Search

Deoram Persaud

Examiner (ID: 5310, Phone: (571)270-5476 , Office: P/2882 )

Most Active Art Unit
2882
Art Unit(s)
2882
Total Applications
893
Issued Applications
643
Pending Applications
84
Abandoned Applications
181

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 13482425 [patent_doc_number] => 20180292755 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-11 [patent_title] => SUBSTRATE LOADING IN MICROLITHOGRAPHY [patent_app_type] => utility [patent_app_number] => 16/008728 [patent_app_country] => US [patent_app_date] => 2018-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5837 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16008728 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/008728
Substrate loading in microlithography Jun 13, 2018 Issued
Array ( [id] => 13482439 [patent_doc_number] => 20180292762 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-11 [patent_title] => LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/008355 [patent_app_country] => US [patent_app_date] => 2018-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15035 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16008355 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/008355
LITHOGRAPHIC APPARATUS, DRYING DEVICE, METROLOGY APPARATUS AND DEVICE MANUFACTURING METHOD Jun 13, 2018 Abandoned
Array ( [id] => 13466159 [patent_doc_number] => 20180284622 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-04 [patent_title] => ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION DEVICE AND METHOD FOR OPERATING SUCH A SYSTEM [patent_app_type] => utility [patent_app_number] => 15/997498 [patent_app_country] => US [patent_app_date] => 2018-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10551 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15997498 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/997498
Illumination system of a microlithographic projection device and method for operating such a system Jun 3, 2018 Issued
Array ( [id] => 16565483 [patent_doc_number] => 10890850 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-01-12 [patent_title] => Optical imaging arrangement with actively adjustable metrology support units [patent_app_type] => utility [patent_app_number] => 15/988113 [patent_app_country] => US [patent_app_date] => 2018-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 11288 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 428 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15988113 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/988113
Optical imaging arrangement with actively adjustable metrology support units May 23, 2018 Issued
Array ( [id] => 15714007 [patent_doc_number] => 20200103770 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-02 [patent_title] => A SYSTEM FOR CLEANING A SUBSTRATE SUPPORT, A METHOD OF REMOVING MATTER FROM A SUBSTRATE SUPPORT, AND A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 16/615868 [patent_app_country] => US [patent_app_date] => 2018-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7486 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16615868 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/615868
A SYSTEM FOR CLEANING A SUBSTRATE SUPPORT, A METHOD OF REMOVING MATTER FROM A SUBSTRATE SUPPORT, AND A LITHOGRAPHIC APPARATUS May 22, 2018 Abandoned
Array ( [id] => 13451583 [patent_doc_number] => 20180277334 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-27 [patent_title] => ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM [patent_app_type] => utility [patent_app_number] => 15/985763 [patent_app_country] => US [patent_app_date] => 2018-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12130 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15985763 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/985763
Aberration correction in charged particle system May 21, 2018 Issued
Array ( [id] => 15756867 [patent_doc_number] => 10620542 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-04-14 [patent_title] => Optical system of a microlithographic projection exposure system or of a wafer inspection system [patent_app_type] => utility [patent_app_number] => 15/972567 [patent_app_country] => US [patent_app_date] => 2018-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 4857 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 177 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15972567 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/972567
Optical system of a microlithographic projection exposure system or of a wafer inspection system May 6, 2018 Issued
Array ( [id] => 13389747 [patent_doc_number] => 20180246416 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-08-30 [patent_title] => OPTICAL SYSTEM, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 15/968270 [patent_app_country] => US [patent_app_date] => 2018-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4775 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15968270 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/968270
Optical system, in particular for a microlithographic projection exposure apparatus Apr 30, 2018 Issued
Array ( [id] => 13540105 [patent_doc_number] => 20180321599 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-08 [patent_title] => Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 15/967861 [patent_app_country] => US [patent_app_date] => 2018-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 23917 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15967861 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/967861
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Apr 30, 2018 Issued
Array ( [id] => 13540101 [patent_doc_number] => 20180321597 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-08 [patent_title] => METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION [patent_app_type] => utility [patent_app_number] => 15/964643 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 26169 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15964643 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/964643
Metrology parameter determination and metrology recipe selection Apr 26, 2018 Issued
