Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19434255 [patent_doc_number] => 20240302753 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-12 [patent_title] => LITHOGRAPHIC APPARATUS, TEMPERATURE SENSOR, AND FIBER BRAGG GRATING SENSOR [patent_app_type] => utility [patent_app_number] => 18/284161 [patent_app_country] => US [patent_app_date] => 2022-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14287 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18284161 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/284161
Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor Mar 20, 2022 Issued
Array ( [id] => 18414482 [patent_doc_number] => 11669021 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-06 [patent_title] => Lithographic apparatus and device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/692859 [patent_app_country] => US [patent_app_date] => 2022-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 11164 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17692859 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/692859
Lithographic apparatus and device manufacturing method Mar 10, 2022 Issued
Array ( [id] => 17689101 [patent_doc_number] => 20220196393 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method [patent_app_type] => utility [patent_app_number] => 17/692974 [patent_app_country] => US [patent_app_date] => 2022-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7862 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -33 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17692974 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/692974
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Mar 10, 2022 Issued
Array ( [id] => 20481490 [patent_doc_number] => 12529964 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-20 [patent_title] => Fluid handling system, method and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 18/555192 [patent_app_country] => US [patent_app_date] => 2022-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 8244 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18555192 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/555192
Fluid handling system, method and lithographic apparatus Mar 9, 2022 Issued
Array ( [id] => 17809087 [patent_doc_number] => 20220260922 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION [patent_app_type] => utility [patent_app_number] => 17/688313 [patent_app_country] => US [patent_app_date] => 2022-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6600 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17688313 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/688313
Apparatus and method for generating extreme ultraviolet radiation Mar 6, 2022 Issued
Array ( [id] => 17762584 [patent_doc_number] => 20220236196 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-28 [patent_title] => METHODS FOR DETERMINING FOCUS SPOT WINDOW AND JUDGING WHETHER WAFER NEEDS TO BE REWORKED [patent_app_type] => utility [patent_app_number] => 17/653440 [patent_app_country] => US [patent_app_date] => 2022-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6781 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17653440 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/653440
Methods for determining focus spot window and judging whether wafer needs to be reworked Mar 2, 2022 Issued
Array ( [id] => 19885402 [patent_doc_number] => 12271115 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-08 [patent_title] => Method to detect a defect on a lithographic sample and metrology system to perform such a method [patent_app_type] => utility [patent_app_number] => 17/684913 [patent_app_country] => US [patent_app_date] => 2022-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 12 [patent_no_of_words] => 4461 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17684913 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/684913
Method to detect a defect on a lithographic sample and metrology system to perform such a method Mar 1, 2022 Issued
Array ( [id] => 18284632 [patent_doc_number] => 20230100104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => INSPECTION DEVICE AND INSPECTION METHOD [patent_app_type] => utility [patent_app_number] => 17/684123 [patent_app_country] => US [patent_app_date] => 2022-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9255 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17684123 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/684123
Inspection device and inspection method Feb 28, 2022 Issued
Array ( [id] => 18981275 [patent_doc_number] => 11906439 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-20 [patent_title] => Optical inspection method, non-transitory storage medium storing optical inspection program, and optical inspection apparatus [patent_app_type] => utility [patent_app_number] => 17/681396 [patent_app_country] => US [patent_app_date] => 2022-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 12963 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 197 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17681396 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/681396
Optical inspection method, non-transitory storage medium storing optical inspection program, and optical inspection apparatus Feb 24, 2022 Issued
Array ( [id] => 20481487 [patent_doc_number] => 12529961 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-20 [patent_title] => Roll-to-roll based 3D printing through computed axial lithography [patent_app_type] => utility [patent_app_number] => 18/271104 [patent_app_country] => US [patent_app_date] => 2022-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 38 [patent_no_of_words] => 2560 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18271104 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/271104
Roll-to-roll based 3D printing through computed axial lithography Feb 21, 2022 Issued
