Search

Dmitry Suhol

Supervisory Patent Examiner (ID: 5760, Phone: (571)272-4430 , Office: P/3716 )

Most Active Art Unit
3725
Art Unit(s)
4137, 3712, 3715, 3725, 3714, 3716
Total Applications
805
Issued Applications
342
Pending Applications
147
Abandoned Applications
318

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 3946625 [patent_doc_number] => 05935335 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-10 [patent_title] => 'Film-forming apparatus and film-forming method' [patent_app_type] => 1 [patent_app_number] => 8/815053 [patent_app_country] => US [patent_app_date] => 1997-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 9354 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/935/05935335.pdf [firstpage_image] =>[orig_patent_app_number] => 815053 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/815053
Film-forming apparatus and film-forming method Mar 10, 1997 Issued
Array ( [id] => 3742507 [patent_doc_number] => 05801066 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1998-09-01 [patent_title] => 'Method and apparatus for measuring a change in the thickness of polishing pads used in chemical-mechanical planarization of semiconductor wafers' [patent_app_type] => 1 [patent_app_number] => 8/812177 [patent_app_country] => US [patent_app_date] => 1997-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 3569 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/801/05801066.pdf [firstpage_image] =>[orig_patent_app_number] => 812177 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/812177
Method and apparatus for measuring a change in the thickness of polishing pads used in chemical-mechanical planarization of semiconductor wafers Mar 5, 1997 Issued
Array ( [id] => 4212778 [patent_doc_number] => 06039834 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-03-21 [patent_title] => 'Apparatus and methods for upgraded substrate processing system with microwave plasma source' [patent_app_type] => 1 [patent_app_number] => 8/811627 [patent_app_country] => US [patent_app_date] => 1997-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 16417 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 229 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/039/06039834.pdf [firstpage_image] =>[orig_patent_app_number] => 811627 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/811627
Apparatus and methods for upgraded substrate processing system with microwave plasma source Mar 4, 1997 Issued
Array ( [id] => 4186278 [patent_doc_number] => 06129806 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-10-10 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => 1 [patent_app_number] => 8/808805 [patent_app_country] => US [patent_app_date] => 1997-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 45 [patent_no_of_words] => 21734 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/129/06129806.pdf [firstpage_image] =>[orig_patent_app_number] => 808805 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/808805
Plasma processing apparatus and plasma processing method Feb 27, 1997 Issued
Array ( [id] => 4020300 [patent_doc_number] => 05993596 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-30 [patent_title] => 'Plasma-etching electrode plate' [patent_app_type] => 1 [patent_app_number] => 8/799957 [patent_app_country] => US [patent_app_date] => 1997-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4679 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/993/05993596.pdf [firstpage_image] =>[orig_patent_app_number] => 799957 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/799957
Plasma-etching electrode plate Feb 13, 1997 Issued
Array ( [id] => 3933903 [patent_doc_number] => 05976310 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-02 [patent_title] => 'Plasma etch system' [patent_app_type] => 1 [patent_app_number] => 8/798672 [patent_app_country] => US [patent_app_date] => 1997-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 6 [patent_no_of_words] => 3373 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/976/05976310.pdf [firstpage_image] =>[orig_patent_app_number] => 798672 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/798672
Plasma etch system Feb 10, 1997 Issued
Array ( [id] => 3870368 [patent_doc_number] => 05804027 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1998-09-08 [patent_title] => 'Apparatus for generating and utilizing magnetically neutral line discharge type plasma' [patent_app_type] => 1 [patent_app_number] => 8/796568 [patent_app_country] => US [patent_app_date] => 1997-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 5583 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/804/05804027.pdf [firstpage_image] =>[orig_patent_app_number] => 796568 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/796568
Apparatus for generating and utilizing magnetically neutral line discharge type plasma Feb 5, 1997 Issued
Array ( [id] => 3973139 [patent_doc_number] => 05904800 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-05-18 [patent_title] => 'Semiconductor wafer processing chamber for reducing particles deposited onto the semiconductor wafer' [patent_app_type] => 1 [patent_app_number] => 8/794706 [patent_app_country] => US [patent_app_date] => 1997-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 4278 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/904/05904800.pdf [firstpage_image] =>[orig_patent_app_number] => 794706 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/794706
Semiconductor wafer processing chamber for reducing particles deposited onto the semiconductor wafer Feb 2, 1997 Issued
Array ( [id] => 3784344 [patent_doc_number] => 05779849 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1998-07-14 [patent_title] => 'Plasma reactors and method of cleaning a plasma reactor' [patent_app_type] => 1 [patent_app_number] => 8/791412 [patent_app_country] => US [patent_app_date] => 1997-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2376 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/779/05779849.pdf [firstpage_image] =>[orig_patent_app_number] => 791412 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/791412
Plasma reactors and method of cleaning a plasma reactor Jan 29, 1997 Issued
