Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17610424 [patent_doc_number] => 20220152703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER [patent_app_type] => utility [patent_app_number] => 17/587236 [patent_app_country] => US [patent_app_date] => 2022-01-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16107 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17587236 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/587236
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Jan 27, 2022 Issued
Array ( [id] => 18275746 [patent_doc_number] => 11614689 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-03-28 [patent_title] => Fluid handling structure and lithographic apparatus [patent_app_type] => utility [patent_app_number] => 17/580696 [patent_app_country] => US [patent_app_date] => 2022-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 20427 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17580696 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/580696
Fluid handling structure and lithographic apparatus Jan 20, 2022 Issued
Array ( [id] => 20481489 [patent_doc_number] => 12529963 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-20 [patent_title] => Fast uniformity drift correction [patent_app_type] => utility [patent_app_number] => 18/262467 [patent_app_country] => US [patent_app_date] => 2022-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 14 [patent_no_of_words] => 10829 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18262467 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/262467
Fast uniformity drift correction Jan 15, 2022 Issued
Array ( [id] => 18804670 [patent_doc_number] => 11837839 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Optical pulse stretcher, laser device, and electronic device manufacturing method [patent_app_type] => utility [patent_app_number] => 17/572185 [patent_app_country] => US [patent_app_date] => 2022-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 27 [patent_no_of_words] => 9444 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 299 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17572185 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/572185
Optical pulse stretcher, laser device, and electronic device manufacturing method Jan 9, 2022 Issued
Array ( [id] => 19319497 [patent_doc_number] => 20240241040 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-18 [patent_title] => INSPECTION APPARATUS AND INSPECTION METHOD [patent_app_type] => utility [patent_app_number] => 18/562475 [patent_app_country] => US [patent_app_date] => 2022-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6779 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18562475 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/562475
INSPECTION APPARATUS AND INSPECTION METHOD Jan 5, 2022 Pending
Array ( [id] => 17706385 [patent_doc_number] => 20220206391 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/564604 [patent_app_country] => US [patent_app_date] => 2021-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7252 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17564604 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/564604
Apparatus for treating substrate and method for treating substrate Dec 28, 2021 Issued
Array ( [id] => 20506879 [patent_doc_number] => 12541154 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-03 [patent_title] => Optical method and apparatus for quickly realizing precise calibration of lithography system [patent_app_type] => utility [patent_app_number] => 18/294989 [patent_app_country] => US [patent_app_date] => 2021-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 5709 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18294989 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/294989
OPTICAL METHOD AND APPARATUS FOR QUICKLY REALIZING PRECISE CALIBRATION OF LITHOGRAPHY SYSTEM Dec 28, 2021 Issued
Array ( [id] => 18989384 [patent_doc_number] => 20240061353 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-22 [patent_title] => METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE ACTUATORS OF A LITHOGRAPHIC EXPOSURE APPARATUS [patent_app_type] => utility [patent_app_number] => 18/270988 [patent_app_country] => US [patent_app_date] => 2021-12-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6845 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18270988 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/270988
METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE ACTUATORS OF A LITHOGRAPHIC EXPOSURE APPARATUS Dec 23, 2021 Pending
Array ( [id] => 17793897 [patent_doc_number] => 20220252989 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-11 [patent_title] => SEMICONDUCTOR FABRICATION APPARATUS AND METHOD OF USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/560039 [patent_app_country] => US [patent_app_date] => 2021-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9430 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17560039 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/560039
Semiconductor fabrication apparatus and method of using the same Dec 21, 2021 Issued
Array ( [id] => 19450612 [patent_doc_number] => 20240310742 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-19 [patent_title] => A CONTAMINATION REDUCTION SYSTEM [patent_app_type] => utility [patent_app_number] => 18/260878 [patent_app_country] => US [patent_app_date] => 2021-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10704 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18260878 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/260878
A CONTAMINATION REDUCTION SYSTEM Dec 14, 2021 Pending
