Search

Edward J. Webman

Examiner (ID: 8225)

Most Active Art Unit
1617
Art Unit(s)
1617, 2899, 1621, 3617, 1616, 1615, 1501, 1502
Total Applications
1435
Issued Applications
869
Pending Applications
171
Abandoned Applications
394

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19933345 [patent_doc_number] => 12306548 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-20 [patent_title] => Positioning system, a lithographic apparatus, an absolute position determination method, and a device manufacturing method [patent_app_type] => utility [patent_app_number] => 18/037641 [patent_app_country] => US [patent_app_date] => 2021-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 2370 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 349 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18037641 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/037641
Positioning system, a lithographic apparatus, an absolute position determination method, and a device manufacturing method Oct 24, 2021 Issued
Array ( [id] => 18863729 [patent_doc_number] => 20230418165 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-28 [patent_title] => A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/252776 [patent_app_country] => US [patent_app_date] => 2021-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14337 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18252776 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/252776
Fluid handling system, method and lithographic apparatus Oct 21, 2021 Issued
Array ( [id] => 17580667 [patent_doc_number] => 20220137522 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-05 [patent_title] => EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/506262 [patent_app_country] => US [patent_app_date] => 2021-10-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11933 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17506262 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/506262
Exposure apparatus, exposure method, and article manufacturing method Oct 19, 2021 Issued
Array ( [id] => 19703111 [patent_doc_number] => 12197135 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Device and method for setting relative laser intensities [patent_app_type] => utility [patent_app_number] => 18/042256 [patent_app_country] => US [patent_app_date] => 2021-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 7061 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 248 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18042256 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/042256
Device and method for setting relative laser intensities Oct 17, 2021 Issued
Array ( [id] => 17738018 [patent_doc_number] => 20220223480 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => WAFER MEASUREMENT METHOD AND APPARATUS, MEDIUM, AND ELECTRONIC DEVICE [patent_app_type] => utility [patent_app_number] => 17/502135 [patent_app_country] => US [patent_app_date] => 2021-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5382 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17502135 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/502135
WAFER MEASUREMENT METHOD AND APPARATUS, MEDIUM, AND ELECTRONIC DEVICE Oct 14, 2021 Abandoned
Array ( [id] => 17565879 [patent_doc_number] => 20220130028 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-28 [patent_title] => PROCESSING APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICLE, MODEL, PROCESSING METHOD, MEASUREMENT METHOD, GENERATION METHOD, AND GENERATION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/502514 [patent_app_country] => US [patent_app_date] => 2021-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 19132 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17502514 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/502514
Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus Oct 14, 2021 Issued
Array ( [id] => 17387402 [patent_doc_number] => 20220035254 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-03 [patent_title] => FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS, A METHOD OF USING A FLUID HANDLING STRUCTURE AND A METHOD OF USING A LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 17/502715 [patent_app_country] => US [patent_app_date] => 2021-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11120 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17502715 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/502715
Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus Oct 14, 2021 Issued
Array ( [id] => 18325582 [patent_doc_number] => 20230123710 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => INSPECTION SYSTEM OF SEMICONDUCTOR WAFER AND METHOD OF DRIVING THE SAME [patent_app_type] => utility [patent_app_number] => 17/501318 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6316 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501318 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/501318
Inspection system of semiconductor wafer and method of driving the same Oct 13, 2021 Issued
Array ( [id] => 17534650 [patent_doc_number] => 20220113259 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-14 [patent_title] => METHOD AND SYSTEM FOR INSPECTING REPAIR OR ASSEMBLY OPERATIONS [patent_app_type] => utility [patent_app_number] => 17/497211 [patent_app_country] => US [patent_app_date] => 2021-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8323 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 166 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17497211 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/497211
Method and system for inspecting repair or assembly operations Oct 7, 2021 Issued
Array ( [id] => 18479583 [patent_doc_number] => 11693319 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-04 [patent_title] => Substrate processing method, substrate processing apparatus, and storage medium [patent_app_type] => utility [patent_app_number] => 17/496965 [patent_app_country] => US [patent_app_date] => 2021-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 23 [patent_no_of_words] => 17147 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17496965 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/496965