Array ( [id] => 18291016 [patent_doc_number] => 11619885 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-04 [patent_title] => Mask chuck and mask manufacturing apparatus including same [patent_app_type] => utility [patent_app_number] => 17/677188 [patent_app_country] => US [patent_app_date] => 2022-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 19 [patent_no_of_words] => 7436 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 275 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17677188 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/677188
Mask chuck and mask manufacturing apparatus including same Feb 21, 2022 Issued
Array ( [id] => 18272289 [patent_doc_number] => 20230093531 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-23 [patent_title] => PROCESSING METHOD AND PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/677960 [patent_app_country] => US [patent_app_date] => 2022-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6608 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17677960 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/677960
Processing method and processing device Feb 21, 2022 Issued
Array ( [id] => 18568240 [patent_doc_number] => 20230258576 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => CARE AREA BASED DEFECT DETECTION [patent_app_type] => utility [patent_app_number] => 17/671517 [patent_app_country] => US [patent_app_date] => 2022-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10953 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 226 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17671517 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/671517
Care area based defect detection Feb 13, 2022 Issued
Array ( [id] => 18462718 [patent_doc_number] => 11687005 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2023-06-27 [patent_title] => Preparing a substrate with patterned regions for immersion based inspection [patent_app_type] => utility [patent_app_number] => 17/671468 [patent_app_country] => US [patent_app_date] => 2022-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 4923 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17671468 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/671468
Preparing a substrate with patterned regions for immersion based inspection Feb 13, 2022 Issued
Array ( [id] => 18765071 [patent_doc_number] => 11815467 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-14 [patent_title] => Nano projection structure inspection apparatus and nano projection structure inspection method [patent_app_type] => utility [patent_app_number] => 17/670492 [patent_app_country] => US [patent_app_date] => 2022-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 5505 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17670492 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/670492
Nano projection structure inspection apparatus and nano projection structure inspection method Feb 12, 2022 Issued
Array ( [id] => 18479587 [patent_doc_number] => 11693323 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-04 [patent_title] => Control apparatus, positioning apparatus, lithography apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/669725 [patent_app_country] => US [patent_app_date] => 2022-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 15 [patent_no_of_words] => 5484 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17669725 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/669725
Control apparatus, positioning apparatus, lithography apparatus, and article manufacturing method Feb 10, 2022 Issued
Array ( [id] => 17831875 [patent_doc_number] => 20220269179 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-25 [patent_title] => APPARATUS FOR POST EXPOSURE BAKE OF PHOTORESIST [patent_app_type] => utility [patent_app_number] => 17/668065 [patent_app_country] => US [patent_app_date] => 2022-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6088 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17668065 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/668065
APPARATUS FOR POST EXPOSURE BAKE OF PHOTORESIST Feb 8, 2022 Abandoned
Array ( [id] => 17831876 [patent_doc_number] => 20220269180 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-25 [patent_title] => APPARATUS FOR POST EXPOSURE BAKE OF PHOTORESIST [patent_app_type] => utility [patent_app_number] => 17/668080 [patent_app_country] => US [patent_app_date] => 2022-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9348 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17668080 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/668080
Apparatus for post exposure bake of photoresist Feb 8, 2022 Issued
Array ( [id] => 19044857 [patent_doc_number] => 11933962 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-03-19 [patent_title] => MEMS based spatial light modulators and applications [patent_app_type] => utility [patent_app_number] => 17/591898 [patent_app_country] => US [patent_app_date] => 2022-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 21 [patent_no_of_words] => 9494 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 240 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17591898 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/591898
MEMS based spatial light modulators and applications Feb 2, 2022 Issued
Array ( [id] => 20373791 [patent_doc_number] => 12481223 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-25 [patent_title] => System and method for optimizing through silicon via overlay [patent_app_type] => utility [patent_app_number] => 17/589630 [patent_app_country] => US [patent_app_date] => 2022-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3555 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17589630 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/589630
System and method for optimizing through silicon via overlay Jan 30, 2022 Issued
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