dec 7, 2020 | Issued |
Array
(
[id] => 16918194
[patent_doc_number] => 20210191286
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-06-24
[patent_title] => METHODS AND APPARATUS FOR CALCULATING SUBSTRATE MODEL PARAMETERS AND CONTROLLING LITHOGRAPHIC PROCESSING
[patent_app_type] => utility
[patent_app_number] => 17/111050
[patent_app_country] => US
[patent_app_date] => 2020-12-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10934
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17111050
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/111050 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Dec 2, 2020 | Issued |
Array
(
[id] => 17628878
[patent_doc_number] => 20220163893
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-05-26
[patent_title] => Curing a Shaped Film Using Multiple Images of a Spatial Light Modulator
[patent_app_type] => utility
[patent_app_number] => 17/100477
[patent_app_country] => US
[patent_app_date] => 2020-11-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 16091
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 115
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17100477
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/100477 | Curing a shaped film using multiple images of a spatial light modulator | Nov 19, 2020 | Issued |
Array
(
[id] => 16858244
[patent_doc_number] => 20210158989
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-27
[patent_title] => METHOD OF REDUCING ROUGHNESS AND/OR DEFECTS ON AN OPTICAL SURFACE AND MIRROR FORMED BY SAME
[patent_app_type] => utility
[patent_app_number] => 17/089075
[patent_app_country] => US
[patent_app_date] => 2020-11-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5971
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -57
[patent_words_short_claim] => 165
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17089075
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/089075 | Method of reducing roughness and/or defects on an optical surface and mirror formed by same | Nov 3, 2020 | Issued |
Array
(
[id] => 19538006
[patent_doc_number] => 12130558
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-10-29
[patent_title] => Radiation system for controlling bursts of pulses of radiation
[patent_app_type] => utility
[patent_app_number] => 17/774531
[patent_app_country] => US
[patent_app_date] => 2020-10-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 9
[patent_no_of_words] => 12025
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 109
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17774531
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/774531 | Radiation system for controlling bursts of pulses of radiation | Oct 26, 2020 | Issued |
Array
(
[id] => 19312880
[patent_doc_number] => 12038690
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-07-16
[patent_title] => Laser interference photolithography system
[patent_app_type] => utility
[patent_app_number] => 17/767424
[patent_app_country] => US
[patent_app_date] => 2020-10-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 6329
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 889
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17767424
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/767424 | Laser interference photolithography system | Oct 22, 2020 | Issued |
Array
(
[id] => 19465949
[patent_doc_number] => 20240319619
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-09-26
[patent_title] => PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM, AND METHOD FOR USING SAME
[patent_app_type] => utility
[patent_app_number] => 17/767420
[patent_app_country] => US
[patent_app_date] => 2020-10-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4664
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -6
[patent_words_short_claim] => 397
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17767420
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/767420 | PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM, AND METHOD FOR USING SAME | Oct 22, 2020 | Pending |