Dung H. Bui

Array ( [id] => 1141658 [patent_doc_number] => 06777341 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-08-17 [patent_title] => 'Method of forming a self-aligned contact, and method of fabricating a semiconductor device having a self-aligned contact' [patent_app_type] => B2 [patent_app_number] => 09/847289 [patent_app_country] => US [patent_app_date] => 2001-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 4092 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 239 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/777/06777341.pdf [firstpage_image] =>[orig_patent_app_number] => 09847289 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6532568 [patent_doc_number] => 20020162822 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-07 [patent_title] => 'Method for detecting end point in plasma etching by impedance change' [patent_app_type] => new [patent_app_number] => 09/847459 [patent_app_country] => US [patent_app_date] => 2001-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3408 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0162/20020162822.pdf [firstpage_image] =>[orig_patent_app_number] => 09847459 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6316000 [patent_doc_number] => 20020195416 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-26 [patent_title] => 'METHOD OF ETCHING A TANTALUM NITRIDE LAYER IN A HIGH DENSITY PLASMA' [patent_app_type] => new [patent_app_number] => 09/846580 [patent_app_country] => US [patent_app_date] => 2001-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5617 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0195/20020195416.pdf [firstpage_image] =>[orig_patent_app_number] => 09846580 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 941293 [patent_doc_number] => 06969684 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-11-29 [patent_title] => 'Method of making a planarized semiconductor structure' [patent_app_type] => utility [patent_app_number] => 09/846119 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 12 [patent_no_of_words] => 8580 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/969/06969684.pdf [firstpage_image] =>[orig_patent_app_number] => 09846119 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7090473 [patent_doc_number] => 20010032707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'Dry etching system for patterning target layer at high reproducibility and method of dry etching used therein' [patent_app_type] => new [patent_app_number] => 09/836649 [patent_app_country] => US [patent_app_date] => 2001-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5354 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20010032707.pdf [firstpage_image] =>[orig_patent_app_number] => 09836649 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1177552 [patent_doc_number] => 06743724 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-06-01 [patent_title] => 'Planarization process for semiconductor substrates' [patent_app_type] => B2 [patent_app_number] => 09/832560 [patent_app_country] => US [patent_app_date] => 2001-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 12 [patent_no_of_words] => 7180 [patent_no_of_claims] => 45 [patent_no_of_ind_claims] => 25 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/743/06743724.pdf [firstpage_image] =>[orig_patent_app_number] => 09832560 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1386298 [patent_doc_number] => 06540935 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-01 [patent_title] => 'Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same' [patent_app_type] => B2 [patent_app_number] => 09/826169 [patent_app_country] => US [patent_app_date] => 2001-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 4830 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/540/06540935.pdf [firstpage_image] =>[orig_patent_app_number] => 09826169 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6889423 [patent_doc_number] => 20010024878 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-09-27 [patent_title] => 'Polishing pad, polishing apparatus and polishing method' [patent_app_type] => new [patent_app_number] => 09/816169 [patent_app_country] => US [patent_app_date] => 2001-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4931 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0024/20010024878.pdf [firstpage_image] =>[orig_patent_app_number] => 09816169 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1416900 [patent_doc_number] => 06509272 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-01-21 [patent_title] => 'Planarization method using fluid composition including chelating agents' [patent_app_type] => B2 [patent_app_number] => 09/805343 [patent_app_country] => US [patent_app_date] => 2001-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 20 [patent_no_of_words] => 6075 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/509/06509272.pdf [firstpage_image] =>[orig_patent_app_number] => 09805343 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5859368 [patent_doc_number] => 20020123228 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-05 [patent_title] => 'Method to improve the reliability of gold to aluminum wire bonds with small pad openings' [patent_app_type] => new [patent_app_number] => 09/798509 [patent_app_country] => US [patent_app_date] => 2001-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2124 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0123/20020123228.pdf [firstpage_image] =>[orig_patent_app_number] => 09798509 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5798027 [patent_doc_number] => 20020008019 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-24 [patent_title] => 'Method of manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 09/795309 [patent_app_country] => US [patent_app_date] => 2001-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 40 [patent_figures_cnt] => 40 [patent_no_of_words] => 8174 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0008/20020008019.pdf [firstpage_image] =>[orig_patent_app_number] => 09795309 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1358543 [patent_doc_number] => 06554002 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-29 [patent_title] => 'Method for removing etching residues' [patent_app_type] => B2 [patent_app_number] => 09/789349 [patent_app_country] => US [patent_app_date] => 2001-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 1768 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/554/06554002.pdf [firstpage_image] =>[orig_patent_app_number] => 09789349 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6900135 [patent_doc_number] => 20010009811 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-07-26 [patent_title] => 'Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes' [patent_app_type] => new [patent_app_number] => 09/789359 [patent_app_country] => US [patent_app_date] => 2001-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5256 [patent_no_of_claims] => 58 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20010009811.pdf [firstpage_image] =>[orig_patent_app_number] => 09789359 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1162754 [patent_doc_number] => 06759253 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-06 [patent_title] => 'Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units' [patent_app_type] => B2 [patent_app_number] => 09/788629 [patent_app_country] => US [patent_app_date] => 2001-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 32 [patent_no_of_words] => 11315 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/759/06759253.pdf [firstpage_image] =>[orig_patent_app_number] => 09788629 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1169006 [patent_doc_number] => 06753263 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-06-22 [patent_title] => 'Etching method' [patent_app_type] => B1 [patent_app_number] => 09/700785 [patent_app_country] => US [patent_app_date] => 2001-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 9854 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/753/06753263.pdf [firstpage_image] =>[orig_patent_app_number] => 09700785 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1068711 [patent_doc_number] => 06844237 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-01-18 [patent_title] => 'Method for improving dielectric polishing' [patent_app_type] => utility [patent_app_number] => 09/774323 [patent_app_country] => US [patent_app_date] => 2001-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 24 [patent_no_of_words] => 2902 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/844/06844237.pdf [firstpage_image] =>[orig_patent_app_number] => 09774323 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7090296 [patent_doc_number] => 20010032591 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'Magnetic barrier for plasma in chamber exhaust' [patent_app_type] => new [patent_app_number] => 09/775295 [patent_app_country] => US [patent_app_date] => 2001-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4575 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20010032591.pdf [firstpage_image] =>[orig_patent_app_number] => 09775295 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1143162 [patent_doc_number] => 06773544 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-08-10 [patent_title] => 'Magnetic barrier for plasma in chamber exhaust' [patent_app_type] => B2 [patent_app_number] => 09/775173 [patent_app_country] => US [patent_app_date] => 2001-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 4622 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/773/06773544.pdf [firstpage_image] =>[orig_patent_app_number] => 09775173 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6907539 [patent_doc_number] => 20010010306 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-08-02 [patent_title] => 'Etching method and apparatus' [patent_app_type] => new [patent_app_number] => 09/771549 [patent_app_country] => US [patent_app_date] => 2001-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 8244 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0010/20010010306.pdf [firstpage_image] =>[orig_patent_app_number] => 09771549 [rel_patent_id] =>[rel_patent_doc_number] =>)