Substrate processing method, substrate processing apparatus, and storage medium Oct 7, 2021 Issued
Array ( [id] => 17521723 [patent_doc_number] => 20220107572 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-07 [patent_title] => POSITIONING APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/492987 [patent_app_country] => US [patent_app_date] => 2021-10-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7692 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -23 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17492987 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/492987
Positioning apparatus, lithography apparatus and article manufacturing method Oct 3, 2021 Issued
Array ( [id] => 18802315 [patent_doc_number] => 11835471 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Z-axis measurement fixture and method of determining the planarity of objects using the fixture [patent_app_type] => utility [patent_app_number] => 17/490461 [patent_app_country] => US [patent_app_date] => 2021-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 8712 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 261 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17490461 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/490461
Z-axis measurement fixture and method of determining the planarity of objects using the fixture Sep 29, 2021 Issued
Array ( [id] => 18546683 [patent_doc_number] => 11720031 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-08 [patent_title] => Overlay design for electron beam and scatterometry overlay measurements [patent_app_type] => utility [patent_app_number] => 17/487725 [patent_app_country] => US [patent_app_date] => 2021-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7673 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17487725 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/487725
Overlay design for electron beam and scatterometry overlay measurements Sep 27, 2021 Issued
Array ( [id] => 18832256 [patent_doc_number] => 20230400783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => OBJECT TABLE, STAGE APPARATUS, HOLDING METHOD AND LITHOGRAPHIC APPARATUS [patent_app_type] => utility [patent_app_number] => 18/027343 [patent_app_country] => US [patent_app_date] => 2021-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9870 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18027343 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/027343
Object table, stage apparatus, holding method and lithographic apparatus Sep 26, 2021 Issued
Array ( [id] => 17337776 [patent_doc_number] => 20220004107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => OPTICAL ARRANGEMENT AND LITHOGRAPHY APPARATUS [patent_app_type] => utility [patent_app_number] => 17/480800 [patent_app_country] => US [patent_app_date] => 2021-09-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9322 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17480800 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/480800
Optical arrangement and lithography apparatus Sep 20, 2021 Issued
Array ( [id] => 19028193 [patent_doc_number] => 11927544 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-03-12 [patent_title] => Wafer defect tracing method and apparatus, electronic device and computer readable medium [patent_app_type] => utility [patent_app_number] => 17/475628 [patent_app_country] => US [patent_app_date] => 2021-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5860 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 231 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17475628 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/475628
Wafer defect tracing method and apparatus, electronic device and computer readable medium Sep 14, 2021 Issued
Array ( [id] => 17461965 [patent_doc_number] => 20220075270 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-10 [patent_title] => BAKE UNIT AND APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/469366 [patent_app_country] => US [patent_app_date] => 2021-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7393 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17469366 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/469366
Bake unit and apparatus for treating substrate Sep 7, 2021 Issued
Array ( [id] => 17984226 [patent_doc_number] => 20220350263 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => WAFER STAGE AND METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/468432 [patent_app_country] => US [patent_app_date] => 2021-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11036 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17468432 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/468432
Wafer stage and method thereof Sep 6, 2021 Issued
Array ( [id] => 17816848 [patent_doc_number] => 11422455 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-23 [patent_title] => EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same [patent_app_type] => utility [patent_app_number] => 17/464826 [patent_app_country] => US [patent_app_date] => 2021-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 9120 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17464826 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/464826
EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same Sep 1, 2021 Issued
Array ( [id] => 18780536 [patent_doc_number] => 11822256 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-21 [patent_title] => Semiconductor processing tool and methods of operation [patent_app_type] => utility [patent_app_number] => 17/446254 [patent_app_country] => US [patent_app_date] => 2021-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8957 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17446254 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/446254
Semiconductor processing tool and methods of operation Aug 26, 2021 Issued
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