Array ( [id] => 3925768 [patent_doc_number] => 05938883 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-17 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => 1 [patent_app_number] => 8/788636 [patent_app_country] => US [patent_app_date] => 1997-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 30 [patent_no_of_words] => 11516 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/938/05938883.pdf [firstpage_image] =>[orig_patent_app_number] => 788636 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/788636
Plasma processing apparatus Jan 26, 1997 Issued
Array ( [id] => 4026190 [patent_doc_number] => 05855682 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-01-05 [patent_title] => 'Plasma thin-film forming apparatus' [patent_app_type] => 1 [patent_app_number] => 8/789552 [patent_app_country] => US [patent_app_date] => 1997-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2777 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/855/05855682.pdf [firstpage_image] =>[orig_patent_app_number] => 789552 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/789552
Plasma thin-film forming apparatus Jan 26, 1997 Issued
08/727484 MULTI-FREQUENCY INDUCTIVE METHOD AND APPARATUS FOR THE PROCESSING OF MATERIAL Jan 15, 1997 Abandoned
Array ( [id] => 3913764 [patent_doc_number] => 05988103 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-23 [patent_title] => 'Apparatus for plasma source ion implantation and deposition for cylindrical surfaces' [patent_app_type] => 1 [patent_app_number] => 8/778955 [patent_app_country] => US [patent_app_date] => 1997-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7117 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/988/05988103.pdf [firstpage_image] =>[orig_patent_app_number] => 778955 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/778955
Apparatus for plasma source ion implantation and deposition for cylindrical surfaces Jan 5, 1997 Issued
Array ( [id] => 4001648 [patent_doc_number] => 05992346 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-30 [patent_title] => 'Apparatus for the surface treatment of workpieces' [patent_app_type] => 1 [patent_app_number] => 8/778569 [patent_app_country] => US [patent_app_date] => 1997-01-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 2965 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/992/05992346.pdf [firstpage_image] =>[orig_patent_app_number] => 778569 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/778569
Apparatus for the surface treatment of workpieces Jan 2, 1997 Issued
Array ( [id] => 4397934 [patent_doc_number] => 06270617 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-08-07 [patent_title] => 'RF plasma reactor with hybrid conductor and multi-radius dome ceiling' [patent_app_type] => 1 [patent_app_number] => 8/778051 [patent_app_country] => US [patent_app_date] => 1997-01-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 38 [patent_no_of_words] => 15089 [patent_no_of_claims] => 49 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/270/06270617.pdf [firstpage_image] =>[orig_patent_app_number] => 778051 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/778051
RF plasma reactor with hybrid conductor and multi-radius dome ceiling Jan 1, 1997 Issued
Array ( [id] => 3965304 [patent_doc_number] => 05885901 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-03-23 [patent_title] => 'Rinsing solution after resist stripping process and method for manufacturing semiconductor device' [patent_app_type] => 1 [patent_app_number] => 8/773828 [patent_app_country] => US [patent_app_date] => 1996-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 4 [patent_no_of_words] => 1980 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/885/05885901.pdf [firstpage_image] =>[orig_patent_app_number] => 773828 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/773828
Rinsing solution after resist stripping process and method for manufacturing semiconductor device Dec 26, 1996 Issued
Array ( [id] => 3855088 [patent_doc_number] => 05795429 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1998-08-18 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => 1 [patent_app_number] => 8/774685 [patent_app_country] => US [patent_app_date] => 1996-12-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 30 [patent_no_of_words] => 11515 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/795/05795429.pdf [firstpage_image] =>[orig_patent_app_number] => 774685 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/774685
Plasma processing apparatus Dec 25, 1996 Issued
Array ( [id] => 3984015 [patent_doc_number] => 05891312 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-04-06 [patent_title] => 'Enhanced vacuum arc vapor deposition electrode' [patent_app_type] => 1 [patent_app_number] => 8/772541 [patent_app_country] => US [patent_app_date] => 1996-12-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 1575 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 212 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/891/05891312.pdf [firstpage_image] =>[orig_patent_app_number] => 772541 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/772541
Enhanced vacuum arc vapor deposition electrode Dec 23, 1996 Issued
Array ( [id] => 4124303 [patent_doc_number] => 06033585 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-03-07 [patent_title] => 'Method and apparatus for preventing lightup of gas distribution holes' [patent_app_type] => 1 [patent_app_number] => 8/777736 [patent_app_country] => US [patent_app_date] => 1996-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 4996 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/033/06033585.pdf [firstpage_image] =>[orig_patent_app_number] => 777736 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/777736
Method and apparatus for preventing lightup of gas distribution holes Dec 19, 1996 Issued
Array ( [id] => 3933891 [patent_doc_number] => 05976309 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-02 [patent_title] => 'Electrode assembly for plasma reactor' [patent_app_type] => 1 [patent_app_number] => 8/767698 [patent_app_country] => US [patent_app_date] => 1996-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 2215 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/976/05976309.pdf [firstpage_image] =>[orig_patent_app_number] => 767698 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/767698
Electrode assembly for plasma reactor Dec 16, 1996 Issued
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