Array ( [id] => 15247613 [patent_doc_number] => 10509328 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-17 [patent_title] => Fabrication and use of dose maps and feature size maps during substrate processing [patent_app_type] => utility [patent_app_number] => 15/964986 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 14 [patent_no_of_words] => 9351 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15964986 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/964986
Fabrication and use of dose maps and feature size maps during substrate processing Apr 26, 2018 Issued
Array ( [id] => 15729971 [patent_doc_number] => 10613413 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2020-04-07 [patent_title] => Ultra-wide field-of-view scanning devices for depth sensing [patent_app_type] => utility [patent_app_number] => 15/960045 [patent_app_country] => US [patent_app_date] => 2018-04-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 14061 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 238 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15960045 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/960045
Ultra-wide field-of-view scanning devices for depth sensing Apr 22, 2018 Issued
Array ( [id] => 16844313 [patent_doc_number] => 11016396 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-25 [patent_title] => Method, substrate and apparatus to measure performance of optical metrology [patent_app_type] => utility [patent_app_number] => 16/610798 [patent_app_country] => US [patent_app_date] => 2018-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 24 [patent_no_of_words] => 22100 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16610798 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/610798
Method, substrate and apparatus to measure performance of optical metrology Apr 16, 2018 Issued
Array ( [id] => 13540103 [patent_doc_number] => 20180321598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-08 [patent_title] => Method of Measuring a Parameter of Interest, Device Manufacturing Method, Metrology Apparatus, and Lithographic System [patent_app_type] => utility [patent_app_number] => 15/954995 [patent_app_country] => US [patent_app_date] => 2018-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10293 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15954995 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/954995
Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system Apr 16, 2018 Issued
Array ( [id] => 16239971 [patent_doc_number] => 20200257205 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-13 [patent_title] => CONTROL APPARATUS AND CONTROL METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, DATA GENERATING METHOD AND PROGRAM [patent_app_type] => utility [patent_app_number] => 16/493808 [patent_app_country] => US [patent_app_date] => 2018-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 25750 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -48 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16493808 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/493808
Control apparatus and control method, exposure apparatus and exposure method, device manufacturing method, data generating method and program Mar 13, 2018 Issued
Array ( [id] => 16520499 [patent_doc_number] => 10871714 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-22 [patent_title] => Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus [patent_app_type] => utility [patent_app_number] => 15/920788 [patent_app_country] => US [patent_app_date] => 2018-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 39 [patent_no_of_words] => 18677 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15920788 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/920788
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus Mar 13, 2018 Issued
Array ( [id] => 13302611 [patent_doc_number] => 20180202842 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-19 [patent_title] => ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND METHOD FOR PRODUCING DEVICE [patent_app_type] => utility [patent_app_number] => 15/919519 [patent_app_country] => US [patent_app_date] => 2018-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16129 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15919519 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/919519
Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device Mar 12, 2018 Issued
Array ( [id] => 15312271 [patent_doc_number] => 10520837 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-31 [patent_title] => Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 15/932215 [patent_app_country] => US [patent_app_date] => 2018-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 16036 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15932215 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/932215
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Feb 15, 2018 Issued
Array ( [id] => 16757708 [patent_doc_number] => 10976250 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-13 [patent_title] => Position detection method and position detection device for sensor chip in optical sample detection system [patent_app_type] => utility [patent_app_number] => 16/478243 [patent_app_country] => US [patent_app_date] => 2018-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 9191 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16478243 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/478243
Position detection method and position detection device for sensor chip in optical sample detection system Jan 15, 2018 Issued
Array ( [id] => 13082287 [patent_doc_number] => 10061208 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-08-28 [patent_title] => Photonic activation of reactants for sub-micron feature formation using depleted beams [patent_app_type] => utility [patent_app_number] => 15/861516 [patent_app_country] => US [patent_app_date] => 2018-01-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 39 [patent_no_of_words] => 14895 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15861516 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/861516
Photonic activation of reactants for sub-micron feature formation using depleted beams Jan 2, 2018 Issued
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