Array ( [id] => 18203726 [patent_doc_number] => 11586116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-21 [patent_title] => Measurement apparatus, exposure apparatus, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/549203 [patent_app_country] => US [patent_app_date] => 2021-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6258 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17549203 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/549203
Measurement apparatus, exposure apparatus, and article manufacturing method Dec 12, 2021 Issued
Array ( [id] => 18719145 [patent_doc_number] => 11796483 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-24 [patent_title] => Device for recognizing defects remaining in finished surface of product [patent_app_type] => utility [patent_app_number] => 17/544758 [patent_app_country] => US [patent_app_date] => 2021-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3211 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 289 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17544758 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/544758
Device for recognizing defects remaining in finished surface of product Dec 6, 2021 Issued
Array ( [id] => 20434070 [patent_doc_number] => 12504691 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-23 [patent_title] => Drawing apparatus, drawing system, and drawing method [patent_app_type] => utility [patent_app_number] => 18/039339 [patent_app_country] => US [patent_app_date] => 2021-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 15 [patent_no_of_words] => 4706 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18039339 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/039339
Drawing apparatus, drawing system, and drawing method Dec 2, 2021 Issued
Array ( [id] => 19166733 [patent_doc_number] => 11982629 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-14 [patent_title] => Device for recognizing defects in finished surface of product [patent_app_type] => utility [patent_app_number] => 17/540451 [patent_app_country] => US [patent_app_date] => 2021-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3666 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 344 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17540451 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/540451
Device for recognizing defects in finished surface of product Dec 1, 2021 Issued
Array ( [id] => 18802314 [patent_doc_number] => 11835470 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Detection apparatus, detection method, exposure apparatus, exposure system, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/536489 [patent_app_country] => US [patent_app_date] => 2021-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 4857 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 203 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17536489 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/536489
Detection apparatus, detection method, exposure apparatus, exposure system, and article manufacturing method Nov 28, 2021 Issued
Array ( [id] => 18710851 [patent_doc_number] => 20230333480 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/028982 [patent_app_country] => US [patent_app_date] => 2021-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15459 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18028982 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/028982
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS Nov 24, 2021 Pending
Array ( [id] => 20214772 [patent_doc_number] => 12411423 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-09 [patent_title] => Developing device and developing method [patent_app_type] => utility [patent_app_number] => 17/455705 [patent_app_country] => US [patent_app_date] => 2021-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 1243 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 341 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17455705 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/455705
Developing device and developing method Nov 18, 2021 Issued
Array ( [id] => 17430013 [patent_doc_number] => 20220057722 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-24 [patent_title] => METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE [patent_app_type] => utility [patent_app_number] => 17/519713 [patent_app_country] => US [patent_app_date] => 2021-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16069 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17519713 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/519713
Method of unloading an object from a support table Nov 4, 2021 Issued
Array ( [id] => 17598571 [patent_doc_number] => 20220148145 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-12 [patent_title] => SURFACE INSPECTION SYSTEM AND METHOD FOR DIFFERENTIATING PARTICULATE CONTAMINATION FROM DEFECTS ON A SURFACE OF A SPECIMEN [patent_app_type] => utility [patent_app_number] => 17/520354 [patent_app_country] => US [patent_app_date] => 2021-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5199 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17520354 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/520354
Surface inspection system and method for differentiating particulate contamination from defects on a surface of a specimen Nov 4, 2021 Issued
Array ( [id] => 18118840 [patent_doc_number] => 11550230 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-10 [patent_title] => Substrate deforming device for proximity exposure, and substrate deforming method for proximity exposure using same [patent_app_type] => utility [patent_app_number] => 17/514209 [patent_app_country] => US [patent_app_date] => 2021-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7072 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17514209 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/514209
Substrate deforming device for proximity exposure, and substrate deforming method for proximity exposure using same Oct 28, 2021 Issued
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